Coating support mechanism and coating evaporation device

Abstract

The application discloses a coating support mechanism and a coating evaporation device. The coating support mechanism comprises a support bracket and a support platform. The support platform is used for placing a to-be-coated piece to be processed. The support platform is arranged on the support bracket and is in contact with the support bracket. The support platform and the support bracket are not substantially connected. The support platform and the support bracket can be slightly separated due to slight vibration. In the heat treatment process of evaporation, the support platform is slightly vibrated due to the hot rising airflow. When the support platform vibrates, the base of the to-be-coated piece and the support platform are also high-frequency separated and contacted again. The supporting points between the to-be-coated piece and the support platform are frequently replaced, so that the crystallization non-contact point effect is achieved. Therefore, the material defect problem of the supporting point position of the to-be-coated piece can be avoided.

Description

Technical Field

[0001] This application relates to the field of coating technology, and in particular to coating support mechanisms and coating vapor deposition apparatus. Background Technology

[0002] Silicon carbide single crystals, as an important functional material, possess characteristics such as a high critical breakdown electric field, high thermal conductivity, high electron saturation migration rate, and excellent chemical stability. Therefore, they are widely used in high-power electronic devices, radio frequency devices, light-emitting devices, lasers, and aerospace applications. With the increasing maturity of silicon carbide-based electronic device research, the demand for large-size, high-quality semi-insulating silicon carbide is becoming increasingly urgent, making it one of the key areas of silicon carbide research.

[0003] Traditional techniques primarily employ the PVT (Physical Vapor Transport) method to synthesize silicon carbide single crystals. This involves heating high-purity silicon carbide powder to approximately 2200°C, causing it to volatilize into gaseous components such as gaseous Si, gaseous Si₂C, and gaseous SiC₂. These gaseous components are then transported to a low-temperature cooling zone via an airflow generated by a thermal gradient, where they deposit onto a seed crystal to form a silicon carbide single crystal of a certain thickness. During the PVT synthesis of third-generation semiconductor silicon carbide, graphite readily reacts with silicon vapor at high temperatures, altering the crucible atmosphere and damaging the graphite structure, leading to crystal defects. To address this issue, a tantalum carbide coating is typically applied to the graphite surface to resist corrosion from the corrosive atmosphere during the PVT growth process.

[0004] In existing technologies, tantalum carbide coatings are mainly fabricated using CVD (chemical vapor deposition), sputtering, and liquid phase methods. In all of these methods, material shortages can occur at the support points during high-temperature processing, leading to a decrease in the coating's protective capabilities. Utility Model Content

[0005] Therefore, it is necessary to provide a coating support mechanism that can solve the problem of material shortage defects in the support point coating during high-temperature processing in conventional technologies. The coating support mechanism of this application can improve the coating protection capability.

[0006] One embodiment of this application provides a coating support mechanism.

[0007] A coating support mechanism includes a support bracket and a support platform. The support platform is used to place the workpiece to be coated, and the support platform is disposed on the support bracket and the support platform is in contact with the support bracket.

[0008] In some embodiments, the support platform includes a first surface and a second surface positioned relative to each other, the first surface being used to place the workpiece to be coated, and the second surface being used to cooperate with the support bracket.

[0009] In some embodiments, a placement station is provided on the first surface for placing the workpiece to be coated.

[0010] In some embodiments, a positioning element and / or a positioning mark are provided on the first surface, the positioning element and / or the positioning mark being located close to the placement station, the positioning element and / or the positioning mark being used for positioning when placing the workpiece to be coated.

[0011] In some embodiments, the adjacent edges of the support platform have a smooth transition.

[0012] In some embodiments, the support platform is a graphite platform made of graphite material.

[0013] In some embodiments, the thickness of the support platform is 1mm to 20mm.

[0014] In some embodiments, the thickness of the support platform is 5mm to 15cm.

[0015] In some embodiments, the support bracket includes a plurality of support rods spaced apart, and the support platform is disposed on the plurality of support rods.

[0016] In some embodiments, the support bracket is a columnar structure with a hollow structure in the middle, the hollow structure corresponding to a placement station on the support platform for placing the workpiece to be coated.

[0017] One embodiment of this application also provides a coating vapor deposition apparatus.

[0018] A coating vapor deposition apparatus includes a furnace body and a coating support mechanism as described in any of the above embodiments, wherein the coating support mechanism is disposed within the furnace body.

[0019] The aforementioned coating support mechanism involves setting the support platform on the support bracket, with the support platform and support bracket in contact and engagement. That is, the support platform and support bracket are not substantially connected; rather, the support platform rests on the support bracket. The support platform and support bracket can slightly separate with slight vibration. Since there is no locking or adhesive mechanism between the support platform and support bracket, during the heat treatment process of vapor deposition, the support platform will vibrate slightly due to the rising hot airflow. When the support platform vibrates, the substrate of the part to be coated will frequently separate and re-contact with the support platform, resulting in frequent changes in the support points between the part to be coated and the support platform. This achieves a contactless crystallization effect, ensuring that tantalum carbide coating can be applied to the bottom of the part to be coated, avoiding material shortages at the support points. After the coating is applied to the part, it possesses excellent coating protection capabilities.

[0020] Furthermore, in this application, the support platform is made of porous graphite material. The surface of the porous graphite material has a dense microstructure of unevenness, which can serve as support points for the workpiece to be coated. When the support platform vibrates, the substrate of the workpiece to be coated undergoes frequent separation and contact with the support platform, and the support points are frequently changed, thereby achieving a contactless effect and improving the coating preparation effect. In addition, when the support platform is made of porous graphite material, this porous graphite material has a low density and contains dense pore channels. The atmosphere material used in preparing the tantalum carbide coating can normally pass through the interior of the porous graphite to reach the substrate surface of the workpiece to be coated, thus realizing the coating preparation. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] To gain a more complete understanding of this application and its beneficial effects, the following description will be provided in conjunction with the accompanying drawings. In the following description, the same reference numerals denote the same parts.

[0023] Figure 1 This is a top view schematic diagram of the coating support mechanism according to an embodiment of this application;

[0024] Figure 2 This is a side view of the coating support mechanism according to an embodiment of this application.

[0025] Explanation of reference numerals in the attached figures

[0026] 10. Coating support mechanism; 100. Support bracket; 110. Support rod; 200. Support platform; 210. First surface; 220. Second surface; 20. Part to be coated; 30. Furnace body. Detailed Implementation

[0027] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0028] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0029] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0030] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0031] In the description of this application, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0032] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0033] In this document, "optionally," "optionally," and "optional" mean that something is optional, that is, it is selected from either "with" or "without." If multiple "options" appear in a technical solution, unless otherwise specified and there are no contradictions or mutual constraints, each "option" is independent. In this application, descriptions such as "optionally contains" and "optionally includes" indicate "contains or does not contain."

[0034] In this application, when numerical intervals (i.e., numerical ranges) are mentioned, unless otherwise specified, the distribution of selectable numerical values ​​within the numerical interval is considered continuous, and includes the two endpoints of the numerical interval (i.e., the minimum and maximum values), as well as every numerical value between these two endpoints. Unless otherwise specified, when a numerical interval refers only to integers within that numerical interval, it includes the two endpoint integers of the numerical range, as well as every integer between the two endpoints, which is equivalent to directly listing every integer. When multiple numerical ranges are provided to describe features or characteristics, these numerical ranges can be merged. In other words, unless otherwise specified, the numerical ranges disclosed in this application should be understood to include any and all subranges included therein. The "numerical value" in the numerical interval can be any quantitative value, such as a number, percentage, ratio, etc. The term "numerical interval" can be broadly included to include percentage intervals, ratio intervals, proportion intervals, etc.

[0035] One embodiment of this application provides a coating support mechanism 10 to solve the problem that in conventional technologies, when fabricating tantalum carbide coatings using methods including CVD (chemical vapor deposition), sputtering, and liquid phase methods, material shortage defects may occur at the support points during high-temperature processing, leading to a decrease in the coating's protective capability. The coating support mechanism 10 will be described below with reference to the accompanying drawings.

[0036] The coating support mechanism 10 provided in one embodiment of this application is exemplary; please refer to [link to relevant documentation]. Figure 1 As shown, Figure 1 This is a schematic diagram of the structure of a coating support mechanism 10 provided in one embodiment of this application. The coating support mechanism 10 of this application can be used for coating preparation, such as for the preparation of tantalum carbide coatings.

[0037] To more clearly illustrate the structure of the coating support mechanism 10, the coating support mechanism 10 will be described below in conjunction with the accompanying drawings.

[0038] For example, please refer to Figure 1 As shown, a coating support mechanism 10 includes a support bracket 100 and a support platform 200. The support platform 200 is used to place the workpiece 20 to be coated, and the support platform 200 is disposed on the support bracket 100 and the support platform 200 is in contact with the support bracket 100.

[0039] In some embodiments, the support platform 200 includes a first surface 210 and a second surface 220 disposed relative to each other. The first surface 210 is used to place the workpiece 20 to be coated. The second surface 220 is used to engage with the support bracket 100.

[0040] In some embodiments, a placement station is provided on the first surface 210. The placement station is used to place the workpiece 20 to be coated. The placement station allows the operator to quickly place the workpiece 20 in the designated position, avoiding misalignment of the workpiece 20 and improving processing efficiency.

[0041] In some embodiments, a positioning element and / or positioning mark are provided on the first surface 210. The positioning element and / or positioning mark are located close to the placement station. The positioning element and / or positioning mark are used for positioning the workpiece 20 to be coated during placement.

[0042] In some implementations, the positioning marker can be a marker point, scale line, or other identification symbol.

[0043] In some embodiments, the adjacent edges of the support platform 200 have a smooth transition. This smooth transition between adjacent edges of the support platform 200 improves the safety of using the support platform 200.

[0044] In some embodiments, the support platform 200 is a graphite platform made of graphite material. In this application, the support platform 200 is made of porous graphite material. The surface of the porous graphite material has a dense microstructure of unevenness, which can serve as support points for the workpiece 20 to be coated. When the support platform 200 vibrates, the substrate of the workpiece 20 to be coated is frequently separated from and contacted with the support platform 200, and the support points are frequently changed, thereby achieving a contactless effect and improving the coating preparation effect. In addition, when the support platform 200 is made of porous graphite material, this porous graphite material has low density and contains dense pore channels. The atmosphere material used in preparing the tantalum carbide coating can normally pass through the interior of the porous graphite to reach the substrate surface of the workpiece 20 to be coated, thus realizing the coating preparation.

[0045] In some embodiments, the thickness of the support platform 200 is 1mm to 20mm. For example, the thickness of the support platform 200 may include, but is not limited to: 1mm, 2mm, 3mm, 5mm, 7mm, 8mm, 9mm, 10mm, 12mm, 14mm, 15mm, 18mm, 19mm, 20mm or any range between the two mentioned above.

[0046] In some embodiments, the thickness of the support platform 200 is 5mm to 15cm. For example, the thickness of the support platform 200 may be 5mm, 6mm, 7mm, 8mm, 9mm, 10mm, 11mm, 12mm, 13mm, 14mm, 15mm or any two of the foregoing.

[0047] In some implementations, see Figure 2 As shown, Figure 2 This is a side view of a coating support mechanism 10 according to an embodiment of the present application. The support bracket 100 includes a plurality of support rods 110, which are spaced apart. The support platform 200 is disposed on the plurality of support rods 110.

[0048] In some embodiments, the support bracket 100 has a columnar structure with a hollow structure in the middle, corresponding to a placement station on the support platform 200 for placing the workpiece 20 to be coated. The hollow structure allows space for the vapor deposition gas flow during vapor deposition, enabling the vapor deposition gas flow to reach the support platform 200.

[0049] One embodiment of this application also provides a coating vapor deposition apparatus.

[0050] A coating vapor deposition apparatus includes a furnace body 30 and a coating support mechanism 10 as described in any of the above embodiments. The coating support mechanism 10 is disposed within the furnace body 30.

[0051] In some embodiments, the coating deposition apparatus may be a CVD (chemical vapor deposition) apparatus, a sputtering apparatus, or a liquid phase apparatus, etc.

[0052] In summary, the coating support mechanism 10, by setting the support platform 200 on the support bracket 100, and the support platform 200 and the support bracket 100 in contact and engagement, means that the support platform 200 and the support bracket 100 are not substantially connected; rather, the support platform 200 rests on the support bracket 100. The support platform 200 and the support bracket 100 can slightly separate with slight vibrations. Since there is no locking or adhesive mechanism between the support platform 200 and the support bracket 100, Therefore, during the heat treatment process of vapor deposition, the support platform 200 will vibrate slightly due to the rising hot airflow. When the support platform 200 vibrates, the substrate of the part to be coated 20 and the support platform 200 will also frequently separate and re-contact. The support points between the part to be coated 20 and the support platform 200 will be frequently changed, thereby achieving the effect of crystallization without contact points. This allows tantalum carbide coating to be prepared on the bottom of the part to be coated 20, avoiding the problem of material shortage at the support point position of the part to be coated 20. After the part to be coated 20 is coated again, it has good coating protection ability.

[0053] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0054] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0055] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of this patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A coating support mechanism, characterized in that, It includes a support bracket and a support platform. The support platform is used to place the workpiece to be coated. The support platform is disposed on the support bracket and is in contact with the support bracket.

2. The coating support mechanism according to claim 1, characterized in that, The support platform includes a first surface and a second surface arranged at relative positions. The first surface is used to place the workpiece to be coated, and the second surface is used to cooperate with the support bracket.

3. The coating support mechanism according to claim 2, characterized in that, A placement station is provided on the first surface, which is used to place the workpiece to be coated.

4. The coating support mechanism according to claim 3, characterized in that, The first surface is provided with a positioning element and / or a positioning mark, the positioning element and / or the positioning mark is located close to the placement station, and the positioning element and / or the positioning mark is used for positioning when placing the workpiece to be coated.

5. The coating support mechanism according to claim 1, characterized in that, The adjacent edges of the support platform have a smooth transition.

6. The coating support mechanism according to any one of claims 1 to 5, characterized in that, The support platform is a graphite platform made of graphite material.

7. The coating support mechanism according to any one of claims 1 to 5, characterized in that, The thickness of the support platform is 1mm to 20mm; Optionally, the thickness of the support platform is 5mm to 15cm.

8. The coating support mechanism according to any one of claims 1 to 5, characterized in that, The support bracket includes multiple support rods, which are spaced apart, and the support platform is mounted on the multiple support rods.

9. The coating support mechanism according to any one of claims 1 to 5, characterized in that, The support bracket has a columnar structure, and a hollow structure in the middle of the support bracket. The hollow structure corresponds to the placement station on the support platform for placing the workpiece to be coated.

10. A coating vapor deposition apparatus, characterized in that, It includes a furnace body and a coating support mechanism as described in any one of claims 1 to 9, wherein the coating support mechanism is disposed within the furnace body.

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