Viewing window assembly and coating apparatus

Abstract

The utility model discloses an observation window assembly and coated film equipment, wherein the observation window assembly comprises a shell, a roller is rotatably arranged in the shell, a slit extending along the axial direction of the roller and a strip hole opposite to the slit are formed on the roller, a first observation port and a second observation port corresponding to the positions of the two opposite sides of the roller are further arranged on the shell, the outer diameter of the roller is greater than the width of the first observation port and the second observation port, a protective glass assembly is arranged at the second observation port, and the protective glass assembly at least comprises a radiation-proof glass. The utility model sets the protective glass assembly at the second observation port and makes the protective glass assembly comprise the radiation-proof glass, so that the radiation can be effectively avoided to cause harm to the observer in cooperation with the roller, the observer can be better protected, the safety can be improved, and the use needs of the radiation coating process can be met.

Description

Technical Field

[0001] This utility model relates to the field of coating processing equipment, and in particular to observation window components and coating equipment. Background Technology

[0002] During the coating process, workers often need to observe the working status inside the vacuum chamber through the observation window set on the vacuum chamber, so as to keep track of the situation inside the vacuum chamber at any time, control and adjust the process, and avoid unexpected situations.

[0003] Currently, the observation window commonly used in the industry is based on a structure called a "flash window," which uses high-speed rotating blades with slits to form a shutter-like mechanism.

[0004] Patent document CN219621247U discloses such an observation window structure.

[0005] However, in this structure, the observation slot is an open opening without safety protection. Therefore, this structure is not suitable for coating processes involving radiation, such as coating processes involving high-energy ion beams or coating processes using radioactive targets, as it could cause harm to observers. Utility Model Content

[0006] The purpose of this invention is to solve the above-mentioned problems in the prior art and to provide an observation window assembly and a coating device.

[0007] The objective of this utility model is achieved through the following technical solution: An observation window assembly includes a housing, within which a roller is rotatably disposed. The roller has a slit extending axially along its axis and a strip-shaped hole opposite the slit. The slit and the strip-shaped hole extend axially along the roller. The housing also has a first observation port and a second observation port located on opposite sides of the roller and corresponding in position. The outer diameter of the roller is larger than the width of the first and second observation ports. A protective glass assembly is disposed at the second observation port, the protective glass assembly including at least radiation-proof glass.

[0008] Preferably, one end of the housing is provided with a plurality of hinge seats located on the side where the first observation port is located, and the opposite end of the housing is provided with a handle.

[0009] Preferably, the roller comprises a circular tube, with end connecting rings coaxially connected to both ends of the circular tube, and a rotating shaft coaxially connected to the central hole of the end connecting rings.

[0010] Preferably, one end of the rotating shaft is connected to the housing via a magnetohydrodynamic seal, and the other end of the rotating shaft is rotatably connected to the housing via a bearing. The rotating shaft connected to the magnetohydrodynamic seal is connected to a motor that drives its rotation.

[0011] Preferably, the slit is divided into multiple short slit groups, each short slit group including multiple short slits that are positioned opposite each other and whose gaps are distributed along the axial direction of the roller. One of the short slits in the short slit group is opposite to one of the strip holes, and the length of the strip hole is adapted to the length of the short slit.

[0012] Preferably, the protective glass assembly is sealed at the second observation port, and the protective glass assembly is fixed at the second observation port by a pressure strip.

[0013] Preferably, the protective glass assembly further includes high-temperature resistant glass, which is located on the side of the radiation-proof glass facing the first observation port.

[0014] Preferably, the protective glass assembly further includes a strong light blocking glass located inside or outside the radiation-proof glass.

[0015] Preferably, the outer shell includes an inner top plate, an outer top plate, an inner bottom plate, an outer bottom plate, two end plates, and two side plates. The inner top plate and outer top plate, together with the two end plates and two side plates, form an upper cavity. The inner bottom plate and outer bottom plate, together with the two end plates and two side plates, form a lower cavity. The outer top plate is provided with a connector communicating with the upper cavity. The inner top plate is provided with a first communicating hole, which communicates with a first channel of an upper adapter block provided at the bottom of the inner top plate. The first channel communicates with one end of a pipe provided on the upper adapter block. The other end of the pipe is connected to a lower adapter block on the inner bottom plate and communicates with a second channel on the lower adapter block. The second channel communicates with the lower cavity through a second communicating hole on the inner bottom plate.

[0016] Coating equipment, including the observation window assembly as described in any of the above.

[0017] The advantages of this utility model's technical solution are mainly reflected in: This invention provides a protective glass assembly at the second observation port, which includes radiation-proof glass. While the roller provides some protection against radiation, the combination of the radiation-proof glass further enhances radiation blocking. This combined approach effectively prevents radiation from harming observers, better protects them, improves safety, and meets the needs of radiation-coated processes.

[0018] The outer shell structure design of this utility model allows for convenient introduction of cooling medium into the outer shell, thereby cooling the interior of the outer shell and the outer shell itself. This helps to reduce the impact of the coating height on the observer, making it more scientific and user-friendly.

[0019] After the observation device of this utility model is installed on the vacuum chamber, its sealing structure can maintain the vacuum chamber as required, thereby meeting the requirements of vacuum coating.

[0020] The peeling assembly of this utility model is also equipped with high-temperature resistant glass and strong light resistant glass, which can effectively reduce the impact of high temperature during coating on other glass components of the protective glass assembly, and at the same time reduce the temperature inside the shell to reduce the impact of high temperature on the internal structure of the shell; the strong light resistant glass can minimize the damage to human eyes caused by strong light during coating, further improving safety. Attached Figure Description

[0021] Figure 1 This is a cross-sectional view of the first position of the observation window assembly of this utility model; Figure 2 This is a cross-sectional view of the second position of the observation window assembly of this utility model; Figure 3 This is a perspective view of the observation window assembly of this utility model, with the window panel hidden in the figure; Figure 4 This is a longitudinal sectional view of the observation window assembly of this utility model; Figure 5 This is a perspective view of the circular tube of the observation window assembly of this utility model. Detailed Implementation

[0022] The purpose, advantages, and features of this utility model will be illustrated and explained through the following non-limiting description of preferred embodiments. These embodiments are merely typical examples of applying the technical solutions of this utility model, and all technical solutions formed by equivalent substitutions or equivalent transformations fall within the scope of protection claimed by this utility model.

[0023] In the description of the solution, it should be noted that the terms "center," "upper," "lower," "left," "right," "front," "rear," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience and simplification of description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0024] Example 1 The observation window component disclosed in this utility model will now be described in detail with reference to the accompanying drawings. Figure 1 As shown, it includes a housing 100, within which a roller 200 is rotatably disposed. The roller 200 has a slit 210 extending along the axial direction of the roller and a strip-shaped hole 220 opposite to the slit 210. The housing 100 also has a first observation port 110 and a second observation port 120 located on opposite sides of the roller 200 and corresponding in position. The slit 210 and the strip-shaped hole 220 extend along the axial direction of the roller 200. A protective glass assembly 300 is disposed at the second observation port 120. The protective glass assembly 300 includes at least a radiation-shielding glass 310.

[0025] The shape and specific details of the outer shell 100 can be designed as needed. In this embodiment, the outer shell 100 is generally a hollow cuboid. In one embodiment, the outer shell 100 can be assembled from 6 cuboid-shaped plates.

[0026] As attached Figure 2 Appendix Figure 3 As shown, the outer shell 100 includes an inner top plate 130, an outer top plate 140, an inner bottom plate 150, an outer bottom plate 160, two end plates 170, and two side plates 180. The inner top plate 130 and the outer top plate 140, together with the two end plates 170 and the two side plates 180, form an upper cavity 190. The inner bottom plate 150 and the outer bottom plate 160, together with the two end plates 170 and the two side plates 180, form a lower cavity 101. A connector communicating with the upper cavity 190 is provided on the outer top plate 140, and a connector communicating with the upper cavity 190 is provided on the inner top plate 130. A first connecting hole 102 is provided, which communicates with a first channel 104 of an upper adapter block 103 located at the bottom of the inner top plate 130. The first channel 104 communicates with one end of a pipe 105 located on the upper adapter block 103. The other end of the pipe 105 is connected to a lower adapter block 106 on the inner bottom plate 150 and communicates with a second channel 107 on the lower adapter block 106. The second channel 107 communicates with the lower cavity 101 through a second connecting hole on the inner bottom plate 150. During coating, cooling gas can be introduced into the upper cavity 190 through the connector. At this time, the cooling gas can enter the pipe 105 through the upper adapter block 103 and cool the space inside the outer shell 100. At the same time, the cooling gas can enter the lower cavity 101 through the pipe 105 and the lower adapter block 106 to cool the lower part of the shell. Subsequently, the cooling air can be removed by evacuation, and cooling can be achieved through continuous inflation and evacuation.

[0027] Of course, another connector (not shown in the figure) can also be provided on the outer base plate 160, which can more conveniently realize the circulation of the cooling medium. At the same time, the pipe 105 is preferably located near the first observation port 110, and it is a U-shaped pipe surrounding the first observation port 110.

[0028] As attached Figure 2 As shown, one of the two side plates 180 is provided with the first observation port 110, and the other is provided with the second observation port 120. Specifically, the left side plate 180 is provided with a rectangular hole, and a window plate 108 is provided at the rectangular hole, and the first observation port 110 is provided at the window plate 108. The right side plate 180 is provided with a rectangular hole, and a glass assembly mounting plate 109 is provided on the right side plate 180. The glass assembly mounting plate 109 is provided with a second observation port 120 directly opposite the first observation port 110.

[0029] As attached Figure 1 Appendix Figure 4 As shown, the roller 200 is disposed between the two end plates 170. The outer diameter of the roller 200 is greater than the width of the first observation port 110 and the second observation port 120, and the roller 200 is directly opposite the first observation port 110 and the second observation port 120. Thus, the roller 200 blocks the first observation port 110 and the second observation port 120 and blocks the radiation to a certain extent.

[0030] As attached Figure 4 As shown, the roller 200 includes a circular tube 230, with both ends of the circular tube 230 coaxially connected to end connecting rings 240. A rotating shaft 250 is coaxially connected to the center hole of the end connecting rings 240. One end of the rotating shaft 250 is connected to the end plate 170 of one end of the housing 100 via a magnetic fluid seal 400. The other end of the rotating shaft 250 is rotatably connected to a plug 111 provided at the end plate 170 of the other end of the housing 100 via a bearing. At the same time, the rotating shaft 250 connected to the magnetic fluid seal 400 extends outside the housing 100 and is connected to a motor (not shown in the figure) that drives its rotation via a coupling 500. The motor can be a known geared motor, which will not be described in detail here, and the motor can be connected to a mounting base 600 on the outside of the magnetic fluid seal.

[0031] As attached Figure 5As shown, the slit 210 and the strip-shaped hole 220 are formed on the circular tube 230. The slit 210 is divided into multiple short slit groups, which are distributed circumferentially along the circular tube. Each short slit group includes multiple short slits 211 that are directly opposite each other and spaced apart along the axial direction of the roller 200. One short slit 211 in each short slit group is directly opposite a strip-shaped hole 220. The length of the strip-shaped hole 220 is adapted to the length of the short slit 211, and the width of the strip-shaped hole is greater than the width of the short slit 211. For example, there are three groups of short slits that are evenly distributed circumferentially. Each short slit group includes three short slits 211. At the same time, one of the three short slits 211 is directly opposite the strip-shaped hole, and the three strip-shaped holes are staggered along the axial direction of the circular tube 230. This structure can effectively reduce the length of the strip-shaped hole, thereby enabling the roller to better block radiation.

[0032] As attached Figure 1 As shown, the protective glass assembly 300 is sealed at the second observation port 120. The second observation port 120 is a countersunk hole. The protective glass assembly 300 is sealed on the stepped surface of the countersunk hole by a sealing ring (not shown in the figure). At the same time, the protective glass assembly 300 is fixed at the second observation port 120 by a pressure strip 700. The pressure strip 700 is fixed on the glass assembly mounting plate 109 by bolts and presses on the upper and lower sides of the protective glass assembly 300.

[0033] The radiation-shielding glass 310 is, for example, lead glass. The protective glass assembly 300 also includes a high-temperature resistant glass 320, such as quartz glass, located on the side of the radiation-shielding glass 310 facing the first observation port 110. Further, the protective glass assembly 300 includes a glare-blocking glass 330 located inside or outside the radiation-shielding glass 310. Preferably, the glare-blocking glass 330 is located on the side of the radiation-shielding glass 310 away from the first observation port 110, and is, for example, known black glass. Finally, the protective glass assembly 300 may also include ordinary glass 340, which may be located between the glare-blocking glass and the radiation-shielding glass. In this case, the glare-blocking glass is located between the two pressure strips and pressed against the ordinary glass by a pressure block 800 fixed to the outer casing.

[0034] During observation, the roller 200 is driven to rotate by a motor, and the observer observes the coating condition in the vacuum chamber from the outside of the protective glass assembly 300.

[0035] As attached Figure 3As shown, one end of the housing 100 is provided with a plurality of hinge seats 112 located on the side where the first observation port 110 is located, and the opposite end of the housing 100 is provided with a handle 113. In use, the side plate 180 where the first observation port 110 is located can be screwed to the door of the vacuum chamber or other positions. At the same time, the side plate 180 can be sealed to the door of the vacuum chamber or other positions by a sealing ring. In addition, the hinge seats can also be hinged to the pin on the vacuum chamber. When the side plate 180 is separated from the vacuum chamber, the observation window assembly can be pulled open by the handle.

[0036] Example 2 This embodiment discloses a coating apparatus, including an observation window assembly as described above. The observation window assembly may be sealed on the door of the vacuum chamber of the coating apparatus or other feasible locations, which are not limited here.

[0037] This utility model has many other embodiments. All technical solutions formed by equivalent transformation or equivalent transformation fall within the protection scope of this utility model.

Claims

1. An observation window assembly, comprising a housing, wherein a roller is rotatably disposed within the housing, the roller having a slit extending axially along the roller and a strip-shaped hole opposite the slit, and the housing further having a first observation port and a second observation port located on opposite sides of the roller and corresponding in position, characterized in that: The outer diameter of the roller is greater than the width of the first observation port and the second observation port. A protective glass assembly is provided at the second observation port, and the protective glass assembly includes at least radiation-proof glass.

2. The observation window assembly according to claim 1, characterized in that: One end of the housing is provided with a plurality of hinge seats located on the side where the first observation port is located, and the opposite end of the housing is provided with a handle.

3. The observation window assembly according to claim 1, characterized in that: The roller includes a circular tube, with end connecting rings coaxially connected to both ends of the circular tube, and a rotating shaft coaxially connected to the central hole of the end connecting rings.

4. The observation window assembly according to claim 3, characterized in that: One end of the rotating shaft is connected to the housing via a magnetohydrodynamic seal, and the other end of the rotating shaft is rotatably connected to the housing via a bearing. The rotating shaft connected to the magnetohydrodynamic seal is connected to a motor that drives its rotation.

5. The observation window assembly according to claim 1, characterized in that: The slit is divided into multiple short slit groups. Each short slit group includes multiple short slits that are positioned opposite each other and whose gaps are distributed along the axial direction of the roller. One of the short slits in the short slit group is opposite to one of the strip holes. The length of the strip hole is adapted to the length of the short slit.

6. The observation window assembly according to claim 1, characterized in that: The protective glass assembly is sealed at the second observation port, and the protective glass assembly is fixed at the second observation port by a pressure strip.

7. The observation window assembly according to claim 1, characterized in that: The protective glass assembly also includes high-temperature resistant glass, which is located on the side of the radiation-proof glass facing the first observation port.

8. The observation window assembly according to claim 1, characterized in that: The protective glass assembly also includes anti-glare glass.

9. The observation window assembly according to any one of claims 1-8, characterized in that: The outer shell includes an inner top plate, an outer top plate, an inner bottom plate, an outer bottom plate, two end plates, and two side plates. The inner top plate and outer top plate, together with the two end plates and two side plates, form an upper cavity. The inner bottom plate and outer bottom plate, together with the two end plates and two side plates, form a lower cavity. The outer top plate is provided with a connector that communicates with the upper cavity. The inner top plate is provided with a first connecting hole. The first connecting hole communicates with a first channel of an upper adapter block provided at the bottom of the inner top plate. The first channel communicates with one end of a pipe provided on the upper adapter block. The other end of the pipe is connected to a lower adapter block on the inner bottom plate and communicates with a second channel on the lower adapter block. The second channel communicates with the lower cavity through a second connecting hole on the inner bottom plate.

10. A coating equipment, characterized in that: Includes the observation window component as described in any one of claims 1-9.

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