A deformation preventing support device for CVD diamond growth

Abstract

The utility model relates to material science and engineering field discloses a kind of CVD diamond growth anti-deformation support device, including base, the base top is fixedly connected with table body, and the table body top is provided with heat compensation component;The heat compensation component includes mounting plate, and the mounting plate outer wall is fixedly connected in table body top, and the mounting plate outer wall is fixedly connected with flange, and the flange inside is fixedly connected with input interface, and the mounting plate inside is fixedly connected with output interface, and the mounting plate one end is provided with radiating group, and the mounting plate top is fixedly connected with guide column one, and the guide column one outer wall is fixedly connected with support.The utility model in, elastic heat compensation sheet can offset the thermal stress in the process of CVD diamond growth, reaches the radiating group realization heat even dispersion, improves the quality stability of diamond growth, solves the problem that crystal is deformed by thermal stress, and heat distribution unevenly causes local growth anomaly and support structure long-term high temperature service is prone to ageing deformation.

Description

Technical Field

[0001] This utility model relates to the field of materials science and engineering, and in particular to a deformation-resistant support device for CVD diamond growth. Background Technology

[0002] In the field of CVD diamond growth, the core work involves diamond seed crystals, which are grown through chemical vapor deposition in a specific high-temperature, high-pressure gaseous environment. This process demands extremely high stability of the growth environment and reliability of the support structure; the seed crystal support device is one of the key factors determining the final quality of the diamond.

[0003] The core equipment related to this growth process is the growth stage in an MPCVD (Multi-Level Chemical Vapor Deposition) device. This type of stage typically includes a base, a support structure to hold the seed crystal, and a corresponding adjustment mechanism. Its working principle involves fixing the seed crystal in the support area, then introducing a carbon-containing gas source into the device. Microwave-excited plasma decomposes the gas source, causing carbon atoms to deposit on the seed crystal surface and gradually grow into a diamond crystal. The structural design of the growth stage must ensure that the seed crystal maintains a stable posture during growth, while also being adaptable to the placement requirements of seed crystals of different sizes.

[0004] Existing CVD diamond growth anti-deformation support devices typically suffer from problems such as crystal deformation caused by thermal stress, localized growth abnormalities caused by uneven heat distribution, and easy aging and deformation of the support structure due to long-term high-temperature service. To address these issues, a new CVD diamond growth anti-deformation support device is proposed. Utility Model Content

[0005] To overcome the above deficiencies, this utility model provides a CVD diamond growth anti-deformation support device, which aims to improve the problems of crystal deformation caused by thermal stress, local growth abnormalities caused by uneven heat distribution, and easy aging and deformation of the support structure during long-term high-temperature service in the prior art.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: A CVD diamond growth anti-deformation support device includes a base, a platform is fixedly connected to the top of the base, and a heat-repairing component is provided on the top of the platform. The heat compensation assembly includes a mounting plate, the outer wall of which is fixedly connected to the top of the platform. A flange is fixedly connected to the outer wall of the mounting plate, an input interface is fixedly connected inside the flange, and an output interface is fixedly connected inside the mounting plate. A heat dissipation group is provided at one end of the mounting plate. A guide post is fixedly connected to the top of the mounting plate, a bracket is fixedly connected to the outer wall of the guide post, and an elastic heat compensation sheet is fixedly connected to the inner wall of the bracket.

[0007] As a further description of the above technical solution: The platform body is slidably connected to a limit block, and the bottom of the platform body is fixedly connected to a caster wheel.

[0008] As a further description of the above technical solution: One end of the limiting block is fixedly connected to a support ring, and a heating pipe is fixedly connected to the outer wall of the support ring.

[0009] As a further description of the above technical solution: A fixing plate is fixedly connected to the top of the platform. A buckle is fixedly connected to the outer wall of the fixing plate. A second buckle is fixedly connected inside the buckle. A fixing hole is opened inside the fixing plate.

[0010] As a further description of the above technical solution: The outer wall of the buckle is rotatably connected to the connecting rod 2. The outer wall of the connecting rod 2 is fixedly connected to the limiting plate 2. The outer wall of the connecting rod 2 is fixedly connected to the limiting plate 1. The inner wall of the limiting plate 1 is fixedly connected to the connecting rod 1. The connecting rod 1 is rotatably connected to the guide post 2.

[0011] As a further description of the above technical solution: A switch is rotatably connected to the outer wall of the second guide post, and a spring is provided on the outer wall of the first connecting rod. One end of the spring is fixedly connected to the bottom end of the second limiting plate, and the other end of the spring is fixedly connected to the top end of the first limiting plate.

[0012] This utility model has the following beneficial effects: 1. In this utility model, by setting an elastic thermal compensation sheet on the thermal compensation component, the elastic thermal compensation sheet can offset the thermal stress during the CVD diamond growth process, so that the heat dissipation group can achieve uniform heat distribution, improve the quality stability of diamond growth, and solve the problems of crystal deformation caused by thermal stress, local growth abnormalities caused by uneven heat distribution, and easy aging and deformation of the support structure during long-term high-temperature service.

[0013] 2. In this utility model, the guide post is rotated by turning the switch. The guide post is connected to connecting rod one and connecting rod two. Under the action of connecting rod one, buckle two is unlocked and disengaged from buckle one, achieving the effect of quick fixing and disassembly, improving work efficiency, and solving the problems of unstable equipment and wasted time during disassembly. Attached Figure Description

[0014] Figure 1 This is a three-dimensional schematic diagram of a CVD diamond growth anti-deformation support device proposed in this utility model; Figure 2 This is a schematic diagram of the heat dissipation assembly of a CVD diamond growth anti-deformation support device proposed in this utility model; Figure 3This is a schematic diagram of the spring structure of a CVD diamond growth anti-deformation support device proposed in this utility model.

[0015] Legend: 1. Casters; 2. Base; 3. Platform; 4. Support ring; 5. Heating pipe; 6. Limiting block; 7. Mounting plate; 8. Flange; 9. Input interface; 10. Heat dissipation assembly; 11. Guide post one; 12. Bracket; 13. Elastic thermal compensation sheet; 14. Output interface; 15. Fixing plate; 16. Clip one; 17. Clip two; 18. Fixing hole; 19. Spring; 20. Connecting rod one; 21. Switch; 22. Guide post two; 23. Limiting plate one; 24. Limiting plate two; 25. Connecting rod two. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0017] Reference Figure 1 and Figure 2 The present invention provides an embodiment of a CVD diamond growth anti-deformation support device, including a base 2, which serves as the bearing foundation of the entire device, provides support for the upper structure, and distributes the weight load of the device. A platform 3 is fixedly connected to the top of the base 2, which provides structural support and space guarantee for diamond growth, making the layout of internal components more reasonable and facilitating the stable control of the growth environment. A heat repair component is provided on the top of the platform 3. The heat compensation assembly includes a mounting plate 7, the outer wall of which is fixedly connected to the top of the platform 3. A flange 8 is fixedly connected to the outer wall of the mounting plate 7. An input interface 9 is fixedly connected inside the flange 8. An output interface 14 is fixedly connected inside the mounting plate 7. A heat dissipation group 10 is provided at one end of the mounting plate 7. The heat dissipation group 10 is composed of dense heat dissipation fins. When the heat exchange medium flows in it, the heat in the diamond growth environment is evenly distributed through the large-area heat exchange of the heat dissipation fins. A guide post 11 is fixedly connected to the top of the mounting plate 7. A bracket 12 is fixedly connected to the outer wall of the guide post 11. An elastic heat compensation plate 13 is fixedly connected to the inner wall of the bracket 12. The elastic heat compensation plate 13 is made of corrugated high-temperature resistant alloy material. During the temperature change process of diamond growth, it offsets the stress generated by thermal expansion and contraction through its own elastic deformation. Reference Figure 1 and Figure 3The platform 3 has a sliding connection of a limiting block 6 inside. A caster wheel 1 is fixedly connected to the bottom of the platform 3, facilitating overall movement and transport. A support ring 4 is fixedly connected to one end of the limiting block 6. The support ring 4 effectively reduces the impact of thermal stress on the diamond crystal, lowering the probability of crystal deformation and cracking, and improving the quality of diamond growth. A heating pipe 5 is fixedly connected to the outer wall of the support ring 4. A fixing plate 15 is fixedly connected to the top of the platform 3. A first buckle 16 is fixedly connected to the outer wall of the fixing plate 15. A second buckle 17 is fixedly connected inside the first buckle 16. A fixing hole 18 is provided inside the fixing plate 15. A second connecting rod 25 is rotatably connected to the outer wall of the second buckle 17. A second limiting plate 24 is fixedly connected to the outer wall of the second connecting rod 25. A spring 19 is connected between plate 24 and limit plate 23. The spring 19 can stretch and fix the position of buckle 2 17. The outer wall of connecting rod 25 is fixedly connected to limit plate 23. The inner wall of limit plate 23 is fixedly connected to connecting rod 20. The inner wall of connecting rod 20 is rotatably connected to guide post 22. Guide post 22 passes through and connects switch 21 and connecting rod 20. It can rotate to drive the compression of spring 19. The outer wall of guide post 22 is rotatably connected to switch 21. Switch 21 can unlock and lock. The outer wall of connecting rod 20 is provided with spring 19. One end of spring 19 is fixedly connected to the bottom of limit plate 24, and the other end of spring 19 is fixedly connected to the top of limit plate 23.

[0018] Working principle: When using this CVD diamond growth anti-deformation support device, the medium is first introduced through the input interface 9. After entering the device, the medium flows in the heat dissipation group 10. The heat dissipation fins are used to disperse the heat. The elastic thermal compensation plate 13 uses its own corrugated elastic structure to offset the thermal stress generated during the CVD diamond growth process when it deforms due to temperature changes. The guide post 11 and the bracket 12 provide positioning and support for the entire structure, ensuring the relative position of each component is stable. Finally, the medium that has completed heat exchange and stress compensation is discharged through the output interface 14, ensuring the stable growth of the diamond crystal.

[0019] When using this CVD diamond growth anti-deformation support device, the second buckle 17 is fixed together with the first buckle 16 in the locked state. If you want to unlock it, you can pry the switch 21 to rotate the second guide post 22. The second guide post 22 is connected to the first connecting rod 20 and the second connecting rod 25. The second buckle 17 can be unlocked by the first connecting rod 20, thereby releasing the second buckle 17 from the first buckle 16, achieving the function of quick fixing and disassembly.

[0020] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A CVD diamond growth anti-deformation support device, comprising a base (2), characterized in that: The base (2) is fixedly connected to the top of the platform (3), and the platform (3) is provided with a heat repair component on the top. The heat compensation assembly includes a mounting plate (7), the outer wall of which is fixedly connected to the top of the platform (3), a flange (8) is fixedly connected to the outer wall of the mounting plate (7), an input interface (9) is fixedly connected inside the flange (8), an output interface (14) is fixedly connected inside the mounting plate (7), a heat dissipation group (10) is provided at one end of the mounting plate (7), a guide post (11) is fixedly connected to the top of the mounting plate (7), a bracket (12) is fixedly connected to the outer wall of the guide post (11), and an elastic heat compensation sheet (13) is fixedly connected to the inner wall of the bracket (12).

2. The CVD diamond growth anti-deformation support device according to claim 1, characterized in that: The platform (3) has a sliding connection of a limit block (6) inside, and a caster wheel (1) is fixedly connected to the bottom of the platform (3).

3. The CVD diamond growth anti-deformation support device according to claim 2, characterized in that: One end of the limiting block (6) is fixedly connected to a support ring (4), and a heating pipe (5) is fixedly connected to the outer wall of the support ring (4).

4. The CVD diamond growth anti-deformation support device according to claim 1, characterized in that: The top of the platform (3) is fixedly connected to a fixing plate (15), the outer wall of the fixing plate (15) is fixedly connected to a buckle one (16), the inside of the buckle one (16) is fixedly connected to a buckle two (17), and the fixing plate (15) has a fixing hole (18).

5. The CVD diamond growth anti-deformation support device according to claim 4, characterized in that: The outer wall of the buckle 2 (17) is rotatably connected to the connecting rod 2 (25), the outer wall of the connecting rod 2 (25) is fixedly connected to the limiting plate 2 (24), the outer wall of the connecting rod 2 (25) is fixedly connected to the limiting plate 1 (23), the inner wall of the limiting plate 1 (23) is fixedly connected to the connecting rod 1 (20), and the inner wall of the connecting rod 1 (20) is rotatably connected to the guide post 2 (22).

6. The CVD diamond growth anti-deformation support device according to claim 5, characterized in that: A switch (21) is rotatably connected to the outer wall of the second guide post (22), and a spring (19) is provided on the outer wall of the first connecting rod (20). One end of the spring (19) is fixedly connected to the bottom end of the second limiting plate (24), and the other end of the spring (19) is fixedly connected to the top end of the first limiting plate (23).

Images