Sheet carrier and coating apparatus

Abstract

The application relates to the field of photovoltaic and semiconductor technologies, in particular to a sheet material carrier and a coating device, which solve the problem that a sheet material carrier cannot save gas sources and the uniformity of gas distribution in the sheet material carrier is good. The sheet material carrier comprises a bottom plate, a first side plate, a second side plate, at least two third side plates and at least one partition plate. The bottom plate, the first side plate, the second side plate and two adjacent third side plates enclose a containing cavity. The at least one partition plate is located in the containing cavity and is used for separating the containing cavity to form at least two sub-containing cavities. The first side plate is provided with an air inlet, the partition plate is provided with an air passage, and the second side plate is provided with an air outlet. Process gas enters the first sub-containing cavity of the containing cavity through the air inlet, flows to the last sub-containing cavity through the air passage, and flows out of the containing cavity through the air outlet. The air inlet mode of the sheet material carrier not only saves gas sources, but also enables process gas to enter each sub-containing cavity of the containing cavity, so that the uniformity of gas distribution in the sheet material carrier is good.

Description

Technical Field

[0001] This application relates to the fields of photovoltaic and semiconductor technology, and more specifically to a sheet carrier and coating apparatus. Background Technology

[0002] Currently, the industry typically uses sheet carriers to carry sheet materials. These carriers are placed on boats and transported to the reactor for processing. To increase production capacity, sheet carriers are usually equipped with multiple sub-cavities for accommodating sheet materials. Each sub-cavity can hold multiple stacked sheet materials, enabling batch processing of the sheet materials within multiple sub-cavities.

[0003] In related technologies, to improve the uniformity of gas distribution within the sheet carrier, air inlets are typically installed on the top of the side plate corresponding to each sub-cavity. Process gases enter each sub-cavity through the corresponding air inlet. While this air intake method can ensure good uniformity of gas distribution within the sheet carrier, it results in wasted gas resources. Utility Model Content

[0004] In view of this, the embodiments of this application provide a sheet carrier and a coating apparatus, which solve the problem that the sheet carrier cannot simultaneously save gas source and achieve good uniformity of gas distribution within the sheet carrier.

[0005] In a first aspect, embodiments of this application provide a sheet carrier, comprising: a base plate; a first side plate, vertically disposed and connected to the base plate; a second side plate, disposed opposite to the first side plate along a first horizontal direction and connected to the base plate; at least two third side plates, arranged sequentially along a second horizontal direction, wherein the third side plates connect the first side plate and the second side plate and are connected to the base plate; wherein the base plate, the first side plate, the second side plate, and two adjacent third side plates enclose a receiving cavity; wherein the second horizontal direction is perpendicular to the first horizontal direction; at least one A partition is located in the receiving cavity and connected to the bottom plate and the adjacent third side plate to divide the receiving cavity into at least two sub-receiving cavities arranged sequentially along the first horizontal direction. The sub-receiving cavities are configured to receive sheet material. The first side plate has an air inlet, the partition has an air vent, and the second side plate has an air outlet. Process gas can enter the first sub-receiving cavity of the receiving cavity through the air inlet, flow to the last sub-receiving cavity through the air vent, and flow out of the last sub-receiving cavity of the receiving cavity through the air outlet.

[0006] In some embodiments, the air inlet includes a first air inlet, the air vent includes a first air vent, and the air outlet includes a first air outlet, wherein the first air inlet, the first air vent, and the first air outlet are aligned one-to-one in the first horizontal direction; wherein the sheet material has a first cross-section, and a first airflow channel is formed between the first cross-section of the sheet material and the corresponding third side plate, and the first air inlet, the first airflow channel, the first air vent, and the first air outlet are sequentially connected along the first horizontal direction.

[0007] In some embodiments, the air inlet further includes a second air inlet, the air vent further includes a second air vent, and the air outlet further includes a second air outlet. The second air inlet, the second air vent, and the second air outlet are aligned one-to-one in the first horizontal direction. The first air inlet, the first air vent, and the first air outlet are all close to the first of two adjacent third side plates, and the second air inlet, the second air vent, and the second air outlet are all close to the second of two adjacent third side plates. The sheet material also has a second cross-section, which is disposed opposite to the first cross-section in the second horizontal direction. The first cross-section of the sheet material forms a first airflow channel with the corresponding first third side plate, and the second cross-section of the sheet material forms a second airflow channel with the corresponding second third side plate. The second air inlet, the second airflow channel, the second air vent, and the second air outlet are sequentially connected along the first horizontal direction.

[0008] In some embodiments, the air inlet further includes at least one third air inlet, the vent further includes at least one third vent, and the air outlet further includes at least one third air outlet, wherein, in the second horizontal direction, the third air inlet is located between the first air inlet and the second air inlet, the third vent is located between the first vent and the second vent, and the third air outlet is located between the first air outlet and the second air outlet, wherein the third air inlet and the corresponding third vent and the third air outlet are aligned one-to-one in the first horizontal direction.

[0009] In some embodiments, the sub-accommodating cavity accommodates at least two columns of sheet material arranged along the second horizontal direction, and each column of sheet material includes multiple sheets of sheet material stacked in a vertical direction; wherein the orthographic projection of the first air inlet, the first air vent, and the first air outlet onto the first side plate along the first horizontal direction covers the first cross-section of a column of sheet material near the first third side plate in the vertical direction; wherein the orthographic projection of the second air inlet, the second air vent, and the second air outlet onto the first side plate along the first horizontal direction covers the second cross-section of a column of sheet material near the second third side plate in the vertical direction; wherein the orthographic projection of the third air inlet, the third air vent, and the third air outlet onto the first side plate along the first horizontal direction covers the second cross-section of one column of sheet material and the first cross-section of the other column of sheet material in the vertical direction of two adjacent columns of sheet material.

[0010] In some embodiments, there are multiple third side plates and multiple partitions; wherein the multiple third side plates are arranged sequentially along the second horizontal direction so that the sheet carrier has multiple receiving cavities arranged sequentially along the second horizontal direction; wherein the multiple partitions are located in the corresponding receiving cavities and are arranged at equal intervals along the first horizontal direction.

[0011] In some embodiments, the sheet carrier further includes: at least two first positioning blocks, respectively disposed on the top of the first third side plate and the top of the last third side plate; at least two second positioning blocks, respectively disposed on the bottom of the first third side plate and the bottom of the last third side plate, wherein the first positioning blocks and second positioning blocks of the same third side plate are aligned in the vertical direction; wherein at least two sheet carriers are stackable in the vertical direction, and the first positioning block of one sheet carrier of two adjacent sheet carriers cooperates with the second positioning block of the other sheet carrier for positioning; and / or; at least two pick-and-place positioning blocks, respectively disposed in the middle of the first third side plate and the middle of the last third side plate, wherein the pick-and-place positioning blocks are configured to cooperate with a carrier pick-and-place device for gripping and positioning.

[0012] In some embodiments, the sheet carrier further includes a cassette configured to hold the sheet material and capable of being placed in and out of the sub-receiving cavity; wherein the cassette has an air inlet through which the process gas can enter the cassette from the sub-receiving cavity.

[0013] In some embodiments, a first positioning member is provided at the bottom of the material box, and the sheet carrier further includes a second positioning member disposed on the base plate; wherein, during the process of placing the material box in the sub-accepting cavity, the first positioning member and the second positioning member cooperate to position the material box.

[0014] Secondly, embodiments of this application provide a coating apparatus, comprising: a reaction furnace having a reaction chamber; and the sheet carrier described in the first aspect, which can be placed in the reaction chamber.

[0015] The sheet carrier provided in this embodiment has an air inlet on its first side plate and an air outlet on its second side plate. A partition within the receiving cavity of the sheet carrier has a vent. Process gas enters the first sub-receiving cavity of the receiving cavity through the air inlet and flows to the last sub-receiving cavity through the vent. This air intake method of the sheet carrier saves gas resources and ensures that process gas enters each sub-receiving cavity of the receiving cavity in a timely manner, thereby achieving better uniformity of gas distribution within the sheet carrier. Attached Figure Description

[0016] Figure 1 The diagram shown is a structural schematic of a sheet carrier provided in an embodiment of this application.

[0017] Figure 2 The image shown is a top view of a sheet carrier and sheet material provided in an embodiment of this application.

[0018] Figure 3 The image shown is a top view of a sheet carrier and sheet material provided in another embodiment of this application.

[0019] Figure 4 The image shown is a top view of a sheet carrier and sheet material provided in another embodiment of this application.

[0020] Figure 5 The image shown is a front view of a sheet carrier and sheet material provided in an embodiment of this application.

[0021] Figure 6 The image shown is a side view of a sheet carrier provided in an embodiment of this application.

[0022] Figure 7 The diagram shown is a structural schematic of a sheet carrier provided in another embodiment of this application.

[0023] Figure 8 The diagram shown is a structural schematic of a material box provided in an embodiment of this application.

[0024] Figure 9 The diagram shown is a structural schematic of a sheet carrier provided in another embodiment of this application.

[0025] Figure 10The diagram shown is a structural schematic of a coating apparatus provided in an embodiment of this application.

[0026] Figure label: 1. Coating apparatus; 10. Sheet carrier; 101. Receiving cavity; 1001. Sub-receiving cavity; 1011. First airflow channel; 1021. Second airflow channel; 1031. Third airflow channel; 100. Base plate; 200. First side plate; 201. Air inlet; 211. First air inlet; 221. Second air inlet; 231. Third air inlet; 300. Second side plate; 301. Air outlet; 311. First air outlet; 321. Second air outlet; 331. Third air outlet; 400. Third side plate; 500. Partition; 501, Vent; 511, First Vent; 521, Second Vent; 531, Third Vent; 600, First Positioning Block; 700, Second Positioning Block; 800, Pick-up and Placement Positioning Block; 900, Material Box; 901, Air Inlet; 910, First Positioning Component; 9101, Positioning Hole; 1000, Second Positioning Component; 1010, Positioning Pin; 2, Sheet Material; 21, First Section; 22, Second Section; 20, Reactor; 2001, Reaction Chamber; X1, First Horizontal Direction; X2, Second Horizontal Direction. Detailed Implementation

[0027] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0028] Figure 1 The diagram shown is a structural schematic of a sheet carrier provided in an embodiment of this application. Figure 2 The image shown is a top view of a sheet carrier and sheet material provided in an embodiment of this application. Figure 1 and Figure 2As shown, the sheet carrier 10 includes a base plate 100, a first side plate 200, a second side plate 300, at least two third side plates 400, and at least one partition 500. The first side plate 200 is vertically arranged and connected to the base plate 100. The second side plate 300 is arranged opposite to the first side plate 200 along a first horizontal direction X1 and is connected to the base plate 100. At least two third side plates 400 are arranged sequentially along a second horizontal direction X2, connecting the first side plate 200 and the second side plate 300, and are also connected to the base plate 100. The base plate 100, the first side plate 200, the second side plate 300, and the two adjacent third side plates 400 enclose a receiving cavity 101. The second horizontal direction X2 is perpendicular to the first horizontal direction X1. The partition 500 is located in the receiving cavity 101 and is connected to the bottom plate 100 and the adjacent third side plate 400 to divide the receiving cavity 101 into at least two sub-receiving cavities 1001 arranged sequentially along the first horizontal direction X1. The sub-receiving cavities 1001 are configured to receive sheet material 2.

[0029] The first side plate 200 has an air inlet 201, the partition 500 has an air vent 501, and the second side plate 300 has an air outlet 301. The process gas can enter the first sub-cabinet 1001 of the receiving cavity 101 through the air inlet 201, flow to the last sub-cabinet 1001 through the air vent 501, and flow out of the last sub-cabinet 1001 of the receiving cavity 101 through the air outlet 301.

[0030] The sheet carrier 10 of this application has an air inlet 201 on its first side plate 200 and an air outlet 301 on its second side plate 300. The partition 500 within the receiving cavity 101 of the sheet carrier 10 has a vent 501. Process gas enters the first sub-receiving cavity 1001 of the receiving cavity 101 through the air inlet 201 and flows to the last sub-receiving cavity 1001 through the vent 501. This air intake method of the sheet carrier 10 saves gas resources and allows process gas to enter each sub-receiving cavity 1001 of the receiving cavity 101 in a timely manner, thereby improving the uniformity of gas distribution within the sheet carrier 10.

[0031] In addition, the air intake method of the sheet carrier 10 allows excess process gas to flow out of the sheet carrier 10 from the air outlet 301 in a timely manner, avoiding excess process gas remaining in the sub-accommodation cavity 1001 and affecting the process quality of the sheet material 2.

[0032] For example, the air inlet 201, the air outlet 501 and the air outlet 301 are aligned one by one along the arrangement direction of the sub-accommodating cavities 1001 of the accommodating cavity 101, which further improves the flow efficiency of process gas to each sub-accommodating cavity 1001, thereby further improving the uniformity of gas distribution in the sheet carrier 10.

[0033] Exemplarily, the sheet carrier 10 includes two third side plates 400 and a partition 500. The bottom plate 100, the first side plate 200, the second side plate 300, and the two third side plates 400 enclose a receiving cavity 101. The partition 500 is located in the receiving cavity 101 to divide the receiving cavity 101 into two sub-receiving cavities 1001 arranged sequentially along a first horizontal direction X1. Process gas enters the first sub-receiving cavity 1001 through the inlet 201, flows to the second sub-receiving cavity 1001 through the vent 501, and flows out of the second sub-receiving cavity 1001 through the outlet 301.

[0034] In some embodiments, such as Figure 3 As shown, the air inlet 201 includes a first air inlet 211, the vent 501 includes a first vent 511, and the air outlet 301 includes a first air outlet 311. The first air inlet 211, the first vent 511, and the first air outlet 311 are aligned one-to-one in the first horizontal direction X1. The sheet material 2 has a first cross-section 21, and a first airflow channel 1011 is formed between the first cross-section 21 of the sheet material 2 and the corresponding third side plate 400. The first air inlet 211, the first airflow channel 1011, the first vent 511, and the first air outlet 311 are sequentially connected along the first horizontal direction X1.

[0035] After the process gas enters the corresponding sub-containment cavity 1001, most of the process gas in the sub-containment cavity 1001 flows directly along the first horizontal direction X1 to the first airflow channel 1011 in the sub-containment cavity 1001 to coat the first cross-section 21 of the sheet material 2, thereby improving the utilization rate of the process gas and improving the coating efficiency of the first cross-section 21.

[0036] For example, such as Figure 3 As shown, when a row of sheet materials 2 is contained in the sub-receiving cavity 1001, a first airflow channel 1011 is formed between the first cross-section 21 of the sheet materials 2 and the first of the two adjacent third side plates 400. Most of the process gas in the process gas entering the sub-receiving cavity 1001 flows directly to the first airflow channel 1011 along the first horizontal direction X1 to coat the first cross-section 21 of the sheet materials 2. Figure 3 The direction of the dashed arrow shown in the figure indicates the flow direction of the process gas entering the containment cavity 101 through the first air inlet 211.

[0037] In some embodiments, such as Figure 4As shown, the air inlet 201 also includes a second air inlet 221, the vent 501 also includes a second vent 521, and the air outlet 301 also includes a second air outlet 321. The second air inlet 221, the second vent 521, and the second air outlet 321 are aligned one-to-one in the first horizontal direction X1. The first air inlet 211, the first vent 511, and the first air outlet 311 are all close to the first of two adjacent third side plates 400, and the second air inlet 221, the second vent 521, and the second air outlet 321 are all close to the second of two adjacent third side plates 400.

[0038] The sheet material 2 also has a second cross section 22, which is disposed opposite to the first cross section 21 in the second horizontal direction X2. A first airflow channel 1011 is formed between the first cross section 21 of the sheet material 2 and the corresponding first third side plate 400, and a second airflow channel 1021 is formed between the second cross section 22 of the sheet material 2 and the corresponding second third side plate 400. The second air inlet 221, the second airflow channel 1021, the second vent 521 and the second air outlet 321 are connected sequentially along the first horizontal direction X1.

[0039] The process gas can enter the containment cavity 101 through the first air inlet 211 and the second air inlet 221, which further improves the air intake efficiency and coating efficiency, and further improves the uniformity of gas distribution in the sub-containment cavity 1001, thereby improving the coating uniformity of the first section 21 and the second section 22.

[0040] Specifically, the process gas enters the receiving cavity 101 through the first inlet 211 and the second inlet 221, which further improves the intake efficiency compared to entering the receiving cavity 101 solely through the first inlet 211 or the second inlet 221. Most of the process gas entering the receiving cavity 101 through the first inlet 211 flows directly along the first horizontal direction X1 to the first airflow channel 1011, coating the first cross-section 21 of the sheet material 2, thereby improving the coating efficiency of the first cross-section 21. Simultaneously, most of the process gas entering the receiving cavity 101 through the second inlet 221 flows directly along the first horizontal direction X1 to the second airflow channel 1021, coating the second cross-section 22 of the sheet material 2, thereby improving the coating efficiency of the second cross-section 22. In addition, the process gas enters the receiving cavity 101 through the first air inlet 211 and the second air inlet 221. Compared with entering the receiving cavity 101 through only the first air inlet 211 or the second air inlet 221, the uniformity of gas distribution in the receiving cavity 101 is further improved, thereby improving the coating uniformity of the first section 21 and the second section 22.

[0041] For example, such as Figure 4As shown, the sub-receiving cavity 1001 accommodates two rows of sheet materials 2. A first airflow channel 1011 is formed between the first cross-section 21 of the first row of sheet materials 2 and the first of the two adjacent third side plates 400. A second airflow channel 1021 is formed between the second cross-section 22 of the second row of sheet materials 2 and the second of the two adjacent third side plates 400. Most of the process gas entering the receiving cavity 101 through the first air inlet 211 flows directly to the first airflow channel 1011 along the first horizontal direction X1 to coat the first cross-section 21 of the first row of sheet materials 2. Similarly, most of the process gas entering the receiving cavity 101 through the second air inlet 221 flows directly to the second airflow channel 1021 along the first horizontal direction X1 to coat the second cross-section 22 of the second row of sheet materials 2. Figure 4 The direction of one dashed arrow shown is the flow direction of the process gas entering the containment cavity 101 through the first air inlet 211, and the direction of the other dashed arrow is the flow direction of the process gas entering the containment cavity 101 through the second air inlet 221.

[0042] In some embodiments, such as Figure 2 As shown, the air inlet 201 further includes at least one third air inlet 231, the vent 501 further includes at least one third vent 531, and the air outlet 301 further includes at least one third air outlet 331. In the second horizontal direction X2, the third air inlet 231 is located between the first air inlet 211 and the second air inlet 221, the third vent 531 is located between the first vent 511 and the second vent 521, and the third air outlet 331 is located between the first air outlet 311 and the second air outlet 321. The third air inlet 231 is aligned one-to-one with the corresponding third vent 531 and third air outlet 331 in the first horizontal direction X1. In other words, the first air inlet 211, the first vent 511, and the third vent 531 are arranged in multiple columns along the first horizontal direction X1 and the second horizontal direction X2. The second air inlet 221, the second air outlet 521, and the third air outlet 331 are arranged in multiple columns along the first horizontal direction X1 and the second horizontal direction X2. The third air inlet 231, the corresponding third air outlet 531, and the third air outlet 331 are arranged in multiple columns along the first horizontal direction X1 and the second horizontal direction X2.

[0043] The process gas can enter the containment cavity 101 through the first inlet 211, the second inlet 221 and the third inlet 231, which further improves the intake efficiency and the uniformity of gas distribution in the sub-containment cavity 1001.

[0044] For example, when each sub-cavity 1001 of the receiving cavity 101 contains at least two rows of sheet material 2, a first airflow channel 1011 is formed between the first cross-section 21 of the sheet material 2 near the first third side plate 400 and the corresponding first third side plate 400, a second airflow channel 1021 is formed between the second cross-section 22 of the sheet material 2 near the second third side plate 400 and the corresponding second third side plate 400, and a third airflow channel 1031 is formed between two adjacent rows of sheet material 2 in the sub-cavity 1001. The third air inlet 231, the third airflow channel 1031, the third vent 531, and the third air outlet 331 are sequentially connected along the first horizontal direction X1.

[0045] Specifically, the process gas enters the receiving cavity 101 through the first inlet 211, the second inlet 221, and the third inlet 231. Compared to entering the receiving cavity 101 solely through the first inlet 211, the second inlet 221, or the third inlet 231, this further improves the intake efficiency. Most of the process gas entering the receiving cavity 101 through the first inlet 211 flows directly along the first horizontal direction X1 to the first airflow channel 1011, coating the first cross-section 21 of the first row of sheet materials 2, thereby improving the coating efficiency of the first cross-section 21 of the first row of sheet materials 2. Simultaneously, most of the process gas entering the receiving cavity 101 through the second inlet 221 flows directly along the first horizontal direction X1 to the second airflow channel 1021, coating the second cross-section 22 of the last row of sheet materials 2, thereby improving the coating efficiency of the second cross-section 22 of the last row of sheet materials 2. Simultaneously, most of the process gas entering the receiving cavity 101 through the third air inlet 231 flows directly to the third airflow channel 1031 along the first horizontal direction X1, simultaneously coating the second cross-section 22 of one row of sheet materials 2 and the first cross-section 21 of the other row of sheet materials 2, thereby improving the coating efficiency of the second cross-section 22 and the first cross-section 21 of the two adjacent rows of sheet materials 2. In addition, the process gas enters the receiving cavity 101 through the first air inlet 211, the second air inlet 221, and the third air inlet 231. Compared with entering the receiving cavity 101 only through the first air inlet 211, the second air inlet 221, or the third air inlet 231, this further improves the uniformity of gas distribution in the receiving cavity 101, thereby improving the coating uniformity of the first cross-section 21 and the second cross-section 22 of the multiple rows of sheet materials 2.

[0046] For example, such as Figure 2As shown, the sub-receiving cavity 1001 accommodates two rows of sheet materials 2. A first airflow channel 1011 is formed between the first cross-section 21 of the first row of sheet materials 2 and the first of the two adjacent third side plates 400. A second airflow channel 1021 is formed between the second cross-section 22 of the second row of sheet materials 2 and the second of the two adjacent third side plates 400. A third airflow channel 1031 is formed between the two rows of sheet materials 2. Most of the process gas entering the containment cavity 101 through the first air inlet 211 flows directly to the first airflow channel 1011 along the first horizontal direction X1, coating the first cross-section 21 of the first row of sheet materials 2; most of the process gas entering the containment cavity 101 through the second air inlet 221 flows directly to the second airflow channel 1021 along the first horizontal direction X1, coating the second cross-section 22 of the second row of sheet materials 2; most of the process gas entering the containment cavity 101 through the third air inlet 231 flows directly to the third airflow channel 1031 along the first horizontal direction X1, coating the second cross-section 22 of the first row of sheet materials 2 and the first cross-section 21 of the second row of sheet materials 2. Figure 2 The direction of one dashed arrow shown is the flow direction of the process gas entering the containment cavity 101 through the first air inlet 211, the direction of another dashed arrow is the flow direction of the process gas entering the containment cavity 101 through the second air inlet 221, and the direction of yet another dashed arrow is the flow direction of the process gas entering the containment cavity 101 through the third air inlet 231.

[0047] In some embodiments, such as Figure 5 As shown, the sub-receiving cavity 1001 accommodates at least two rows of sheet materials 2 arranged along the second horizontal direction X2, and each row of sheet materials 2 includes multiple sheet materials 2 stacked in the vertical direction.

[0048] Among them, the first air inlet 211, the first air outlet 511 and the first air outlet 311 each cover the first section 21 of a row of sheet material 2 near the first third side plate 400 in the vertical direction by the orthogonal projection of the first horizontal direction X1 onto the first side plate 200.

[0049] The above configuration allows the process gas flowing through the first air inlet 211 and the first air outlet 511 into the receiving cavity 101 to simultaneously contact the first cross-sections 21 of multiple rows of sheet materials 2 in a row of sheet materials 2 near the first third side plate 400, thereby improving the coating uniformity of the multiple first cross-sections 21 near the first third side plate 400. Additionally, it facilitates the rapid exit of excess process gas from the first air outlet 311 from the receiving cavity 101.

[0050] Among them, the second air inlet 221, the second air outlet 521 and the second air outlet 321 each cover the second section 22 of a row of sheet material 2 near the second and third side plates 400 in the vertical direction by the orthogonal projection of the second horizontal direction X1 onto the first side plate 200.

[0051] The above configuration allows the process gas flowing through the second air inlet 221 and the second air outlet 521 into the receiving cavity 101 to simultaneously contact the first cross-sections 21 of multiple rows of sheet materials 2 in a row of sheet materials 2 near the second and third side plates 400, thereby improving the coating uniformity of the multiple first cross-sections 21 near the second and third side plates 400. Additionally, it facilitates the rapid exit of excess process gas from the receiving cavity 101 through the second air outlet 321.

[0052] Among them, the third air inlet 231, the third air outlet 531 and the third air outlet 331 each cover the second section 22 of one row of sheet material 2 and the first section 21 of the other row of sheet material 2 in the vertical direction by the orthogonal projection of the third horizontal direction X1 onto the first side plate 200.

[0053] The above configuration allows the process gas flowing through the receiving cavity 101 via the third air inlet 231 and the third air outlet 531 to simultaneously contact the first cross-section 21 of multiple rows of sheet materials 2 in one of the adjacent rows of sheet materials 2, and the second cross-section 22 of multiple rows of sheet materials 2 in the other row of sheet materials 2. This improves the coating uniformity of the first cross-section 21 and the second cross-section 22 in the adjacent rows of sheet materials 2. Furthermore, it facilitates the rapid exit of excess process gas from the receiving cavity 101 via the third air outlet 331.

[0054] In some embodiments, such as Figure 1 and Figure 2 As shown, there are multiple third side plates 400 and partitions 500. Multiple third side plates 400 are arranged sequentially along a second horizontal direction X2, so that the sheet carrier 10 has multiple receiving cavities 101 arranged sequentially along the second horizontal direction X2. Multiple partitions 500 are located in corresponding receiving cavities 101 and are arranged at equal intervals along a first horizontal direction X1, so that each receiving cavity 101 has multiple sub-receiving cavities 1001.

[0055] By adding multiple third side plates 400 and multiple partitions 500, the size and load capacity of the sheet carrier 10 are increased, thereby improving production capacity.

[0056] For example, such as Figure 1 and Figure 2As shown, there are three third side plates 400, which are arranged sequentially along the second horizontal direction X2, so that the sheet carrier 10 has two receiving cavities 101 arranged sequentially along the second horizontal direction X2. Each receiving cavity 101 is provided with two partitions 500, and the two partitions 500 in the receiving cavity 101 are arranged at equal intervals along the first horizontal direction X1 to divide the receiving cavity 101 into three sub-receiving cavities 1001.

[0057] In some embodiments, such as Figure 1 , Figure 5 and Figure 6 As shown, the sheet carrier 10 also includes at least two first positioning blocks 600 and at least two second positioning blocks 700. The at least two first positioning blocks 600 are respectively disposed on the top of the first third side plate 400 and the top of the last third side plate 400. The at least two second positioning blocks 700 are respectively disposed on the bottom of the first third side plate 400 and the bottom of the last third side plate 400. The first positioning blocks 600 and second positioning blocks 700 of the same third side plate 400 are aligned vertically. At least two sheet carriers 10 can be stacked vertically, and the first positioning block 600 of one sheet carrier 10 cooperates with the second positioning block 700 of the other sheet carrier 10 for positioning, so that the adjacent sheet carriers 10 can be precisely aligned and stably stacked.

[0058] By stacking at least two sheet carriers 10 together in a vertical direction, it is possible to batch process the sheet material 2 in at least two sheet carriers 10, thereby further improving production capacity.

[0059] For example, the sheet carrier 10 includes four first positioning blocks 600 and four second positioning blocks 700. Two first positioning blocks 600 are each provided on the first third side plate 400 and the last third side plate 400, and every two of the four first positioning blocks 600 are arranged opposite each other in the second horizontal direction X2. Two second positioning blocks 700 are each provided on the first third side plate 400 and the last third side plate 400, and every two of the four second positioning blocks 700 are arranged opposite each other in the second horizontal direction X2. By using multiple first positioning blocks 600 and multiple second positioning blocks 700 for one-to-one positioning, the positioning accuracy and stacking stability of two adjacent sheet carriers 10 are further improved.

[0060] In some embodiments, such as Figure 1 , Figure 5 and Figure 6As shown, the sheet carrier 10 also includes at least two pick-and-place positioning blocks 800, which are respectively disposed in the middle of the first third side plate 400 and the middle of the last third side plate 400. The pick-and-place positioning blocks 800 are configured to cooperate with the carrier pick-and-place device to perform gripping and positioning.

[0061] For example, the sheet carrier 10 includes four pick-and-place positioning blocks 800. Two pick-and-place positioning blocks 800 are each provided on the first third side plate 400 and the last third side plate 400, and every two pick-and-place positioning blocks 800 are arranged opposite each other in the second horizontal direction X2. By using multiple pick-and-place positioning blocks 800 in conjunction with the carrier pick-and-place device for gripping and positioning, the accuracy of gripping and positioning of the sheet carrier 10 and the stability of gripping are further improved.

[0062] In some embodiments, such as Figure 2 and Figure 7 As shown, the sheet carrier 10 also includes a cassette 900, which is configured to hold the sheet material 2 and can be placed in and removed from the sub-receiving cavity 1001. The cassette 900 has an air inlet 901 through which process gas can enter the cassette 900 from the sub-receiving cavity 1001.

[0063] The sheet material 2 is placed in the material box 900 so that the sheet material 2 can be placed in the sub-accepting cavity 1001.

[0064] In some embodiments, such as Figure 8 and Figure 9 As shown, a first positioning member 910 is provided at the bottom of the material box 900, and the sheet carrier 10 also includes a second positioning member 1000, which is disposed on the base plate 100. During the process of placing the material box 900 into the sub-accepting cavity 1001, the first positioning member 910 and the second positioning member 1000 cooperate to position the material box 900.

[0065] For example, the first positioning member 910 has a positioning hole 9101, and the second positioning member 1000 includes a positioning pin 1010. During the process of placing the material box 900 into the sub-accommodating cavity 1001, the positioning pin 1010 is inserted into the positioning hole 9101 to achieve the placement and positioning of the material box 900. Positioning is achieved through the engagement of the pin hole, and the positioning method is simple.

[0066] Figure 10 The diagram shown is a structural schematic of a coating apparatus provided in an embodiment of this application. Figure 10 As shown, the coating apparatus 1 includes the sheet carrier 10 and the reactor 20 mentioned in the above embodiments. The reactor 20 has a reaction chamber 2001, in which the sheet carrier 10 can be placed and removed.

[0067] For example, the process gas flows along the first horizontal direction X1 in the reaction chamber 2001 to the first side plate 200 of the sheet carrier 10, and enters the sheet carrier 10 through the air inlet 201 of the first side plate 200, thereby further improving the air intake efficiency. Figure 10 The direction of the dashed arrow shown in the figure indicates the flow direction of the process gas in the reaction chamber 2001.

[0068] Since the coating apparatus 1 includes a sheet carrier 10, all the technical features and effects of the sheet carrier 10 are not described here.

[0069] In the embodiments of this application, unless otherwise specified, the connection can be a detachable connection using bolts, nuts, screws, clips, magnets, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, etc.

[0070] The terms "an embodiment" or "embodiment" used in this specification indicate that the described embodiment may include a specific feature, structure, or characteristic, but not every embodiment necessarily includes that specific feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. Additionally, when a specific feature, structure, or characteristic is described in connection with an embodiment, implementing such a feature, structure, or characteristic in conjunction with other embodiments, whether explicitly described or not, is within the knowledge scope of those skilled in the art.

[0071] It should be understood that the terms “on,” “above,” and “on top of” in this application should be interpreted in the broadest possible way, such that “on” means not only “directly on something” but also “on something” with an intermediate feature or layer therebetween, and that “above” or “on top of” means not only “on top of something” but also “on top of something” without an intermediate feature or layer therebetween (i.e., directly on something).

[0072] Furthermore, for ease of explanation, spatial relative terms such as "below," "below," "under," "above," and "above" may be used to describe the relationship of a component or feature relative to other components or features as shown in the figures. Spatial relative terms are intended to encompass different orientations of components in use or operation other than those shown in the figures. Devices may have other orientations (rotated 90 degrees or in other orientations), and the spatial relative descriptive terms used herein may be interpreted accordingly.

[0073] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0074] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications or equivalent substitutions made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A sheet carrier, characterized in that, include: Base plate; The first side plate is vertically arranged and connected to the bottom plate; The second side plate is disposed opposite to the first side plate along the first horizontal direction and is connected to the bottom plate; At least two third side plates are arranged sequentially along a second horizontal direction, wherein the third side plates connect the first side plate and the second side plate, and are connected to the bottom plate; wherein the bottom plate, the first side plate, the second side plate, and the two adjacent third side plates enclose a receiving cavity; wherein the second horizontal direction is perpendicular to the first horizontal direction; At least one partition is located in the receiving cavity and connected to the bottom plate and the adjacent third side plate to divide the receiving cavity into at least two sub-receiving cavities arranged sequentially along the first horizontal direction, the sub-receiving cavities being configured to receive sheet material; The first side plate has an air inlet, the partition has an air vent, and the second side plate has an air outlet. The process gas can enter the first sub-cavity of the accommodating cavity through the air inlet, flow to the last sub-cavity through the air vent, and flow out of the last sub-cavity of the accommodating cavity through the air outlet.

2. The sheet carrier according to claim 1, characterized in that, The air inlet includes a first air inlet, the air vent includes a first air vent, and the air outlet includes a first air outlet. The first air inlet, the first air vent, and the first air outlet are aligned one by one in the first horizontal direction. The sheet material has a first cross-section, and a first airflow channel is formed between the first cross-section of the sheet material and the corresponding third side plate. The first air inlet, the first airflow channel, the first vent, and the first air outlet are connected sequentially along the first horizontal direction.

3. The sheet carrier according to claim 2, characterized in that, The air inlet further includes a second air inlet, the air vent further includes a second air vent, and the air outlet further includes a second air outlet. The second air inlet, the second air vent, and the second air outlet are aligned one-to-one in the first horizontal direction. The first air inlet, the first air vent, and the first air outlet are all close to the first of the two adjacent third side plates, and the second air inlet, the second air vent, and the second air outlet are all close to the second of the two adjacent third side plates. The sheet material also has a second cross-section, which is disposed opposite to the first cross-section in the second horizontal direction. The first cross-section of the sheet material forms a first airflow channel with the corresponding first third side plate, and the second cross-section of the sheet material forms a second airflow channel with the corresponding second third side plate. The second air inlet, the second airflow channel, the second vent, and the second air outlet are sequentially connected along the first horizontal direction.

4. The sheet carrier according to claim 3, characterized in that, The air inlet further includes at least one third air inlet, the air vent further includes at least one third air vent, and the air outlet further includes at least one third air outlet. In the second horizontal direction, the third air inlet is located between the first air inlet and the second air inlet, the third air vent is located between the first air vent and the second air vent, and the third air outlet is located between the first air outlet and the second air outlet. The third air inlet and the corresponding third air vent and the third air outlet are aligned one-to-one in the first horizontal direction.

5. The sheet carrier according to claim 4, characterized in that, The sub-accommodating cavity accommodates at least two columns of the sheet material arranged along the second horizontal direction, and each column of the sheet material includes multiple sheets of the sheet material stacked in the vertical direction; Wherein, the first air inlet, the first air outlet and the first air outlet each have their orthogonal projections along the first horizontal direction onto the first side plate, which in the vertical direction cover the first cross section of a row of sheet material near the first third side plate; Wherein, the second air inlet, the second air outlet and the second air outlet each have their orthographic projection along the first horizontal direction onto the first side plate, which in the vertical direction covers the second cross section of a row of sheet material near the second third side plate; Wherein, the third air inlet, the third air outlet and the third air outlet each have their orthographic projection along the first horizontal direction onto the first side plate, which in turn covers the second cross-section of one column of the sheet material and the first cross-section of the other column of the sheet material in the vertical direction.

6. The sheet carrier according to any one of claims 1 to 5, characterized in that, There are multiple third side plates and multiple partitions; The plurality of third side plates are arranged sequentially along the second horizontal direction, so that the sheet carrier has a plurality of receiving cavities arranged sequentially along the second horizontal direction; The partitions are located in the corresponding receiving cavities and are arranged at equal intervals along the first horizontal direction.

7. The sheet carrier according to claim 6, characterized in that, Also includes: At least two first positioning blocks are respectively disposed on the top of the first third side plate and the top of the last third side plate; At least two second positioning blocks are respectively disposed at the bottom of the first third side plate and the bottom of the last third side plate, wherein the first positioning block and the second positioning block of the same third side plate are aligned in the vertical direction; Wherein, at least two of the sheet carriers can be stacked vertically, and the first positioning block of one of the two adjacent sheet carriers cooperates with the second positioning block of the other sheet carrier for positioning; and / or; At least two pick-and-place positioning blocks are respectively disposed in the middle of the first third side plate and the middle of the last third side plate, and the pick-and-place positioning blocks are configured to cooperate with the vehicle pick-and-place device for gripping and positioning.

8. The sheet carrier according to any one of claims 1 to 5, characterized in that, Also includes: A material box is configured to hold the sheet material and can be placed in or removed from the sub-receiving cavity; The material box has an air inlet, through which the process gas can enter the material box from the sub-accommodating cavity.

9. The sheet carrier according to claim 8, characterized in that, The bottom of the material box is provided with a first positioning element, and the sheet carrier further includes: A second positioning element is disposed on the base plate; During the process of placing the material box into the sub-accommodating cavity, the first positioning member and the second positioning member cooperate to position the material box.

10. A coating apparatus, characterized in that, include: A reactor, having a reaction chamber; The sheet carrier according to any one of claims 1 to 9 can be placed in the reaction chamber.

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