A heating assembly for ALD

Abstract

The utility model relates to ALD processing technical field especially a heating assembly for ALD, including heat preservation shell, the inner chamber fixed mounting of heat preservation shell has the inner shell, the top fixed connection of inner shell has first electric push rod, the output fixed connection of first electric push rod has the connecting frame, the bottom of connecting frame is through to the inner chamber of inner shell and fixedly connected with sealing cover plate. The utility model can automatically carry out the feeding and discharging operation, when using, pneumatic push rod will lift the product through the material lifting plate, make the DC motor to drive the material lifting plate to move through the thread plate, so that the material lifting plate conveys the product to the placing frame or takes out the product from the equipment, and when using, the heating piece will cooperate with the heater to carry out the multi -surface heating treatment to the product, and the servo motor still drives the hydraulic cylinder and the placing frame to rotate through the gear ring and the gear to make the equipment can evenly heat the product.

Description

Technical Field

[0001] This utility model relates to the field of ALD processing technology, specifically a heating component for ALD. Background Technology

[0002] Atomic layer deposition (ALD) is a method that deposits materials onto a substrate surface layer by layer in the form of single-atom films. Atomic layer deposition is similar to ordinary chemical deposition, but in the process of ALD, the chemical reaction of the new atomic film is directly related to the previous layer. This method allows only one atomic layer to be deposited each time the reaction occurs.

[0003] A search revealed that the announcement number is CN218089790U, and the name is "An ALD Heating Furnace," which includes a heating chamber. Research and analysis showed that the equipment uses an electromagnetic flowmeter with a flow regulating device to detect the amount of reactants introduced and transmits the signal to a controller. The controller then controls the opening or closing of an electric control valve to control the amount introduced. The design of the flow equalization plate on the heating device allows the gas to flow out smoothly and evenly, thereby improving the uniformity of film formation. The heating chamber can be moved easily using a moving device. However, it also has the following drawbacks to some extent.

[0004] For example, this ALD heating furnace cannot accurately control the temperature and heat the product evenly during use, making it difficult to achieve precise temperature control and ensure uniform heating of the product. This directly affects the stability of atomic layer deposition in the ALD process, leading to deviations in film quality. Furthermore, it lacks automatic loading and unloading functions, requiring manual operation to place and remove products. This not only reduces the efficiency of the process but also easily introduces the risk of contamination or disrupts the stability of the reaction environment due to manual intervention. To solve these technical problems, we have designed a heating component for ALD. Utility Model Content

[0005] The purpose of this invention is to provide a heating component for ALD (Alternating Current Discharge), which has the advantages of precise and uniform heating of products and automatic loading and unloading of equipment. It solves the problems of inaccurate temperature control and uniform heating of products, difficulty in achieving precise temperature control and uniform heating of products, which leads to deviations in film quality. It also lacks automatic loading and unloading functions, which not only reduces the efficiency of the process, but also easily introduces the risk of contamination or damages the stability of the reaction environment due to manual intervention.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a heating assembly for ALD, comprising an insulation shell, an inner shell fixedly installed in the inner cavity of the insulation shell, a first electric push rod fixedly connected to the top of the inner shell, a connecting frame fixedly connected to the output end of the first electric push rod, a sealing cover plate fixedly connected to the bottom of the connecting frame penetrating into the inner cavity of the inner shell, a heating element embedded in the bottom of the sealing cover plate, a reaction chamber fixedly installed at the bottom of the inner cavity of the inner shell, a heater fixedly installed on the inner side of the reaction chamber, an adjustment mechanism provided at the bottom of the insulation shell, a loading and unloading mechanism provided on the left side of the insulation shell, the adjustment mechanism comprising a hydraulic cylinder, the hydraulic cylinder penetrating and installed at the bottom of the insulation shell, the loading and unloading mechanism comprising a connecting pipe, the connecting pipe being connected to and installed on the left side of the insulation shell, and a magnetoelectric angle sensor fixedly installed at the bottom of the insulation shell and on the surface of the hydraulic cylinder.

[0007] Preferably, an air inlet valve and an air outlet valve are connected to the right side of the insulation shell, and a pressure gauge is connected to the right side of the insulation shell.

[0008] Preferably, the output end of the hydraulic cylinder extends into the inner cavity of the inner shell, and the surface of the hydraulic cylinder is movably connected to the inner walls of the insulation shell and the inner shell respectively through sealed bearings. The output end of the hydraulic cylinder extends into the inner cavity of the inner shell and is fixedly connected to a placement frame, and a temperature sensor is fixedly installed on the surface of the placement frame.

[0009] Preferably, a gear ring is fixedly sleeved on the surface of the hydraulic cylinder, a servo motor is fixedly connected to the bottom of the insulation shell, and a gear is fixedly connected to the output end of the servo motor, the gear meshing with the gear ring.

[0010] Preferably, a support frame is fixedly connected to the left side of the connecting pipe, a DC motor is installed through the right side of the support frame, a threaded plate is fixedly installed at the output end of the DC motor, a pneumatic push rod is fixedly connected to the bottom of the threaded plate, and a lifting plate is fixedly connected to the bottom of the pneumatic push rod.

[0011] Preferably, a second electric push rod is fixedly connected to the left side of the insulation shell, a sealing plate is fixedly connected to the output end of the second electric push rod, and a heat insulation plate is inlaid on the right side of the sealing plate.

[0012] Preferably, a sealing sleeve is movably fitted on the surface of the connecting frame, and the sealing sleeve is fixedly connected to the inner wall of the heat insulation shell and the inner shell. A high-temperature resistant infrared ranging sensor is installed through the bottom of the inner shell.

[0013] Compared with the prior art, the beneficial effects of this utility model are as follows: This utility model, through the cooperation of an insulation shell, inner shell, high-temperature resistant infrared ranging sensor, barometer, hydraulic cylinder, gear ring, servo motor, gear, placement frame, temperature sensor, support frame, DC motor, threaded plate, pneumatic push rod, lifting plate, second electric push rod, and magnetoelectric angle sensor, can automatically perform loading and unloading operations. In use, the pneumatic push rod lifts the product through the lifting plate, enabling the DC motor to drive the lifting plate to move through the threaded plate, so that the lifting plate can transport the product into the placement frame or remove the product from the equipment. In addition, during use, the heating element works with the heater to heat the product from multiple sides. At the same time, the servo motor drives the hydraulic cylinder and placement frame to rotate through the gear ring and gear, so that the equipment can heat the product evenly. Attached Figure Description

[0014] Figure 1 This is a three-dimensional cross-sectional view of the structure of this utility model; Figure 2 This is a front perspective view of the structure of this utility model; Figure 3 This is a perspective view of the partial structural adjustment mechanism of this utility model; Figure 4 This is a three-dimensional view of the loading and unloading mechanism of a part of the present invention.

[0015] In the diagram: 1. Insulation shell; 2. Inner shell; 3. First electric push rod; 4. Connecting frame; 5. Sealing cover plate; 6. Heating element; 7. Reaction chamber; 8. Sealing plate; 9. Heater; 10. Loading and unloading mechanism; 11. High-temperature resistant infrared distance sensor; 12. Adjustment mechanism; 13. Pressure gauge; 14. Hydraulic cylinder; 15. Gear ring; 16. Servo motor; 17. Gear; 18. Placement frame; 19. Temperature sensor; 20. Connecting pipe; 21. Support frame; 22. DC motor; 23. Threaded plate; 24. Pneumatic push rod; 25. Lifting plate; 26. Second electric push rod; 27. Magnetoelectric angle sensor. Detailed Implementation

[0016] Please see Figures 1-4A heating assembly for ALD includes an insulation shell 1, an inner shell 2 fixedly installed inside the cavity of the insulation shell 1, a first electric push rod 3 fixedly connected to the top of the inner shell 2, a connecting frame 4 fixedly connected to the output end of the first electric push rod 3, a sealing cover 5 fixedly connected to the bottom of the connecting frame 4 extending through the inner cavity of the inner shell 2, a heating element 6 embedded in the bottom of the sealing cover 5, a reaction chamber 7 fixedly installed at the bottom of the inner cavity of the inner shell 2, a heater 9 fixedly installed on the inner side of the reaction chamber 7, and an adjustment mechanism 12 provided at the bottom of the insulation shell 1. A loading and unloading mechanism 10 is provided on the left side. The adjusting mechanism 12 includes a hydraulic cylinder 14, which is installed through the bottom of the insulation shell 1. The loading and unloading mechanism 10 includes a connecting pipe 20, which is connected to the left side of the insulation shell 1. A magnetoelectric angle sensor 27 is fixedly installed at the bottom of the insulation shell 1 and on the surface of the hydraulic cylinder 14. By setting the magnetoelectric angle sensor 27, the rotation angle of the hydraulic cylinder 14 can be monitored to prevent the placement frame 18 from being unable to return to its original angle due to rotation, so as to prevent the lifting plate 25 from being unable to remove the product.

[0017] Please see Figure 2 An air inlet valve and an air outlet valve are connected to the right side of the insulation shell 1, and a pressure gauge 13 is connected to the right side of the insulation shell 1. By setting the pressure gauge 13, the pressure of the gas filled in the insulation shell 1 can be monitored.

[0018] Please see Figure 1 and Figure 3 The output end of the hydraulic cylinder 14 extends into the inner cavity of the inner shell 2. The surface of the hydraulic cylinder 14 is movably connected to the inner walls of the insulation shell 1 and the inner shell 2 respectively through sealed bearings. The output end of the hydraulic cylinder 14 extends into the inner cavity of the inner shell 2 and is fixedly connected to a placement frame 18. A temperature sensor 19 is fixedly installed on the surface of the placement frame 18. By setting the temperature sensor 19, the heating temperature of the equipment can be monitored in real time to prevent the heating temperature of the equipment from not meeting the processing standards.

[0019] Please see Figure 1 and Figure 3 A gear ring 15 is fixedly sleeved on the surface of the hydraulic cylinder 14, and a servo motor 16 is fixedly connected to the bottom of the heat insulation shell 1. A gear 17 is fixedly connected to the output end of the servo motor 16, and the gear 17 meshes with the gear ring 15.

[0020] Please see Figure 1 , Figure 2 and Figure 4A support frame 21 is fixedly connected to the left side of the connecting pipe 20. A DC motor 22 is installed through the right side of the support frame 21. A threaded plate 23 is fixedly installed at the output end of the DC motor 22. A pneumatic push rod 24 is fixedly connected to the bottom of the threaded plate 23. A lifting plate 25 is fixedly connected to the bottom of the pneumatic push rod 24. By setting the pneumatic push rod 24, the lifting plate 25 can be driven to move up and down to lift the product.

[0021] Please see Figure 1 , Figure 2 and Figure 4 A second electric push rod 26 is fixedly connected to the left side of the insulation shell 1. A sealing plate 8 is fixedly connected to the output end of the second electric push rod 26. A heat insulation plate is inlaid on the right side of the sealing plate 8. By setting the heat insulation plate, the heat insulation of the sealing plate 8 can be increased, preventing heat from flowing out of the connecting pipe 20. By setting the sealing plate 8, the connecting pipe 20 can be sealed, so that it can cooperate with the heat insulation plate to increase the heat insulation of the equipment.

[0022] Please see Figure 1 and Figure 2 A sealing sleeve is movably fitted on the surface of the connecting frame 4. The sealing sleeve is fixedly connected to the inner wall of the insulation shell 1 and the inner shell 2. A high-temperature resistant infrared ranging sensor 11 is installed through the bottom of the inner shell 2. The high-temperature resistant infrared ranging sensor 11 adopts the IRTSH8 high-temperature resistant infrared temperature sensor. The magnetoelectric angle sensor 27 adopts the PRAS21 magnetoelectric angle sensor. By setting the sealing sleeve, the sealing performance of the connection between the connecting frame 4 and the insulation shell 1 and the inner shell 2 can be increased.

[0023] In use, the user can control the equipment via an external controller. During ALD processing, the conveyor first transports the ALD-processed product to the lifting plate 25. Then, the pneumatic push rod 24 drives the lifting plate 25 to lift the product. Subsequently, the output of the DC motor 22 drives the pneumatic push rod 24 and the lifting plate 25 to move via the threaded plate 23, allowing the lifting plate 25 to transport the product into the placement frame 18 for placement. During placement, the user can also control the hydraulic cylinder 14, causing its output to lift the placement frame 18. During lifting, the high-temperature resistant infrared distance sensor 11 monitors the height of the placement frame 18 in real time, allowing the lifting plate 25 to place multiple products into the placement frame 18. After placement, the hydraulic cylinder 14 drives the placement frame 18 back into the reaction chamber 7. Simultaneously, the output of the first electric push rod 3 drives the sealing cover 5 via the connecting frame 4 to... The inner cavity 7 is sealed, and the user fills the insulation shell 1 with high-purity nitrogen through the air inlet valve to increase the insulation of the equipment and prevent heat loss. The user then controls the heater 9 and the heating element 6 to heat the product. During heating, the output of the servo motor 16 drives the gear ring 15 to rotate through the gear 17. The gear ring 15 then drives the hydraulic cylinder 14 to rotate, which in turn drives the product to rotate through the placement frame 18, allowing for uniform heating. During rotation, the magnetoelectric angle sensor 27 monitors the rotation angle of the hydraulic cylinder 14 to prevent deviations. After heating, the user controls the first electric push rod 3, the hydraulic cylinder 14, and the servo motor 16 again to return the placement frame 18 and the sealing cover 5 to their original positions, so that the loading and unloading mechanism 10 can remove the product from the equipment.

[0024] In summary, this heating assembly for ALD, through the cooperation of the insulation shell 1, inner shell 2, first electric push rod 3, connecting frame 4, sealing cover plate 5, heating element 6, reaction chamber 7, sealing plate 8, heater 9, and loading / unloading mechanism 10, solves the problems of inaccurate temperature control and uniform heating of products, difficulty in achieving precise temperature control, and inability to ensure uniform heating of products, which can lead to deviations in film quality. Furthermore, it lacks automatic loading / unloading functionality, which not only reduces process efficiency but also easily introduces the risk of contamination or disrupts the stability of the reaction environment due to manual intervention.

Claims

1. A heating assembly for ALD, comprising an insulating shell (1), characterized in that: An inner shell (2) is fixedly installed in the inner cavity of the insulation shell (1). A first electric push rod (3) is fixedly connected to the top of the inner shell (2). A connecting frame (4) is fixedly connected to the output end of the first electric push rod (3). The bottom of the connecting frame (4) extends through the inner cavity of the inner shell (2) and is fixedly connected to a sealing cover plate (5). A heating element (6) is embedded in the bottom of the sealing cover plate (5). A reaction chamber (7) is fixedly installed at the bottom of the inner cavity of the inner shell (2). A heater (9) is fixedly installed on the inner side of the reaction chamber (7). An adjustment mechanism (12) is provided at the bottom of the insulation shell (1), and a loading and unloading mechanism (10) is provided on the left side of the insulation shell (1). The adjustment mechanism (12) includes a hydraulic cylinder (14), which is installed through the bottom of the insulation shell (1). The loading and unloading mechanism (10) includes a connecting pipe (20), which is connected to the left side of the insulation shell (1). A magnetoelectric angle sensor (27) is fixedly installed at the bottom of the insulation shell (1) and on the surface of the hydraulic cylinder (14).

2. A heating assembly for ALD according to claim 1, characterized in that: The right side of the insulation shell (1) is connected to an air inlet valve and an air outlet valve, and the right side of the insulation shell (1) is connected to a pressure gauge (13).

3. A heating assembly for ALD according to claim 1, characterized in that: The output end of the hydraulic cylinder (14) extends into the inner cavity of the inner shell (2). The surface of the hydraulic cylinder (14) is movably connected to the inner wall of the heat insulation shell (1) and the inner shell (2) respectively through sealed bearings. The output end of the hydraulic cylinder (14) extends into the inner cavity of the inner shell (2) and is fixedly connected to a placement frame (18). A temperature sensor (19) is fixedly installed on the surface of the placement frame (18).

4. A heating assembly for ALD according to claim 1, characterized in that: The surface of the hydraulic cylinder (14) is fixedly fitted with a gear ring (15), and the bottom of the heat insulation shell (1) is fixedly connected with a servo motor (16). The output end of the servo motor (16) is fixedly connected with a gear (17), and the gear (17) meshes with the gear ring (15).

5. A heating assembly for ALD according to claim 1, characterized in that: A support frame (21) is fixedly connected to the left side of the connecting pipe (20), and a DC motor (22) is installed through the right side of the support frame (21). A threaded plate (23) is fixedly installed at the output end of the DC motor (22), and a pneumatic push rod (24) is fixedly connected to the bottom of the threaded plate (23). A lifting plate (25) is fixedly connected to the bottom of the pneumatic push rod (24).

6. A heating assembly for ALD according to claim 1, characterized in that: A second electric push rod (26) is fixedly connected to the left side of the heat insulation shell (1), and a sealing plate (8) is fixedly connected to the output end of the second electric push rod (26). A heat insulation plate is inlaid on the right side of the sealing plate (8).

7. A heating assembly for ALD according to claim 1, characterized in that: The surface of the connecting frame (4) is fitted with a sealing sleeve, which is fixedly connected to the inner wall of the heat insulation shell (1) and the inner shell (2). A high-temperature resistant infrared ranging sensor (11) is installed through the bottom of the inner shell (2).

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