Vacuum feedthrough connector and vacuum equipment chamber

Abstract

This invention provides a vacuum feedthrough connector and a vacuum equipment cavity. The vacuum feedthrough connector includes terminals, electrode pins, a flange, a threaded sleeve, a vacuum-side insulating bushing assembly, atmospheric-side inner and outer insulating bushings, and a screw-fit nut. The threaded sleeve extends from the atmospheric side into the flange hole of the flange and is fixed therein. The first flange of the vacuum-side insulating bushing assembly is sealed to the flange by a first sealing element, and the electrode pin is sealed to the vacuum-side insulating bushing within the flange hole by a second sealing element. The atmospheric-side inner insulating bushing is partially disposed within the threaded sleeve and overlaps with the vacuum-side insulating bushing. The screw-fit nut is screwed into the threaded sleeve until it pushes against the inclined annular surface of the atmospheric-side inner insulating bushing and stops, pushing the electrode pin against the vacuum-side insulating bushing. The atmospheric-side outer insulating bushing is disposed outside the screw-fit nut and covers the electrode pin. This invention avoids welding between metal and non-metal components, allows for quick component replacement, and reduces manufacturing and maintenance costs.

Description

Technical Field

[0001] This utility model relates to the field of vacuum equipment manufacturing, and in particular to a vacuum feeder connector and a vacuum equipment cavity. Background Technology

[0002] The manufacturing process of heterojunction solar cells utilizes vacuum coating equipment such as plasma-enhanced chemical vapor deposition (PECVD) and physical vapor deposition (PVD) to form amorphous silicon / microcrystalline silicon layers and transparent conductive oxide (TCO) layers, respectively. With the increasing demand for cost reduction in solar cells, there is a corresponding need to continuously improve the unit capacity of core equipment for solar cell thin-film preparation, such as PECVD or PVD equipment. This means that the vacuum chamber can simultaneously accommodate more silicon wafers for film formation, thereby meeting the overall cost reduction requirements of the production line.

[0003] To improve equipment capacity, some industry professionals have developed a vacuum equipment chamber that includes multiple vertically parallel heating plates and a transmission device for vertically conveying silicon wafer carriers. It may also include multiple vertically parallel radio frequency electrode plates. This vacuum equipment chamber can improve silicon wafer capacity, unit capacity, and cost competitiveness. However, at the same time, the vacuum equipment chamber has a greater demand for heating power supply.

[0004] Vacuum equipment cavities utilize vacuum feedthrough connectors to feed high currents from the atmospheric side to the vacuum side. Most existing vacuum feedthrough connectors employ a one-piece design, using a special welding process to bond metal and non-metal parts together to achieve electrical insulation between the metal electrodes and their outer shells. Due to the significant difference in thermal expansion coefficients between the metal and non-metal parts (i.e., different temperature responses), varying welding stresses occur at the welding points, affecting welding quality and consequently the overall electrical performance of the connector. Furthermore, the one-piece design necessitates complete replacement upon damage, leading to high maintenance costs. Moreover, the welding process can damage even precious metal plating, such as gold or silver, on the electrode pins.

[0005] Therefore, how to provide a vacuum feedthrough electrode structure that avoids the welding process between metals and non-metals, so as to avoid welding between metals and non-metals, ensure the integrity of the noble metal layer on the electrode surface and its electrical performance, and enable quick replacement of components and reduce manufacturing and maintenance costs, has become an urgent technical problem to be solved. Utility Model Content

[0006] To address the aforementioned problems in the prior art, this utility model proposes a vacuum feedthrough connector, comprising:

[0007] A terminal block, comprising a connector for connection to a power supply cable and a connecting piece for connection to the connector;

[0008] The electrode pin has a vacuum side end and an atmospheric side end at its two ends, respectively, and the atmospheric side end has a flat surface for connecting the connecting piece to the terminal block;

[0009] A flange, which has a corresponding number of flange holes for the electrode pins;

[0010] A threaded sleeve that extends from the atmospheric side into the flange bore and is fixed therein;

[0011] A vacuum-side insulating bushing assembly includes a vacuum-side insulating bushing and a first flange for supporting and fixing the vacuum-side insulating bushing to a flange, the first flange being sealed to the flange by a first seal disposed in the vacuum side of the flange, and the electrode pin being sealed to the vacuum-side insulating bushing within a flange bore of the flange by a second seal.

[0012] An atmospheric side inner insulating bushing is partially disposed inside the threaded sleeve and overlapped with the vacuum side insulating bushing.

[0013] A screw-on nut passes through the atmospheric-side inner insulating bushing and engages with the threaded sleeve until it stops pushing against the inclined annular surface of the atmospheric-side inner insulating bushing, whereby the atmospheric-side inner insulating bushing pushes the electrode pin against the vacuum-side insulating bushing; and

[0014] An atmospheric-side outer insulating bushing is disposed outside the spun nut and covers the remainder of the plane of the electrode pin exposed on the atmospheric side, except for the atmospheric-side end.

[0015] In one embodiment, the flange has a first boss in its flange hole for the threaded sleeve and a second boss at the flange hole opening. The top end of the threaded sleeve is welded to the first boss, and its side end near the flange hole opening is welded to the second boss.

[0016] In one embodiment, the vacuum-side insulating bushing assembly is a one-piece molded polytetrafluoroethylene bushing assembly, and both the atmospheric-side inner insulating bushing and the atmospheric-side outer insulating bushing are one-piece molded polytetrafluoroethylene bushings.

[0017] In one embodiment, the vacuum-side insulating bushing sequentially includes a first vacuum-side bushing portion having a first inner diameter, a second vacuum-side bushing portion having a second inner diameter, and a third vacuum-side bushing portion having a third inner diameter. The third inner diameter is larger than the second inner diameter, and the second inner diameter is larger than the first inner diameter. A first blocking surface is formed at the junction of the second vacuum-side bushing portion and the first vacuum-side bushing portion. The first blocking surface is close to the first flange. A second blocking surface is formed at the junction of the third vacuum-side bushing portion and the second vacuum-side bushing portion. The second blocking surface is located on the atmospheric side.

[0018] In one embodiment, the electrode pin sequentially includes a first pin portion having a first outer diameter, a second pin portion having a second outer diameter, and a third pin portion having a third outer diameter. The atmospheric end is disposed at the end of the third pin portion. The atmospheric end has a first threaded hole through the middle of its plane. The atmospheric outer insulating bushing has a corresponding receiving groove. A first bolt passes through the connecting piece of the terminal block and engages with the first threaded hole before entering the receiving groove, thereby fixing the terminal block on the electrode pin. The second outer diameter is larger than the first outer diameter, and the third outer diameter is smaller than the second outer diameter but larger than or equal to the first outer diameter. A first annular surface is formed at the junction of the first pin portion and the second pin portion, and a second annular surface is formed at the junction of the second pin portion and the third pin portion. When the electrode pin is disposed on the vacuum-side insulating bushing, its first annular surface abuts against the first blocking surface, and the first pin portion protrudes from the first bushing portion by a predetermined length to form the vacuum-side end.

[0019] In one embodiment, the atmospheric side inner insulating bushing sequentially includes a first inner bushing portion having a fourth outer diameter, a second inner bushing portion having a fifth outer diameter, a third inner bushing portion having a sixth outer diameter, and a fourth inner bushing portion having the fifth outer diameter. The fourth outer diameter is smaller than the fifth outer diameter, and the fifth outer diameter is smaller than the sixth outer diameter. A third annular surface is formed at the junction of the first inner bushing portion and the second inner bushing portion. A fourth annular surface is formed at the junction of the second inner bushing portion and the third inner bushing portion. An oblique annular surface is formed at the junction of the third inner bushing portion and the fourth inner bushing portion. The fourth annular surface abuts against the end of the threaded sleeve during assembly. The oblique annular surface abuts against the inner end oblique surface of the screw-fit nut. The first inner bushing portion extends into the third vacuum side bushing portion, and its end is separated from the second blocking surface and the second annular surface.

[0020] In one embodiment, the second pin portion of the electrode pin has a plurality of sealing grooves on its circumferential surface, and a plurality of second sealing elements are disposed in the plurality of sealing grooves; the flange has a first sealing groove on the vacuum side, and the first sealing element is disposed therein to achieve a sealed connection between the flange and the vacuum side insulating bushing assembly; the first flange of the vacuum side insulating bushing assembly has a plurality of second threaded holes or through holes, and the flange has a plurality of third threaded holes correspondingly on the vacuum side; a plurality of second bolts pass through the plurality of second threaded holes or through holes on the first flange and engage with the plurality of third threaded holes to fix the vacuum side insulating bushing assembly to the flange.

[0021] In one embodiment, the vacuum feedthrough connector includes a terminal block, an electrode pin, an atmospheric-side inner insulating bushing, a screw-fit nut, and an atmospheric-side outer insulating bushing. The vacuum-side insulating bushing assembly correspondingly includes a vacuum-side insulating bushing fixed to the first flange. The atmospheric-side outer insulating bushing covers the portion of the electrode pin exposed on the atmospheric side, except for the atmospheric-side end, and has a receiving groove on the opposite side of the plane.

[0022] In one embodiment, the vacuum feedthrough connector includes two terminals, two electrode pins, two atmospheric-side inner insulating bushings, an integrated atmospheric-side outer insulating bushing, and two screw nuts. The vacuum-side insulating bushing assembly correspondingly includes two vacuum-side insulating bushings fixed to the first flange. The integrated atmospheric-side outer insulating bushing covers the portion of the two electrode pins exposed on the atmospheric side, except for the atmospheric-side ends, and forms receiving grooves on opposite sides of the plane.

[0023] This utility model also provides a vacuum equipment cavity, which includes a cavity body and a vacuum feed connector disposed on the cavity body wall to feed power into the cavity body. The vacuum feed connector is a vacuum feed connector as described in any of the above claims. The flange of the vacuum feed connector is fixed to the cavity body wall by a plurality of fasteners. A connection port is provided on the cavity body wall corresponding to the flange. A third sealing element is provided on the flange for the connection port.

[0024] Compared to existing vacuum feedthrough connectors, which are designed as a single unit and require complete replacement for maintenance, involving special welding processes to bond metal and non-metal parts together, affecting welding quality, overall connector electrical performance, and the integrity of the precious metal layer on the electrode pins, this invention provides a vacuum feedthrough connector comprising terminals, electrode pins, flanges, threaded sleeves, a vacuum-side insulating bushing assembly, an atmospheric-side inner insulating bushing, a screw-fit nut, and an atmospheric-side outer insulating bushing. The terminals include a connector for connecting to a power cable and a connecting piece for connecting to the connector. The electrode pins have a vacuum-side end and an atmospheric-side end, with the atmospheric-side end having a plane for connecting the connecting piece to the terminal. The flange has a corresponding number of flange holes for the electrode pins, and the threaded sleeve extends from the atmospheric side into the flange holes and is fixed in place. The vacuum-side insulating bushing assembly includes a vacuum-side insulating bushing and a first flange for supporting and fixing the vacuum-side insulating bushing to the flange. The first flange is sealed to the flange by a first seal disposed in the vacuum side of the flange. The electrode pin and the vacuum-side insulating bushing are sealed in the flange hole of the flange by a second seal. The atmospheric-side inner insulating bushing is partially disposed in the threaded sleeve and overlaps with the vacuum-side insulating bushing. The screw-on nut passes through the atmospheric-side inner insulating bushing and is screwed into the threaded sleeve until it pushes against the inclined annular surface of the atmospheric-side inner insulating bushing and stops. The atmospheric-side inner insulating bushing pushes the electrode pin against the vacuum-side insulating bushing. The atmospheric-side outer insulating bushing is disposed outside the screw-on nut and covers the portion of the electrode pin exposed on the atmospheric side except for the atmospheric-side end.

[0025] This invention avoids welding between metals and non-metals, ensures the integrity of the precious metal layer on the electrode surface and its electrical properties, and enables quick replacement of components, reducing manufacturing and maintenance costs. Attached Figure Description

[0026] The above-described features and advantages of this invention can be better understood after reading the following detailed description of the embodiments of this disclosure in conjunction with the accompanying drawings. In the drawings, the components are not necessarily drawn to scale, and components having similar related characteristics or features may have the same or similar reference numerals.

[0027] Figure 1 This is a three-dimensional structural diagram of the first embodiment of the vacuum feedthrough connector of this utility model.

[0028] Figure 2 for Figure 1 A three-dimensional structural diagram of the vacuum feedthrough connector of the first embodiment from another perspective.

[0029] Figure 3 for Figure 1 A cross-sectional structural diagram of the first embodiment of the vacuum feedthrough connector.

[0030] Figure 4 for Figure 3 A three-dimensional structural diagram of the electrode pin 11.

[0031] Figure 5 for Figure 3 A three-dimensional structural diagram of the threaded sleeve 13 welded into the flange 12.

[0032] Figure 6 for Figure 3 A partial cross-sectional view of the threaded sleeve 13 welded into the flange 12.

[0033] Figure 7 for Figure 3 A three-dimensional structural diagram of the vacuum-side insulating bushing assembly 14.

[0034] Figure 8 for Figure 3 A cross-sectional structural diagram of the vacuum-side insulating bushing assembly 14.

[0035] Figure 9 for Figure 3 A three-dimensional structural diagram of the atmospheric side inner insulating bushing 15.

[0036] Figure 10 for Figure 3 A three-dimensional structural diagram of the atmospheric side outer insulating bushing 17.

[0037] Figure 11 for Figure 3 A partial cross-sectional view of the atmospheric side outer insulating bushing 17.

[0038] Figure 12 This is a three-dimensional structural diagram of the second embodiment of the vacuum feedthrough connector of this utility model.

[0039] Figure 13 for Figure 12 A partial cross-sectional view of the second embodiment of the vacuum feedthrough connector.

[0040] Figure 14 for Figure 12 A three-dimensional structural diagram of the vacuum-side insulating bushing assembly 14”.

[0041] Figure 15 for Figure 12 A partial cross-sectional structural diagram of the atmospheric side outer insulating bushing 17”. Detailed Implementation

[0042] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments to provide a clearer understanding of its objectives, features, and advantages. It should be understood that the aspects described below with reference to the accompanying drawings and specific embodiments are merely exemplary and should not be construed as limiting the scope of protection of the present invention in any way. Unless the context clearly indicates otherwise, the singular forms “a” and “described” include plural references. The terms “first,” “second,” and similar terms used in this specification and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components.

[0043] See Figures 1 to 3 , Figure 1 This is a three-dimensional structural diagram of the first embodiment of the vacuum feedthrough connector of this utility model; Figure 2 for Figure 1 A three-dimensional structural diagram of the vacuum feedthrough connector in the first embodiment from another perspective; Figure 3 for Figure 1 A cross-sectional structural diagram of the first embodiment of the vacuum feedthrough connector.

[0044] like Figures 1 to 3 As shown, the first embodiment 1 of the vacuum feedthrough connector of this utility model includes a terminal block 10, an electrode pin 11, a flange 12, a threaded sleeve 13, a vacuum-side insulating bushing assembly 14, an atmospheric-side inner insulating bushing 15, a screw-fit nut 16, and an atmospheric-side outer insulating bushing 17. It also includes a first bolt 18 and a fastener 19. The terminal block 10 includes a connector 100 for connecting to a power supply cable 2 and a connecting piece 102 connected to the connector 100, the connecting piece 102 having a connecting hole. The atmospheric-side outer insulating bushing 17 is an integrated atmospheric-side outer insulating bushing.

[0045] See Figures 1 to 3 See also Figures 4 to 6 , Figure 4 for Figure 3 A three-dimensional structural diagram of the electrode pin 11 in the diagram. Figure 5 and Figure 6 They are respectively Figure 3 A three-dimensional structural diagram and a partial sectional structural diagram of the threaded sleeve 13 welded into the flange 12. (See attached diagram.) Figure 3 as well as Figure 4 As shown, the electrode pin 11 has a vacuum-side end 1100 and an atmospheric-side end 1120 at its two ends, respectively. The atmospheric-side end 1120 has a flat surface 1122 for connecting the connecting piece 102 of the terminal block 10. Figures 5 to 6As shown, flange 12 has a corresponding number of flange holes 120 for the electrode pin 11, and threaded sleeve 13 extends from the atmospheric side into the flange holes 120 and is fixed therein. Figures 1 to 3 As shown, the vacuum-side insulating bushing assembly 14 includes a vacuum-side insulating bushing 140 and a first flange 142 for supporting and fixing the vacuum-side insulating bushing 140 to the flange 12. The first flange 142 is sealed to the flange 12 by a first seal S1 disposed in the vacuum side of the flange 12. The electrode pin 11 and the vacuum-side insulating bushing 140 are sealed within the flange hole 120 of the flange 12 by a second seal S2. The atmospheric-side inner insulating bushing 15 is partially disposed within the threaded sleeve 13 and overlaps with the vacuum-side insulating bushing 140. A screw-on nut 16 passes through the atmospheric-side inner insulating bushing 15 and screws into the threaded sleeve 13 until it pushes against the inclined annular surface 157 of the atmospheric-side inner insulating bushing 15 (see...). Figure 9 The electrode pin 11 is pushed against the vacuum side insulating bushing 140 by the inner insulating bushing 15 on the atmospheric side; the outer insulating bushing 17 on the atmospheric side is disposed outside the screw nut 16 and covers the rest of the electrode pin 11 exposed on the atmospheric side except for the plane 1122 of its atmospheric side end 1120.

[0046] See Figure 4The electrode pin 11 sequentially includes a first pin portion 110 with a first outer diameter RO1, a second pin portion 111 with a second outer diameter RO2, and a third pin portion 112 with a third outer diameter RO3. Multiple pin sealing grooves 1110 are formed on the circumferential surface of the second pin portion 111, and multiple second seals S2 are disposed in the multiple pin sealing grooves 1110. An atmospheric end portion 1120 is disposed at the end of the third pin portion 112. A first threaded hole 1124 is formed through the center of the atmospheric end portion 1122. A corresponding receiving groove 1700 is formed on the atmospheric outer insulating bushing 17. A first bolt 18 passes through the connecting piece 102 of the terminal 10, engages with the first threaded hole 1124, and enters the receiving groove 1700, thereby fixing the terminal 10 onto the electrode pin 11. The second outer diameter RO2 is larger than the first outer diameter RO1, and the third outer diameter RO3 is smaller than the second outer diameter RO2 and greater than or equal to the first outer diameter RO1. A first annular surface 1112 is formed at the junction of the first pin portion 110 and the second pin portion 111, and a second annular surface 1114 is formed at the junction of the second pin portion 111 and the third pin portion 112. The first outer diameter RO1 can be 6mm, 8mm, 10mm, 12mm, or 14mm, the third outer diameter RO3 can be 12mm or 14mm, the second outer diameter RO2 can be 15mm or 16mm, and the inner annular diameter of the pin sealing groove 1110 provided on the second outer diameter RO2 is generally not smaller than the first outer diameter RO1.

[0047] like Figure 5 as well as Figure 6 As shown, the flange 12 has a first boss 1200 in its flange hole 120 for the threaded sleeve 13, and a second boss 1202 at the opening of the flange hole 120. The top end of the threaded sleeve 13 is welded to the first boss 1200, and its side end near the opening of the flange hole 120 is welded to the second boss 1202. The threaded sleeve 13 includes a threaded section 130 and an end 132.

[0048] See Figure 7 as well as Figure 8 The two are respectively Figure 3 A three-dimensional structural diagram and a cross-sectional structural diagram of the vacuum-side insulating bushing assembly 14 are shown. Figure 7 as well as Figure 8 As shown, the vacuum-side insulating bushing assembly 14 includes two vacuum-side insulating bushings 140 and a first flange 142 for supporting and securing the vacuum-side insulating bushings 140 to the flange 12. The first flange 142 may be oval, flattened, or elliptical. The vacuum-side insulating bushing assembly 14 may be a one-piece molded polytetrafluoroethylene bushing assembly.

[0049] like Figure 8 As shown, the vacuum-side insulating bushing 140 sequentially includes a first vacuum-side bushing portion 1400 with a first inner diameter RI1, a second vacuum-side bushing portion 1402 with a second inner diameter RI2, and a third vacuum-side bushing portion 1404 with a third inner diameter RI3. The third inner diameter RI3 is larger than the second inner diameter RI2, and the second inner diameter RI2 is larger than the first inner diameter RI1. A first blocking surface 1406 is formed at the junction of the second vacuum-side bushing portion 1402 and the first vacuum-side bushing portion 1400. The first blocking surface 1406 is close to the first flange 142. A second blocking surface 1408 is formed at the junction of the third vacuum-side bushing portion 1404 and the second vacuum-side bushing portion 1402. The second blocking surface 1408 is located on the atmospheric side. Figure 4 When the electrode pin 11 shown is disposed on the vacuum side insulating bushing 140, its first annular surface 1112 abuts against the first blocking surface 1406, and the first pin portion 110 protrudes from the first vacuum side bushing portion 1400 by a predetermined length to form the vacuum side end 1100.

[0050] like Figure 6 As shown, the flange 12 has a first sealing groove 122 and a second sealing groove 124 on the vacuum side; a first sealing element S1 is disposed in the first sealing groove 122 to achieve a sealing connection between the flange 12 and the vacuum-side insulating bushing assembly 14, and the first sealing groove 122 can be a dovetail-shaped sealing groove; a third sealing element S3 is disposed in the second sealing groove 124 to achieve a sealing connection between the flange 12 and the cavity wall of the vacuum equipment chamber. Figure 6 as well as Figure 7 The vacuum-side insulating bushing assembly 14 has a plurality of second threaded holes or through holes 1420 on its first flange 142, and the flange 12 has a plurality of third threaded holes 126 on its vacuum side. A plurality of second bolts 144 pass through the plurality of second threaded holes or through holes 1420 on the first flange 142 and engage with the plurality of third threaded holes 126 to fix the vacuum-side insulating bushing assembly 14 to the flange 12.

[0051] See Figure 9 , it is Figure 3 A three-dimensional structural diagram of the atmospheric side inner insulating bushing 15 is shown. The atmospheric side inner insulating bushing 15 can be a one-piece molded polytetrafluoroethylene bushing. For example... Figure 9As shown, the atmospheric side inner insulating bushing 15 sequentially includes a first inner bushing portion 150 with a fourth outer diameter RO4, a second inner bushing portion 151 with a fifth outer diameter RO5, a third inner bushing portion 152 with a sixth outer diameter RO6, and a fourth inner bushing portion 153 with the fifth outer diameter RO5. The fourth outer diameter RO4 is smaller than the fifth outer diameter RO5, and the fifth outer diameter RO5 is smaller than the sixth outer diameter RO6. A third annular surface 155 is formed at the junction of the first inner bushing portion 150 and the second inner bushing portion 151. A fourth annular surface 156 is formed at the junction of the second inner bushing portion 151 and the third inner bushing portion 152. An oblique annular surface 157 is formed at the junction of the third inner bushing portion 152 and the fourth inner bushing portion 153. The fourth annular surface 156 abuts against the end 122 of the threaded sleeve 13 during assembly. The oblique annular surface 157 abuts against the inner end oblique surface of the screw-on nut 16. The first inner bushing portion 150 extends into the third vacuum side bushing portion 1404 and its end 154 is separated from the second blocking surface 1408 and the second annular surface 1114.

[0052] See Figure 10 as well as Figure 11 The two are respectively Figure 3 A three-dimensional structural schematic diagram and a partial cross-sectional structural schematic diagram of the atmospheric side outer insulating bushing 17 are shown. The atmospheric side outer insulating bushing 17 can be a one-piece molded polytetrafluoroethylene bushing. For example... Figure 10 and Figure 11 As shown, the atmospheric side outer insulating bushing 17 is an integrated atmospheric side outer insulating bushing, including a receiving part 170 and a full-coverage part 172. The full-coverage part 172 is disposed outside the screw-fit nut 16. The receiving part 170 covers the remaining portion of the two electrode pins 11 exposed on the atmospheric side except for the plane 1122 of their atmospheric side ends 1120. The receiving part 170 has two grooves 1702 on two opposite surfaces that match the shape of the atmospheric side ends 1120 of the electrode pins 11. The receiving groove 1700 is disposed at the bottom of the groove 1702.

[0053] exist Figures 1 to 3 In the first embodiment of the vacuum feedthrough connector shown, the vacuum feedthrough connector 1 includes two electrode pins 11, two atmospheric-side inner insulating bushings 15, an integrated atmospheric-side outer insulating bushing 17, two screw nuts 16, and two terminals 10. The vacuum-side insulating bushing assembly 14 correspondingly includes two vacuum-side insulating bushings 140 fixed on the first flange 142. The integrated atmospheric-side outer insulating bushing 17 covers the two electrode pins 11 that are installed in place, and exposes the plane 1122 on the atmospheric side except for the atmospheric-side end 1120.

[0054] When using the first embodiment 1 of the vacuum feedthrough connector of this utility model to power the vacuum equipment cavity, the first embodiment 1 of the vacuum feedthrough connector is installed in the following order: (1). Provide as follows Figure 5 and Figure 6 (2) A flange 12 with a threaded sleeve 13 welded on it is shown; (3) The first seal S1 is installed into the first sealing groove 122 on the vacuum side of the flange 12; (4) The vacuum side insulating bushing 140 of the vacuum side insulating bushing assembly 14 is passed through the flange hole 120 from the vacuum side of the flange 12 and its first flange 142 is abutted against the flange 12; (5) A plurality of second bolts 144 are passed through a plurality of second threaded holes or through holes 1420 on the first flange 142 and screwed into a plurality of third threaded holes 126 on the flange 12 to fix the vacuum side insulating bushing assembly 14 to the flange 12. (5) Place multiple second seals S2 in multiple pin sealing grooves 1110 of the second pin portion 111, and pass the first pin portion 110 of the electrode pin 11 through the vacuum side insulating bushing 140 from the atmospheric side until the first annular surface 1112 abuts against the first blocking surface 1406; (6) Insert the first inner bushing portion 150 of the atmospheric side inner insulating bushing 15 into the threaded sleeve 13 and the third vacuum side bushing portion 1404 of the vacuum side insulating bushing 140; (7) Sleeve the screw nut 16 onto the atmospheric side inner bushing. The insulating bushing 15 and the threaded sleeve 13 are screwed onto the threaded section 130 of the threaded sleeve 13 until the inclined annular surface 157 of the atmospheric side inner insulating bushing 15 abuts against the inner end inclined surface of the screw-fit nut 16, and the fourth annular surface 156 abuts against the end 132 of the threaded sleeve 13; (8) The full-coverage portion 172 of the atmospheric side outer insulating bushing 17 is fitted onto the outside of the screw-fit nut 16, and the receiving portion 170 is fitted onto the remaining portion of the electrode pin 11 exposed to the atmosphere, except for the plane 1122 of the atmospheric side end 1120; (9) The electrode pin 11 is screwed onto the threaded section 130 of the threaded sleeve 13 until the inclined annular surface 157 of the atmospheric side inner insulating bushing 15 abuts against the inner end inclined surface of the screw-fit nut 16, and the fourth annular surface 156 abuts against the end 132 of the threaded sleeve 13; (9) The electrode pin 11 is screwed onto the threaded section 130 of the threaded sleeve 13. The vacuum side end 1100 of the pole pin 11 passes through the connection port of the vacuum equipment cavity, and the flange 12 is fixed to the cavity wall by multiple fasteners 19. The flange 12 and the cavity wall of the vacuum equipment cavity are sealed by the third sealing element S3 provided in the second sealing groove 124; (10). The connecting piece 102 of the terminal 10 electrically connected to the power supply cable 2 is placed on the plane 1122. The first bolt 18 is screwed into the receiving groove 1700 of the receiving part 170 after passing through the connecting piece 102 and engaging with the first threaded hole 1124 on the plane 1122.

[0055] See Figure 12 as well as Figure 13 The two figures are a three-dimensional structural diagram and a partial cross-sectional structural diagram of the second embodiment of the vacuum feedthrough connector of this utility model, respectively. Figure 12 as well as Figure 13As shown, the second embodiment 1 of the vacuum feedthrough connector includes a terminal block 10, an electrode pin 11, a flange 12, a threaded sleeve 13, a vacuum-side insulating bushing assembly 14", an atmospheric-side inner insulating bushing 15, a screw-fit nut 16, and an atmospheric-side outer insulating bushing 17. The vacuum-side insulating bushing assembly 14" correspondingly includes a vacuum-side insulating bushing 140 fixed on the first flange 142".

[0056] See Figure 14 , it is Figure 12 A three-dimensional structural diagram of the vacuum-side insulating bushing assembly 14” is shown. The structure of the vacuum-side insulating bushing 140” can be referred to. Figure 8 Based on the relevant description, except for the difference in the number of insulating bushings on the vacuum side, the first flange 142” of the first embodiment of the vacuum feedthrough connector can be circular.

[0057] See Figure 15 , it is Figure 12 A partial cross-sectional structural diagram of the atmospheric side outer insulating bushing 17”. (See attached diagram.) Figure 15 As shown, the atmospheric side outer insulating bushing 17” includes a receiving portion 170” and a full-coverage portion 172”. The receiving portion 170” is used to cover the remaining portion of an electrode pin 11 exposed on the atmospheric side except for the plane 1122 of the atmospheric side end 1120 when it is installed in place; the receiving portion 170” has a groove 1702” whose shape matches the shape of the atmospheric side end 1120 of the electrode pin 11”, and a receiving groove 1700” is formed at the bottom of the groove 1702”.

[0058] The difference between the second embodiment of the vacuum feedthrough connector of this utility model and the first embodiment described above is that the first embodiment of the vacuum feedthrough connector 1 includes two terminals 10, two electrode pins 11, two atmospheric side inner insulating bushings 15, two atmospheric side outer insulating bushings 17, and two screw nuts 16, and the second embodiment of the vacuum feedthrough connector 1" includes one of each of these. Figure 10 The receiving portion 170 has two recesses 1702, and the full-coverage portion 172 covers two screw nuts 16, while Figure 15 The receiving portion 170” has a groove 1702”, and the full-coverage portion 172” covers only a screw-on nut 16”.

[0059] This utility model also provides a vacuum equipment cavity, which includes a cavity body and a vacuum feed connector disposed on the cavity wall to feed power into the cavity body. The vacuum feed connector is a vacuum feed connector 1 or 1” as described above. The flange 12 of the vacuum feed connector 1 or 1” is fixed to the cavity wall by a plurality of fasteners 19. A connection port is provided on the cavity wall corresponding to the flange 12. A third sealing element S3 is provided on the flange 12 for the connection port.

[0060] The vacuum feedthrough connector of this utility model includes a terminal block, electrode pins, a flange, a threaded sleeve, a vacuum-side insulating bushing assembly, an atmospheric-side inner insulating bushing, a screw-fit nut, and an atmospheric-side outer insulating bushing. The terminal block includes a connector for connecting to a power supply cable and a connecting piece for connecting to the connector. The electrode pins have a vacuum-side end and an atmospheric-side end, respectively. The atmospheric-side end has a plane for connecting the connecting piece to the terminal block. The flange has a corresponding number of flange holes for the electrode pins. The threaded sleeve extends from the atmospheric side into the flange holes and is fixed therein. The vacuum-side insulating bushing assembly includes a vacuum-side insulating bushing and a component for supporting and fixing the vacuum-side insulating bushing to the flange. The first flange is sealed to the flange by a first seal disposed in the vacuum side of the flange. The electrode pin and the vacuum side insulating bushing are sealed in the flange hole of the flange by a second seal. The atmospheric side inner insulating bushing is partially disposed in the threaded sleeve and overlaps with the vacuum side insulating bushing. The screw-on nut passes through the atmospheric side inner insulating bushing and is screwed into the threaded sleeve until it pushes against the inclined annular surface of the atmospheric side inner insulating bushing and stops. The atmospheric side inner insulating bushing pushes the electrode pin against the vacuum side insulating bushing. The atmospheric side outer insulating bushing is disposed outside the screw-on nut and covers the portion of the electrode pin exposed on the atmospheric side except for the atmospheric side end. This invention avoids welding between metal and non-metal, ensures the integrity of the noble metal layer on the electrode surface and its electrical properties, and allows for quick component replacement and reduces manufacturing and maintenance costs.

[0061] The above embodiments are provided for those skilled in the art to implement or use the present invention. Those skilled in the art can make various modifications or changes to the above embodiments without departing from the inventive concept of the present invention. Therefore, the protection scope of the present invention is not limited to the above embodiments, but should be the maximum scope that conforms to the innovative features mentioned in the claims.

Claims

1. A vacuum feedthrough connector, characterized in that, It includes: A terminal block, comprising a connector for connection to a power supply cable and a connecting piece for connection to the connector; The electrode pin has a vacuum side end and an atmospheric side end at its two ends, respectively, and the atmospheric side end has a flat surface for connecting the connecting piece to the terminal block; A flange, which has a corresponding number of flange holes for the electrode pins; A threaded sleeve that extends from the atmospheric side into the flange bore and is fixed therein; A vacuum-side insulating bushing assembly includes a vacuum-side insulating bushing and a first flange for supporting and fixing the vacuum-side insulating bushing to a flange, the first flange being sealed to the flange by a first seal disposed in the vacuum side of the flange, and the electrode pin being sealed to the vacuum-side insulating bushing within a flange bore of the flange by a second seal. An atmospheric side inner insulating bushing is partially disposed inside the threaded sleeve and overlapped with the vacuum side insulating bushing. A screw-on nut passes through the atmospheric side inner insulating bushing and engages with the threaded sleeve until it pushes against the inclined annular surface of the atmospheric side inner insulating bushing and stops. The atmospheric side inner insulating bushing pushes the electrode pin against the vacuum side insulating bushing. as well as An atmospheric-side outer insulating bushing is disposed outside the spun nut and covers the remainder of the plane of the electrode pin exposed on the atmospheric side, except for the atmospheric-side end.

2. The vacuum feedthrough connector according to claim 1, characterized in that, The flange has a first boss in its flange hole for the threaded sleeve and a second boss at the flange opening. The top end of the threaded sleeve is welded to the first boss, and its side end near the flange opening is welded to the second boss.

3. The vacuum feedthrough connector according to claim 1, characterized in that, The vacuum-side insulating bushing assembly is a one-piece molded polytetrafluoroethylene bushing assembly, and the atmospheric-side inner insulating bushing and atmospheric-side outer insulating bushing are both one-piece molded polytetrafluoroethylene bushings.

4. The vacuum feedthrough connector according to claim 1, characterized in that, The vacuum-side insulating bushing sequentially includes a first vacuum-side bushing portion having a first inner diameter, a second vacuum-side bushing portion having a second inner diameter, and a third vacuum-side bushing portion having a third inner diameter. The third inner diameter is larger than the second inner diameter, and the second inner diameter is larger than the first inner diameter. A first blocking surface is formed at the junction of the second vacuum-side bushing portion and the first vacuum-side bushing portion. The first blocking surface is close to the first flange. A second blocking surface is formed at the junction of the third vacuum-side bushing portion and the second vacuum-side bushing portion. The second blocking surface is located on the atmospheric side.

5. The vacuum feedthrough connector according to claim 4, characterized in that, The electrode pin sequentially includes a first pin portion with a first outer diameter, a second pin portion with a second outer diameter, and a third pin portion with a third outer diameter. The atmospheric end is located at the end of the third pin portion. The atmospheric end has a first threaded hole through the middle of its plane. The atmospheric outer insulating bushing has a corresponding receiving groove. The first bolt passes through the connecting piece of the terminal block and engages with the first threaded hole before entering the receiving groove, thereby fixing the terminal block on the electrode pin. The second outer diameter is larger than the first outer diameter, and the third outer diameter is smaller than the second outer diameter but larger than or equal to the first outer diameter. A first annular surface is formed at the junction of the first pin portion and the second pin portion, and a second annular surface is formed at the junction of the second pin portion and the third pin portion. When the electrode pin is placed on the vacuum side insulating bushing, its first annular surface abuts against the first blocking surface, and the first pin portion protrudes from the first vacuum side bushing portion by a predetermined length to form the vacuum side end.

6. The vacuum feedthrough connector according to claim 5, characterized in that, The atmospheric side inner insulating bushing sequentially includes a first inner bushing portion having a fourth outer diameter, a second inner bushing portion having a fifth outer diameter, a third inner bushing portion having a sixth outer diameter, and a fourth inner bushing portion having the fifth outer diameter. The fourth outer diameter is smaller than the fifth outer diameter, and the fifth outer diameter is smaller than the sixth outer diameter. A third annular surface is formed at the junction of the first inner bushing portion and the second inner bushing portion, and a fourth annular surface is formed at the junction of the second inner bushing portion and the third inner bushing portion. An oblique annular surface is formed at the junction of the third inner bushing portion and the fourth inner bushing portion. The fourth annular surface abuts against the end of the threaded sleeve during assembly. The oblique annular surface abuts against the inner end oblique surface of the screw-on nut. The first inner bushing portion extends into the third vacuum side bushing portion, and its end is separated from the second blocking surface and the second annular surface.

7. The vacuum feedthrough connector according to claim 5, characterized in that, The second pin portion of the electrode pin has multiple sealing grooves on its circumferential surface, and multiple second sealing elements are disposed in the multiple sealing grooves; the flange has a first sealing groove on the vacuum side, and the first sealing element is disposed therein to achieve a sealed connection between the flange and the vacuum side insulating bushing assembly; the first flange of the vacuum side insulating bushing assembly has multiple second threaded holes or through holes, and the flange has multiple third threaded holes on the vacuum side accordingly; multiple second bolts pass through the multiple second threaded holes or through holes on the first flange and engage with the multiple third threaded holes to fix the vacuum side insulating bushing assembly to the flange.

8. The vacuum feedthrough connector according to claim 5, characterized in that, The vacuum feedthrough connector includes a terminal block, an electrode pin, an atmospheric-side inner insulating bushing, a screw-fit nut, and an atmospheric-side outer insulating bushing. The vacuum-side insulating bushing assembly includes a vacuum-side insulating bushing fixed to the first flange. The atmospheric-side outer insulating bushing covers the portion of the electrode pin exposed on the atmospheric side, except for the atmospheric-side end, and has a receiving groove on the opposite side of the plane.

9. The vacuum feedthrough connector according to claim 5, characterized in that, The vacuum feedthrough connector includes two terminals, two electrode pins, two atmospheric-side inner insulating bushings, an integrated atmospheric-side outer insulating bushing, and two screw nuts. The vacuum-side insulating bushing assembly includes two vacuum-side insulating bushings fixed on the first flange. The integrated atmospheric-side outer insulating bushing covers the portion of the two electrode pins exposed on the atmospheric side, except for the atmospheric-side ends, and forms receiving grooves on opposite sides of the plane.

10. A vacuum device cavity, comprising a cavity body and a vacuum feed connector disposed on the cavity body wall for supplying power to the cavity body, characterized in that, The vacuum feed connector is a vacuum feed connector as described in any one of claims 1 to 9. The flange of the vacuum feed connector is fixed to the cavity wall by a plurality of fasteners. A connection port is provided on the cavity wall corresponding to the flange. A third sealing element is provided on the flange for the connection port.

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