A conveying device, coating equipment

Abstract

The utility model provides a kind of conveying device, coating equipment, it is related to coating technical field, to solve the technical problem that photovoltaic cell is easily oxidized in conveying process. The conveying device is used to convey photovoltaic cell to coating equipment, and the conveying device includes conveying part and gas supply device for providing inert gas, and conveying part is used to carry multiple photovoltaic cells;Multiple first spouts are arranged on the bottom of conveying part and communicated with gas supply device, and each first spout is directed to corresponding photovoltaic cell. The conveying device forms inert environment around photovoltaic cell by setting conveying part that can spray inert gas on the bottom, so that photovoltaic cell is difficult to be oxidized in conveying process.

Description

Technical Field

[0001] This utility model relates to the field of coating technology, and in particular to a conveying device and coating equipment. Background Technology

[0002] The statements in this section are merely background information related to this utility model and do not necessarily constitute prior art.

[0003] A tube furnace is a device used to coat the surface of materials. Gaseous reactants are introduced into the substrate surface inside the furnace. Under high temperature and other conditions, the gaseous reactants undergo a chemical reaction, generating a solid thin film that is deposited on the substrate surface. For example, silane gas is introduced onto the surface of a silicon wafer; at high temperature, the silane decomposes and forms a silicon thin film on the wafer surface.

[0004] In related technologies, during the process of photovoltaic cells entering and exiting the furnace body, the conveying device of the coating tube furnace is prone to forming an oxide layer on the surface of the photovoltaic cells under the influence of the high temperature at the furnace opening, which affects the uniformity of the coating. Utility Model Content

[0005] The purpose of this invention is to provide a conveying device and a coating equipment to solve the technical problem of easy oxidation of photovoltaic cells during the conveying process.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] In a first aspect, the present invention provides a conveying device for conveying photovoltaic cells to a coating equipment. The conveying device includes a conveying component and a gas supply device for providing inert gas. The conveying component is used to carry multiple photovoltaic cells.

[0008] The bottom of the conveying component is provided with a plurality of first nozzles that are connected to the gas supply device, and each first nozzle is directed toward the corresponding photovoltaic cell.

[0009] According to at least one embodiment of the present invention, the central axis of the first nozzle has a preset angle with a preset plane, wherein the preset plane is perpendicular to the bottom of the conveying member;

[0010] The preset included angle ranges from 3° to 10°.

[0011] According to at least one embodiment of the present invention, the central axis of the first nozzle is located in the plane where the photovoltaic cell is located, or the central axis of the first nozzle is parallel to the plane where the photovoltaic cell is located.

[0012] According to at least one embodiment of the present invention, the conveying member has an air inlet end, and the distribution density of the first nozzle on the bottom of the conveying member increases along a direction away from the air inlet end.

[0013] According to at least one embodiment of the present invention, the conveying member includes a cavity structure and has an air inlet end, and along a direction away from the air inlet end, the cavity of the conveying member is divided into multiple sections.

[0014] The conveying device further includes a plurality of first air pipes, each of the first nozzles on each section is evenly distributed, and each of the first nozzles on the same section is connected to the air supply device through the corresponding first air pipe.

[0015] According to at least one embodiment of the present invention, the conveying device further includes a plurality of flow valves, each of which is disposed on a corresponding first air pipe.

[0016] According to at least one embodiment of the present invention, the conveying member includes an inner bottom wall, an outer bottom wall opposite to the inner bottom wall, two inner side walls respectively connecting the two sides of the inner bottom wall, and two outer side walls respectively connecting the two sides of the outer bottom wall, wherein the outer side walls are opposite to and connected to the inner side walls, so that the cross-sectional shape of the conveying member is a U-shaped cavity structure.

[0017] Each of the inner sidewalls is provided with a plurality of second nozzles that are connected to the gas supply device, and each second nozzle is directed toward the corresponding photovoltaic cell.

[0018] According to at least one embodiment of the present invention, the conveying device further includes a second air pipe and a drag chain. The second air pipe has a first pipe section and a second pipe section connected together. The first pipe section is connected to the air supply device, and the second pipe section is connected to each of the first air pipes. The first pipe section is a flexible air pipe, and the second pipe section is a rigid air pipe.

[0019] The first pipe segment is disposed inside the cable chain, and the extension direction of the cable chain is consistent with the movement direction of the conveying component.

[0020] According to at least one embodiment of the present invention, the conveying device further includes a cover plate, a linear motion mechanism, and a base disposed at the moving end of the linear motion mechanism. The cover plate is connected to the base, and the conveying member is connected to the side of the cover plate opposite to the base.

[0021] The cover plate is used to seal the furnace opening of the coating equipment.

[0022] Secondly, this utility model also provides a coating equipment, including a furnace body and the conveying device described in the first aspect, wherein the conveying component of the conveying device can be moved into the furnace body.

[0023] In one or more technical solutions provided in the exemplary embodiments of this utility model, at least one of the following beneficial effects can be achieved.

[0024] The conveying device of this exemplary embodiment includes a conveying member and a gas supply device for providing inert gas. The conveying member carries multiple photovoltaic cells, which are arranged sequentially along the length of the conveying member. Multiple first nozzles communicating with the gas supply device are provided on the conveying member, with the first nozzles generally facing the corresponding photovoltaic cells. Inert gas from the gas supply device is sprayed onto the corresponding photovoltaic cells through each first nozzle, creating an inert environment around the photovoltaic cells. On the one hand, the sprayed inert gas can prevent particulate matter in the environment from contaminating the surface of the photovoltaic cells; on the other hand, in the inert environment, the photovoltaic cells are less prone to oxidation, making it difficult to form an oxide layer on their surface.

[0025] Therefore, during the process of entering and exiting the coating equipment, the conveying components can create an inert environment around the photovoltaic cells, improving the surface cleanliness of the photovoltaic cells and facilitating the improvement of coating uniformity in subsequent stages. Furthermore, the formation of an oxide layer can also affect the appearance of the finished photovoltaic cells, and the conveying device of the exemplary embodiment of this invention can reduce the formation of an oxide layer on the photovoltaic cells, thereby improving the appearance of the finished photovoltaic cells. Attached Figure Description

[0026] The accompanying drawings illustrate exemplary embodiments of the present invention and, together with the description thereof, serve to explain the principles of the present invention. These drawings are included to provide a further understanding of the present invention and are incorporated in and constitute a part of this specification.

[0027] Figure 1 This is an isometric structural schematic diagram of the coating equipment according to an embodiment of the present utility model;

[0028] Figure 2 This is a schematic diagram of the main structure of the coating equipment according to an embodiment of the present utility model;

[0029] Figure 3 This is an isometric structural schematic diagram of the conveying device according to an embodiment of the present utility model;

[0030] Figure 4 This is a top view of the conveying component according to an embodiment of the present utility model;

[0031] Figure 5 This is a cross-sectional view of the bottom of the conveying component according to an embodiment of the present invention.

[0032] Figure label:

[0033] 11. Bottom; 111. First nozzle; 12. Side; 13. Air inlet; 14. Cover plate; 15. Base;

[0034] 20. Furnace body;

[0035] 31. First trachea; 32. Second trachea; 321. First tube segment; 322. Second tube segment; 33. Cable chain. Detailed Implementation

[0036] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0037] In the photovoltaic field, coating equipment is used to coat silicon wafers for photovoltaic cells. For example, multiple silicon wafers are placed in a coating tube furnace via a conveying device, and process gases are introduced. After high-temperature ionization, the desired film layer is formed on the surface of the silicon wafers. In related technologies, during the conveying process, the surface of the silicon wafers is exposed to the air, making them susceptible to contamination by environmental particles. Furthermore, the high temperatures at the furnace opening of the coating equipment affect the silicon wafers on the conveying device, causing an oxide layer to form pre-formed on the wafer surface. This not only affects the uniformity of the coating and the surface cleanliness of the silicon wafers, but also impacts the appearance of the finished solar cells.

[0038] To address the aforementioned issues, the conveying device provided in the exemplary embodiment of this utility model provides a first nozzle on the conveying component that is connected to an inert gas supply device. The inert gas ejected from the first nozzle forms an inert environment around the photovoltaic cell (silicon wafer), thereby protecting the photovoltaic cell during its entry and exit from the furnace of the coating equipment, reducing particulate matter contamination and oxidation, and improving the uniformity of the coating on the photovoltaic cell.

[0039] It should be noted that the conveying device provided in the exemplary embodiment of this utility model is not only applicable to the conveying of photovoltaic cells, but also applicable to the conveying of other target objects to be coated that need to be prevented from oxidation or cleaned.

[0040] Figure 1 This is an isometric structural schematic diagram of the coating equipment according to an embodiment of the present utility model; Figure 3 This is an isometric structural schematic diagram of the conveying device according to an embodiment of the present utility model; Figure 4 This is a top view schematic diagram of the conveying component according to an embodiment of the present utility model. (In conjunction with...) Figure 1 , Figures 3-4As shown, the conveying device provided in the exemplary embodiment of this utility model is used to convey photovoltaic cells to a coating equipment. The conveying device includes a conveying component and a gas supply device for providing inert gas. The conveying component is used to carry multiple photovoltaic cells. Multiple first nozzles 111 connected to the gas supply device are arranged on the bottom 11 of the conveying component, and each first nozzle 111 faces the corresponding photovoltaic cell.

[0041] In practical applications, multiple photovoltaic cells (silicon wafers) are placed along the length of the conveyor. The photovoltaic cells are erected on the conveyor (which can be called a paddle) using specific tooling (also called a boat), and typically stand at a certain angle. The conveyor, acting as a carrier, transports the photovoltaic cells to the tubular furnace of the coating equipment (also called a diffusion equipment), where process gases are introduced to deposit a coating (functional layer) on the photovoltaic cells. The conveyor is designed as a hollow structure, with multiple first nozzles 111 on its bottom 11. This hollow structure is connected to a gas supply device, so that during the transportation of the photovoltaic cells, inert gas is continuously sprayed through the first nozzles 111 toward the corresponding photovoltaic cells. The inert gas envelops the photovoltaic cells, creating an inert environment around them. Therefore, before the photovoltaic cells enter the furnace body 20, blowing can prevent particulate matter in the environment from adhering to the surface of the photovoltaic cells. Furthermore, in an inert environment, the photovoltaic cells are less likely to naturally form an oxide layer as they would in air. Even in the high-temperature environment at the furnace inlet and outlet, the formation of an oxide layer on the photovoltaic cells can be reduced. Thus, the surface cleanliness of the photovoltaic cells is improved, and the reduction of the oxide layer ensures uniformity during the coating process, improving the appearance of the finished cells.

[0042] In some embodiments, the central axis of the first nozzle 111 has a preset angle with a preset plane, wherein the preset plane is perpendicular to the bottom 11 of the conveying component; the preset angle ranges from 3° to 10°.

[0043] For example, the inert gas can be nitrogen, argon, etc. The photovoltaic cells are not strictly vertically mounted on the conveyor; generally, they have a certain angle of inclination with respect to the vertical plane. Since the conveyor is roughly horizontal, the preset angle between the central axis of the first nozzle 111 and the preset plane is 3° to 10°, allowing the first nozzle 111 to be as parallel as possible to the photovoltaic cell at the first nozzle 111, thus ensuring an inert environment for the photovoltaic cell.

[0044] In some embodiments, the central axis of the first nozzle 111 is located in the plane where the photovoltaic cell is located, or the central axis of the first nozzle is parallel to the plane where the photovoltaic cell is located, which can better provide an inert environment for the photovoltaic cell and thus achieve the corresponding protection effect. That is, the angle between the first nozzle 111 and the preset plane is the same as the preset angle between the photovoltaic cell and the preset plane.

[0045] For example, the preset angle between the photovoltaic cell and the preset plane can be 5° to 7°, and the preset angle between the central axis of the first nozzle 111 and the preset plane can also be 5° to 7°, for example, 5.1°, 5.3°, 5.5°, 5.7°, 5.9°, 6.1°, 6.3°, 6.7°, 6.8°, 6.9°, 7°, etc.

[0046] See Figure 3 The conveying component includes a bottom 11 and side portions 12 located on both sides of the bottom 11. When the conveying component is inserted into the furnace body 20 of the coating equipment, for ease of description, the end near the furnace opening is defined as the air inlet end 13 and the other end is defined as the free end. The first nozzle 111 on the conveying component and the corresponding hollow structure or pipeline are connected to the air supply device located outside the furnace body 20 through the corresponding pipeline at the air inlet end 13.

[0047] For example, along the direction away from the air inlet end 13, the distribution density of the first nozzle 111 on the bottom 11 of the delivery member increases.

[0048] Since the gas supply device connects to the conveyor at the furnace opening, the gas flow direction of the conveyor is from the inlet end 13 to the free end. Therefore, the further away the conveyor is from the inlet end 13, the lower the flow velocity and flow rate. To ensure a good inert environment for all photovoltaic cells along the length of the conveyor, the number of first nozzles 111 near the inlet end 13 is relatively small, while the number of first nozzles 111 near the free end is relatively large. This ensures that each photovoltaic cell receives a sufficient inert environment to guarantee the protective effect. Simultaneously, the gradually increasing density of the first nozzles 111 from the inlet end 13 to the free end of the conveyor ensures a high consistency of the inert environment for each photovoltaic cell. This also results in high consistency of the finished photovoltaic cells during the coating process, guaranteeing batch quality stability.

[0049] Figure 5 This is a cross-sectional view of the bottom of the conveying component according to an embodiment of the present invention. Figure 5As shown, in the conveying device provided by the exemplary embodiment of the present invention, the conveying component has a cavity structure and an air inlet end 13. Along the direction away from the air inlet end 13, the cavity of the conveying component is divided into multiple sections. The conveying device also includes multiple first air pipes 31. Each first nozzle 111 on each section is evenly distributed, and each first nozzle 111 on the same section is connected to the air supply device through the corresponding first air pipe 31.

[0050] For example, the conveyor has a first section E1, a second section E2, and a third section E3 arranged in the direction from the air inlet 13 to the free end. The first nozzles 111 on the three sections are evenly distributed. Each section is separated by a partition in the cavity structure of the conveyor. Each section has a first air pipe 31 connected to the air supply device. The three first pipes are connected to the air supply device through a distributor or a converter (the converter has one air inlet and three air outlets).

[0051] In practical applications, each first pipe can independently control the gas velocity or flow rate entering each section, thereby achieving a consistent inert environment along the entire length. For example, a flow valve is installed on each first gas pipe 31, which can be electrically connected to a controller. The controller adjusts the opening of the flow valve according to actual needs, thereby controlling the velocity and / or flow rate of the inert gas entering each section.

[0052] Understandably, the number of sections in the conveyor is determined based on the actual gas flow requirements, and can be 2, 4, 5 or more.

[0053] For example, the lengths of each segment can be the same or different. For instance, the lengths of the first segment E1, the second segment E2, and the third segment E3 decrease sequentially to ensure the consistency of the inertial environment of the photovoltaic cells in each segment as much as possible.

[0054] See Figure 3 and Figure 4 In the conveying device provided by the exemplary embodiment of this utility model, the conveying component includes an inner bottom wall, an outer bottom wall opposite to the inner bottom wall, two inner side walls respectively connected to both sides of the inner bottom wall, and two outer side walls respectively connected to both sides of the outer bottom wall, and the outer side walls are opposite to and connected to the inner side walls so that the cross-sectional shape of the conveying component is a U-shaped cavity structure; a plurality of second nozzles connected to the gas supply device are arranged on each inner side wall, and each second nozzle faces the corresponding photovoltaic cell.

[0055] In practical applications, the distribution of the second nozzle is consistent with that of the first nozzle 111 in the direction from the inlet end 13 to the free end. For example, the distribution density of the second nozzle also increases along the direction away from the inlet end 13. When the conveyor is divided into three sections, the hollow structure of each side 12 is the same as the hollow structure of the bottom 11 and is also divided into three sections. The hollow structures of the side 12 and the bottom 11 on each section are interconnected. That is, the second nozzle and the first nozzle 111 on the first section E1 are both connected to the air supply device through the same first air pipe 31; similarly, the second nozzle and the first nozzle 111 on the second section E2 are both connected to the air supply device through another first air pipe 31.

[0056] For example, the central axis of the second nozzle is also approximately parallel to the plane where the photovoltaic cell is located. The first nozzle 111 on the bottom 11 and the second nozzles on the two sides 12 cooperate to further ensure the inert environment around the photovoltaic cell.

[0057] Figure 2 This is a schematic front view of the coating equipment according to an embodiment of the present invention. Figures 1-3 As shown, the conveying device provided in the exemplary embodiment of this utility model further includes a second air pipe 32 and a cable chain 33; the second air pipe 32 has a first pipe section 321 and a second pipe section 322 connected together; the first pipe section 321 is connected to an air supply device, and the second pipe section 322 is connected to each of the first air pipes 31; the first pipe section 321 is a flexible air pipe, and the second pipe section 322 is a rigid air pipe; the first pipe section 321 is disposed inside the cable chain 33, and the extension direction of the cable chain 33 is consistent with the movement direction of the conveying component.

[0058] In practical applications, a distributor is installed near the air inlet 13 of the conveyor, connecting each of the first air pipes 31 and the second air pipes 32 to the distributor on the base 15. The second air pipe 32 is used for the air supply connection between the air supply device and the conveyor inside the furnace body 20. Since the conveyor needs to enter and exit the furnace body 20, and the position of the air supply device is relatively fixed, a flexible first pipe section 321 is selected for transition, while a rigid second pipe section 322 is rigidly connected to the distributor.

[0059] For example, a flexible first tube segment 321 is mounted on a cable chain 33. The characteristics of the cable chain 33 can protect, support and guide the hose (first tube segment 321), thereby meeting the reciprocating motion requirements of the conveying component.

[0060] It is understood that the drag chain 33 is located on the side of the furnace body 20 and / or the conveyor, and the extension direction of the drag chain 33 is consistent with the movement direction of the conveyor.

[0061] In some embodiments, the conveying device provided by the exemplary embodiments of the present invention includes a cover plate 14, a linear motion mechanism, and a base 15 disposed at the moving end of the linear motion mechanism. The cover plate 14 is connected to the base 15, and the conveying component is connected to the side of the cover plate 14 away from the base 15, that is, the conveying component and the base 15 are respectively disposed on opposite sides of the cover plate 14; the cover plate 14 is used to seal the furnace opening of the furnace body of the coating equipment.

[0062] For example, the linear motion mechanism can be a hydraulic cylinder, and the base 15 can be set on the hydraulic rod. Along the horizontal direction, the reciprocating motion of the conveying component can be realized as the hydraulic rod extends and retracts.

[0063] For example, two slide rails can be provided outside the furnace opening of the furnace body 20 of the coating equipment along the moving direction of the conveyor, and the conveyor can slide on the slide rails so as to smoothly insert the battery cell into the furnace body 20.

[0064] In other embodiments, the linear motion structure may also consist of a slider, two slide rails, and a servo motor. The conveying component and / or cover plate 14 are fixedly mounted on multiple sliders, the sliders are slidably mounted on the corresponding slide rails, and the servo motor can drive the sliders to reciprocate on the slide rails.

[0065] In practical applications, the cover plate 14 is adapted to the furnace opening of the furnace body 20. When the conveyor carries the photovoltaic cells into the furnace body 20, the cover plate 14 seals the furnace opening. This can isolate the photovoltaic cells from the air environment as much as possible, so that the high-temperature coating process can be carried out.

[0066] See Figure 1 An exemplary embodiment of this utility model also provides a coating device, including a furnace body 20 and a conveying device as described in the above embodiments; the conveying component of the conveying device can be moved into the furnace body 20.

[0067] The coating equipment of this exemplary embodiment has the same technical advantages over the prior art as the conveying device, and will not be repeated here.

[0068] Those skilled in the art should understand that the above embodiments are merely for clearly illustrating the present invention and are not intended to limit the scope of the present invention. Those skilled in the art can make other changes or modifications based on the above disclosure, and these changes or modifications still fall within the scope of the present invention.

Claims

1. A conveying device, characterized in that, The conveying device is used to transport photovoltaic cells into a coating equipment. The conveying device includes a conveying component and a gas supply device for providing inert gas. The conveying component is used to carry multiple photovoltaic cells. The bottom of the conveying component has a plurality of first nozzles connected to the gas supply device, each of which faces the corresponding photovoltaic cell.

2. The conveying device according to claim 1, characterized in that, The central axis of the first nozzle has a preset angle with a preset plane, wherein the preset plane is perpendicular to the bottom of the conveying component; The preset included angle ranges from 3° to 10°.

3. The conveying device according to claim 1, characterized in that, The central axis of the first nozzle is located in the plane where the photovoltaic cell is located, or the central axis of the first nozzle is parallel to the plane where the photovoltaic cell is located.

4. The conveying device according to claim 1, characterized in that, The conveyor has an air inlet end, and the distribution density of the first nozzle on the bottom of the conveyor increases along a direction away from the air inlet end.

5. The conveying device according to claim 1, characterized in that, The conveying component includes a cavity structure and has an air inlet end. Along a direction away from the air inlet end, the cavity of the conveying component is divided into multiple sections. The conveying device further includes a plurality of first air pipes, each of the first nozzles on each section is evenly distributed, and each of the first nozzles on the same section is connected to the air supply device through a corresponding first air pipe.

6. The conveying device according to claim 5, characterized in that, The conveying device also includes a plurality of flow valves, each of which is located on a corresponding first air pipe.

7. The conveying device according to any one of claims 1-6, characterized in that, The conveying component includes an inner bottom wall, an outer bottom wall opposite to the inner bottom wall, two inner side walls respectively connecting the two sides of the inner bottom wall, and two outer side walls respectively connecting the two sides of the outer bottom wall, wherein the outer side walls are opposite to and connected to the inner side walls, so that the cross-sectional shape of the conveying component is a U-shaped cavity structure; Each of the inner sidewalls is provided with a plurality of second nozzles that are connected to the gas supply device, and each second nozzle is directed toward the corresponding photovoltaic cell.

8. The conveying device according to claim 6, characterized in that, The conveying device further includes a second air pipe and a cable chain. The second air pipe has a first pipe section and a second pipe section connected together. The first pipe section is connected to the air supply device, and the second pipe section is connected to each of the first air pipes. The first pipe section is a flexible air pipe, and the second pipe section is a rigid air pipe. The first pipe segment is disposed inside the cable chain, and the extension direction of the cable chain is consistent with the movement direction of the conveying component.

9. The conveying device according to claim 8, characterized in that, The conveying device further includes a cover plate, a linear motion mechanism, and a base disposed at the moving end of the linear motion mechanism. The cover plate is connected to the base, and the conveying component is connected to the side of the cover plate opposite to the base. The cover plate is used to seal the furnace opening of the coating equipment.

10. A coating apparatus, characterized in that, It includes a furnace body and a conveying device as described in any one of claims 1-9, wherein the conveying component of the conveying device is movable into the furnace body.

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