Accurate quantitative copper plating dosing device

Abstract

The utility model belongs to the technical field of dosing device, concretely is a kind of precision quantitative copper deposition dosing device, it includes: liquid medicine tank, the lateral surface fixed connection of liquid medicine tank has liquid storage tank, the both sides of liquid storage tank are separately equipped with one independent groove structure, the middle part of liquid storage tank is equipped with first through-hole, the middle part of liquid storage tank is rotatably connected with adjusting rod, the middle part of adjusting rod is equipped with first connecting hole, adjusting rod is connected with first through-hole by first connecting hole, the lateral surface fixed connection of adjusting rod has sealing ring, the other side of liquid medicine tank is equipped with uniform medicine structure;Two empty grooves are separated in the liquid storage tank of storing liquid medicine, and the on-off of two empty grooves can be controlled by adjusting rod, so that user can carry out liquid medicine deployment on one side of liquid storage tank, and then the dosing of deployment completion is quantitatively transferred to the other side of liquid storage tank, and user can accurately control the transfer amount of dosing in this process, and excessive addition is avoided.

Description

Technical Field

[0001] This utility model belongs to the field of dosing device technology, specifically a precise quantitative copper plating dosing device. Background Technology

[0002] In the manufacturing processes of printed circuit boards and high-end interconnect substrates, chemical copper plating is a critical upstream process. It is used to form a dense and uniform conductive copper layer on the surface of the insulating substrate and the inner walls of vias, enabling interlayer electrical interconnection and providing a conductive substrate for subsequent copper electroplating. This process is based on an autocatalytic redox reaction, and its deposition quality directly affects the reliability, signal integrity, and production yield of the final product.

[0003] Copper plating solution is a multi-component chemical system, typically containing copper salts, reducing agents, complexing agents, stabilizers, pH adjusters, and various trace additives. The copper plating reaction is in a dynamic chemical equilibrium state. During continuous production, the effective components are continuously consumed, and byproducts gradually accumulate, causing the solution composition to deviate from the optimal process window. Therefore, it is essential to maintain the concentration of each component within the set range through timed, quantitative, and precise replenishment operations to ensure process stability and deposit quality.

[0004] Currently, the replenishment of reagents in the copper plating process relies heavily on manual experience or mechanical control. Manual addition is susceptible to errors due to the operator's subjective experience; mechanical addition often uses devices such as fixed flow pumps and electromagnetic metering valves, but their metering accuracy is easily affected by factors such as changes in reagent viscosity and fluctuations in pipeline pressure. When adding reagents directly into the processing tank using these methods, both over- and under-addition can lead to uncontrolled reagent concentration, affecting the uniformity and consistency of the copper plating reaction, and failing to meet the current process requirements for precise and automated control of reagent addition.

[0005] Therefore, it is necessary to design a device that can accurately dispense drugs. Summary of the Invention

[0006] Therefore, it is necessary to provide a precise quantitative copper plating dosing device. By dividing the liquid storage tank into two empty tanks, the two empty tanks can be controlled by adjusting the rod to allow the user to prepare the liquid solution on one side of the storage tank and then quantitatively transfer the prepared solution to the other side of the storage tank. During this process, the user can precisely control the amount of solution transferred, thereby avoiding over-addition. Finally, the quantitatively prepared solution in the storage tank is simply discharged into the liquid plating tank.

[0007] The technical solution of this utility model to solve the above-mentioned technical problems is as follows: A precise quantitative copper plating dosing device includes a chemical solution tank, a dosing structure on the side of the chemical solution tank, and a storage tank. The storage tank is fixedly connected to the side of the chemical solution tank. An independent tank structure is provided on each side of the storage tank. A first through hole is opened in the middle of the storage tank. An adjusting rod is rotatably connected to the middle of the storage tank. A first connecting hole is opened in the middle of the adjusting rod. The adjusting rod communicates with the first through hole through the first connecting hole. A sealing ring is fixedly connected to the side of the adjusting rod. A uniform dosing structure is provided on the other side of the chemical solution tank.

[0008] Optionally, in one embodiment of the present invention, a delivery pump is fixedly connected to the bottom side of the liquid tank, one end of the delivery pump is connected to the storage tank through a hose, and the other end of the delivery pump is fixedly connected to a spray pipe through a hose, the spray pipe being located in the middle of the liquid tank.

[0009] Optionally, in one embodiment of the present invention, a second through hole is provided in the middle of the medicine tank, the first through hole and the second through hole are arranged in parallel, and the diameter of the second through hole is smaller than that of the first through hole.

[0010] Optionally, in one embodiment of the present invention, a second connecting hole is provided in the middle of the adjusting rod, the second connecting hole and the first connecting hole are arranged perpendicular to each other, and the diameter of the second connecting hole is equal to the diameter of the second through hole.

[0011] Optionally, in one embodiment of the present invention, a limiting groove is provided on the side of the liquid storage tank, and the side of the adjusting rod abuts against the liquid storage tank through the limiting groove.

[0012] Optionally, in one embodiment of the present invention, three positioning grooves are provided on the side of the liquid storage tank. The three positioning grooves are arranged in an arc shape at equal intervals, and the angle of the limiting groove is 90°.

[0013] Optionally, in one embodiment of the present invention, a positioning rod is slidably connected to the end of the adjusting rod, the end of the positioning rod abuts against the liquid storage tank through a positioning groove, and a spring is fixedly connected between the positioning rod and the adjusting rod.

[0014] Optionally, in one embodiment of the present invention, the uniform drug distribution structure includes a rocking rod, the spray pipe is rotatably connected to the liquid tank, the side of the spray pipe is provided with a plurality of spray holes, and the end of the spray pipe is fixedly connected to the rocking rod.

[0015] Optionally, in one embodiment of the present invention, a groove is provided in the middle of the rocker arm, and a drive slider is slidably connected to the rocker arm through the groove.

[0016] Optionally, in one embodiment of the present invention, a turntable is rotatably connected to the side of the medicine tank, and the driving slider is fixedly connected to the side of the turntable.

[0017] Compared with the prior art, the precise quantitative copper plating dosing device provided by this utility model has the following characteristics: By rotating the adjusting rod, the first connecting hole and the first through hole can be aligned and staggered, thereby opening and closing the slots on both sides of the storage tank. When adding medicine to the medicine tank, the operator can directly mix the medicine on one side of the storage tank. After mixing, the operator can rotate the adjusting rod to connect the slots on both sides. At this time, the medicine flows from one side of the storage tank to the other side. During this process, the operator can control the amount of medicine flowing into the other side of the tank through the adjusting rod. After measuring, the first through hole is closed, and the measured amount of medicine can be directly delivered into the medicine tank by the delivery pump, avoiding over-addition. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the overall structure of Embodiment 1 of the present invention; Figure 2 This is a schematic diagram of the connection structure between the medicine tank and the storage tank in Embodiment 1 of this utility model; Figure 3 for Figure 2 The diagram shown is an enlarged view of the structure of part A. Figure 4 This is a schematic diagram of the connection structure between the liquid storage tank and the adjusting rod in Embodiment 1 of this utility model; Figure 5 This is a schematic diagram of the connection structure between the adjusting rod and the positioning rod in Embodiment 1 of this utility model; Figure 6 This is a schematic diagram of the connection structure between the liquid tank and the rocker arm in Embodiment 1 of this utility model.

[0020] Reference numerals: 1. Medicine tank; 2. Dosing structure; 201. Storage tank; 202. Adjusting rod; 203. Delivery pump; 204. Spray pipe; 205. First connecting hole; 206. Second connecting hole; 207. Sealing ring; 208. Limiting groove; 209. Positioning groove; 210. First through hole; 211. Second through hole; 212. Positioning rod; 213. Spring; 3. Medication distribution structure; 301. Turntable; 302. Rocking rod; 303. Slide groove; 304. Drive slider. Detailed Implementation

[0021] It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments of the present invention can be combined with each other. The technical solutions of the present invention will be further described below with reference to the accompanying drawings of the embodiments. The present invention is not limited to the specific embodiments described below.

[0022] It should be understood that the same or similar reference numerals in the accompanying drawings of the embodiments correspond to the same or similar components. In the description of this utility model, it should be understood that if terms such as upper, lower, front, back, left, right, top, bottom, etc., indicate orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms describing positional relationships in the accompanying drawings are for illustrative purposes only and should not be construed as limiting this patent. Those skilled in the art can understand the specific meaning of the above terms according to the specific circumstances.

[0023] To ensure precise dosing of chemicals during copper plating, a precise quantitative copper plating chemical dosing device was designed, the specific scheme of which is as follows: Example 1

[0024] like Figure 1-6 As shown, a precise quantitative copper plating dosing device includes a liquid tank 1, a dosing structure 2 on the side of the liquid tank 1, a storage tank 201, a storage tank 201 fixedly connected to the side of the liquid tank 1, an independent tank structure on each side of the storage tank 201, a first through hole 210 in the middle of the storage tank 201, an adjusting rod 202 rotatably connected to the middle of the storage tank 201, a first connecting hole 205 in the middle of the adjusting rod 202, the adjusting rod 202 communicating with the first through hole 210 through the first connecting hole 205, a sealing ring 207 fixedly connected to the side of the adjusting rod 202, and a uniform dosing structure 3 on the other side of the liquid tank 1.

[0025] A liquid delivery pump 203 is fixedly connected to the bottom side of the liquid tank 1. One end of the liquid delivery pump 203 is connected to the liquid storage tank 201 through a hose, and the other end of the liquid delivery pump 203 is fixedly connected to a spray pipe 204 through a hose. The spray pipe 204 is located in the middle of the liquid tank 1.

[0026] A second through hole 211 is provided in the middle of the medicine tank 1. The first through hole 210 and the second through hole 211 are arranged in parallel. The diameter of the second through hole 211 is smaller than that of the first through hole 210.

[0027] The adjusting rod 202 has a second connecting hole 206 in the middle. The second connecting hole 206 is perpendicular to the first connecting hole 205. The diameter of the second connecting hole 206 is equal to the diameter of the second through hole 211.

[0028] A limiting groove 208 is provided on the side of the liquid storage tank 201, and the side of the adjusting rod 202 abuts against the liquid storage tank 201 through the limiting groove 208. Three positioning grooves 209 are provided on the side of the liquid storage tank 201, and the three positioning grooves 209 are arranged in an arc shape at equal intervals. The angle of the limiting groove 208 is 90°.

[0029] A positioning rod 212 is slidably connected to the end of the adjusting rod 202. The end of the positioning rod 212 abuts against the liquid storage tank 201 through the positioning groove 209. A spring 213 is fixedly connected between the positioning rod 212 and the adjusting rod 202. A second through hole 211, parallel to the first through hole 210, is also provided in the middle of the liquid storage tank 201. A second connecting hole 206 is provided on the adjusting rod 202 corresponding to the second through hole 211. The second connecting hole 206 is perpendicular to the first connecting hole 205. Because the diameter of the second connecting hole 206 is small, when transferring the medicine, the operator can choose to connect the two sides of the liquid storage tank 201 through either the first through hole 210 or the second through hole 211 to adjust the flow rate of the medicine, thereby more accurately controlling the amount of medicine added. Simultaneously, to facilitate the user's adjustment of the adjusting rod 202... The position of the adjusting rod 202 is adjusted. A limiting groove 208 is provided on the side of the liquid storage tank 201 to limit the rotation range of the adjusting rod 202. At the same time, three positioning grooves 209 are also provided on the side of the liquid storage tank 201 corresponding to different rotation positions of the adjusting rod 202. Combined with the positioning rod 212 at the end of the adjusting rod 202, the rotation position of the adjusting rod 202 can be quickly positioned. A liquid delivery pump 203 is provided on the bottom side of the liquid storage tank 201. The liquid delivery pump 203 can pump a metered amount of medicine from the liquid storage tank 201 into the spray pipe 204 and finally discharge it into the medicine tank 1.

[0030] The uniform drug distribution structure 3 includes a rocker arm 302, a spray pipe 204 rotatably connected to the liquid tank 1, multiple spray holes on the side of the spray pipe 204, a rocker arm 302 fixedly connected to the end of the spray pipe 204, a sliding groove 303 in the middle of the rocker arm 302, and a drive slider 304 slidably connected to the rocker arm 302 through the sliding groove 303.

[0031] A turntable 301 is rotatably connected to the side of the medicine tank 1, and a drive slider 304 is fixedly connected to the side of the turntable 301.

[0032] A row of spray holes is provided on the side of the spray pipe 204. A turntable 301 driven by a motor is provided on the side of the liquid tank 1. When the liquid pump 203 pumps the liquid into the spray pipe 204, the liquid will be sprayed out from the spray holes on the side of the spray pipe 204. At this time, the motor is started, which drives the turntable 301 to rotate. The drive slider 304 on the side of the turntable 301 will slide in the groove 303 on the rocker arm 302 at the same time, and drive the rocker arm 302 to swing back and forth within a certain angle. Finally, the spray pipe 204 will rotate back and forth within a certain angle range, increasing the spraying range of the liquid, so that the liquid can be quickly and evenly mixed with the liquid in the liquid tank 1 after being sprayed into the liquid tank 1.

[0033] Job Description: First, when adding medicine to the medicine tank 1, the operator can directly mix the medicine on one side of the storage tank 201. After mixing, the two sides of the tank are connected by rotating the adjusting rod 202. At this time, the medicine flows from one side of the storage tank 201 to the other side. During this process, the operator can control the amount of medicine flowing into the other side of the tank by adjusting the rod 202. The storage tank 201 also has a second through hole 211 in the middle, which is parallel to the first through hole 210. The adjusting rod 202 has a second connecting hole 206 corresponding to the second through hole 211. The second connecting hole 206 is perpendicular to the first connecting hole 205. The diameter of the connecting hole 206 is relatively small. When transferring the medicine, the operator can choose to connect the two sides of the storage tank 201 through the first through hole 210 or the second through hole 211 to adjust the flow rate of the medicine and thus more accurately control the amount of medicine added. At the same time, in order to facilitate the user to adjust the position of the adjusting rod 202, a limiting groove 208 is provided on the side of the storage tank 201 to limit the rotation range of the adjusting rod 202. In addition, three positioning grooves 209 are also provided on the side of the storage tank 201 corresponding to different rotation positions of the adjusting rod 202. Combined with the positioning rod 212 at the end of the adjusting rod 202, the rotation position of the adjusting rod 202 can be quickly positioned.

[0034] A liquid delivery pump 203 is provided on the bottom side of the storage tank 201. The liquid delivery pump 203 can pump a metered amount of medicine from the storage tank 201 into the spray pipe 204 and finally discharge it into the medicine tank 1. A row of spray holes is opened on the side of the spray pipe 204. A turntable 301 driven by a motor is provided on the side of the medicine tank 1. When the liquid delivery pump 203 pumps the medicine into the spray pipe 204, the medicine will be sprayed out from the spray holes on the side of the spray pipe 204. At this time, the motor is started to drive the turntable 301 to rotate. The drive slider 304 on the side of the turntable 301 will slide in the groove 303 opened on the rocker arm 302 at the same time, and simultaneously drive the rocker arm 302 to swing back and forth within a certain angle. Finally, the spray pipe 204 will rotate back and forth within a certain angle range, increasing the spraying range of the medicine and allowing the medicine to be quickly and evenly mixed with the medicine in the medicine tank 1 after being sprayed into the medicine tank 1.

[0035] The dosing device of this solution integrates a dosing structure 2, a liquid delivery pump 203, and a dynamic homogenizing structure 3, which has the functions of quantitative measurement, delivery and mixing, and improves the efficiency of copper plating.

[0036] The dosing structure 2 is equipped with a liquid storage tank having a first through hole 210 and a second through hole 211, and a first connecting hole 205 and a second connecting hole 206 that are vertically connected on the adjusting rod 202, forming a dual-aperture flow path. By rotating the adjusting rod, the operator can choose to use the large-aperture channel for rapid pre-dosing or switch to the small-aperture channel for precise dosing.

[0037] The rotating adjustment lever provides a clear tactile feedback, allowing operators to clearly perceive the current flow status and preventing quantitative errors caused by misoperation or uncertain position.

[0038] The uniform drug distribution structure, through a turntable 301, a drive slider 304, and a rocker arm 302 with a groove 303, forms a crank-slider mechanism. This mechanism converts the continuous rotation of the motor into the reciprocating oscillation of the spray pipe 204 at a specific angle, causing the drug solution to cover the area in a fan shape, thus expanding the mixing zone. The periodically injected drug solution will periodically disturb the original solution in the tank, accelerating the mixing process and avoiding uneven copper deposition caused by the accumulation of high-concentration drug solution in certain areas. The device automatically completes the delivery and spraying of the quantitative drug solution through the delivery pump 203, avoiding errors caused by manual handling and dumping and reducing the labor intensity of workers. Example 2

[0039] In this embodiment, the structure of the dosing device is basically the same as that in Embodiment 1. The difference is that a concentration meter and a level sensor are installed at key positions in the liquid tank. The dosing rate of the metering pump is finely adjusted according to the real-time reading of the concentration meter to maintain constant concentration control. The loss of liquid due to evaporation or carry-over is automatically compensated according to the signal from the level sensor.

[0040] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating this utility model, and are not intended to limit the implementation of this utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A precise quantitative copper plating dosing device, comprising a chemical solution tank, characterized in that: The side of the medicine tank is provided with a dosing structure, which includes a storage tank. The storage tank is fixedly connected to the side of the medicine tank. Each side of the storage tank is provided with an independent tank structure. A first through hole is opened in the middle of the storage tank. An adjusting rod is rotatably connected to the middle of the storage tank. A first connecting hole is opened in the middle of the adjusting rod. The adjusting rod is connected to the first through hole through the first connecting hole. A sealing ring is fixedly connected to the side of the adjusting rod. A uniform dosing structure is provided on the other side of the medicine tank.

2. The precise quantitative copper plating dosing device according to claim 1, characterized in that: A delivery pump is fixedly connected to the bottom side of the medicine tank. One end of the delivery pump is connected to the storage tank through a hose, and the other end of the delivery pump is fixedly connected to a spray pipe through a hose. The spray pipe is located in the middle of the medicine tank.

3. The precise quantitative copper plating dosing device according to claim 1, characterized in that: A second through hole is provided in the middle of the medicine tank. The first through hole and the second through hole are arranged in parallel, and the diameter of the second through hole is smaller than that of the first through hole.

4. The precise quantitative copper plating dosing device according to claim 3, characterized in that: The adjusting rod has a second connecting hole in the middle, which is perpendicular to the first connecting hole. The diameter of the second connecting hole is equal to the diameter of the second through hole.

5. The precise quantitative copper plating dosing device according to claim 1, characterized in that: A limiting groove is provided on the side of the liquid storage tank, and the side of the adjusting rod abuts against the liquid storage tank through the limiting groove.

6. The precise quantitative copper plating dosing device according to claim 5, characterized in that: The side of the liquid storage tank has three positioning grooves, which are arranged in an arc shape at equal intervals. The angle of the limiting groove is °.

7. The precise quantitative copper plating dosing device according to claim 6, characterized in that: The end of the adjusting rod is slidably connected to a positioning rod, the end of the positioning rod abuts against the liquid storage tank through a positioning groove, and a spring is fixedly connected between the positioning rod and the adjusting rod.

8. The precise quantitative copper plating dosing device according to claim 2, characterized in that: The uniform dispensing structure includes a rocker arm, the spray pipe is rotatably connected to the liquid tank, the side of the spray pipe has multiple spray holes, and the end of the spray pipe is fixedly connected to the rocker arm.

9. The precise quantitative copper plating dosing device according to claim 8, characterized in that: The rocker arm has a groove in the middle, and a drive slider is slidably connected to the rocker arm through the groove.

10. The precise quantitative copper plating dosing device according to claim 9, characterized in that: A turntable is rotatably connected to the side of the medicine tank, and the drive slider is fixedly connected to the side of the turntable.

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