A rapid heat exchange tank for electroless nickel plating
Patent Information
- Application Number
- CN202522337977.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-04
- Publication Date
- 2026-10-09
- Estimated Expiration
- 2035-11-04
AI Technical Summary
[0003]目前现有用于化学镀镍的加热设备普遍存在如下问题：一方面，加热器与电镀液接触不均匀，易导致局部热量集中，超出电镀液或槽体耐受温度，引发电镀液成分变化或槽体变形，进而影响电镀的质量；另一方面，因热传递滞后，温度调节灵敏度低，难以将镀液温度稳定控制在工艺所需的精确范围内，无法满足高精度化学镀镍的需求，因此有必要对现有的电镀加热设备进行改进以解决上述问题
1.通过设置环绕电镀槽体的换热槽体以形成换热腔并在换热腔内设置多根沿着竖直方向均匀间隔设置且对称设置的输入管，并在输入管上均匀开设输出孔，从而实现将换热介质均匀输送至换热腔内，确保换热介质与电镀槽体充分均匀接触，避免传统加热器与电镀液接触不均而导致局部热量集中，并防止电镀液因局部超温而导致电镀液性质变化；
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Figure CN224832922U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the technical field of heat exchange tank structure, and in particular to a rapid heat exchange tank for electroless nickel plating. Background Technology
[0002] In the electroless nickel plating process, the heat exchange tank and heat exchange equipment are the core equipment that carries the plating solution and realizes heat exchange and temperature control, which directly affects the plating yield of workpieces such as wafers.
[0003] Currently available heating equipment for electroless nickel plating generally suffers from the following problems: On the one hand, uneven contact between the heater and the plating solution can easily lead to localized heat concentration, exceeding the tolerance temperature of the plating solution or tank, causing changes in the composition of the plating solution or deformation of the tank, thus affecting the quality of electroplating; on the other hand, due to lag in heat transfer and low sensitivity of temperature regulation, it is difficult to stably control the temperature of the plating solution within the precise range required by the process, failing to meet the needs of high-precision electroless nickel plating. Therefore, it is necessary to improve the existing electroplating heating equipment to solve the above problems. Utility Model Content
[0004] The purpose of this invention is to provide a rapid heat exchange tank for electroless nickel plating, which has the advantages of simple structure and ensures stable and accurate temperature of the electroplating solution.
[0005] The above-mentioned technical objective of this utility model is achieved through the following technical solution: a rapid heat exchange tank for electroless nickel plating, comprising an electroplating tank body and a heat exchange tank body arranged around the electroplating tank body, wherein a heat exchange cavity for accommodating a heat exchange medium is formed between the electroplating tank body and the heat exchange tank body, and an input pipe for inputting a heat exchange medium into the heat exchange cavity and a heating circulation assembly for circulating heating of the heat exchange medium in the heat exchange cavity are respectively fixedly connected to the heat exchange tank body.
[0006] The present invention is further configured such that: at least four input pipes are provided, which are evenly spaced along the vertical direction in the heat exchange cavity and symmetrically arranged on both sides of the heat exchange cavity; and several output holes for outputting heat exchange medium are evenly opened along the length direction on the input pipes, so as to realize the uniform mixing of the input heat exchange medium with the heat exchange medium in the heat exchange cavity.
[0007] The present invention is further configured such that: the heating circulation assembly includes several return output pipes fixedly connected to the heat exchange tank and communicating with the heat exchange cavity for realizing the output of the heat exchange medium; a return tank for collecting and storing the heat exchange medium is provided outside the return output pipes; a heating rod for heating the heat exchange medium is fixedly provided inside the return tank; a return input pipe communicating with the input pipe is fixedly connected to the bottom of the return tank to realize the return of the heat exchange medium to be reintroduced into the heat exchange cavity; and a first centrifugal pump is fixedly connected to the return input pipe.
[0008] The present invention is further configured such that: a partition plate is fixedly connected inside the reflux tank, the partition plate divides the reflux tank into a preheating zone and a reflux output zone, the reflux output pipe is connected to the preheating zone, the reflux input pipe is connected to the reflux output zone, the preheating zone and the reflux output zone are connected by a connecting pipe, and a second centrifugal pump for sending the heat exchange medium in the preheating zone into the reflux output zone is fixedly connected to the connecting pipe.
[0009] The present invention is further configured such that: a plurality of retaining brackets for preventing deformation of the plating tank and the heat exchange tank are fixedly connected between the plating tank and the heat exchange tank, and a plurality of flow holes for the heat exchange medium to pass through are evenly opened on the retaining brackets to reduce the impact on the circulation flow rate of the heat exchange medium.
[0010] The present invention is further configured such that: the heat exchange tank is fixedly connected to an overflow port and an exhaust port at the top of the heat exchange cavity, so as to realize the discharge of heat exchange medium and expansion air.
[0011] The present invention is further configured such that: waste discharge seats are symmetrically and fixedly connected to both sides of the electroplating tank, a waste discharge cavity is opened in the waste discharge seat, and a plurality of waste discharge grooves for supplying water vapor and waste gas generated by heating the electroplating solution are evenly opened along the length direction of the electroplating tank; waste discharge pipes are fixedly connected to both ends of the waste discharge seat; and a condensate discharge pipe for discharging condensate is fixedly connected to the bottom of the waste discharge cavity of the waste discharge seat.
[0012] The present invention is further configured such that: at least one air blowing pipe is fixedly connected inside the electroplating tank to ensure uniform temperature and concentration of the electroplating solution, and the air blowing pipe is provided with a plurality of air blowing holes evenly distributed on the air blowing pipe.
[0013] In summary, this utility model has the following beneficial effects: 1. By setting up a heat exchange tank surrounding the electroplating tank to form a heat exchange cavity, and setting up multiple input pipes that are evenly spaced and symmetrically arranged along the vertical direction in the heat exchange cavity, and evenly opening output holes on the input pipes, the heat exchange medium is evenly transported into the heat exchange cavity, ensuring that the heat exchange medium is fully and evenly in contact with the electroplating tank, avoiding the uneven contact between the traditional heater and the electroplating solution that leads to local heat concentration, and preventing the electroplating solution from changing its properties due to local overheating; 2. The heating circulation assembly introduces the heat exchange medium from the heat exchange chamber into the reflux tank through the reflux output pipe. After the heat exchange medium is heated by the heating rod, the first centrifugal pump pumps the heat exchange medium into the heat exchange chamber through the reflux input pipe and the input pipe, thereby realizing the circulation heating of the heat exchange medium. At the same time, a partition plate is set in the reflux tank to divide the reflux tank into a preheating zone and a reflux output zone. The heat exchange medium is preheated in the preheating zone. The preheated heat exchange medium is then pumped into the reflux output zone through the second centrifugal pump and the connecting pipe. This ensures that the heat exchange medium in the reflux output zone can be maintained within a certain temperature range, avoiding the influence of insufficient heat exchange medium or low heat exchange medium temperature on the temperature of the electroplating solution, thereby ensuring that the temperature of the electroplating solution is stably controlled within a certain range. 3. By setting a fixed support bracket between the electroplating tank and the heat exchange tank, stable support is provided for the electroplating tank and the heat exchange tank, avoiding the deformation of the tank caused by stress due to temperature changes during the heat exchange process, and ensuring the stability of the electroplating process. At the same time, an overflow port and an exhaust port are set at the top of the heat exchange tank to promptly discharge the heat exchange medium or expanding air that has expanded in volume due to temperature rise in the heat exchange chamber, and to prevent the heat exchange chamber from deforming and affecting the electroplating process. 4. By setting symmetrical waste discharge seats on both sides of the electroplating tank, and through waste discharge chambers opened in the waste discharge seats and waste discharge grooves evenly opened along the length of the electroplating tank, water vapor generated during the heating of the electroplating solution and waste gas generated during the electroplating process are quickly collected and discharged through waste discharge pipes, preventing waste gas from dissipating into the air. At the same time, the condensate drain pipe at the bottom of the waste discharge seat can discharge the condensate generated by the condensation of water vapor in the waste discharge chamber, preventing condensate from flowing back into the electroplating tank and affecting the concentration and temperature of the electroplating solution. In addition, an air blowing pipe is set in the electroplating tank, and several air blowing holes are evenly opened on the air blowing pipe. By evenly introducing inert gas into the electroplating solution, the electroplating solution in the electroplating tank is stirred by the gas to ensure uniform flow of the electroplating solution in the electroplating tank, ensuring that the temperature and concentration of the electroplating solution are consistent, ensuring that the workpiece is in full contact with the electroplating solution during the electroplating process, and ensuring the electroplating effect. Attached Figure Description
[0014] Figure 1 This is an overall exploded structural diagram of this embodiment; Figure 2 yes Figure 1 Enlarged schematic diagram of part A; Figure 3 yes Figure 1 Enlarged diagram of part B; Figure 4 This is a cross-sectional view of the electroplating tank in this embodiment.
[0015] Reference numerals in the attached drawings: 1. Electroplating tank; 2. Heat exchange tank; 3. Heat exchange chamber; 4. Input pipe; 41. Output hole; 5. Heating circulation assembly; 51. Return output pipe; 52. Return tank; 54. Return input pipe; 55. First centrifugal pump; 56. Divider plate; 57. Preheating zone; 58. Return output zone; 59. Connecting pipe; 510. Second centrifugal pump; 6. Holding bracket; 61. Flow hole; 7. Overflow port; 8. Exhaust port; 9. Waste discharge seat; 11. Waste discharge tank; 12. Waste discharge pipe; 13. Condensate discharge pipe; 14. Air blowing pipe; 15. Air blowing hole. Detailed Implementation
[0016] The present invention will be further described in detail below with reference to the accompanying drawings.
[0017] Example: refer to Figures 1 to 4 A rapid heat exchange tank for electroless nickel plating includes an electroplating tank body 1 and a heat exchange tank body 2 surrounding the electroplating tank body 1. A heat exchange cavity 3 for containing a heat exchange medium is formed between the electroplating tank body 1 and the heat exchange tank body 2. An input pipe 4 for inputting the heat exchange medium into the heat exchange cavity 3 and a heating circulation component 5 for circulating heating of the heat exchange medium in the heat exchange cavity 3 are fixedly connected to the heat exchange tank body 2. Discharge pipes are provided at the bottom of both the electroplating tank body 1 and the heat exchange cavity 3 to discharge the electroplating solution and the heat exchange medium, respectively.
[0018] refer to Figure 1 and Figure 2 Specifically, the input pipe 4 has at least four pipes, which are evenly spaced vertically within the heat exchange chamber 3 and symmetrically arranged on both sides of the heat exchange chamber 3. Several output holes 41 for outputting the heat exchange medium are evenly opened along the length of the input pipe 4, so as to achieve uniform mixing of the input heat exchange medium with the heat exchange medium in the heat exchange chamber 3, avoid uneven contact between the traditional heater and the electroplating solution, which would lead to local heat concentration, and prevent the electroplating solution from changing its properties due to local overheating.
[0019] refer to Figure 1Specifically, the heating circulation assembly 5 includes several return output pipes 51 fixedly connected to the heat exchange tank 2 and communicating with the heat exchange cavity 3 for outputting the heat exchange medium. A return trough 52 for collecting and storing the heat exchange medium is connected outside the return output pipes 51. A heating rod for heating the heat exchange medium is fixedly installed inside the return trough 52. A return input pipe 54, communicating with the input pipe 4, is fixedly connected to the bottom of the return trough 52 to re-input the returned heat exchange medium into the heat exchange cavity 3. A first centrifugal pump 55 is fixedly connected to 54. The reflux tank 52 is set lower than the heat exchange chamber 3 so that the heat exchange medium in the heat exchange chamber 3 is transported to the reflux tank 52 through the reflux output pipe 51 by gravity. The heating circulation component 5 introduces the heat exchange medium in the heat exchange chamber 3 into the reflux tank 52 through the reflux output pipe 51 and heats the heat exchange medium through the heating rod. Then, the first centrifugal pump 55 inputs the heat exchange medium into the heat exchange chamber 3 through the reflux input pipe 54 and the input pipe 4 to realize the circulation heating of the heat exchange medium. A partition plate 56 is fixedly connected inside the reflux tank 52, dividing the reflux tank 52 into a preheating zone 57 and a reflux output zone 58. A reflux output pipe 51 is connected to the preheating zone 57, and a reflux input pipe 54 is connected to the reflux output zone 58. The preheating zone 57 and the reflux output zone 58 are connected by a connecting pipe 59. A second centrifugal pump 510 is fixedly connected to the connecting pipe 59 to send the heat exchange medium in the preheating zone 57 into the reflux output zone 58, so that the heat exchange medium is preheated through the preheating zone 57. The preheated heat exchange medium is fed into the reflux output zone 58 through the second centrifugal pump 510 and the connecting pipe 59, ensuring that the heat exchange medium in the reflux output zone 58 can be maintained within a certain temperature range. This avoids the heat exchange medium being insufficient or at a low temperature, which would affect the temperature of the electroplating solution. Thus, the temperature of the electroplating solution is stably controlled within a certain range, which can be adjusted according to the electroplating requirements. Temperature sensors are also installed in the heat exchange chamber 3, the preheating zone 57, and the reflux output zone 58 to achieve real-time measurement of the temperature of the heat exchange medium.
[0020] refer to Figure 1 Specifically, several retaining supports 6 are fixedly connected between the electroplating tank 1 and the heat exchange tank 2 to prevent deformation of the tank due to stress caused by temperature changes during heat exchange, thus ensuring the stability of the electroplating process. Several flow holes 61 are evenly distributed on the retaining supports 6 to allow the heat exchange medium to pass through, reducing the impact on the circulation flow rate of the heat exchange medium. An overflow port 7 and an exhaust port 8 are fixedly connected to the top of the heat exchange chamber 3 in the heat exchange tank 2 to discharge the heat exchange medium and expanding air. This ensures timely discharge of the heat exchange medium or expanding air that has expanded in volume due to temperature increases within the heat exchange chamber 3, preventing deformation of the heat exchange chamber 3 and affecting the electroplating process.
[0021] refer to Figure 3 and Figure 4 Specifically, waste discharge seats 9 are symmetrically fixedly connected to both sides of the electroplating tank 1. A waste discharge cavity is opened in the waste discharge seat 9. Several waste discharge grooves 11 are evenly opened along the length of the electroplating tank 1 for the passage of water vapor and waste gas generated by heating the electroplating solution. Waste discharge pipes 12 are fixedly connected to both ends of the waste discharge seat 9. A condensate discharge pipe 13 for discharging condensate is fixedly connected to the bottom of the waste discharge cavity of the waste discharge seat 9. Through the waste discharge cavity opened in the waste discharge seat 9 and the waste discharge grooves 11 evenly opened along the length of the electroplating tank 1, the water vapor generated during the heating of the electroplating solution and the waste gas generated during the electroplating process are quickly collected and discharged through the waste discharge pipe 12 to prevent the waste gas from dissipating into the air. At the same time, the condensate discharge pipe 13 at the bottom of the waste discharge seat 9 can discharge the condensate generated by the condensation of water vapor in the waste discharge cavity to prevent the condensate from flowing back into the electroplating tank 1 and affecting the concentration and temperature of the electroplating solution.
[0022] refer to Figure 4 Specifically, at least one air blowing pipe 14 is fixedly connected inside the electroplating tank 1 to ensure uniform temperature and concentration of the electroplating solution. The air blowing pipe 14 is evenly provided with several air blowing holes 15. By uniformly introducing inert gas into the electroplating solution, the electroplating solution in the electroplating tank 1 is stirred by the gas to ensure uniform flow, so as to ensure that the temperature and concentration of the electroplating solution are consistent, and to ensure that the workpiece and the electroplating solution are in full contact during the electroplating process, thus ensuring the electroplating effect.
[0023] Brief description of the operating principle: The heat exchange chamber 3 is formed by the heat exchange tank 2 surrounding the electroplating tank 1 to achieve uniform heating of the electroplating solution. The heat exchange medium is uniformly fed into the heat exchange chamber 3 by multiple input pipes 4 with uniform output holes 41, and the heat exchange medium is circulated and heated in a closed loop by the heating circulation component 5.
[0024] This specific embodiment is merely an explanation of the present utility model and is not intended to limit the present utility model. After reading this specification, those skilled in the art can make modifications to this embodiment that make creative contributions as needed, but as long as they are within the scope of the claims of the present utility model, they are protected by patent law.
Claims
1. A rapid heat exchange tank for electroless nickel plating, characterized in that, It includes an electroplating tank (1) and a heat exchange tank (2) arranged around the electroplating tank (1). A heat exchange cavity (3) for containing a heat exchange medium is formed between the electroplating tank (1) and the heat exchange tank (2). An input pipe (4) for inputting a heat exchange medium into the heat exchange cavity (3) and a heating circulation assembly (5) for circulating heating of the heat exchange medium in the heat exchange cavity (3) are respectively fixedly connected to the heat exchange tank (2).
2. The rapid heat exchange tank for electroless nickel plating according to claim 1, characterized in that, The input pipe (4) has at least 4 pipes, which are evenly spaced in the heat exchange cavity (3) and symmetrically arranged on both sides of the heat exchange cavity (3) along the vertical direction. The input pipe (4) has a number of output holes (41) evenly opened along the length direction for the output of the heat exchange medium, so as to realize the uniform mixing of the input heat exchange medium with the heat exchange medium in the heat exchange cavity (3).
3. A rapid heat exchange tank for electroless nickel plating according to claim 2, characterized in that, The heating circulation assembly (5) includes several return output pipes (51) fixedly connected to the heat exchange tank (2) and connected to the heat exchange cavity (3) for outputting the heat exchange medium. The return output pipes (51) are externally connected to a return tank (52) for collecting and storing the heat exchange medium. The return tank (52) is fixedly provided with a heating rod for heating the heat exchange medium. The bottom of the return tank (52) is fixedly connected to a return input pipe (54) connected to the input pipe (4) to realize the return of the heat exchange medium to be re-input into the heat exchange cavity (3). A first centrifugal pump (55) is fixedly connected to the return input pipe (54).
4. A rapid heat exchange tank for electroless nickel plating according to claim 3, characterized in that, A partition plate (56) is fixedly connected inside the reflux tank (52). The partition plate (56) divides the reflux tank (52) into a preheating zone (57) and a reflux output zone (58). The reflux output pipe (51) is connected to the preheating zone (57), and the reflux input pipe (54) is connected to the reflux output zone (58). The preheating zone (57) and the reflux output zone (58) are connected by a connecting pipe (59). A second centrifugal pump (510) is fixedly connected to the connecting pipe (59) for sending the heat exchange medium in the preheating zone (57) into the reflux output zone (58).
5. A rapid heat exchange tank for electroless nickel plating according to claim 1, characterized in that, A number of retaining brackets (6) are fixedly connected between the electroplating tank (1) and the heat exchange tank (2) to prevent the tank from deforming. A number of flow holes (61) for the heat exchange medium to pass through are evenly opened on the retaining brackets (6) to reduce the impact on the circulation flow of the heat exchange medium.
6. A rapid heat exchange tank for electroless nickel plating according to claim 5, characterized in that, The heat exchange tank (2) is fixedly connected to an overflow port (7) and an exhaust port (8) at the top of the heat exchange chamber (3) to facilitate the discharge of the heat exchange medium and the expanding air.
7. A rapid heat exchange tank for electroless nickel plating according to claim 1, characterized in that, The electroplating tank (1) is symmetrically and fixedly connected to two waste discharge seats (9). A waste discharge cavity is opened in the waste discharge seat (9). The waste discharge seat (9) is evenly provided with several waste discharge troughs (11) for supplying water vapor and waste gas generated by heating the electroplating solution. A waste discharge pipe (12) is fixedly connected to both ends of the waste discharge seat (9). A condensate discharge pipe (13) for discharging condensate is fixedly connected to the bottom of the waste discharge cavity of the waste discharge seat (9).
8. A rapid heat exchange tank for electroless nickel plating according to claim 1, characterized in that, At least one air blowing pipe (14) is fixedly connected inside the electroplating tank (1) to ensure uniform temperature and concentration of the electroplating solution. Several air blowing holes (15) are evenly opened on the air blowing pipe (14).