Heating apparatus and single crystal furnace
Patent Information
- Application Number
- CN202522125859.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-30
- Publication Date
- 2026-10-09
- Estimated Expiration
- 2035-09-30
AI Technical Summary
[0004]实用新型目的：本申请提供一种加热设备，用于解决线圈角度调整难度大的技术问题；本申请的另一目的在于提供一种单晶炉
[0030]有益效果：与相关技术相比，本申请实施例提供的加热设备及单晶炉，该加热设备包括线圈和调节装置；线圈适于设置于单晶炉的炉体内；调节装置的至少部分适于设置于炉体内，调节装置包括第一固定组件和调节组件，第一固定组件适于与单晶炉的炉体连接；调节组件与第一固定组件转动连接，调节组件与线圈连接。本申请通过设置调节装置来转动连接线圈和单晶炉的炉体，以便于转动线圈，从而降低调节线圈角度的难度，便于线圈找平。
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Figure CN224832938U_ABST
Abstract
Description
Technical Field
[0001] This application belongs to the technical field of single crystal production equipment, specifically involving heating equipment and single crystal furnaces. Background Technology
[0002] The coils inside the zone melting single crystal furnace are the core components of the furnace's heating system. The horizontal state of the coils directly determines the uniformity of the temperature gradient distribution within the thermal field. Any deviation in the coil's horizontal position will lead to abnormalities in the single crystal growth process, such as causing runaway melt flow (melt runaway).
[0003] However, due to the way the coil is connected to the furnace body, the process of adjusting the coil angle is quite complicated and difficult. Utility Model Content
[0004] The purpose of this utility model is to provide a heating device to solve the technical problem of the difficulty in adjusting the coil angle; another purpose of this application is to provide a single crystal furnace.
[0005] Technical solution: This application provides a heating device, including:
[0006] A coil, the coil being adapted to be disposed within the furnace body of a single crystal furnace;
[0007] An adjusting device, at least a portion of which is adapted to be disposed within the furnace body, the adjusting device comprising a first fixing component and an adjusting component, the first fixing component being adapted to be connected to the furnace body; the adjusting component being rotatably connected to the first fixing component and connected to the coil.
[0008] In some embodiments, the first fixing component includes:
[0009] A fixing member, the fixing member being adapted to be connected to the furnace body, and the adjusting component being rotatably connected to the fixing member;
[0010] A limiting member, which is movably disposed within the fixing member, is adapted to contact the adjusting assembly to limit the rotation of the adjusting assembly relative to the fixing member.
[0011] In some embodiments, the adjustment component includes:
[0012] A first conductor, which is electrically connected to the first electrode of the coil, and is insulated from the first fixing component;
[0013] The second conductor is electrically connected to the second electrode of the coil, and is insulated from the first conductor and the first fixing component.
[0014] In some embodiments, the first conductor passes through the second conductor.
[0015] In some embodiments, the first conductor is eccentrically positioned relative to the second conductor.
[0016] In some embodiments, the first conductor has a first flow channel, the second conductor has a second flow channel, the coil has a third flow channel, the first flow channel is connected to one end of the third flow channel, and the second flow channel is connected to the other end of the third flow channel.
[0017] In some embodiments, the first conductor has a first mounting hole on the side facing the coil, and the second conductor has a second mounting hole on the side facing the coil;
[0018] The coil includes:
[0019] ontology;
[0020] A first connecting portion is disposed on the body, the first connecting portion has a first through hole, and the first connecting portion is electrically connected to the first conductor;
[0021] A second connecting part is disposed on the body, the second connecting part has a second through hole, and the second connecting part is electrically connected to the second conductor;
[0022] A first connector is respectively disposed in the first through hole and the first conductor, and respectively connects the first connecting part and the first conductor;
[0023] The second connector passes through the second through hole and the second conductor respectively, and connects the second connecting part and the second conductor respectively.
[0024] In some embodiments, the heating device further includes a driving device, the driving device including a second fixing component and a driving component, the second fixing component being connected to the first fixing component, or adapted to be connected to the furnace body, the driving component being connected to the adjusting component, and the driving component being adapted to drive the adjusting component to rotate relative to the first fixing component.
[0025] In some embodiments, the heating device further includes a sensor connected to the regulating assembly and electrically connected to the driving device.
[0026] Accordingly, this application also provides a single crystal furnace, comprising:
[0027] Furnace body, the furnace body having a receiving cavity;
[0028] The heating device described in any of the above embodiments;
[0029] At least a portion of the adjusting device and the coil are disposed in the receiving cavity.
[0030] Beneficial Effects: Compared with related technologies, the heating device and single crystal furnace provided in this application include a coil and an adjusting device. The coil is adapted to be disposed within the furnace body of the single crystal furnace. At least a portion of the adjusting device is adapted to be disposed within the furnace body. The adjusting device includes a first fixing component and an adjusting component. The first fixing component is adapted to be connected to the furnace body of the single crystal furnace. The adjusting component is rotatably connected to the first fixing component and is connected to the coil. This application uses an adjusting device to rotatably connect the coil and the furnace body of the single crystal furnace, thereby facilitating the rotation of the coil, reducing the difficulty of adjusting the coil angle, and making coil leveling easier. Attached Figure Description
[0031] The technical solution and other beneficial effects of this application will become apparent from the following detailed description of specific embodiments in conjunction with the accompanying drawings.
[0032] Figure 1 This is a schematic diagram of the structure of the heating device provided in the embodiments of this application;
[0033] Figure 2 A cross-sectional view of the first conductor when the heating device provided in the embodiment of this application is installed inside a single crystal furnace;
[0034] Figure 3 A cross-sectional view of the second conductor when the heating device provided in the embodiment of this application is installed inside a single crystal furnace;
[0035] Figure 4 A cross-sectional view of the first and second connectors when the heating device provided in the embodiment of this application is installed in a single crystal furnace.
[0036] Explanation of reference numerals in the attached figures:
[0037] 100-Furnace body; 110-Receiving cavity; 200-Coil; 210-Third flow channel; 220-Body body; 230-First connecting part; 231-First through hole; 240-Second connecting part; 241-Second through hole; 250-First connecting piece; 260-Second connecting piece; 300-Adjusting device; 310-First fixing component; 311-Fixing piece; 312-Limiting piece; 320-Adjusting component; 321-First conductor; 322-First flow channel; 323-First mounting hole; 324-Second conductor; 325-Second flow channel; 326-Second mounting hole. Detailed Implementation
[0038] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.
[0039] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection, an electrical connection, or a connection that allows for mutual communication; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two elements or the interaction between two elements. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances. In the description of this application, "multiple" means two or more, unless otherwise expressly and specifically limited. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more features.
[0040] The following disclosure provides many different implementations or examples for carrying out different structures of this application. To simplify the disclosure of this application, the components and arrangements of specific examples are described below. Of course, these are merely examples and are not intended to limit this application.
[0041] The coil 200 inside the single crystal furnace is the core component of the furnace's heating system. The horizontal state of the coil directly determines the uniformity of the temperature gradient distribution within the thermal field. If the coil's horizontal position deviates, it will lead to abnormalities in the single crystal growth process, such as causing problems like runaway melt flow (melt run-through).
[0042] However, due to the connection method between coil 200 and furnace body 100, the process of adjusting the angle of coil 200 is relatively complicated and difficult.
[0043] To address the technical problem of the complexity and difficulty in adjusting the 200° angle of the coil, the first embodiment of this application provides a heating device. Please refer to... Figure 1 , Figure 2 , Figure 3 and Figure 4The heating device includes a coil 200 and an adjusting device 300; the coil 200 is adapted to be disposed in the receiving cavity 110; at least a portion of the adjusting device 300 is adapted to be disposed within the single crystal furnace body 100, the adjusting device 300 includes a first fixing component 310 and an adjusting component 320, the first fixing component 310 is adapted to be connected to the furnace body 100; the adjusting component 320 is rotatably connected to the first fixing component 310, and the adjusting component 320 is connected to the coil 200.
[0044] in, Figure 1 The arc-shaped arrows indicate the directions in which the adjusting component 320 can rotate relative to the first fixed component 310.
[0045] The first fixing component 310 is used to support the adjusting component 320 to limit the relative rotation and relative movement of the adjusting component 320 except for the relative rotation of the adjusting coil 200.
[0046] It is understandable that, since the adjusting component 320 can be rotatably connected to the first fixing component 310, the relative angle between the adjusting component 320 and the first fixing component 310 can be adjusted by their relative rotation.
[0047] In the above embodiment, by connecting the adjustment component 320 to the coil 200, the first fixing component 310, which is rotatable relative to the adjustment component 320, is adapted to be connected to the furnace body 100, so that the coil 200 can be rotatably connected to the furnace body 100, thereby allowing the coil 200 to rotate relative to the furnace body 100, facilitating the adjustment of the angle between the coil 200 and the furnace body 100, and reducing the difficulty of adjusting the angle of the coil 200.
[0048] In some embodiments, please refer to Figure 1 The first fixing component 310 includes a fixing member 311 and a limiting member 312. The fixing member 311 is adapted to be connected to the furnace body 100, and the adjusting component 320 is rotatably connected to the fixing member 311. The limiting member 312 is movably inserted through the fixing member 311 and is adapted to contact the adjusting component 320 to limit the rotation of the adjusting component 320 relative to the fixing member 311.
[0049] Specifically, the end of the limiting member 312 near the adjusting component 320 can abut against the adjusting component 320 and increase the pressure and friction between the adjusting component 320 and the first fixing component 310, thereby limiting the rotation of the adjusting component 320 relative to the first fixing component 310.
[0050] In some embodiments, the limiting member 312 is threadedly connected to the fixing member 311, and the fixing member 311 can move closer to or further away from the adjusting member 320 in the radial direction of the adjusting member 320 so as to abut or separate from the adjusting member 320.
[0051] Firstly, in the above embodiments, by setting the limiting member 312, the adjusting member 320 can be fixed after the coil 200 and the adjusting component 320 are adjusted to a suitable angle, so that the angle of the coil 200 is fixed and maintained, thus extending the maintenance cycle.
[0052] Secondly, in the above embodiments, by setting the limiting member 312, the relative rotation between the adjusting component 320 and the first fixing component 310 can be restricted, thereby allowing the damping when the first fixing component 310 and the adjusting component 320 rotate relative to each other, that is, reducing the frictional force when the first fixing component 310 and the adjusting component 320 rotate relative to each other, thereby making the torque required to adjust the coil 200 angle smaller, so as to further reduce the difficulty of adjusting the coil 200 angle.
[0053] In some embodiments, please refer to Figure 1 and Figure 4 The adjustment component 320 includes a first conductor 321 and a second conductor 324. The first conductor 321 is electrically connected to the first electrode of the coil 200 and is insulated from the first fixing component 310. The second conductor 324 is electrically connected to the second electrode of the coil 200 and is insulated from both the first conductor 321 and the first fixing component 310.
[0054] In some embodiments, the end of the first conductor 321 away from the first electrode is adapted to be connected to the first cable, and the end of the second conductor 324 away from the second electrode is adapted to be connected to the second cable. The first cable, the first conductor 321, the coil 200, the second conductor 324, and the second cable are connected, and the coil 200 can be powered.
[0055] It is understood that, since the adjustment assembly 320, which includes the first conductor 321 and the second conductor 324, is rotatable, the first cable and the second cable connected to the first conductor 321 and the second conductor 324 are flexible cables, so that they can deform when the adjustment assembly 320 rotates.
[0056] Specifically, the first conductor 321, the coil 200, and the second conductor 324 are connected in series.
[0057] In some embodiments, the outer surfaces of the first conductor 321 and the second conductor 324 are respectively covered with insulating layers so that the first conductor 321, the second conductor 324 and the first fixing component 310 are insulated from each other; in some embodiments, the outer surface of the first conductor 321 is covered with a first insulating layer and the outer surface of the second conductor 324 is covered with a second insulating layer.
[0058] In the above embodiment, by integrating the wire that powers the coil 200 into the adjustment assembly 320, the number of connecting parts required for the coil 200 is reduced when the coil 200 is assembled into the furnace body 100, and the number of parts around the coil 200 is also reduced, thereby reducing the possibility of interference when adjusting the angle of the coil 200 and further reducing the difficulty of adjusting the angle of the coil 200.
[0059] In some embodiments, please refer to Figure 1 The first conductor 321 is inserted inside the second conductor 324.
[0060] In the above embodiment, by passing the first conductor 321 through the second conductor 324, the first conductor 321 and the second conductor 324 can be kept relatively stationary, thereby reducing the possibility of friction between the insulation layer of the first conductor 321 and the second conductor 324, thereby reducing the risk of short circuit between the first conductor 321 and the second conductor 324 and loosening between the first conductor 321 and the second conductor 324, and improving the reliability of the adjustment device 300.
[0061] In some embodiments, please refer to Figure 1 and Figure 4 The first conductor 321 is eccentrically positioned relative to the second conductor 324.
[0062] Specifically, along the first direction, the distance between the first conductor 321 and the fixing member 311 is L1; along the second direction, the distance between the first conductor 321 and the fixing member 311 is L2, satisfying: L1 > L2, and the first direction and the second direction are opposite. That is, the portion of the second conductor 324 located on one side of the first conductor 321 along the first direction has a larger maximum dimension along the first direction, and the portion of the second conductor 324 located on one side of the first conductor 321 along the second direction has a smaller maximum dimension along the second direction.
[0063] In the above embodiment, by making the first conductor 321 eccentrically positioned relative to the second conductor 324, a wider area is provided for the coil 200 to be attached and connected to the second conductor 324 when the diameter of the second conductor 324 is small. This reduces the risk of the area where the coil 200 and the second conductor 324 are attached and connected coming into contact with the first conductor 321, thus reducing the risk of a short circuit and improving the reliability of the single crystal furnace. The portion where the coil 200 is attached and connected to the second conductor 324 is the second connection portion 240 of the coil 200 described below.
[0064] In some embodiments, please refer to Figure 1 , Figure 2 and Figure 3The first conductor 321 has a first flow channel 322, the second conductor 324 has a second flow channel 325, and the coil 200 has a third flow channel 210. The first flow channel 322 is connected to one end of the third flow channel 210, and the second flow channel 325 is connected to the other end of the third flow channel 210.
[0065] In some embodiments, the first flow channel 322 is used to supply liquid to the third flow channel 210, and the second flow channel 325 is used to drain liquid from the third flow channel 210; in some embodiments, the first flow channel 322 is used to drain liquid from the third flow channel 210, and the second flow channel 325 is used to supply liquid to the third flow channel 210.
[0066] In some embodiments, the side of the first flow channel 322 away from the third flow channel 210 is adapted to communicate with the first pipeline, and the side of the second flow channel 325 away from the third flow channel 210 is adapted to communicate with the second pipeline. The first pipeline, the first flow channel 322, the third flow channel 210, the second flow channel 325 and the second pipeline are connected, and the third flow channel 210 can be supplied with liquid.
[0067] It is understandable that, since the adjustment component 320 of the first flow channel 322 and the second flow channel 325 of the vault is rotatable, the first pipe and the second pipe connected to the first flow channel 322 and the second flow channel 325 are flexible pipes so that they can deform when the adjustment component 320 rotates.
[0068] In the above embodiment, by providing a first flow channel 322 and a second flow channel 325 that can communicate with the third flow channel 210 in the first conductor 321 and the second conductor 324, the liquid inlet pipe and the liquid outlet pipe are respectively integrated into the first conductor 321 and the second conductor 324. This further reduces the number of connecting parts required for the coil 200 when assembling the coil 200 into the furnace body 100, and reduces the number of parts around the coil 200, thereby reducing the possibility of interference when adjusting the angle of the coil 200 and further reducing the difficulty of adjusting the angle of the coil 200.
[0069] In some embodiments, the inner surfaces of the first waterway and the second waterway are respectively coated with an insulating layer.
[0070] In some embodiments, please refer to Figure 2 , Figure 3 and Figure 4The first conductor 321 has a first mounting hole 323 on the side facing the coil 200, and the second conductor 324 has a second mounting hole 326 on the side facing the coil 200. The coil 200 includes a body 220, a first connecting portion 230, a second connecting portion 240, a first connecting member 250, and a second connecting member 260. The first connecting portion 230 is disposed on the body 220 and has a first through hole 231, and is electrically connected to the first conductor 321. The second connecting portion 240 is disposed on the body 220 and has a second through hole 241, and is electrically connected to the second conductor 324. The first connecting member 250 passes through the first through hole 231 and the first conductor 321 respectively, and connects the first connecting portion 230 and the first conductor 321 respectively. The second connecting member 260 passes through the second through hole 241 and the second conductor 324 respectively, and connects the second connecting portion 240 and the second conductor 324 respectively.
[0071] In some embodiments, the first connector 250 and the second connector 260 are both bolts, the first mounting hole 323 and the second mounting hole 326 are both threaded holes, the first connector 250 is threadedly connected to the first conductor 321, and the second connector 260 is threadedly connected to the second conductor 324.
[0072] In the above embodiments, the first conductor 321 contacts the first connecting portion 230 and is connected through the first connector 250, which not only fixes the first connecting portion 230 to the first conductor 321, but also achieves an electrical connection between the first connecting portion 230 and the first conductor 321, thereby enabling electrical energy to be transferred between the first conductor 321 and the first connecting portion 230; similarly, the second conductor 324 is disconnected from the second connecting portion 240 and connected through the second connector 260, which not only fixes the second connecting portion 240 to the second conductor 324, but also achieves an electrical connection between the second connecting portion 240 and the second conductor 324, thereby enabling electrical energy to be transferred between the second conductor 324 and the second connecting portion 240.
[0073] In some embodiments, the heating device further includes a driving device, which includes a second fixing component and a driving component. The second fixing component is connected to the first fixing component 310, or the second fixing component is adapted to be connected to the housing. The driving component is connected to the adjusting component 320 and is adapted to drive the adjusting component 320 to rotate relative to the first fixing component 310.
[0074] In some embodiments, the drive component is rotatable relative to the second fixed component, and power is transmitted between the drive component and the adjustment component 320 through gears, belts, splines, etc., to drive the adjustment component 320 to rotate.
[0075] In some embodiments, the side of the adjusting component 320 away from the coil 200 is adapted to extend out of the furnace body 100, the driving device is adapted to be disposed outside the furnace body 100, the second fixing component is adapted to be connected to the furnace body 100, and the driving component is connected to the portion of the adjusting component 320 extending out of the furnace body 100.
[0076] In the above embodiments, by setting a driving device to achieve automatic adjustment of the coil 200 angle, the impact of narrow operating space on the coil 200 angle adjustment can be reduced, further reducing the difficulty of coil 200 adjustment. At the same time, setting a driving device can also further reduce the error caused by a single adjustment action, reduce the number of repeated adjustments, and improve the efficiency of coil 200 angle adjustment.
[0077] In some embodiments, the heating device further includes a sensor connected to the regulating assembly 320 and electrically connected to the driving device.
[0078] In some embodiments, the heating device further includes a controller, and the sensor and the drive device are electrically connected through the controller. The controller can receive signals from the sensor to control whether the drive device operates and the magnitude of the operation.
[0079] In the above embodiments, by setting a sensor, the angle of the coil 200 can be monitored, making it easier to confirm whether the angle needs adjustment and whether the angle adjustment is in place, thus making the timing of the coil 200 angle adjustment more flexible. Meanwhile, in some embodiments, by setting a sensor and a driving device, the driving device can automatically adjust the angle of the coil 200 according to the sensor signal, further reducing the difficulty of adjusting the coil 200 angle.
[0080] Accordingly, please refer to Figure 1 This application also provides a single crystal furnace, including a furnace body 100, the furnace body 100 having a receiving cavity 110; in any of the above embodiments, the heating device has a coil 200 disposed in the receiving cavity 110, and at least a portion of the adjusting device 300 disposed in the receiving cavity 110.
[0081] In some embodiments, please refer to Figure 2 , Figure 3 and Figure 4 In some embodiments, the adjustment device 300 is entirely located inside the housing; in others, a portion of the adjustment device 300 extends through the housing and out of the housing.
[0082] in, Figure 1 The arc-shaped arrows indicate the directions in which the adjusting component 320 can rotate relative to the first fixed component 310.
[0083] The first fixing component 310 is used to support the adjusting component 320 to limit the relative rotation and relative movement of the adjusting component 320, except for the relative rotation of the adjusting coil 200.
[0084] It is understandable that, since the adjusting component 320 can be rotatably connected to the first fixing component 310, the relative angle between the adjusting component 320 and the first fixing component 310 can be adjusted by their relative rotation.
[0085] In the above embodiment, by connecting the adjustment component 320 to the coil 200, the first fixing component 310, which can rotate relative to the adjustment component 320, is connected to the furnace body 100, so that the coil 200 can be rotatably connected to the furnace body 100, thereby allowing the coil 200 to rotate relative to the furnace body 100, facilitating the adjustment of the angle between the coil 200 and the furnace body 100, and reducing the difficulty of adjusting the angle of the coil 200.
[0086] The heating device and single crystal furnace provided in the embodiments of this application have been described in detail above. Specific examples have been used in this application to illustrate the principles and implementation methods of this application. The description of the above embodiments is only for the purpose of helping to understand the technical solutions and core ideas of this application. Those skilled in the art should understand that they can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. These modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.
Claims
1. A heating device, characterized in that, include: A coil (200), said coil (200) being adapted to be disposed within the furnace body (100) of a single crystal furnace; An adjusting device (300) is provided, at least a portion of which is adapted to be disposed within the furnace body (100). The adjusting device (300) includes a first fixing component (310) and an adjusting component (320). The first fixing component (310) is adapted to be connected to the furnace body (100). The adjusting component (320) is rotatably connected to the first fixing component (310) and is connected to the coil (200).
2. The heating device according to claim 1, characterized in that, The first fixing component (310) includes: A fixing member (311) is adapted to be connected to the furnace body (100), and the adjusting assembly (320) is rotatably connected to the fixing member (311); A limiting member (312) is movably disposed through the fixing member (311) and is adapted to contact the adjusting assembly (320) to limit the rotation of the adjusting assembly (320) relative to the fixing member (311).
3. The heating device according to claim 1, characterized in that, The adjustment component (320) includes: The first conductor (321) is electrically connected to the first electrode of the coil (200) and is insulated from the first fixing component (310). The second conductor (324) is electrically connected to the second electrode of the coil (200), and is insulated from the first conductor (321) and the first fixing component (310).
4. The heating device according to claim 3, characterized in that, The first conductor (321) passes through the second conductor (324).
5. The heating device according to claim 4, characterized in that, The first conductor (321) is eccentrically positioned relative to the second conductor (324).
6. The heating device according to claim 3, characterized in that, The first conductor (321) has a first flow channel (322), the second conductor (324) has a second flow channel (325), and the coil (200) has a third flow channel (210). The first flow channel (322) is connected to one end of the third flow channel (210), and the second flow channel (325) is connected to the other end of the third flow channel (210).
7. The heating device according to claim 3, characterized in that, The first conductor (321) has a first mounting hole (323) on the side facing the coil (200), and the second conductor (324) has a second mounting hole (326) on the side facing the coil (200); The coil (200) includes: Ontology(220); A first connecting portion (230) is disposed on the body (220), the first connecting portion (230) has a first through hole (231), and the first connecting portion (230) is electrically connected to the first conductor (321); A second connecting part (240) is disposed on the body (220), the second connecting part (240) has a second through hole (241), and the second connecting part (240) is electrically connected to the second conductor (324); The first connector (250) passes through the first through hole (231) and the first conductor (321) respectively, and connects the first connecting part (230) and the first conductor (321) respectively; The second connector (260) passes through the second through hole (241) and the second conductor (324) respectively, and connects the second connecting part (240) and the second conductor (324) respectively.
8. The heating device according to claim 1, characterized in that, The heating device further includes a driving device, which includes a second fixing component and a driving component. The second fixing component is connected to the first fixing component (310), or the second fixing component is adapted to be connected to the furnace body (100). The driving component is connected to the adjusting component (320), and the driving component is adapted to drive the adjusting component (320) to rotate relative to the first fixing component (310).
9. The heating device according to claim 8, characterized in that, The heating device also includes a sensor connected to the regulating assembly (320) and electrically connected to the driving device.
10. A single crystal furnace, characterized in that, include: A furnace body (100) having a receiving cavity (110); The heating device according to any one of claims 1 to 9, wherein the coil (200) is disposed in the receiving cavity (110), and at least a portion of the adjusting device (300) is disposed in the receiving cavity (110).