A new type of single crystal furnace
Patent Information
- Application Number
- CN202522152465.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-11
- Publication Date
- 2026-10-09
- Estimated Expiration
- 2035-10-11
AI Technical Summary
[0004]针对上述情况，本实用新型提供一种新型单晶炉，旨在解决传统36寸单晶炉的N型热场结构（专为生产N型单晶硅片设计的热场系统）中，气流会频繁冲刷高温部件（如碳碳埚帮）的技术问题
1、本申请优化了气流路径，气流依次流经导流筒、第一通道、第二通道、排气孔，减弱了气流对碳碳埚帮等高温部件的频繁冲刷，实现热场运行效率提升、能耗降低、设备安全性增强，从而推动单晶硅制造技术的整体升级。
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Figure CN224832940U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of single crystal silicon technology, and in particular to a novel single crystal furnace. Background Technology
[0002] like Figure 1 As shown, in the N-type hot zone structure of a traditional 36-inch single crystal furnace (a hot zone system designed specifically for the production of N-type single crystal silicon wafers), the airflow frequently washes over high-temperature components (such as the carbon crucible sides), resulting in serious heat loss, high energy consumption, rapid equipment corrosion, and frequent failures.
[0003] With the development of the photovoltaic industry, the technical requirements for monocrystalline silicon production are constantly increasing. This invention systematically modifies equipment components, optimizes airflow paths, and reduces the frequent scouring of high-temperature components by airflow, thereby improving thermal field operating efficiency, reducing energy consumption, and enhancing equipment safety, thus promoting the overall upgrade of monocrystalline silicon manufacturing technology. Summary of the Invention
[0004] In response to the above situation, this utility model provides a novel single crystal furnace, which aims to solve the technical problem that airflow frequently washes over high-temperature components (such as the carbon crucible sides) in the N-type thermal field structure of the traditional 36-inch single crystal furnace (a thermal field system designed specifically for the production of N-type single crystal silicon wafers).
[0005] To achieve the above objectives, this utility model provides the following technical solution: This utility model provides a novel single crystal furnace, comprising: a flow guide tube, a bottom insulation felt, and, from the outside to the inside, a furnace body, an outer cylinder, an inner insulation cylinder, a main heater, and a carbon-carbon crucible side; The top of the outer cylinder and the inner insulation cylinder have openings. A guide tube is installed at the opening of the outer cylinder. The lower part of the guide tube extends into the opening of the inner insulation cylinder and is located above the carbon crucible side. The bottom insulation felt is set at the bottom of the furnace body and has exhaust holes. in: A first channel is formed between the upper part of the carbon crucible side and the lower part of the outer cylinder; A second channel is formed between the outer cylinder and the inner insulation cylinder; The airflow flows sequentially through the guide tube, the first channel, the second channel, and the exhaust port.
[0006] In some embodiments of this utility model, the upper part of the outer cylinder is a first outer cylinder and the lower part is a second outer cylinder. The wall thickness of the second outer cylinder is less than the wall thickness of the first outer cylinder, and a shoulder is formed at the connection between the second outer cylinder and the first outer cylinder. The inner insulation cylinder is located below the shoulder.
[0007] In some embodiments of this utility model, the second outer cylinder is made of heat-insulating material.
[0008] In some embodiments of this utility model, the surface of the second outer cylinder is covered with thermal insulation material.
[0009] In some embodiments of this utility model, the middle part of the bottom insulation felt protrudes upward to form a convex part, and the vent hole is located near the convex part.
[0010] In some embodiments of this utility model, a plurality of the exhaust holes are arranged at circumferential intervals along the protrusion.
[0011] In some embodiments of this utility model, a flow-blocking component is provided at the top of the exhaust hole. The inner side of the flow-blocking component is connected to the outer edge of the protrusion of the bottom insulation felt, and the outer side is connected to the lower inner side of the inner insulation cylinder. A third channel is formed between the edge area of the bottom insulation felt and the flow-blocking component. The airflow flows sequentially through the guide tube, the first channel, the second channel, the third channel, and the exhaust port.
[0012] In some embodiments of this utility model, the flow blocking element is annular.
[0013] In some embodiments of this utility model, the flow-blocking component is made of heat-insulating material.
[0014] In some embodiments of this utility model, the flow-blocking component is made of the same material as the bottom insulation felt.
[0015] The embodiments of this utility model have at least the following advantages or beneficial effects: 1. This application optimizes the airflow path, with the airflow passing sequentially through the guide tube, the first channel, the second channel, and the exhaust port. This reduces the frequent scouring of high-temperature components such as the carbon crucible side by the airflow, thereby improving the operating efficiency of the thermal field, reducing energy consumption, and enhancing equipment safety, thus promoting the overall upgrade of monocrystalline silicon manufacturing technology.
[0016] 2. By optimizing the airflow path, the thermal field structure was improved, and the thermal field stability was enhanced: The improved thermal field structure significantly reduced thermal convection fluctuations and improved the temperature stability inside the furnace, thereby ensuring the quality of single crystal growth.
[0017] Other features and advantages of this invention will be set forth in the following description. Attached Figure Description
[0018] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0019] Figure 1 This is a schematic diagram of the structure of the 36-inch single crystal furnace provided in Example 1; Figure 2 Schematic diagrams of the novel single crystal furnaces provided in Examples 2 and 3; Figure 3 This is a schematic diagram of the structure of the novel single crystal furnace provided in Example 4.
[0020] Icon for Example 1: 11-Guide tube, 12-Bottom insulation felt, 13-Furnace body, 14-Shell, 15-Inner insulation tube, 16-Main heater, 17-Carbon crucible side, 18-Single crystal silicon rod, 19-Carbon support rod; Icons for Examples 2-4: 21-Guide tube, 22-Bottom insulation felt, 221-Exhaust hole, 222-Protrusion, 23-Furnace body, 25-Outer cylinder, 251-First outer cylinder, 252-Second outer cylinder, 253-Shoulder, 26-Inner insulation cylinder, 27-Main heater, 28-Carbon crucible side, 29-Carbon support rod, 31-First channel, 32-Second channel, 33-Blocking component, 34-Third channel. Detailed Implementation
[0021] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of the present invention.
[0022] In the description of the embodiments of this utility model, it should be understood that the terms "upper", "lower", "top", "bottom", "inner", "outer", "circumferential", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing the embodiments of this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this utility model.
[0023] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of embodiments of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.
[0024] In this embodiment of the invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this embodiment of the invention according to the specific circumstances.
[0025] The embodiments of this utility model will be described in detail below. Example
[0026] See Figure 1 To better understand the aforementioned background technology and the content of this embodiment, this embodiment first introduces a 36-inch single crystal furnace, which adopts an N-type thermal field structure; the 36-inch single crystal furnace includes a flow guide tube 11, a bottom insulation felt 12, and, from the outside to the inside, a furnace body 13, a shell 14, an inner insulation tube 15, a main heater 16, and a carbon crucible side 17.
[0027] The inner insulation cylinder 15 is tightly fitted to the shell 14. A guide cylinder 11 is installed on the top of the shell 14. The lower part of the guide cylinder 11 extends into the opening of the inner insulation cylinder 15 and is located above the carbon crucible side 17. The bottom insulation felt 12 is set at the bottom of the furnace body 13 and has an exhaust hole; the bottom of the carbon crucible side 17 is connected to a carbon support rod 19, which moves through the middle of the bottom insulation felt 12 and is used to raise and lower the carbon crucible side 17.
[0028] In the aforementioned 36-inch single crystal furnace, which adopts an N-type thermal field structure (a thermal field system specifically designed for the production of N-type single crystal silicon wafers), the airflow flows sequentially between the guide tube 11, the carbon-carbon crucible side 17, and the main heater 16, and through the exhaust port. The airflow frequently erodes high-temperature components such as the carbon-carbon crucible side 17 (graphite component) and the main heater 16, resulting in severe heat loss, high energy consumption, rapid equipment corrosion, and frequent malfunctions. Example
[0029] See Figures 1-2To address the aforementioned issues, this embodiment provides a novel single-crystal furnace, comprising a flow guide tube 21, a bottom insulation felt 22, and, from the outside to the inside, a furnace body 23, an outer cylinder 25, an inner insulation cylinder 26, a main heater 27, and a carbon crucible side 28.
[0030] The top of the outer cylinder 25 and the inner insulation cylinder 26 have openings. A guide tube 21 is installed at the opening of the outer cylinder 25. The lower part of the guide tube 21 extends into the opening of the inner insulation cylinder 26 and is located above the carbon crucible side 28. The bottom insulation felt 22 is set at the bottom of the furnace body 23 and has an exhaust hole 221; the bottom of the carbon crucible side 28 is connected to a carbon support rod 29, which moves through the middle of the bottom insulation felt 22 and is used to raise and lower the carbon crucible side 28. A first channel 31 is formed between the upper part of the carbon crucible side 28 and the lower part of the outer cylinder 25.
[0031] A second channel 32 is formed between the outer cylinder 25 and the inner insulation cylinder 26.
[0032] like Figure 2 As shown by the dashed line, the above scheme optimizes the airflow path. The airflow flows sequentially through the guide tube 21, the first channel 31, the second channel 32, and the exhaust port 221, which reduces the frequent scouring of high-temperature components such as the carbon crucible side 28 by the airflow. This improves the operating efficiency of the thermal field, reduces energy consumption, and enhances equipment safety, thereby promoting the overall upgrade of monocrystalline silicon manufacturing technology.
[0033] In addition, by optimizing the airflow path, the thermal field structure was improved, and the thermal field stability was enhanced: the improved thermal field structure significantly reduced thermal convection fluctuations and improved the temperature stability inside the furnace, thereby ensuring the quality of single crystal growth. Example
[0034] See Figures 1-2 This embodiment is a specific implementation of embodiment 2 in which a second channel 32 is formed between the outer cylinder 25 and the inner insulation cylinder 26.
[0035] The upper part of the outer cylinder 25 is the first outer cylinder 25125, and the lower part is the second outer cylinder 25225. The wall thickness of the second outer cylinder 25225 is less than that of the first outer cylinder 25125. A shoulder 253 is formed at the connection between the second outer cylinder 25225 and the first outer cylinder 25125. The guide cylinder 21 is connected to the first outer cylinder 25125 by bolts or other fasteners. The inner insulation cylinder 26 and the second channel 32 are located below the shoulder 253.
[0036] like Figure 1 As shown, in the prior art, the inner insulation cylinder 26 and the outer cylinder 25 are tightly fitted together; as Figure 2As shown, the above solution provided in this embodiment separates the inner insulation cylinder 26 and the outer cylinder 25, forming a second channel 32 between them, and drawing the airflow out from the second channel 32.
[0037] Furthermore, the second outer cylinder 25225 can be made of insulating material or the surface of the second outer cylinder 25225 can be covered with insulating material to achieve the insulating function. Example
[0038] See Figures 1-2 ,as well as Figure 3 This embodiment is an improvement on embodiment 2 or 3.
[0039] The middle part of the bottom insulation felt 22 protrudes upward to form a protrusion 222, and the vent 221 is disposed near the protrusion 222. Multiple vents 221 are arranged at intervals along the circumference of the protrusion 222.
[0040] The top of the vent 221 is provided with an annular flow blocking element 33. The inner side of the flow blocking element 33 is connected to the outer edge of the protrusion 222 of the bottom insulation felt 22, and the outer side is connected to the lower inner side of the inner insulation cylinder 26. A third channel 34 is formed between the edge area of the bottom insulation felt 22 and the flow blocking element 33.
[0041] In this embodiment, the airflow flows sequentially through the guide tube 21, the first channel 31, the second channel 32, the third channel 34, and the exhaust port 221 without any flow splitting, which better reduces the frequent scouring of the airflow on high-temperature components such as the carbon crucible side 28.
[0042] Furthermore, in order to enhance the heat preservation effect, the aforementioned flow blocking component 33 is made of heat preservation material, such as the same material as the bottom heat preservation felt 22.
[0043] It should be noted that in Embodiments 1 and 2, without adding the flow blocking component 33, although there is a certain flow diversion phenomenon (the airflow is diverted after passing through the guide tube 21, with one part entering the first channel 31 and the second channel 32, and the other part possibly entering the original path), it can still improve the frequent scouring of high-temperature components such as the carbon crucible side 28 by the airflow (better than the prior art).
[0044] Finally, it should be noted that the above are merely preferred embodiments of this application and are not intended to limit this application. For those skilled in the art, this application can have various modifications and variations. Without conflict, the embodiments and features described in the embodiments of this application can be arbitrarily combined with each other. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.
Claims
1. A novel single crystal furnace, characterized in that, include: The flow guide tube, the bottom insulation felt, and, from the outside to the inside, the furnace body, the outer cylinder, the inner insulation cylinder, the main heater and the carbon crucible side; The outer cylinder and the inner insulation cylinder have openings at their tops. The guide tube is installed at the opening of the outer cylinder. The lower part of the guide tube extends into the opening of the inner insulation cylinder and is located above the carbon crucible side. The bottom insulation felt is disposed at the bottom of the furnace body and has exhaust holes. in: A first channel is formed between the upper part of the carbon crucible side and the lower part of the outer cylinder; A second channel is formed between the outer cylinder and the inner insulation cylinder; The airflow flows sequentially through the guide tube, the first channel, the second channel, and the exhaust port.
2. The novel single crystal furnace according to claim 1, characterized in that, The upper part of the outer cylinder is a first outer cylinder and the lower part is a second outer cylinder. The wall thickness of the second outer cylinder is less than that of the first outer cylinder. A shoulder is formed at the connection between the second outer cylinder and the first outer cylinder. The inner insulation cylinder is located below the shoulder.
3. The novel single crystal furnace according to claim 2, characterized in that, The second outer cylinder is made of heat-insulating material.
4. The novel single crystal furnace according to claim 2, characterized in that, The surface of the second outer cylinder is covered with thermal insulation material.
5. The novel single crystal furnace according to any one of claims 1 to 4, characterized in that, The bottom insulation felt has an upward convex part in the middle, and the vent is located near the convex part.
6. The novel single crystal furnace according to claim 5, characterized in that, The plurality of exhaust holes are arranged at circumferential intervals along the protrusion.
7. The novel single crystal furnace according to claim 5, characterized in that, A flow-blocking component is provided at the top of the exhaust port. The inner side of the flow-blocking component is connected to the outer edge of the protrusion of the bottom insulation felt, and the outer side is connected to the lower inner side of the inner insulation cylinder. A third channel is formed between the edge area of the bottom insulation felt and the flow-blocking component. The airflow flows sequentially through the guide tube, the first channel, the second channel, the third channel, and the exhaust port.
8. The novel single crystal furnace according to claim 7, characterized in that, The flow-blocking component is annular.
9. The novel single crystal furnace according to claim 7, characterized in that, The flow-blocking component is made of heat-insulating material.
10. The novel single crystal furnace according to claim 9, characterized in that, The flow-blocking component is made of the same material as the bottom insulation felt.