A device for extracting a single crystal silicon rod after rod dropping of a single crystal furnace
Patent Information
- Application Number
- CN202522265030.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-27
- Publication Date
- 2026-10-09
- Estimated Expiration
- 2035-10-27
AI Technical Summary
[0002]单晶硅是指硅原子以规则的金刚石晶格结构排列形成的单晶体,具有纯度高、导电性可控、机械强度高且化学性质稳定等特性,其核心作用是作为电子信息产业中实现电能转换、信号传输与存储的关键半导体材料;在电子领域,它是制造芯片、晶体管、二极管等核心元器件的基础,通过掺杂不同元素调整导电性能,支撑计算机、通信设备等电子产品的运行;在光伏领域,单晶硅可制成高效光伏电池片,能将太阳能直接转化为电能,是光伏电站、太阳能热水器等光伏产品的核心组件;而在单晶硅生产领域,单晶炉是制造高纯度单晶硅棒的核心装备,且广泛应用于光伏产业和半导体芯片制造等关键行业,在单晶生长过程中,受多方面因素影响,极易发生掉棒事故,从晶体生长工艺来看,温度梯度异常会致使硅棒生长时受力不均匀,拉晶速度突变则可能使硅棒与籽晶连接部位因承受不住应力而断裂;从设备机械角度分析,提拉系统卡顿会让硅棒在提拉过程中突然失去平衡,籽晶夹持装置松动会直接导致籽晶与硅棒的连接失效;此外,突发震动、电力波动等环境干扰,也会破坏单晶生长的稳定状态,进而引发掉棒;掉棒后,高温熔融或处于红热状态的硅棒会滞留于坩埚内,若不及时处理,会造成坩埚壁侵蚀、硅料凝固结块,甚至引发设备内部短路、热应力集中损坏炉体结构等严重后果,大幅增加设备维修成本与停机时间;然而,现有处理掉棒的手段存在明显局限性,人工操作时,工作人员需穿戴防护装备进入高温、高辐射的环境,使用钨丝绳等简易工具对残棒进行简单捆绑以移除,这种方式效率低下,而且工作人员面临着高温烫伤的危险,同时简易工具抓取不稳定,难以保持残棒垂直,极易导致残棒二次滑落,进一步加剧设备损坏和生产损失,所以,本领域技术人员提供了一种单晶炉掉棒后单晶硅棒的提取装置,以解决上述背景技术中提出的问题
[0014]1.使用中,首先,装置本质为上下两层环形夹持组件构成的笼状框架,上层以上弧形夹臂为核心,下层以下弧形夹臂为核心,两者通过两侧边缘处的竖向连接架固定连接,竖向连接架选用高强度耐热合金材质,确保上下层夹臂同轴度的同时,能承受单晶硅棒的重量且在单晶炉高温环境下不变形;上、下弧形夹臂上均对称开设有两个开口,一侧开口通过连接结构实现转动连接,另一侧通过弹性锁定结构实现开合锁定,配合形成可调节的夹持空间;
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Figure CN224832943U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of extraction device technology, specifically an extraction device for single crystal silicon rods after they fall off a single crystal furnace. Background Technology
[0002] Monocrystalline silicon refers to a single crystal formed by silicon atoms arranged in a regular diamond lattice structure. It possesses characteristics such as high purity, controllable conductivity, high mechanical strength, and stable chemical properties. Its core role is as a key semiconductor material in the electronics and information industry, enabling power conversion, signal transmission, and storage. In the electronics field, it is the foundation for manufacturing core components such as chips, transistors, and diodes. By doping with different elements, its conductivity is adjusted to support the operation of electronic products such as computers and communication equipment. In the photovoltaic field, monocrystalline silicon can be made into high-efficiency photovoltaic cells, directly converting solar energy into electrical energy. It is a core component of photovoltaic power plants, solar water heaters, and other photovoltaic products. In the monocrystalline silicon production field, the monocrystalline furnace is the core equipment for manufacturing high-purity monocrystalline silicon rods and is widely used in key industries such as photovoltaics and semiconductor chip manufacturing. During the monocrystalline growth process, due to various factors, rod breakage accidents are highly likely to occur. From the perspective of crystal growth technology, abnormal temperature gradients can cause uneven stress on the silicon rod during growth, while sudden changes in the pulling speed can cause the connection between the silicon rod and the seed crystal to break due to insufficient stress. From the perspective of equipment mechanics, the Czochralski system... System jamming can cause silicon rods to suddenly lose balance during the pulling process, and loosening of the seed crystal clamping device can directly lead to the failure of the connection between the seed crystal and the silicon rod. In addition, sudden vibrations, power fluctuations and other environmental interferences can also disrupt the stable state of single crystal growth, thus causing the rod to fall off. After falling off, the silicon rod, which is molten at high temperature or in a red-hot state, will remain in the crucible. If it is not handled in time, it will cause crucible wall erosion, silicon material solidification and agglomeration, and even cause serious consequences such as internal short circuits and thermal stress concentration damaging the furnace structure, significantly increasing equipment maintenance costs and downtime. However, existing methods for handling fallen rods have obvious limitations. When operating manually, workers need to wear protective equipment to enter a high-temperature and high-radiation environment and use simple tools such as tungsten wire ropes to simply tie the remaining rod for removal. This method is inefficient, and workers face the risk of high-temperature burns. At the same time, the simple tools are unstable and it is difficult to keep the remaining rod vertical, which can easily cause the remaining rod to slip again, further aggravating equipment damage and production losses. Therefore, those skilled in the art have provided a device for extracting single crystal silicon rods after falling off in a single crystal furnace to solve the problems mentioned in the background art. Utility Model Content
[0003] The purpose of this invention is to provide a device for extracting single-crystal silicon rods after they fall off a single-crystal furnace, so as to solve the problems mentioned in the background art.
[0004] To achieve the above objectives, this utility model provides the following technical solution:
[0005] A device for extracting a single-crystal silicon rod after it falls off a single-crystal furnace includes a connecting structure, an elastic locking structure, and an upper arc-shaped clamping arm. Vertical connecting frames are fixedly connected to both sides of the bottom edge of the upper arc-shaped clamping arm. The bottom of the two vertical connecting frames is fixedly connected by a lower arc-shaped clamping arm. Two openings are symmetrically opened on both the lower arc-shaped clamping arm and the upper arc-shaped clamping arm. The opening on one side is connected by the connecting structure, and the opening on the other side is connected by the elastic locking structure.
[0006] As a further embodiment of this utility model: the connection structure includes a connecting shaft, a first connecting plate, a first mounting plate, a first collar, a second collar, a second mounting plate, and a second connecting plate. Three first collars are rotatably connected at equal intervals on the connecting shaft, and a first connecting plate is fixedly connected to one side of each first collar.
[0007] As a further embodiment of this utility model: the first connecting plate is fixedly connected to the side away from the first collar by the first mounting plate, and two second collars are rotatably connected to the connecting shaft between the three first collars.
[0008] As a further improvement of this utility model: a second connecting plate is fixedly connected to one side of the second collar, and the side of the second connecting plate away from the second collar is fixedly connected by a second mounting plate.
[0009] As a further embodiment of this utility model: the elastic locking structure includes a first fixing block, a telescopic spring, a raised button, a second fixing block, a slot, a locking block, and a third fixing block. The telescopic spring is fixedly connected to one side of the first fixing block, and the third fixing block is fixedly connected to the other side of the telescopic spring.
[0010] As a further improvement of this utility model: the upper and lower parts of the third fixing block away from the telescopic spring are fixedly connected to the locking blocks, and the top and bottom of the two locking blocks are respectively connected to the protruding buttons by springs.
[0011] As a further improvement of this utility model: the second fixing block has a card slot corresponding to the card block, and the card slot is embeddedly connected to the card block.
[0012] As a further embodiment of this utility model: the upper parts of both sides of the upper arc-shaped clamping arm are symmetrically fixedly connected with connecting ear seats, and the first mounting plate and the second mounting plate on the two connecting structures and the first fixing block and the second fixing block on the two elastic locking structures are respectively fixedly connected to the corresponding arc-shaped clamping arms.
[0013] Compared with the prior art, the beneficial effects of this utility model are:
[0014] 1. In use, the device is essentially a cage-like frame composed of two layers of annular clamping components. The upper layer has an upper arc-shaped clamping arm as its core, and the lower layer has a lower arc-shaped clamping arm as its core. The two are fixedly connected by vertical connecting frames at both sides. The vertical connecting frames are made of high-strength heat-resistant alloy material to ensure the coaxiality of the upper and lower clamping arms while being able to withstand the weight of the single crystal silicon rod and not deform in the high-temperature environment of the single crystal furnace. Two openings are symmetrically opened on both the upper and lower arc-shaped clamping arms. One side of the opening is connected by a connecting structure to achieve rotation, and the other side is opened and locked by an elastic locking structure, which together form an adjustable clamping space.
[0015] 2. Press the raised button on the clamping block to retract it and release the engagement with the second fixing block. Then, rotate the upper and lower arc-shaped clamping arms around the connecting shaft of the connecting structure to open them. The collar of the connecting structure will unfold alternately with the rotation of the clamping arms to increase the clamping space until the inner diameter of the clamping arms matches the diameter of the single crystal silicon rod. Then, align the pre-adjusted device with the falling single crystal silicon rod from top to bottom. The vertical connecting frame ensures that the upper and lower arc-shaped clamping arms always remain coaxial to avoid difficulty in fitting due to misalignment. Slowly move the device so that the inner arc surfaces of the upper and lower arc-shaped clamping arms fit against the cylindrical surface of the silicon rod. At this time, the collar and connecting plate in the connecting structure are slightly adjusted according to the actual shape of the silicon rod to ensure that the clamping arms are in full contact with the rod. Because the curvature of the clamping arms matches the diameter tolerance, even if the silicon rod has slight deformation, it can still fit.
[0016] 3. Next, after confirming that the clamping arm is in contact with the rod, pull the third fixing block to move quickly towards the second fixing block. The locking block is precisely inserted into the corresponding slot under the guidance. When the locking block is fully embedded, the protruding button automatically pops out under the action of the spring, and then engages with the outer wall of the second fixing block, thereby completing the closing and locking of the clamping arm. At this time, the upper and lower arc-shaped clamping arms tightly hug the outer surface of the silicon rod, and the collar in the connecting structure returns to the staggered fit state. Through the support of the first and second connecting plates and the mounting plate, the clamping force is evenly transmitted to the entire clamping arm to ensure that the clamping force is stable and will not loosen due to the weight of the rod.
[0017] 4. Finally, the hooks of the lifting equipment are connected to the connecting lugs on both sides of the upper arc-shaped clamping arm. The diameter of the connecting lugs is precisely matched with the lifting hook to ensure a reliable connection. After the lifting equipment is started, the connecting lugs apply upward force, and the entire device and the single crystal silicon rod form a stable whole. The cage-like frame formed by the vertical connecting frame and the arc-shaped clamping arm maintains its shape stability during the lifting process with sufficient structural strength, without bending or deformation, and finally smoothly lifts the single crystal silicon rod away from the single crystal furnace. Attached Figure Description
[0018] Figure 1 This is a schematic diagram of a device for extracting single-crystal silicon rods after they have fallen off a single-crystal furnace.
[0019] Figure 2This is a schematic diagram of the side structure of a device for extracting single-crystal silicon rods after they have fallen from a single-crystal furnace.
[0020] Figure 3 This is a schematic diagram of the upper arc-shaped clamping arm structure in a device for extracting single-crystal silicon rods after they have fallen from a single-crystal furnace.
[0021] Figure 4 This is a schematic diagram of the lower arc-shaped clamping arm structure in a device for extracting single-crystal silicon rods after they have fallen from a single-crystal furnace.
[0022] Figure 5 This is a schematic diagram of the connection structure in a device for extracting single-crystal silicon rods after they have fallen from a single-crystal furnace.
[0023] Figure 6 This is a schematic diagram of the elastic locking structure in a device for extracting a single-crystal silicon rod after it has fallen from a single-crystal furnace.
[0024] In the diagram: 1. Vertical connecting frame; 2. Connecting ear seat; 3. Connecting structure; 31. Connecting shaft; 32. First connecting plate; 33. First mounting plate; 34. First collar; 35. Second collar; 36. Second mounting plate; 37. Second connecting plate; 4. Elastic locking structure; 41. First fixing block; 42. Telescopic spring; 43. Raised button; 44. Second fixing block; 45. Slot; 46. Locking block; 47. Third fixing block; 5. Upper arc-shaped clamping arm; 6. Lower arc-shaped clamping arm; 7. Opening. Detailed Implementation
[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0026] Example 1
[0027] Reference Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 6This embodiment provides a device for extracting a single-crystal silicon rod after it falls off a single-crystal furnace. It includes a connecting structure 3, an elastic locking structure 4, and an upper arc-shaped clamping arm 5. Vertical connecting frames 1 are fixedly connected to both sides of the bottom edge of the upper arc-shaped clamping arm 5. The bottom of the two vertical connecting frames 1 is fixedly connected by a lower arc-shaped clamping arm 6. Two openings 7 are symmetrically opened on both the lower arc-shaped clamping arm 6 and the upper arc-shaped clamping arm 5. One side of the opening 7 is connected by the connecting structure 3, and the other side is connected by the elastic locking structure 4. The device is essentially a cage-like frame composed of two layers of annular clamping components. The upper arc-shaped clamping arm 5 is the core of the upper layer, and the lower arc-shaped clamping arm 6 is the core of the lower layer. The two are fixedly connected by the vertical connecting frames 1 at both sides. The vertical connecting frames 1 are made of high-strength heat-resistant alloy material to ensure the coaxiality of the upper and lower clamping arms while bearing the weight of the single-crystal silicon rod and preventing deformation under the high temperature environment of the single-crystal furnace. The upper arc-shaped clamping arm 5 and the lower arc-shaped clamping arm 6... Two openings 7 are symmetrically provided on each side. One side of the opening 7 is rotatably connected through the connecting structure 3, and the other side is opened and locked through the elastic locking structure 4, forming an adjustable clamping space. Connecting lugs 2 are symmetrically fixedly connected to the upper part of both sides of the upper arc-shaped clamping arm 5. The first mounting plate 33 and the second mounting plate 36 on the two connecting structures 3 and the first fixing block 41 and the second fixing block 44 on the two elastic locking structures 4 are respectively fixedly connected to the corresponding arc-shaped clamping arms. The hooks of the lifting equipment are connected through the connecting lugs 2 on both sides of the upper arc-shaped clamping arm 5. The hole diameter of the connecting lug 2 is precisely matched with the lifting hook to ensure reliable connection. After the lifting equipment is started, the connecting lugs 2 apply upward force, and the entire device and the single crystal silicon rod form a stable whole. The cage-like frame formed by the vertical connecting frame 1 and the arc-shaped clamping arm maintains a stable shape during the lifting process with sufficient structural strength, without bending or deformation, and finally smoothly lifts the single crystal silicon rod away from the single crystal furnace.
[0028] Example 2
[0029] Reference Figure 1-6This embodiment is based on the previous embodiment, but differs in that the connecting structure 3 includes a connecting shaft 31, a first connecting plate 32, a first mounting plate 33, a first collar 34, a second collar 35, a second mounting plate 36, and a second connecting plate 37. Three first collars 34 are equidistantly rotatably connected to the connecting shaft 31. A first connecting plate 32 is fixedly connected to one side of each first collar 34. The side of the first connecting plate 32 away from the first collar 34 is fixedly connected via the first mounting plate 33. Two second collars 35 are alternately rotatably connected to the connecting shaft 31 among the three first collars 34. A second connecting plate 37 is fixedly connected to one side of each second collar 35. The side of the second connecting plate 37 away from the second collar 35... The device is fixedly connected via the second mounting plate 36. Pressing the protruding button 43 on the locking block 46 causes it to retract, releasing the engagement with the second fixing block 44. Then, the upper arc-shaped clamping arm 5 and the lower arc-shaped clamping arm 6 rotate around the connecting shaft 31 of the connecting structure 3 to open. The collar of the connecting structure 3 will unfold alternately with the rotation of the clamping arms, increasing the clamping space until the inner diameter of the clamping arms matches the diameter of the single crystal silicon rod. Subsequently, the pre-adjusted device is aligned with the falling single crystal silicon rod from top to bottom. The vertical connecting frame 1 ensures that the upper arc-shaped clamping arm 5 and the lower arc-shaped clamping arm 6 always remain coaxial to avoid difficulty in fitting due to misalignment. The device is slowly moved so that the inner arc surfaces of the upper arc-shaped clamping arm 5 and the lower arc-shaped clamping arm 6 fit against the cylindrical surface of the silicon rod. At this time, the collar in the connecting structure 3 and the connecting plate are aligned according to... The actual shape of the silicon rod is finely adjusted at the angle to ensure full contact between the clamping arm and the rod body. Because the curvature of the clamping arm is adapted to the diameter tolerance, even slight deformation of the silicon rod can achieve a close fit. The elastic locking structure 4 includes a first fixing block 41, a telescopic spring 42, a raised button 43, a second fixing block 44, a slot 45, a locking block 46, and a third fixing block 47. The first fixing block 41 is fixedly connected to one side of the telescopic spring 42, and the third fixing block 47 is fixedly connected to the other side of the telescopic spring 42. Locking blocks 46 are fixedly connected to the upper and lower parts of the third fixing block 47 on the side away from the telescopic spring 42. The top and bottom of the two locking blocks 46 are respectively movably connected to the raised button 43 via springs. The second fixing block 44 has openings corresponding to the locking blocks 46. The corresponding slot 45 is embedded and connected to the slot 46. After confirming that the clamping arm fits the rod, the third fixing block 47 is pulled to move quickly towards the second fixing block 44. Under the guidance, the slot 46 is accurately inserted into the corresponding slot 45. When the slot 46 is fully embedded, the raised button 43 automatically pops out under the action of the spring, and then engages with the outer wall of the second fixing block 44, thereby completing the closing and locking of the clamping arm. At this time, the upper arc-shaped clamping arm 5 and the lower arc-shaped clamping arm 6 tightly hug the outer surface of the silicon rod. The collar in the connecting structure 3 returns to the staggered fit state. Through the support of the first and second connecting plates and the mounting plate, the clamping force is evenly transmitted to the entire clamping arm to ensure that the clamping force is stable and will not loosen due to the weight of the rod.
[0030] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.
[0031] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.
Claims
1. A device for extracting a single-crystal silicon rod after it falls off a single-crystal furnace, comprising a connecting structure (3), an elastic locking structure (4), and an upper arc-shaped clamping arm (5), characterized in that, Vertical connecting frames (1) are fixedly connected to both sides of the bottom edge of the upper arc-shaped clamping arm (5). The bottom of the two vertical connecting frames (1) is fixedly connected by the lower arc-shaped clamping arm (6). Two openings (7) are symmetrically opened on the lower arc-shaped clamping arm (6) and the upper arc-shaped clamping arm (5). The opening (7) on one side is connected by the connecting structure (3), and the opening (7) on the other side is connected by the elastic locking structure (4).
2. The device for extracting single-crystal silicon rods after they fall off a single-crystal furnace according to claim 1, characterized in that, The connection structure (3) includes a connecting shaft (31), a first connecting plate (32), a first mounting plate (33), a first collar (34), a second collar (35), a second mounting plate (36), and a second connecting plate (37). Three first collars (34) are rotatably connected at equal intervals on the connecting shaft (31), and a first connecting plate (32) is fixedly connected to one side of each first collar (34).
3. The device for extracting single-crystal silicon rods after they fall off a single-crystal furnace according to claim 2, characterized in that, The first connecting plate (32) is fixedly connected to the side away from the first sleeve ring (34) by the first mounting plate (33), and two second sleeve rings (35) are alternately rotatably connected on the connecting shaft (31) between the three first sleeve rings (34).
4. The device for extracting single-crystal silicon rods after they fall off a single-crystal furnace according to claim 2, characterized in that, The second connecting plate (37) is fixedly connected to one side of the second collar (35), and the side of the second connecting plate (37) away from the second collar (35) is fixedly connected by the second mounting plate (36).
5. The device for extracting single-crystal silicon rods after they fall off a single-crystal furnace according to claim 1, characterized in that, The elastic locking structure (4) includes a first fixing block (41), a telescopic spring (42), a raised button (43), a second fixing block (44), a slot (45), a locking block (46), and a third fixing block (47). The first fixing block (41) is fixedly connected to the telescopic spring (42) on one side, and the telescopic spring (42) is fixedly connected to the third fixing block (47) on the other side.
6. The device for extracting single-crystal silicon rods after they fall off in a single-crystal furnace according to claim 5, characterized in that, The third fixing block (47) is fixedly connected to the upper and lower parts of the side away from the telescopic spring (42) with a locking block (46), and the top and bottom of the two locking blocks (46) are respectively connected to a protruding button (43) by a spring.
7. The device for extracting single-crystal silicon rods after they fall off in a single-crystal furnace according to claim 5, characterized in that, The second fixing block (44) has a card slot (45) corresponding to the card block (46), and the card slot (45) is embeddedly connected to the card block (46).
8. The device for extracting single-crystal silicon rods after they fall off a single-crystal furnace according to claim 1, characterized in that, The upper arc-shaped clamping arm (5) is symmetrically fixedly connected to the upper part of the two sides with connecting ear seats (2). The first mounting plate (33) and the second mounting plate (36) on the two connecting structures (3) are fixedly connected to the corresponding arc-shaped clamping arm with the first fixing block (41) and the second fixing block (44) on the two elastic locking structures (4).