A crucible cover and a crucible arrangement
Patent Information
- Application Number
- CN202522327633.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-31
- Publication Date
- 2026-10-09
- Estimated Expiration
- 2035-10-31
AI Technical Summary
每次晶体生长完成后，籽晶与坩埚盖之间的粘接面会残留石墨箔、粘接剂以及蔓延的碳化硅结晶，这些残留物极其坚硬且化学性质稳定，难以无损清除，导致坩埚盖无法重复使用，生产成本高；在生长结束后为了取出晶体，通常需要破坏性地敲击坩埚盖，存在磕碰导致损坏晶体的风险，其坩埚盖重量较大也影响将其转移至匀胶机上进行表面匀胶的操作，对粘接工艺实施造成不便
[0021]该坩埚盖通过上盖主体的第一安装孔、晶体粘接件的第二安装孔和紧固件的配合结构，能够使晶体粘接件和上盖主体形成可拆卸连接的结构，即晶体粘接件可以与上盖主体组装成一个完整的坩埚盖，也可以在需要拆卸时将晶体粘接件从上盖主体上拆卸下来，该紧固件与孔体配合的连接结构具有操作简单方便、连接稳固、拆卸方便的特点，且不会影响晶体粘接件背离所述上盖主体的表面用于籽晶粘接的平整性；在将该组装好的坩埚盖安装在坩埚装置用于碳化硅晶体生长时，晶体粘接件作为碳化硅晶体接触的结构，可以仅更换晶体粘接件即可重复进行晶体生长，而上盖主体可以重复使用，能够极大地降低耗材成本，且生长结束后，只需将晶体粘接件拆下，再掰下晶体粘接件即可轻松、安全地将晶体与晶体粘接件分离，有效降低在取晶过程中损坏晶体的风险，且晶体粘接件轻薄且平整的结构也容易转移至匀胶机进行表面匀胶操作，提高匀胶的便捷性。
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Figure CN224832945U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of silicon carbide crystal preparation technology, and in particular to a crucible lid and crucible device. Background Technology
[0002] Silicon carbide (SiC), as a representative of third-generation wide-bandgap semiconductor materials, has shown great application potential in the fields of high-temperature, high-frequency, high-power, and radiation-resistant electronic devices due to its excellent physicochemical properties such as wide bandgap, high breakdown electric field, high thermal conductivity, and high electron saturation drift velocity. It is gradually becoming a core material for manufacturing power electronic devices in high-end equipment such as new energy vehicles, rail transit, and smart grids.
[0003] Currently, the mainstream methods for preparing silicon carbide single crystals include physical vapor transport (PVT) and high-temperature chemical vapor deposition (HTCVD). Among them, PVT is the most widely used technology for industrial-scale growth of large-size, high-quality silicon carbide single crystals due to its relatively simple equipment and mature process. The basic principle of PVT is as follows: high-purity silicon carbide powder is placed in the high-temperature zone of a graphite crucible, where it sublimates at temperatures exceeding 2000°C, decomposing into various gaseous components containing silicon, carbon, and other elements. These gaseous components are transported to the relatively cool surface of a seed crystal under an inert gas atmosphere, reaching a supersaturated state, and then recrystallize on the seed crystal, thereby achieving homoepitaxial growth of silicon carbide single crystals. The entire reaction process must be carried out in a precisely designed and sealed graphite crucible.
[0004] In this process system, the crucible lid, as a key component that supports and fixes the seed crystal, is crucial in its structural design. In existing technologies, the crucible lid typically adopts a monolithic structure, meaning it is machined from a single high-purity graphite block with a thickness between 20mm and 40mm. As a core consumable, the crucible lid is usually made of expensive high-purity graphite. After each crystal growth, graphite foil, adhesive, and spreading silicon carbide crystals remain on the bonding surface between the seed crystal and the crucible lid. These residues are extremely hard and chemically stable, making them difficult to remove without damage. This results in the crucible lid being unusable and incurring high production costs. Furthermore, removing the crystal after growth usually requires destructively striking the crucible lid, posing a risk of damaging the crystal. The weight of the crucible lid also hinders its transfer to the spin coater for surface spin coating, causing inconvenience to the bonding process. Utility Model Content
[0005] The purpose of this invention is to provide a crucible lid that is reusable, easy to extract crystals, and convenient for uniform coating.
[0006] To address the aforementioned technical problems, the first aspect of this utility model provides a crucible lid, which includes an upper lid body and a crystal bonding component; the upper lid body and the crystal bonding component are detachably connected.
[0007] The upper cover body is provided with a first mounting hole; the crystal adhesive is provided with a second mounting hole, and the surface of the crystal adhesive facing away from the upper cover body is a flat structure; the crystal adhesive is connected to the second mounting hole and the first mounting hole by fasteners to connect with the upper cover body.
[0008] In some embodiments, the first mounting hole and the second mounting hole are respectively provided on the side of the upper cover body that contacts the crystal adhesive, and both the first mounting hole and the second mounting hole are blind hole structures.
[0009] In some embodiments, the first mounting hole is located at the center of the upper cover body, and the second mounting hole is located at the center of the crystal adhesive.
[0010] In some embodiments, the walls of both the first mounting hole and the second mounting hole are provided with internal threads, and the outer peripheral wall of the fastener is provided with external threads. The fastener and the first mounting hole and the second mounting hole are connected by the engagement of the external threads and the internal threads to form a threaded connection.
[0011] In some embodiments, the thickness of the crystal adhesive is less than the thickness of the upper cover body;
[0012] And / or, the ratio of the thickness of the upper cover body to the depth of the first mounting hole is 2 to 3:1;
[0013] And / or, the ratio of the thickness of the crystal adhesive to the depth of the second mounting hole is 1.4 to 2:1.
[0014] In some embodiments, both the upper cover body and the crystal adhesive are graphite structures;
[0015] And / or, the crystal adhesive is a sheet-like structure.
[0016] The second aspect of this utility model provides a crucible device, which includes a crucible body and a crucible cover as described above. The upper cover body is detachably fitted onto the crucible body to form a closed reaction chamber, and the crystal bonding member is located in the reaction chamber. A silicon carbide seed crystal is bonded to the surface of the crystal bonding member away from the upper cover body.
[0017] In some embodiments, the peripheral wall of the upper cover body is formed with a first step, and when the upper cover body is closed on the crucible body, the first step of the upper cover body rests on the crucible body.
[0018] In some embodiments, a graphite ring is provided between the crucible body and the upper cover body; the outer peripheral wall of the graphite ring near the crucible body is provided with a second step, the graphite ring is supported on the crucible body through the second step, and the inner peripheral wall of the graphite ring near the upper cover body is provided with a third step, the first step of the upper cover body and the third step are engaged and cooperated.
[0019] In some embodiments, the crucible apparatus further includes a filter element connected to the crucible body; the filter element is disposed between the bottom of the reaction chamber and the crystal bonding element.
[0020] Compared with the prior art, the embodiments of this utility model have the following beneficial effects:
[0021] The crucible lid, through the mating structure of the first mounting hole in the upper lid body, the second mounting hole in the crystal adhesive component, and the fasteners, allows for a detachable connection between the crystal adhesive component and the upper lid body. This means the crystal adhesive component can be assembled with the upper lid body to form a complete crucible lid, or it can be detached from the upper lid body when disassembly is required. The fastener-hole mating connection structure is characterized by simple and convenient operation, a stable connection, and easy disassembly, without affecting the flatness of the crystal adhesive component's surface away from the upper lid body for seed crystal bonding. When the crucible lid is installed in the crucible device for silicon carbide crystal growth, the crystal bonding component serves as the contact structure with the silicon carbide crystal. Crystal growth can be repeated by simply replacing the crystal bonding component, while the main body of the lid can be reused, which can greatly reduce the cost of consumables. After the growth is completed, the crystal bonding component can be easily and safely separated from the crystal by simply removing it and then prying it off. This effectively reduces the risk of damaging the crystal during the crystal removal process. Furthermore, the thin and flat structure of the crystal bonding component makes it easy to transfer to the spin coater for surface spin coating, improving the convenience of spin coating. Attached Figure Description
[0022] One or more embodiments are illustrated by way of example with reference numerals in the accompanying drawings. These illustrations do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings are denoted as similar elements. Unless otherwise stated, the figures in the drawings are not to be limited by scale.
[0023] Figure 1 This is a structural schematic diagram of the assembled state of the crucible lid according to an embodiment of the present invention.
[0024] Figure 2 This is a longitudinal cross-sectional view of the crucible lid structure in a disassembled state according to an embodiment of the present invention.
[0025] Figure 3 yes Figure 1 A schematic diagram of the crucible lid's main body and the crystal bonding component in a disassembled state.
[0026] Figure 4 A schematic diagram of the overall structure of the crucible device according to an embodiment of this utility model.
[0027] Figure 5 yes Figure 4 A schematic diagram of the exploded structure of the crucible device.
[0028] Figure 6 yes Figure 4 A schematic diagram of the longitudinal cross-sectional structure of the crucible device.
[0029] Figure 7 yes Figure 4 A longitudinal cross-sectional schematic diagram of the crucible device in a disassembled state.
[0030] 100. Crucible apparatus;
[0031] 10. Crucible lid;
[0032] 1. Top cover body; 11. First mounting hole; 12. First step; 2. Crystal adhesive; 21. Second mounting hole; 3. Fastener;
[0033] 20. Crucible body; 30. Filter element; 40. Graphite ring; 41. Second step; 42. Third step. Detailed Implementation
[0034] To make the objectives, technical solutions, and advantages of this utility model clearer, the various embodiments of this utility model will be described in detail below with reference to the accompanying drawings. However, those skilled in the art will understand that many technical details have been provided in the various embodiments of this utility model to facilitate a better understanding of this application. However, the technical solutions claimed in the claims of this application can be implemented even without these technical details and with various variations and modifications based on the following embodiments.
[0035] In this embodiment of the invention, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," and "longitudinal" indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. These terms are primarily for the purpose of better describing this invention and its embodiments, and are not intended to limit the indicated devices, elements, or components to having a specific orientation, or to be constructed and operated in a specific orientation.
[0036] Furthermore, in addition to indicating direction or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this utility model according to the specific circumstances.
[0037] Furthermore, the terms "installation," "setting," "equipped with," "opening," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this utility model based on the specific circumstances.
[0038] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.
[0039] This utility model embodiment provides a crucible lid 10, such as Figures 1 to 7 As shown, the crucible cover 10 includes an upper cover body 1 and a crystal adhesive component 2; the upper cover body 1 and the crystal adhesive component 2 are detachably connected. The upper cover body 1 is provided with a first mounting hole 11; the crystal adhesive component 2 is provided with a second mounting hole 21, and the surface of the crystal adhesive component 2 facing away from the upper cover body 1 is a flat structure. It can be understood that the flat surface of the crystal adhesive component 2 is suitable for direct or indirect contact with the silicon carbide seed crystal. The crystal adhesive component 2 is connected to the second mounting hole 21 and the first mounting hole 11 by fasteners 3 to connect with the upper cover body 1.
[0040] Understandably, through the mating structure of the first mounting hole 11 of the upper cover body 1, the second mounting hole 21 of the crystal adhesive 2, and the fastener 3, the fastener 3 can be inserted into the first mounting hole 11 and the second mounting hole 21 by interference fit, or it can be fixed to the first mounting hole 11 and the second mounting hole 21 by threaded connection. There are no special restrictions here. This allows the crystal adhesive 2 to be assembled with the upper cover body 1 into a complete crucible cover 10. The crystal adhesive 2 can also be removed from the upper cover body 1 when disassembly is required. It has the characteristics of stable connection and convenient assembly and disassembly.
[0041] Understandably, when preparing silicon carbide single crystals using the PVT method, the crystal bonding component 2 is first assembled with the upper cover body 1 to form a crucible cover 10. Specifically, the fastener 3 is first fixed to the first mounting hole 11 of the upper cover body 1, and then the second mounting hole 21 of the crystal bonding component 2 is aligned with the fastener 3. The fastener 3 is then fixed to the second mounting hole 21, thereby tightly combining the upper cover body 1 and the crystal bonding component 2 to form a complete crucible cover 10. The assembled crucible cover 10 is then installed on the crucible body 20 filled with raw materials, and crystal growth can then be carried out. After the growth is completed and the crucible device 100 is cooled, the crucible cover 10 is first separated from the crucible body 20, and then the crystal bonding component 2 is removed from the upper cover body 1. The crystal bonding component 2 is then pried off with a tool, and the silicon carbide crystal can be safely removed. The upper cover body 1 can be reused after simple cleaning.
[0042] In summary, the crucible lid 10, through the mating structure of the first mounting hole 11 of the upper cover body 1, the second mounting hole 21 of the crystal adhesive 2, and the fastener 3, enables the crystal adhesive 2 and the upper cover body 1 to form a detachable connection. That is, the crystal adhesive 2 can be assembled with the upper cover body 1 to form a complete crucible lid 10, or it can be removed from the upper cover body 1 when disassembly is required. The connection structure of the fastener 3 and the hole body is simple and convenient to operate, provides a stable connection, and is easy to disassemble, without affecting the flatness of the surface of the crystal adhesive 2 facing away from the upper cover body 1 for seed crystal bonding; When the assembled crucible cover 10 is installed on the crucible device 100 for silicon carbide crystal growth, the crystal bonding component 2 serves as the contact structure with the silicon carbide crystal. Crystal growth can be repeated simply by replacing the crystal bonding component 2, while the main body 1 of the cover can be reused, which can greatly reduce the cost of consumables. After the growth is completed, the crystal bonding component 2 can be removed and then pried off to easily and safely separate the crystal from the crystal bonding component 2, effectively reducing the risk of damaging the crystal during the crystal removal process. In addition, the thin and flat structure of the crystal bonding component 2 makes it easy to transfer to the spin coater for surface spin coat operation, improving the convenience of spin coat operation.
[0043] In some implementations, such as Figures 1 to 3As shown, the first mounting hole 11 and the second mounting hole 21 are respectively provided on the side where the upper cover body 1 and the crystal adhesive 2 are in contact. Both the first mounting hole 11 and the second mounting hole 21 are blind holes, meaning that the holes only extend to a certain depth inside the component and do not penetrate to the other side surface. This achieves a structural design of partial recess without penetration. Understandably, by providing specific blind hole structures on the side where the upper cover body 1 and the crystal adhesive 2 are in contact, the blind holes can accommodate the insertion of fasteners 3, achieving reliable locking between the upper cover body 1 and the crystal adhesive 2, ensuring structural stability and connection strength during assembly. This connection method not only facilitates assembly and maintenance but also helps improve the overall mechanical performance of the component. Furthermore, the blind hole structure effectively maintains the flatness of the outer surface of the upper cover body 1 and the contact surface between the crystal adhesive 2 and the seed crystal. Since the orifice does not penetrate to the outside, the outer surface can maintain a continuous and uninterrupted planar state, which not only enhances the overall appearance and aesthetics of the crucible lid 10 in the assembled state, but also effectively avoids surface unevenness or edge burrs that may be caused by the orifice penetrating. In addition, the simple and specific structure of this blind hole will not affect the surface morphology of the side of the crystal bonding component 2 away from the upper cover body 1, thereby effectively ensuring that the surface of the crystal bonding component 2 remains flat, which is conducive to the direct or indirect contact of the silicon carbide seed crystal, and effectively avoids the impact of stress concentration or uneven thermal field on the uniformity of crystal nucleation and growth. The side of the crystal bonding component 2 close to the upper cover body 1 is also a flat surface, which can be adsorbed onto the coating machine tray, which is conducive to the bonding operation.
[0044] In some embodiments, the first mounting hole 11 is located at the center of the upper cover body 1, and the second mounting hole 21 is located at the center of the crystal adhesive 2. Understandably, by placing the first mounting hole 11 and the second mounting hole 21 at the center to form a center-aligned mounting structure, when the fastener 3 is vertically inserted or screwed in, the applied locking force can spread evenly and symmetrically radially from the center point of the component, improving the fastening effect and effectively avoiding the risk of warping or deformation of the upper cover body 1 and the crystal adhesive 2 during the fastening process.
[0045] In some implementations, such as Figure 2As shown, both the first mounting hole 11 and the second mounting hole 21 have internal threads on their walls, and the outer peripheral wall of the fastener 3 has external threads. The fastener 3 forms a threaded connection with the first mounting hole 11 and the second mounting hole 21 through the engagement of the external and internal threads. Understandably, the interlocking of the fastener 3 with the first mounting hole 11 and the second mounting hole 21 using a threaded structure effectively improves the stability of the connection and facilitates disassembly and assembly. By rotating the fastener 3, the degree of compression and relative position between the upper cover body 1 and the crystal bonding component 2 can be precisely controlled, and the crystal bonding component 2 can be disassembled and replaced without damage and quickly after growth, making the operation simple and convenient.
[0046] In some embodiments, the thickness of the crystal adhesive 2 is less than the thickness of the upper cover body 1;
[0047] In some embodiments, the ratio of the thickness of the upper cover body 1 to the depth of the first mounting hole 11 is 2 to 3:1;
[0048] In some embodiments, the ratio of the thickness of the crystal adhesive 2 to the depth of the second mounting hole 21 is 1.4 to 2:1.
[0049] Understandably, by designing the thickness of the crystal adhesive 2 to be less than the thickness of the upper cover body 1, the specific optimized ratio of the thickness of the upper cover body 1 to the depth of the first mounting hole 11, and the specific optimized ratio of the thickness of the crystal adhesive 2 to the depth of the second mounting hole 21, a base with a certain thickness can be provided to effectively resist the axial tensile force of the fastener 3 when the fastener 3 is screwed in and a locking force is applied. This prevents the fastener 3 from being pulled out or the bottom material of the hole from tearing, and ensures that the fastener 3 has a sufficiently long threaded section to engage with the crystal adhesive 2, forming a firm grip. If the ratio is too small, the bottom will be too thin and the strength insufficient; if the ratio is too large, it means that the hole depth is too shallow and the effective engagement length of the thread is insufficient. Specifically, the thickness of the upper cover body 1 is about 25 mm, the hole depth of the first mounting hole 11 is about 9 mm, the thickness of the crystal adhesive 2 is about 5 mm, and the hole depth of the second mounting hole 21 is about 3 mm, which enables the crystal adhesive 2 to form a thin and light structure.
[0050] In some embodiments, the crystal bonding element 2 is of graphite structure. Furthermore, the upper cover body 1 is also of graphite structure to suit the high-temperature environment of silicon carbide single crystal growth. Of course, in other embodiments, the crystal bonding element 2 and the upper cover body 1 can also be other materials suitable for the high-temperature environment of silicon carbide single crystal growth, and no particular limitation is made here.
[0051] In some implementations, such as Figure 2As shown, the crystal adhesive 2 has a sheet-like structure. Understandably, the sheet-like structure of the crystal adhesive 2 has sufficient area for silicon carbide single crystal growth, and can reduce weight. It can serve as a flat substrate to fit and lock well with the top of the upper cover body 1, and is easy to transfer to a spin coater for surface spin coating.
[0052] This utility model embodiment also provides a crucible device 100, such as Figures 1 to 7 As shown, the crucible device 100 includes a crucible body 20 and a crucible lid 10 as described above. The upper lid body 1 is detachably fitted onto the crucible body 20 to form a closed reaction chamber, and the crystal bonding member 2 is located inside the reaction chamber. A silicon carbide seed crystal is bonded to the surface of the crystal bonding member 2 facing away from the upper lid body 1. When the crucible device 100 is used for silicon carbide crystal growth, the silicon carbide raw material is placed at the bottom of the reaction chamber. The silicon carbide raw material sublimates at a high temperature, and the gas phase components recrystallize on the silicon carbide seed crystal surface of the crucible lid 10 at a lower temperature, thereby growing a silicon carbide single crystal.
[0053] Understandably, the crucible device 100, by providing the crucible cover 10, wherein the crucible cover 10, through the mating structure of the first mounting hole 11 of the upper cover body 1, the second mounting hole 21 of the crystal adhesive 2, and the fastener 3, enables the crystal adhesive 2 and the upper cover body 1 to form a detachable connection structure. That is, the crystal adhesive 2 can be assembled with the upper cover body 1 into a complete cover, or the crystal adhesive 2 can be removed from the upper cover body 1 when disassembly is required. The connection structure of the fastener 3 mating with the hole body has the characteristics of simple and convenient operation, stable connection, and convenient disassembly, and will not affect the crystal adhesive 2 from moving away from the target location. The surface flatness of the upper cover body 1 is described; when the crucible device 100 is used for silicon carbide crystal growth, the crystal bonding component 2 serves as the crystal contact structure. Crystal growth can be repeated by simply replacing the crystal bonding component 2, and the upper cover body 1 can be reused, which can greatly reduce the cost of consumables. After the growth is completed, the crystal bonding component 2 can be removed and then broken off to easily and safely separate the crystal from the crystal bonding component 2, effectively reducing the risk of damaging the crystal during the crystal removal process. In addition, the thin and flat structure of the crystal bonding component 2 is also easy to transfer to the spin coater for surface spin coat operation, improving the convenience of spin coat operation.
[0054] In some implementations, such as Figure 7As shown, the peripheral wall of the upper cover body 1 has a first step 12. When the upper cover body 1 is closed onto the crucible body 20, the first step 12 of the upper cover body 1 rests on the crucible body 20. It should be noted that the crystal adhesive 2 has the same shape and area as the bottom end of the upper cover body 1, so that the crystal adhesive 2 can completely cover the bottom end of the upper cover body 1. The first step 12 on the peripheral wall of the upper cover body 1 can firmly fix the crucible cover 10 onto the crucible body 20, making it easy to disassemble. Furthermore, the crystal adhesive 2 can cover the upper end of the reaction chamber of the crucible body 20, which is conducive to crystal growth.
[0055] In some implementations, such as Figure 6 and Figure 7 As shown, a graphite ring 40 is provided between the crucible body 20 and the upper cover body 1. The outer peripheral wall of the graphite ring 40 near the crucible body 20 has a second step 41, and the graphite ring 40 rests on the crucible body 20 via the second step 41. The inner peripheral wall of the graphite ring 40 near the upper cover body 1 has a third step 42, and the first step 12 of the upper cover body 1 overlaps with the third step 42. Understandably, the graphite ring 40, through its third step 42 on its inner peripheral wall, engages with the first step 12 of the upper cover body 1, and rests on the crucible body 20 via the second step 41. This allows the upper cover body 1, the graphite ring 40, and the crucible body 20 to be tightly connected to form a sealed whole, and enables the upper cover body 1 to be precisely aligned with the center of the crucible, effectively preventing the upper cover body 1 from shifting or being placed unevenly.
[0056] In some implementations, such as Figure 6 and Figure 7 As shown, the crucible device 100 also includes a filter element 30 connected to the crucible body 20; the filter element 30 is disposed between the bottom of the reaction chamber and the crystal bonding member 2. Specifically, the filter element 30 can be a porous tantalum carbide sheet. Understandably, during the PVT process for growing silicon carbide crystals, the silicon carbide raw material powder at the bottom needs to be sublimated at high temperature, decomposing into silicon- and carbon-containing gaseous substances. These gaseous substances are then transported to the seed crystal at the lower temperature at the top, recrystallizing into a single crystal. By placing this porous tantalum carbide sheet between the bottom of the reaction chamber and the crystal bonding member 2, unreacted or non-volatile solid impurities that may be present in the raw material powder, or introduced during processing, can be blocked, allowing only gaseous molecules to pass through. Through this physical filtration, it is effectively ensured that the gaseous components reaching the crystal bonding member 2 are pure, effectively preventing impurities from being encapsulated in the grown crystal, thereby reducing the defect density in the crystal and improving crystal quality.
[0057] The "subject name" provided by the embodiments of this utility model has been described in detail above. Specific examples have been used in this document to illustrate the principle and implementation of this utility model. The description of the above embodiments is only for the purpose of helping to understand the idea of this utility model. There may be changes in the specific implementation and application scope. Therefore, the content of this specification should not be construed as a limitation of this utility model.
Claims
1. A crucible lid, characterized in that, The crucible lid includes an upper lid body and a crystal bonding component; the upper lid body and the crystal bonding component are detachably connected. The upper cover body is provided with a first mounting hole; the crystal adhesive is provided with a second mounting hole, and the surface of the crystal adhesive facing away from the upper cover body is a flat structure; the crystal adhesive is connected to the second mounting hole and the first mounting hole by fasteners to connect with the upper cover body.
2. The crucible lid according to claim 1, characterized in that, The first mounting hole and the second mounting hole are respectively provided on the side of the upper cover body that contacts the crystal adhesive, and both the first mounting hole and the second mounting hole are blind holes.
3. The crucible lid according to claim 2, characterized in that, The first mounting hole is located at the center of the upper cover body, and the second mounting hole is located at the center of the crystal adhesive.
4. The crucible lid according to claim 2, characterized in that, The walls of both the first mounting hole and the second mounting hole are provided with internal threads, and the outer peripheral wall of the fastener is provided with external threads. The fastener and the first mounting hole and the second mounting hole are connected by the cooperation of the external threads and the internal threads to form a threaded connection.
5. The crucible lid according to claim 4, characterized in that, The thickness of the crystal adhesive is less than the thickness of the upper cover body; And / or, the ratio of the thickness of the upper cover body to the depth of the first mounting hole is 2 to 3:1; And / or, the ratio of the thickness of the crystal adhesive to the depth of the second mounting hole is 1.4 to 2:
1.
6. The crucible lid according to claim 1, characterized in that, Both the upper cover body and the crystal bonding component are graphite structures; And / or, the crystal adhesive is a sheet-like structure.
7. A crucible apparatus, characterized in that, The crucible device includes a crucible body and a crucible lid as described in any one of claims 1-6. The upper lid body is detachably fitted onto the crucible body to form a closed reaction chamber, and the crystal adhesive is located inside the reaction chamber. A silicon carbide seed crystal is bonded to the surface of the crystal adhesive facing away from the upper lid body.
8. The crucible apparatus according to claim 7, characterized in that, The peripheral wall of the upper cover body has a first step, and when the upper cover body is closed on the crucible body, the first step of the upper cover body rests on the crucible body.
9. The crucible apparatus according to claim 8, characterized in that, A graphite ring is provided between the crucible body and the upper cover body; a second step is provided on the outer peripheral wall of the graphite ring near the crucible body, and the graphite ring is supported on the crucible body through the second step; a third step is provided on the inner peripheral wall of the graphite ring near the upper cover body, and the first step of the upper cover body overlaps and cooperates with the third step.
10. The crucible apparatus according to claim 7, characterized in that, The crucible device further includes a filter element connected to the crucible body; the filter element is disposed between the bottom of the reaction chamber and the crystal bonding element.