A source furnace mounting bracket

Abstract

The utility model discloses a source furnace mounting support is suitable for the source furnace mounting port of molecular beam epitaxy equipment, including U type board, the fixed position column for inserting the screw hole of mounting port place, the sliding rod for supporting guiding source furnace sliding to the mounting port to U type board is connected and fixed to the mounting port through the position column, and the whole support is carried out through the support rod, and source furnace is along the sliding rod and is pushed to slide to the mounting port and can be quickly installed, has simple structure, low manufacturing cost, convenient operation, practical function, strong bearing capacity, small and so on advantages such as occupying space, can effectively shorten the installation time, simplify the installation process, reduce the installation cost, reduce the risk of source furnace inner wall knock, significantly improve the success rate of source furnace installation.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor equipment mounting equipment technology, specifically relating to a source furnace mounting bracket for molecular beam epitaxy equipment. Background Technology

[0002] Molecular beam epitaxy (MBE) equipment is typically equipped with multiple source furnaces, which are often installed at an angle, neither horizontal nor vertical. The source furnaces are quite heavy when fully loaded with raw materials, and the limited operating space makes installation difficult due to issues such as damage to the inner walls of the source furnaces, misalignment between the furnace openings and the equipment openings, and detachment of sealing rings.

[0003] Currently, there are two main installation methods: one relies on manual support of the furnace for installation, which is prone to problems such as the sealing ring falling off and the furnace opening not being aligned, and the installation is time-consuming and has a low success rate; the other uses a floor-mounted auxiliary device, which can reduce the burden of manpower, but has disadvantages such as complex structure, large size, high manufacturing cost and poor operational flexibility.

[0004] Therefore, there is an urgent need to develop a molecular beam epitaxy source furnace mounting bracket that is simple in structure, compact in size, easy to operate, and highly flexible, in order to overcome the shortcomings of existing mounting methods. Utility Model Content

[0005] In order to overcome the problems of complex operation, poor centering, and easy damage to equipment in the existing technology, this utility model provides a new source furnace mounting bracket with simple structure, convenient operation, and high flexibility.

[0006] The source furnace mounting bracket provided by this utility model is adapted to the source furnace mounting port of a molecular beam epitaxy device. It includes a U-shaped plate, on which a positioning post for inserting into the screw hole at the source furnace mounting port is fixedly provided, a sliding rod for supporting and guiding the source furnace to slide to the source furnace mounting port, and a support rod for supporting the mounting bracket.

[0007] Optionally or preferably, the U-shaped plate has a U-shaped groove that fits the outer periphery of the source furnace mounting opening.

[0008] Optionally or preferably, the positioning post is perpendicular to the U-shaped plate, cylindrical, and its size is adapted to the screw hole.

[0009] Optionally or preferably, the positioning post and the U-shaped plate are integrally formed.

[0010] Optionally or preferably, the sliding rod is perpendicular to the U-shaped plate and is cylindrical.

[0011] Optionally or preferably, the sliding rod and the U-shaped plate are integrally formed.

[0012] Optionally or preferably, the support rod has external threads on its surface, and the U-shaped plate has threaded holes. The support rod is rotatably mounted on the U-shaped plate through the threaded holes. The support rod and the U-shaped plate form a set angle to accommodate the inclination angle of the bottom wall of the molecular beam epitaxy equipment. The upper end of the support rod is used to contact and support the bottom wall of the molecular beam epitaxy equipment. The support rod can provide support without contacting the ground, and the entire source furnace mounting bracket is a considerable distance from the ground during use, essentially in a suspended state.

[0013] Optionally or preferably, the upper end of the support rod is provided with a universal support head.

[0014] Optionally or preferably, the lower end of the support rod is provided with a detachable handle.

[0015] Compared with the prior art, the present invention has the following beneficial effects: The mounting bracket of this utility model includes only a U-shaped plate, a positioning column, a sliding rod, and a support rod. It has a simple structure and occupies little space. The U-shaped groove on the U-shaped plate can fit snugly to the outer periphery of the source furnace mounting port. The positioning column can be inserted into the screw hole at the source furnace mounting port to fix the U-shaped plate. The upper end of the support rod fits against the bottom wall of the molecular beam epitaxy equipment, providing overall support and strong load-bearing capacity. The source furnace can be quickly installed by simply pushing it up along the sliding rod to the source furnace mounting port. It is convenient to operate and highly practical.

[0016] The support rod and U-shaped plate are connected by threads, and the support length can be adjusted and fixed by screwing. The universal support head at the upper end of the support rod can rotate at multiple angles to fit against the bottom wall of the equipment, further achieving stable support. The threaded connection between the support rod and the U-shaped plate, as well as the detachable handle at the lower end of the support rod, make it easy to remove the support rod from the U-shaped plate for convenient replacement.

[0017] Using the mounting bracket of this utility model can effectively shorten the installation time, simplify the installation process, reduce the installation cost, reduce the risk of collision with the inner wall of the source furnace, and significantly improve the success rate of source furnace installation. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the source furnace mounting bracket in Example 1; Figure 2 This is a schematic diagram of the source furnace mounting bracket from another perspective in Example 1; Figure 3 This is a schematic diagram of the source furnace mounting bracket in Example 1 during the installation of the source furnace.

[0019] In the picture: 1-Source furnace mounting bracket, 101-Positioning column, 102-Sliding rod, 103-Support rod, 1031-Universal support head, 1032-Handle, 104-U-shaped plate, 1041-U-shaped groove, 2-Molecular beam epitaxy equipment, 201-Source furnace mounting port, 202-Bottom wall, 3-Source furnace, 301-Source furnace inner wall, 302-Source furnace opening. Detailed Implementation

[0020] To enable those skilled in the art to better understand the present application, the present application will be clearly and completely described below with reference to embodiments and accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present application.

[0021] Example 1 Please refer to Figure 1 and Figure 2 A source furnace mounting bracket 1 of one type includes a source furnace mounting port 201 adapted to a molecular beam epitaxy device 2, and includes a U-shaped plate 104, a positioning post 101, a sliding rod 102 and a support rod 103.

[0022] The upper end of the U-shaped plate 104 has a U-shaped groove 1041 that fits the outer periphery of the furnace mounting port 201. The two sides near the lower end have threaded holes that are inclined at a certain angle relative to the surface of the U-shaped plate 104 for the support rod 103 to pass through.

[0023] The positioning post 101 has a cylindrical structure, and its size is adapted to the screw holes of the source furnace mounting port 201. The positioning post 101 is perpendicular to the U-shaped plate 104 and can be integrally formed with the U-shaped plate 104. The positioning post 101 can be freely inserted into the screw holes to achieve the initial suspension positioning of the source furnace mounting bracket 1.

[0024] The sliding rod 102 is located on the U-shaped plate 104 near the source furnace mounting port 201 and is used to guide the sliding of the source furnace 3. The sliding rod 102 has a cylindrical structure and its length can be set according to the sliding requirements during the installation of the source furnace 3. The sliding rod 102 is perpendicular to the U-shaped plate 104 and can be integrally formed with the U-shaped plate 104.

[0025] The support rod 103 has external threads on its surface and rotates through the threaded hole onto the U-shaped plate 104. The support rod and the U-shaped plate 104 form a set angle (i.e., the inclination angle of the threaded hole) to adapt to the inclination angle of the bottom wall 202 of the molecular beam epitaxy equipment 2. The upper end of the support rod 103 is provided with a universal support head 1031 for contacting and supporting the bottom wall 202 of the molecular beam epitaxy equipment 2. The universal support head 1031 adopts existing technology, has multi-directional rotation function, and can withstand loads. The lower end of the support rod 103 is provided with a detachable handle 1032. The extension length of the support rod 103 can be adjusted by turning it to ensure that the universal support head 1031 is in full contact with the inclination bottom wall 202 of the molecular beam epitaxy equipment 2, thereby achieving stable support.

[0026] Please refer to Figure 3 The outer wall of the molecular beam epitaxy equipment 2 is an inclined structure, and the source furnace installation port 201 is set perpendicular to the outer wall of the equipment.

[0027] The method of using the furnace mounting bracket 1 is as follows: First, insert the positioning post 101 of the source furnace mounting bracket 1 into the screw hole of the source furnace mounting port 201, so that the U-shaped groove 1041 of the U-shaped plate 104 matches the connection of the source furnace mounting port 201, and the U-shaped plate is tightly attached to the source furnace mounting port 201. At this time, the source furnace mounting bracket 1 is in a preliminary stable state.

[0028] Subsequently, the handle 1032 on the support rod 103 is turned to rotate the support rod 103 and adjust the length of the support rod 103 so that the universal support head 1031 gradually approaches the bottom wall 202 of the molecular beam epitaxy equipment 2 and adjusts its angle to ensure full contact with the bottom wall 202. At this time, the source furnace mounting bracket 1 reaches a stable load-bearing state.

[0029] Finally, tilt the source furnace 3 and slide it smoothly along the sliding rod 102 toward the molecular beam epitaxy device 2. During the process, check the condition of the sealing ring. After the source furnace port 302 is aligned with the source furnace mounting port 201, install some screws for initial fixation, then remove the source furnace mounting bracket 1, and then install and tighten the remaining screws to complete the installation of the source furnace.

[0030] This article uses specific examples to illustrate the inventive concept in detail. The description of the above embodiments is only for the purpose of helping to understand the core idea of ​​this utility model. It should be noted that any obvious modifications, equivalent substitutions or other improvements made by those skilled in the art without departing from the inventive concept should be included within the protection scope of this utility model.

Claims

1. A source furnace mounting bracket, adapted to the source furnace mounting port of a molecular beam epitaxy (MBE) device, characterized in that, It includes a U-shaped plate, on which are fixed a positioning post for inserting into the screw hole at the source furnace mounting port, a sliding rod for supporting and guiding the source furnace to slide to the source furnace mounting port, and a support rod for supporting the mounting bracket.

2. The source furnace mounting bracket according to claim 1, characterized in that, The U-shaped plate has a U-shaped groove that fits the outer periphery of the furnace mounting opening.

3. The source furnace mounting bracket according to claim 1, characterized in that, The positioning post is perpendicular to the U-shaped plate, cylindrical in shape, and its size is adapted to the screw holes.

4. The source furnace mounting bracket according to claim 3, characterized in that, The positioning post and the U-shaped plate are integrally formed.

5. The source furnace mounting bracket according to claim 1, characterized in that, The sliding rod is perpendicular to the U-shaped plate and is cylindrical.

6. The source furnace mounting bracket according to claim 5, characterized in that, The sliding rod and the U-shaped plate are integrally formed.

7. The source furnace mounting bracket according to claim 1, characterized in that, The support rod has external threads on its surface, and the U-shaped plate has threaded holes. The support rod is rotated through the threaded holes and inserted onto the U-shaped plate. The support rod and the U-shaped plate form a set angle to adapt to the tilt angle of the bottom wall of the molecular beam epitaxy equipment. The upper end of the support rod is used to contact and support the bottom wall of the molecular beam epitaxy equipment.

8. The source furnace mounting bracket according to claim 7, characterized in that, The upper end of the support rod is provided with a universal support head.

9. The source furnace mounting bracket according to claim 7, characterized in that, The lower end of the support rod is equipped with a detachable handle.

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