Vacuum cooling device and vacuum system
Patent Information
- Application Number
- CN202522005131.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-18
- Publication Date
- 2026-10-09
- Estimated Expiration
- 2035-09-18
AI Technical Summary
[0013]根据本公开一些实施例的真空冷却装置以及真空系统能够带来有益的技术效果。例如，根据本公开的一些实施例的真空冷却装置以及真空系统，冷却机构与内衬套热耦合，使内衬套的热量高效传递到冷却机构，以将热量导出，结构简单可靠。又例如，根据本公开的一些实施例的真空冷却装置以及真空系统，能方便地与真空系统进行安装对接，并且在样品进行工艺处理（例如，镀膜）时，托盘可以通过旋转实现位置避让，以免影响样品处理。样品处理结束后，托盘可以通过旋转和/或线性运动以与样品接触，实现样品的快速降温。
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Figure CN224832948U_ABST
Abstract
Description
Technical Field
[0001] This disclosure relates to the field of vacuum equipment technology, and in particular to a vacuum cooling device and a vacuum system. Background Technology
[0002] In vacuum systems, such as molecular beam epitaxy (MBE) systems, rapid cooling is beneficial in the back-end processing stages of thin film material growth to ensure the quality and performance of the thin film material. Utility Model Content
[0003] This disclosure provides a vacuum cooling device, comprising: tray; A drive mechanism, including a transmission rod, which is capable of linear and / or rotary motion; The connecting shaft assembly includes: The connecting shaft is connected to the drive rod at its proximal end and to the pallet at its distal end, so as to drive the pallet to move linearly and / or rotate. The inner bushing is fitted inside the connecting shaft and can rotate relative to the connecting shaft; The cooling mechanism, thermally coupled to the inner liner, connects the shaft and the inner liner to conduct heat between the tray and the cooling mechanism.
[0004] In some embodiments of this disclosure, the cooling mechanism includes: Inlet pipe; The inlet port is connected to the inlet pipe and is used to introduce coolant into the inlet pipe. The inlet pipe is sleeved inside the outlet pipe and connected to the outlet pipe; and The outlet, connected to the outlet pipe, is used to discharge coolant. The distal end of the outlet pipe is thermally coupled to the inner liner.
[0005] In some embodiments of this disclosure, the transmission rod includes an axial through hole, and the liquid outlet pipe passes through the axial through hole; and / or The distal end of the outlet pipe contacts the inner liner to achieve thermal coupling.
[0006] In some embodiments of this disclosure, the cooling mechanism further includes: An inlet pipe compression fitting, located at the inlet, is used to connect to an external inlet pipe; and The liquid outlet fitting is located at the liquid outlet and is used to connect to an external liquid outlet pipe.
[0007] In some embodiments of this disclosure, the drive mechanism further includes: The sleeve and the transmission rod are sleeved inside the sleeve, and the proximal end of the cooling mechanism is vacuum-sealed to the proximal end of the sleeve. A drive magnet, connected to the proximal end of a drive rod; and A drive magnet is mounted outside the sleeve and magnetically coupled to the transmission magnet to drive the transmission rod to perform linear and / or rotary motion.
[0008] In some embodiments of this disclosure, the drive mechanism further includes: An electric motor, the output of which is connected to a drive magnet to rotate the drive magnet; and / or The cylinder has its output end connected to the drive magnet to drive the drive magnet to move linearly.
[0009] In some embodiments of this disclosure, the cooling mechanism further includes a cooling flange, and the liquid outlet pipe is vacuum-sealed to the cooling flange. The drive mechanism includes a proximal flange, which is located at the proximal end of the sleeve and is vacuum-sealed to the cooling end flange.
[0010] In some embodiments of this disclosure, the vacuum cooling device further includes a rotating shaft, the proximal end of which is fixedly connected to a transmission rod, and the distal end of which is fixedly connected to a connecting shaft.
[0011] In some embodiments of this disclosure, the connecting shaft assembly further includes a retaining ring disposed inside the connecting shaft and at the distal end of the inner bushing to prevent the inner bushing from falling off.
[0012] This disclosure provides a vacuum system, including: Vacuum cavity; and According to any embodiment of the vacuum cooling device disclosed herein, the vacuum cooling device is vacuum-sealed to a vacuum chamber, and the tray is brought into contact with or moved away from the substrate disposed in the vacuum chamber by the linear movement and / or rotational movement of the tray.
[0013] The vacuum cooling apparatus and vacuum system according to some embodiments of this disclosure can bring beneficial technical effects. For example, in the vacuum cooling apparatus and vacuum system according to some embodiments of this disclosure, the cooling mechanism is thermally coupled to the inner liner, so that the heat of the inner liner is efficiently transferred to the cooling mechanism to dissipate the heat, and the structure is simple and reliable. As another example, the vacuum cooling apparatus and vacuum system according to some embodiments of this disclosure can be easily installed and connected to a vacuum system, and when the sample is being processed (e.g., coated), the tray can be rotated to avoid affecting the sample processing. After the sample processing is completed, the tray can be rotated and / or moved linearly to contact the sample, achieving rapid cooling of the sample. Attached Figure Description
[0014] To more clearly illustrate the technical solutions in the embodiments of this disclosure or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of this disclosure. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0015] Figure 1 A three-dimensional structural schematic diagram of a vacuum cooling apparatus according to some embodiments of the present disclosure is shown; Figure 2 A first-angle structural schematic diagram of a vacuum cooling apparatus according to some embodiments of the present disclosure is shown; Figure 3 A second-angle structural schematic diagram of a vacuum cooling apparatus according to some embodiments of the present disclosure is shown; Figure 4 Show Figure 3 AA cross-section view; Figure 5 An exploded schematic diagram of a vacuum cooling apparatus according to some embodiments of the present disclosure is shown; Figure 6 A schematic diagram of the cooling mechanism structure of a connecting shaft assembly according to some embodiments of the present disclosure is shown; Figure 7 A schematic cross-sectional view of a connecting shaft assembly according to some embodiments of the present disclosure is shown; Figure 8 A schematic diagram of the structure of a vacuum system according to some embodiments of the present disclosure is shown; Figure 9A A schematic diagram showing a vacuum cooling apparatus according to some embodiments of the present disclosure when it is not in use; Figure 9B A schematic diagram showing the use of a vacuum cooling apparatus according to some embodiments of the present disclosure is provided. In the above figures, the reference numerals represent: 1000-Vacuum System 100-Vacuum Cooling Device 110-pallet 120-Drive Mechanism 121-Transmission rod 122-Casing 123-Transmission Magnet 124-Drive Magnet 125-motor 126-cylinder 127-Near-end flange 130-Connecting Shaft Assembly 131-Connecting Shaft 132-Inner Liner 133-stop ring 140-Cooling Mechanism 141-Inlet pipe 142-Discharge tube 143-Inlet pipe compression fitting 144-Discharge tube compression fitting 145-Cooling Flange 150-rotation axis 200-Vacuum Chamber 210-sample Detailed Implementation
[0016] Some embodiments of this disclosure will now be described with reference to the accompanying drawings. Obviously, the described embodiments are merely exemplary embodiments of this disclosure, and not all embodiments.
[0017] In the description of this disclosure, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," "top," "bottom," "horizontal," and "longitudinal," etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this disclosure. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. In the description of this disclosure, it should be noted that unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "coupling" should be interpreted broadly, for example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal communication between two elements. In the description of this disclosure, "distal" or "farside" refers to one end or side that extends into a vacuum environment (e.g., a vacuum chamber), while "proximal" or "proximal" is the end or side opposite to "distal" or "farside" (e.g., one end or side away from the vacuum chamber, or one end or side within the vacuum chamber that is closer to the vacuum chamber wall, etc.). Alternatively, the end or side closer to the drive device is called the proximal or proximal end, and the end or side farther from the drive device is called the distal or distal end. Those skilled in the art will understand the specific meaning of the above terms in this disclosure according to the specific circumstances.
[0018] Figure 1 A three-dimensional structural schematic diagram of a vacuum cooling apparatus 100 according to some embodiments of the present disclosure is shown. Figure 2 A first angular structural schematic diagram of a vacuum cooling apparatus 100 according to some embodiments of the present disclosure is shown. Figure 3 A second-angle structural schematic diagram of a vacuum cooling apparatus 100 according to some embodiments of the present disclosure is shown. Figure 4 Show Figure 3 AA cross-section view. Figure 5 An exploded schematic diagram of a vacuum cooling apparatus 100 according to some embodiments of the present disclosure is shown.
[0019] like Figures 1-5 As shown, in some embodiments of this disclosure, the vacuum cooling device 100 may include a tray 110, a drive mechanism 120, a connecting shaft assembly 130, and a cooling mechanism 140. The drive mechanism 120 includes a transmission rod 121, which is capable of linear and / or rotational motion. The connecting shaft assembly 130 may include a connecting shaft 131 and an inner bushing 132. The proximal end of the connecting shaft 131 is connected to the transmission rod 121, and the distal end is connected to the tray 110, thereby driving the tray 110 to move linearly and / or rotate. The inner bushing 132 is fitted inside the connecting shaft 131 and is rotatable relative to the connecting shaft 131. The cooling mechanism 140 is thermally coupled to the inner bushing 132, and the connecting shaft 131 and the inner bushing 132 are used to conduct heat between the tray 110 and the cooling mechanism 140.
[0020] In some embodiments of this disclosure, the inner bushing 132 may include silicon carbide, which can not only achieve good thermal conductivity, but also reduce the friction between the connecting shaft 131 and the inner bushing 132, as well as between the inner bushing 132 and the cooling mechanism 140 when the connecting shaft 131 rotates.
[0021] In some embodiments of this disclosure, the connecting shaft 131 may comprise a material with good thermal conductivity, such as copper. Similarly, the tray 110 may comprise a material with good thermal conductivity, such as copper. Heat is transferred through the tray 110 to the connecting shaft 131 and then cooled by the cooling mechanism 140.
[0022] In some embodiments of this disclosure, the cooling mechanism 140 is thermally coupled to the inner liner 132, so that the heat of the inner liner 132 is efficiently transferred to the cooling mechanism 140 to dissipate the heat, resulting in a simple and reliable structure.
[0023] In some embodiments of this disclosure, the cooling mechanism 140 and the inner liner 132 can be thermally coupled through contact, for example, through the outlet pipe 142 of the cooling mechanism 140 (e.g., Figure 4 The distal end of the liquid outlet pipe 142 (shown) contacts the inner liner 132, allowing the heat from the inner liner 132 to be efficiently transferred to the cooling mechanism 140 for heat dissipation. When the connecting shaft 131 rotates, the liquid outlet pipe 142 and the inner liner 132 in contact with it can remain stationary to prevent the liquid outlet pipe 142 from moving.
[0024] In some embodiments of this disclosure, the connecting shaft assembly 130 is connected to the cooling mechanism 140 (e.g., Figure 4The central axes of the liquid outlet pipe 142 and the liquid inlet pipe 141 shown coincide, and the connecting shaft assembly 130 and the cooling mechanism 140 form a contact fit.
[0025] like Figure 4 As shown, in some embodiments of this disclosure, the transmission rod 121 includes an axial through hole, and the liquid outlet pipe 142 passes through the axial through hole of the transmission rod 121.
[0026] In some embodiments of this disclosure, the axial through-hole design of the transmission rod 121 integrates the liquid outlet pipe 142 inside the transmission rod 121, saving the overall space of the vacuum cooling system.
[0027] Figure 6 A schematic diagram of the cooling mechanism 140 of the connecting shaft assembly 130 according to some embodiments of the present disclosure is shown.
[0028] like Figures 1-5 , Figure 6 As shown, in some embodiments of this disclosure, the cooling mechanism 140 may include an inlet pipe 141, an inlet port (not shown), an outlet pipe 142, and an outlet port (not shown). The inlet port communicates with the inlet pipe 141 and is used to introduce coolant into the inlet pipe 141. The inlet pipe 141 is sleeved inside the outlet pipe 142 and communicates with the outlet pipe 142. The outlet port communicates with the outlet pipe 142 and is used to discharge coolant. The distal end of the outlet pipe 142 is thermally coupled to the inner liner 132.
[0029] like Figure 2 , Figure 4 , Figure 5 and Figure 6 As shown, in some embodiments of this disclosure, the cooling mechanism 140 may further include an inlet pipe clamping fitting 143 and an outlet pipe clamping fitting 144. The inlet pipe clamping fitting 143 is disposed at the inlet and is used to connect to an external inlet pipe 141. The outlet pipe clamping fitting 144 is disposed at the outlet and is used to connect to an external outlet pipe 142.
[0030] In some embodiments of this disclosure, the inlet pipe fitting 143 can be used to connect to the inlet pipe of external circulating water to remove heat through the flow of water.
[0031] like Figure 4 As shown, in some embodiments of this disclosure, the drive mechanism 120 may further include a sleeve 122, a transmission magnet 123, and a drive magnet 124. The transmission rod 121 is sleeved within the sleeve 122, and the proximal end of the cooling mechanism 140 is vacuum-sealed to the proximal end of the sleeve 122. The transmission magnet 123 is connected to the proximal end of the transmission rod 121. The drive magnet 124 is disposed outside the sleeve 122 and magnetically coupled to the transmission magnet 123 to drive the transmission rod 121 to perform linear and / or rotational motion.
[0032] In some embodiments of this disclosure, the sleeve 122 may be a hollow shaft formed by the drive mechanism 120 itself, without the need for an additional sleeve 122, and the transmission rod 121 may be inserted into the hollow shaft.
[0033] like Figure 1 , Figure 2 , Figure 4 and Figure 5 As shown, in some embodiments of this disclosure, the drive mechanism 120 may further include a motor 125. The output end of the motor 125 is connected to the drive magnet 124 to drive the drive magnet 124 to rotate.
[0034] In some embodiments of this disclosure, the motor 125 drives the drive magnet 124 to rotate, thereby driving the transmission magnet 123 to rotate, and the transmission magnet 123 drives the transmission rod 121 to rotate, so as to drive the connecting shaft 131 and the tray 110 to rotate.
[0035] like Figure 1 , Figure 3 and Figure 5 As shown, in some embodiments of this disclosure, the drive mechanism 120 may further include a cylinder 126. The output end of the cylinder 126 is connected to the drive magnet 124 to drive the drive magnet 124 to move linearly.
[0036] In some embodiments of this disclosure, the cylinder 126 drives the drive magnet 124 to move linearly, thereby driving the transmission magnet 123 to move linearly, and the transmission magnet 123 drives the transmission rod 121 to move linearly, so as to drive the connecting shaft 131 and the tray 110 to move linearly.
[0037] like Figure 4 and Figure 5 As shown, in some embodiments of this disclosure, the cooling mechanism 140 may further include a cooling flange 145. The liquid outlet pipe 142 is vacuum-sealed to the cooling flange 145. The drive mechanism 120 may further include a proximal flange 127, which is disposed at the proximal end of the sleeve 122 and vacuum-sealed to the cooling flange 145.
[0038] like Figure 4 As shown, in some embodiments of this disclosure, the coolant in the cooling mechanism 140 circulates within the closed outlet pipe 142 and inlet pipe 141.
[0039] like Figures 1-5 As shown, in some embodiments of this disclosure, the vacuum cooling device 100 may further include a rotating shaft 150. The proximal end of the rotating shaft 150 is fixedly connected to the transmission rod 121, and the distal end of the rotating shaft 150 is fixedly connected to the connecting shaft 131.
[0040] In some embodiments of this disclosure, the rotating shaft 150 may also be integrally formed with the transmission rod 121. The rotating shaft 150 is used to lengthen the rotating rod to match actual usage requirements.
[0041] Figure 7 A schematic cross-sectional view of a connecting shaft assembly 130 according to some embodiments of the present disclosure is shown.
[0042] like Figure 7 As shown, in some embodiments of this disclosure, the connecting shaft assembly 130 may further include a retaining ring 133. The retaining ring 133 is disposed inside the connecting shaft 131 and located at the distal end of the inner bushing 132 to prevent the inner bushing 132 from falling off.
[0043] Figure 8 A schematic diagram of the structure of a vacuum system 1000 according to some embodiments of the present disclosure is shown.
[0044] like Figure 8 As shown, in some embodiments of this disclosure, the vacuum system 1000 may include a vacuum chamber 200 and a vacuum cooling device 100 according to any embodiment of this disclosure. The vacuum cooling device 100 is vacuum-sealed to the vacuum chamber 200, and the tray 110 is brought into contact with or moved away from the substrate disposed in the vacuum chamber 200 by the linear movement and / or rotational movement of the tray 110.
[0045] The vacuum cooling device 100 according to some embodiments of this disclosure can be easily installed and connected to the vacuum system 1000. Furthermore, when the sample 210 undergoes processing (e.g., coating), the tray 110 can be rotated to achieve positional avoidance (e.g., ...). Figure 9A As shown), to avoid affecting the processing of sample 210. After the processing of sample 210 is completed, tray 110 can be rotated and / or moved linearly to contact sample 210 (e.g., as shown). Figure 9B As shown in the figure, this achieves rapid cooling of sample 210.
[0046] Figure 9A A schematic diagram of a vacuum cooling apparatus 100 according to some embodiments of the present disclosure when not in use is shown. Figure 9B A schematic diagram is shown of a vacuum cooling device 100 in use according to some embodiments of the present disclosure.
[0047] like Figure 9A As shown, in some embodiments of this disclosure, when the sample 210 (e.g., substrate) is subjected to processing (e.g., thin film growth), the drive mechanism 120 drives the tray 110 to rotate to one side so that the tray 110 does not affect the growth of the sample 210. Figure 9BAs shown, after the process is completed, the tray 110 moves directly under the sample 210 and makes the tray 110 contact the sample 210. The heat of the sample 210 is transferred to the tray 110, and through the connecting shaft 131 and the inner liner 132, it is finally carried away by the coolant (e.g., circulating water) in the cooling mechanism 140, thereby achieving the purpose of rapid cooling.
[0048] It should be noted that the above are merely exemplary embodiments of this disclosure and are not intended to limit this disclosure. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this disclosure should be included within the scope of protection of this disclosure.
Claims
1. A vacuum cooling device, characterized in that, include: tray; A drive mechanism, including a transmission rod, the transmission rod being capable of linear and / or rotary motion; The connecting shaft assembly includes: A connecting shaft is connected at its proximal end to the transmission rod and at its distal end to the tray, so as to drive the tray to move linearly and / or rotate. An inner bushing is fitted inside the connecting shaft and can rotate relative to the connecting shaft; A cooling mechanism is thermally coupled to the inner liner, and the connecting shaft and the inner liner are used to conduct heat between the tray and the cooling mechanism.
2. The vacuum cooling device according to claim 1, characterized in that, The cooling mechanism includes: Inlet pipe; The inlet is connected to the inlet pipe and is used to introduce coolant into the inlet pipe. The inlet pipe is sleeved inside the outlet pipe and communicates with the outlet pipe; and The outlet is connected to the outlet pipe and is used to discharge coolant. The distal end of the outlet pipe is thermally coupled to the inner liner.
3. The vacuum cooling device according to claim 2, characterized in that, The transmission rod includes an axial through hole, and the liquid outlet pipe passes through the axial through hole; and / or The distal end of the outlet pipe contacts the inner liner to achieve thermal coupling.
4. The vacuum cooling device according to claim 2, characterized in that, The cooling mechanism also includes: An inlet pipe compression fitting, located at the inlet, is used to connect to an external inlet pipe; and A liquid outlet tube clamp fitting is located at the liquid outlet and is used to connect to an external liquid outlet tube.
5. The vacuum cooling device according to claim 2, characterized in that, The drive mechanism also includes: A sleeve, wherein the transmission rod is sleeved inside the sleeve, and the proximal end of the cooling mechanism is vacuum-sealed to the proximal end of the sleeve; A transmission magnet is connected to the proximal end of the transmission rod; and A drive magnet is disposed outside the sleeve and magnetically coupled to the transmission magnet to drive the transmission rod to perform linear and / or rotary motion.
6. The vacuum cooling device according to claim 5, characterized in that, The drive mechanism also includes: An electric motor, the output of which is connected to the drive magnet to drive the drive magnet to rotate; and / or A cylinder, the output end of which is connected to the driving magnet to drive the driving magnet to move linearly.
7. The vacuum cooling device according to claim 5, characterized in that, The cooling mechanism also includes a cooling flange, and the liquid outlet pipe is vacuum-sealed to the cooling flange. The drive mechanism includes a proximal flange disposed at the proximal end of the sleeve and vacuum-sealed to the cooling flange.
8. The vacuum cooling device according to claim 1, characterized in that, It also includes a rotating shaft, the proximal end of which is fixedly connected to the transmission rod, and the distal end of which is fixedly connected to the connecting shaft.
9. The vacuum cooling device according to claim 1, characterized in that, The connecting shaft assembly also includes a retaining ring disposed inside the connecting shaft and located at the distal end of the inner bushing to prevent the inner bushing from falling off.
10. A vacuum system, characterized in that, include: Vacuum cavity; as well as According to any one of claims 1-9, the vacuum cooling device is vacuum-sealed to the vacuum chamber, and the tray is brought into contact with or moved away from the substrate disposed in the vacuum chamber by the linear movement and / or rotational movement of the tray.