Self-resetting window shielding device, vacuum window, and vacuum processing system

Abstract

The present disclosure relates to the technical field of vacuum equipment, and discloses a self-resetting window shielding device, a vacuum window and a vacuum processing system. The self-resetting window shielding device comprises a window shield, a rotating assembly, a rotating assembly and an elastic member. The window shield is used for shielding the window. The rotating assembly comprises a rotating shaft, the distal end of the rotating shaft is connected with the window shield, and is used for driving the window shield to open or close. The rotating assembly is coupled with the rotating shaft, and is used for receiving a rotating operation to drive the rotating shaft to rotate, so that the window shield is opened or closed. The elastic member is connected with the rotating handle, and is used for providing a returning elastic force to the rotating handle to drive the rotating shaft to return, so that the window shield is reset.

Description

Technical Field

[0001] This disclosure relates to the field of vacuum equipment technology, and in particular to a self-resetting window blocking device, a vacuum window, and a vacuum processing system. Background Technology

[0002] The existing vacuum window shutter has springs set inside the vacuum, which are prone to damage and failure due to fatigue fracture, permanent deformation, wear and corrosion, etc. If the springs fail, the window shutter will not be able to close tightly, requiring vacuum breaking repair, which is costly. Utility Model Content

[0003] This disclosure provides a self-resetting window blocking device, comprising: A window baffle is used to block the view. A rotating assembly includes a rotating shaft, the distal end of which is connected to a window baffle for driving the window baffle to open or close. A rotating handle, coupled to a rotating shaft, receives rotational inputs to drive the rotating shaft, thereby opening or closing the viewing window shutter; and The elastic element, connected to the rotating handle, provides a spring force to the rotating handle to drive the rotating shaft to rotate and reset the viewing window baffle.

[0004] In some embodiments of this disclosure, the self-resetting window blocking device further includes: The positioning pin is fixedly connected at its distal end to the rotating handle and at its proximal end to one end of the elastic element. It is used to push the elastic element to deform under the rotation drive of the rotating handle, and under the elastic force of the elastic element, drive the rotating handle to rotate, thereby driving the rotating shaft to rotate and reset the viewing window baffle.

[0005] In some embodiments of this disclosure, the self-resetting window blocking device further includes: A vacuum sleeve, with a rotating shaft fitted inside the vacuum sleeve; and The tail cap is fixedly connected to the proximal end of the vacuum sleeve. The tail cap includes a groove, an elastic element is embedded in the groove, and the proximal end of the positioning pin is located in the groove and abuts or is fixedly connected to one end of the elastic element. The positioning pin is used to slide in the groove to compress or stretch the elastic element.

[0006] In some embodiments of this disclosure, the shape of the groove is adapted to the shape of the elastic element for limiting the elastic element; and / or Elastic elements include springs or polymer elastomers. In some embodiments of this disclosure, the rotating handle includes a main body and a drive magnet disposed on the main body, the drive magnet being circumferentially disposed outside the vacuum sleeve; and The rotating assembly also includes a drive magnet disposed near the rotating shaft. The drive magnet is magnetically coupled to the drive magnet to drive the rotating shaft to rotate.

[0007] In some embodiments of this disclosure, the self-resetting window blocking device further includes: At least one screw is used to vacuum seal the proximal end of the vacuum sleeve and include a protrusion. The end cap is fixedly connected to the protrusion of the vacuum sleeve by at least one screw.

[0008] In some embodiments of this disclosure, the self-resetting window blocking device further includes: Barrier flange, including side flange. The vacuum sleeve includes a vacuum sleeve connecting flange and a side flange that is vacuum-sealed to the vacuum sleeve connecting flange.

[0009] In some embodiments of this disclosure, the self-resetting window blocking device further includes a blocking device flange, including a window baffle receiving hole, wherein the window baffle is disposed within the window baffle receiving hole; and / or The rotating handle includes a scale for measuring the amount of rotation.

[0010] This disclosure provides a vacuum window, including: Flange vacuum observation window; and The self-resetting window blocking device according to any embodiment of this disclosure is sealed to the flange vacuum observation window.

[0011] This disclosure provides a vacuum processing system, including: Vacuum cavity, including window; and According to any embodiment of the present disclosure, the vacuum window body is vacuum-sealed to the window.

[0012] The self-resetting window blocking device, vacuum window, and vacuum processing system according to some embodiments of this disclosure can bring beneficial technical effects. For example, in the self-resetting window blocking device, vacuum window, and vacuum processing system of some embodiments of this disclosure, the elastic element is connected to the rotating handle, and the elastic element is located at the end of the rotating handle, making disassembly convenient and easy to maintain. As another example, in the self-resetting window blocking device, vacuum window, and vacuum processing system of some embodiments of this disclosure, the rotation of the rotating handle can drive the rotating shaft to rotate, causing the window baffle to open or close. The elastic element can provide a rotational force to the rotating handle to drive the rotating shaft to rotate, enabling the window baffle to automatically reset, thereby preventing contamination of the flange vacuum observation window. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of this disclosure or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of this disclosure. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0014] Figure 1 A schematic diagram of the structure of a self-resetting window blocking device according to some embodiments of the present disclosure is shown; Figure 2 A cross-sectional schematic diagram of a self-resetting window blocking device according to some embodiments of the present disclosure is shown; Figure 3 A partially exploded schematic diagram of a self-resetting window blocking device according to some embodiments of the present disclosure is shown. Figure 4A This diagram illustrates a self-resetting window blocking device according to some embodiments of the present disclosure when the window baffle is open; Figure 4B A schematic diagram of the tail cover portion of a self-resetting window blocking device according to some embodiments of the present disclosure is shown when the window baffle is opened; Figure 5A This diagram illustrates a self-resetting window blocking device according to some embodiments of the present disclosure when the window baffle is closed; Figure 5B This diagram shows a tail cover portion of a self-resetting window blocking device according to some embodiments of the present disclosure when the window baffle is closed; Figure 6 A schematic diagram of the structure of a vacuum window according to some embodiments of the present disclosure is shown; Figure 7 A schematic diagram of the structure of a vacuum processing system according to some embodiments of the present disclosure is shown; In the above figures, the reference numerals represent: 10000-Vacuum Processing System 1000-Vacuum Window 100-Self-resetting window blocking device 110-Viewing Window Baffle 120-Rotating Component 121-Rotating Shaft 122-Transmission Magnet 130-Turn the handle 131-Main Body 132-Drive Magnet 133-scale 140-Elastic Component 150-locating pin 160-Vacuum Sleeve 161-protrusion 162-Sleeve Connection Flange 170-tail cover 171-Slide 180a, 180b - Set screws 190-Shielding device flange 191-Viewing window baffle receiving hole 192-Side flange 200-Flange Vacuum Observation Window 2000-Vacuum Chamber Detailed Implementation

[0015] Some embodiments of this disclosure will now be described with reference to the accompanying drawings. Obviously, the described embodiments are merely exemplary embodiments of this disclosure, and not all embodiments.

[0016] In the description of this disclosure, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," "top," "bottom," "horizontal," and "longitudinal," etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this disclosure. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. In the description of this disclosure, it should be noted that unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "coupling" should be interpreted broadly, for example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal communication between two elements. In the description of this disclosure, "distal" or "farside" refers to one end or side that extends into a vacuum environment (e.g., a vacuum chamber), while "proximal" or "proximal" is the end or side opposite to "distal" or "farside" (e.g., one end or side away from the vacuum chamber, or one end or side within the vacuum chamber that is closer to the vacuum chamber wall, etc.). Alternatively, the end or side closer to the drive device is called the proximal or proximal end, and the end or side farther from the drive device is called the distal or distal end. Those skilled in the art will understand the specific meaning of the above terms in this disclosure according to the specific circumstances.

[0017] Figure 1 A schematic diagram of the structure of a self-resetting window blocking device 100 according to some embodiments of the present disclosure is shown. Figure 2 A cross-sectional schematic diagram of a self-resetting window blocking device 100 according to some embodiments of the present disclosure is shown. Figure 3A partially exploded schematic diagram of a self-resetting window blocking device 100 according to some embodiments of the present disclosure is shown.

[0018] like Figure 1 , Figure 2 and Figure 3 As shown, in some embodiments of this disclosure, the self-resetting window blocking device 100 may include a window baffle 110, a rotating assembly 120, a rotating handle 130, and an elastic element 140. The window baffle 110 is used to block the window. The rotating assembly 120 may include a rotating shaft 121. The distal end of the rotating shaft 121 is connected to the window baffle 110 and is used to drive the window baffle 110 to open or close. The rotating handle 130 is coupled to the rotating shaft 121 and is used to receive a rotational operation to drive the rotating shaft 121 to rotate, thereby opening or closing the window baffle 110. The elastic element 140 is connected to the rotating handle 130 and is used to provide a rotational elastic force to the rotating handle 130 to drive the rotating shaft 121 to rotate, thereby resetting the window baffle 110. Those skilled in the art will understand that in this disclosure, reset refers to restoring the default state when there is no operation, which may be an open state or a closed state.

[0019] In some embodiments of this disclosure, the elastic element 140 is connected to the rotating handle 130. The elastic element 140 is located at the end of the rotating handle 130, making it easy to disassemble and maintain.

[0020] In some embodiments of this disclosure, the distal end of the rotating shaft 121 and the window baffle 110 can be connected in various suitable ways, such as by screws, nuts and bolts.

[0021] In some embodiments of this disclosure, the coupling between the rotating handle 130 and the rotating shaft 121 includes, but is not limited to, the following methods: magnetic coupling transmission (described in detail below), mechanical coupling transmission, etc. Mechanical coupling transmission may include, for example, shaft-hole mating connection transmission, gear meshing transmission, belt or chain transmission, threaded fastening connection transmission, etc.

[0022] like Figure 3 As shown, in some embodiments of this disclosure, the self-resetting window blocking device 100 may further include a positioning pin 150. The distal end of the positioning pin 150 may be fixedly connected to a rotating handle 130, and the proximal end may be connected to one end of an elastic member 140. This positioning pin 150 is used to push the elastic member 140 to deform under the rotational drive of the rotating handle 130, and under the elastic force of the elastic member 140, to drive the rotating handle 130 to rotate, thereby driving the rotating shaft 121 to rotate and reset the window baffle 110. Those skilled in the art will understand that the elastic force of the elastic member 140 can be a tensile force or a pushing force.

[0023] like Figure 1 , Figure 2 and Figure 3As shown, in some embodiments of this disclosure, the self-resetting window blocking device 100 may further include a vacuum sleeve 160 and a tail cap 170. A rotating shaft 121 is sleeved within the vacuum sleeve 160. The tail cap 170 is fixedly connected to the proximal end of the vacuum sleeve 160. The tail cap 170 includes a groove 171 (e.g., ...). Figure 4B As shown, the elastic element 140 is embedded in the slide groove 171, and the proximal end of the positioning pin 150 is located in the slide groove 171 and abuts or is fixedly connected to one end of the elastic element 140. The positioning pin 150 is used to slide in the slide groove 171 to compress or stretch the elastic element 140. The slide groove 171 may be located on the inner surface of the tail cap 170.

[0024] In some embodiments of this disclosure, rotating the handle 130 can drive the positioning pin 150 to rotate, thereby sliding within the slide groove 171 and compressing or stretching the elastic element 140 within the slide groove 171. When the external force applied to the handle 130 disappears, the elastic element 140, driven by the elastic force, pushes the handle 130 to rotate, thereby driving the rotating shaft 121 to rotate and causing the viewing window baffle 110 to automatically reset, thus effectively protecting the viewing window.

[0025] In some embodiments of this disclosure, the shape of the groove 171 is adapted to the shape of the elastic member 140 (e.g., see reference 140). Figure 4B and Figure 5B ), used to limit the elastic element 140.

[0026] In some embodiments of this disclosure, the elastic element 140 may include any suitable elastic member, such as a spring or a polymeric elastomer. Springs may include, for example, compression springs, tension springs, etc. Polymer elastomers may include elastomers made of high-temperature resistant polymer materials, such as fluororubber, silicone rubber, or perfluoroether rubber.

[0027] like Figure 2 As shown, in some embodiments of this disclosure, the rotating handle 130 may include a body 131 and a drive magnet 132 disposed on the body 131. The drive magnet 132 is circumferentially disposed outside the vacuum sleeve 160. The rotating assembly 120 may further include a transmission magnet 122. The transmission magnet 122 is disposed near the end of the rotating shaft 121. The drive magnet 132 is magnetically coupled to the transmission magnet 122 to drive the rotating shaft 121 to rotate.

[0028] like Figure 3As shown, in some embodiments of this disclosure, the self-resetting window blocking device 100 may further include at least one screw (e.g., set screw 180a, set screw 180b). The proximal end of the vacuum sleeve 160 is vacuum-sealed and includes a protrusion 161. The tail cap 170 is fixedly connected to the protrusion 161 of the vacuum sleeve 160 by at least one screw (e.g., set screw 180a, set screw 180b), for example, the tail cap 170 is fixed to the protrusion 161 by set screws 180a and 180b.

[0029] Those skilled in the art will understand that Figure 3 The shown method of securing the tail cap 170 is merely exemplary. The tail cap 170 may be secured in other ways as needed, such as by bolts and nuts.

[0030] In some embodiments of this disclosure, the tail cover 170 is easy to disassemble, and the elastic element 140 is provided on the tail cover 170, making it easy to replace and maintain.

[0031] In some embodiments of this disclosure, the tail cap 170 can be adjusted at an angle before being fixed to the vacuum sleeve 160.

[0032] like Figure 1 and Figure 2 As shown, in some embodiments of this disclosure, the rotating handle 130 may include a scale 133 for measuring the amount of rotation.

[0033] like Figure 3 As shown, in some embodiments of this disclosure, the self-resetting window blocking device 100 may further include a blocking device flange 190. The blocking device flange 190 may include a window baffle receiving hole 191, and the window baffle 110 of the self-resetting window blocking device 100 is disposed within the window baffle receiving hole 191.

[0034] like Figure 3 As shown, in some embodiments of this disclosure, the shielding device flange 190 may further include a side flange 192. The vacuum sleeve 160 may further include a vacuum sleeve connecting flange 162. The side flange 192 and the vacuum sleeve connecting flange 162 are vacuum-sealed together.

[0035] like Figure 3 As shown, in some embodiments of this disclosure, the side flange 192 is fixedly and sealingly connected to the outer ring surface of the shielding device flange 190, and the rotating shaft 121 penetrates the body of the shielding device flange 190 radially along the outer ring surface of the shielding device flange 190. The viewing window baffle 110 is fixedly connected to the distal end of the rotating shaft 121 and is disposed within the viewing window baffle receiving hole 191.

[0036] Figure 4AThis diagram shows a self-resetting window blocking device 100 according to some embodiments of the present disclosure with the window baffle 110 open. Figure 4B A schematic diagram of the tail cover 170 portion of the self-resetting window blocking device 100 according to some embodiments of the present disclosure is shown when the window baffle 110 is opened. Figure 5A This diagram shows a self-resetting window blocking device 100 according to some embodiments of the present disclosure with the window baffle 110 closed. Figure 5B A schematic diagram of the tail cover portion of a self-resetting window blocking device 100 according to some embodiments of the present disclosure is shown when the window baffle 110 is closed.

[0037] like Figure 4A and Figure 4B As shown, in some embodiments of this disclosure, rotating the handle 130 causes the rotating shaft 121 to rotate, opening the viewing window baffle 110. Simultaneously, rotating the handle 130 causes the positioning pin 150 to rotate and slide within the slide groove 171, compressing the elastic member 140. For example, it causes one end of a compression spring to slide within the slide groove 171, thus compressing the spring.

[0038] like Figure 5A and Figure 5B As shown, in some embodiments of this disclosure, when the external force applied to the rotating handle 130 disappears, the elastic element 140 (e.g., compression spring 140) is driven by the elastic force to push the positioning pin 150 to slide in the slide groove 171, thereby pushing the rotating handle 130 to rotate, so as to drive the rotating shaft 121 to rotate, so that the window baffle 110 can be automatically reset.

[0039] Those skilled in the art will understand that Figure 4B and Figure 5B As an example only, the proximal end of the locating pin 150 may also be connected to the other end of the elastic element 140, or a spring may be stretched to obtain a resilient force upon contraction.

[0040] Figure 6 A schematic diagram of the structure of a vacuum window 1000 according to some embodiments of the present disclosure is shown.

[0041] like Figure 6 As shown, in some embodiments of this disclosure, the vacuum window 1000 may include a flange vacuum observation window 200 and a self-resetting window blocking device 100 according to any embodiment of this disclosure. The self-resetting window blocking device 100 is sealed to the flange vacuum observation window 200. When the window baffle 110 is open, the flange vacuum observation window 200 can be observed normally. When the window baffle 110 is closed, it can block and protect the flange vacuum observation window 200, preventing the flange vacuum observation window 200 from being contaminated.

[0042] Those skilled in the art will understand that the flange vacuum observation window 200 can be an integral structure or an assembly assembled from the flange base, transparent observation window and seals according to actual needs.

[0043] Figure 7 A schematic diagram of the structure of a vacuum processing system 10000 according to some embodiments of the present disclosure is shown.

[0044] like Figure 7 As shown, in some embodiments of this disclosure, the vacuum processing system 10000 may include a vacuum chamber 2000 and a vacuum window 1000 according to any embodiment of this disclosure. The vacuum chamber 2000 may include a window. A shielding flange 190 of the vacuum window 1000 is vacuum-sealed to the window.

[0045] When the elastic element 140 is placed in a vacuum environment, factors such as the outgassing rate, coefficient of thermal expansion, and corrosion resistance of the material under vacuum must be considered. A material with a low outgassing rate can prevent the release of gas in the vacuum environment, thus avoiding affecting the vacuum level. A suitable coefficient of thermal expansion ensures the stability of the elastic element 140's performance under temperature changes, and good corrosion resistance prevents damage to the elastic element 140 in the presence of trace amounts of corrosive gases. According to some embodiments of the self-resetting window blocking device 100, vacuum window 1000, and vacuum processing system 10000 of this disclosure, the elastic element 140 is placed outside the vacuum environment. Therefore, the material selection for the elastic element 140 does not need to comply with performance requirements such as low outgassing rate under vacuum conditions, thus allowing for greater freedom in material selection. Furthermore, since the elastic element 140 is installed outside the vacuum environment, it is easy to disassemble and maintain.

[0046] It should be noted that the above are merely exemplary embodiments of this disclosure and are not intended to limit this disclosure. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this disclosure should be included within the scope of protection of this disclosure.

Claims

1. A self-resetting window blocking device, characterized in that, include: A window baffle is used to block the view. A rotating assembly includes a rotating shaft, the distal end of which is connected to the window baffle for driving the window baffle to open or close; A rotating handle, coupled to the rotating shaft, is used to receive rotational operations to drive the rotating shaft to rotate, thereby opening or closing the viewing window baffle; and An elastic element, connected to the rotating handle, is used to provide a rotational elastic force to the rotating handle to drive the rotating shaft to rotate and reset the viewing window baffle.

2. The self-resetting window blocking device according to claim 1, characterized in that, Also includes: The positioning pin is fixedly connected at its distal end to the rotating handle and at its proximal end to one end of the elastic element. It is used to push the elastic element to deform under the rotation drive of the rotating handle, and under the elastic force of the elastic element, drive the rotating handle to rotate, thereby driving the rotating shaft to rotate and reset the viewing window baffle.

3. The self-resetting window blocking device according to claim 2, characterized in that, Also includes: A vacuum sleeve, wherein the rotating shaft is sleeved inside the vacuum sleeve; as well as The tail cap is fixedly connected to the proximal end of the vacuum sleeve. The tail cap includes a groove, and the elastic element is embedded in the groove. The proximal end of the positioning pin is located in the groove and abuts or is fixedly connected to one end of the elastic element. The positioning pin is used to slide in the groove to compress or stretch the elastic element.

4. The self-resetting window blocking device according to claim 3, characterized in that, The groove shape is adapted to the shape of the elastic element, and is used to limit the elastic element; and / or The elastic element includes a spring or a polymer elastomer.

5. The self-resetting window blocking device according to claim 3, characterized in that, The rotating handle includes a main body and a driving magnet disposed on the main body, the driving magnet being circumferentially disposed outside the vacuum sleeve; and The rotating assembly also includes a drive magnet disposed near the end of the rotating shaft, and the drive magnet is magnetically coupled to the drive magnet to drive the rotating shaft to rotate.

6. The self-resetting window blocking device according to claim 3, characterized in that, Also includes: At least one screw is used to vacuum seal the proximal end of the vacuum sleeve and include a protrusion, and the tail cap is fixedly connected to the protrusion of the vacuum sleeve by at least one screw.

7. The self-resetting window blocking device according to claim 3, characterized in that, Also includes: Barrier flange, including side flange. The vacuum sleeve includes a vacuum sleeve connecting flange, and the side flange is vacuum-sealed to the vacuum sleeve connecting flange.

8. The self-resetting window blocking device according to claim 1, characterized in that, The self-resetting window blocking device further includes a blocking device flange, including a window baffle receiving hole, wherein the window baffle is disposed within the window baffle receiving hole; and / or The rotating handle includes a scale for measuring the amount of rotation.

9. A vacuum window, characterized in that, include: Flange vacuum observation window; as well as The self-resetting window blocking device according to any one of claims 1-8 is sealed to the flange vacuum observation window.

10. A vacuum processing system, characterized in that, include: Vacuum cavity, including window; and According to claim 9, the vacuum window body of the vacuum window is vacuum-sealed to the window.

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