Rotary vane vacuum pump integrated with a vacuum gauge

Abstract

The utility model belongs to the technical field of rotary vane vacuum pump, concretely relates to the rotary vane vacuum pump of integrated vacuum gauge. In view of the deficiency of the vacuum gauge mounting structure of the existing rotary vane vacuum pump, the utility model adopts the following technical scheme: the rotary vane vacuum pump of integrated vacuum gauge includes: pump body, is equipped with air inlet; Air inlet connector, is installed on the air inlet; Vacuum gauge, including meter connector; Among them, the air inlet connector has the first connecting part for connecting with the pipeline, the second connecting part connected with the air inlet and the third connecting part for installing the vacuum gauge, and the first connecting part, the second connecting part and the third connecting part are communicated. The rotary vane vacuum pump of integrated vacuum gauge of the utility model, the installation of vacuum gauge is simple, does not need additional bellows, KF mouth pipeline and the like; due to the simplification of connecting pipeline, the corresponding leakage risk is also reduced; due to not needing additional pipeline, the cost is also reduced; there is no deviation caused by different pipeline, and the measurement is more accurate.

Description

Technical Field

[0001] This utility model belongs to the field of rotary vane vacuum pump technology, specifically relating to a rotary vane vacuum pump with integrated vacuum gauge. Background Technology

[0002] Rotary vane vacuum pumps are widely used in electronic device manufacturing, vacuum coating, laboratory equipment, and vacuum packaging due to their simple structure, moderate cost, and stable performance. Typically, oil is used to seal the gap between the vanes and the pump chamber, making rotary vane vacuum pumps generally oil-sealed mechanical vacuum pumps. To ensure stable operation of the vacuum system, a vacuum gauge is usually required to monitor the vacuum level in real time.

[0003] In existing technologies, rotary vane vacuum pumps and vacuum gauges are mostly designed as separate units. Vacuum gauges typically have two installation locations: one is on the container being evacuated, and the other is on the pipeline connecting the vacuum pump and the container. Installing the vacuum gauge on the container requires the container to have a pre-existing interface, and is limited by installation space, therefore its use is relatively rare.

[0004] The vacuum gauge is installed on the pipe connecting the vacuum pump and the container being evacuated, which has the following drawbacks:

[0005] 1. Additional piping and interfaces are required, increasing assembly steps and space usage;

[0006] 2. High risk of leakage: Pipelines and joints are prone to becoming leakage points. Defects in pipeline welding or errors in installation and operation can affect the system's vacuum level and long-term reliability.

[0007] 3. Increased size and cost: The split design makes the vacuum pump system larger and has more parts, increasing manufacturing and maintenance costs.

[0008] 4. Contamination risk: During operation, oil vapor will flow back into the oil rotary vane pump. Since external vacuum gauges are usually not specially protected, they are easily contaminated, which may lead to decreased sensitivity or damage.

[0009] 5. Inaccurate measurement: Due to the different pipelines used, the deviations caused by the pipelines are difficult to correct, resulting in inaccurate measurement results.

[0010] In summary, in many cases, the container being evacuated does not have a suitable location for installing a vacuum gauge, and connecting it through pipes can easily lead to deviations in the vacuum gauge's measurement results. Summary of the Invention

[0011] This invention addresses the shortcomings of existing rotary vane vacuum pump vacuum gauge installation structures by providing a rotary vane vacuum pump with an integrated vacuum gauge. By improving the installation position of the vacuum gauge, it achieves at least one of the following: simplified installation, reduced leakage risk, reduced size and cost, reduced pollution risk, and improved measurement accuracy.

[0012] To achieve the above objectives, this utility model adopts the following technical solution: a rotary vane vacuum pump with an integrated vacuum gauge, the rotary vane vacuum pump with an integrated vacuum gauge comprising:

[0013] The pump body is equipped with an air inlet;

[0014] Air intake connector, installed on the air intake port;

[0015] Vacuum gauge, including gauge connector;

[0016] The air inlet connector has a first connecting part for connecting to a pipeline, a second connecting part for connecting to an air inlet, and a third connecting part for installing a vacuum gauge. The first connecting part, the second connecting part, and the third connecting part are connected to each other.

[0017] The rotary vane vacuum pump of this utility model integrates a vacuum gauge, with a third connection part formed on the inlet connector for mounting the vacuum gauge. The installation of the vacuum gauge is simple, requiring no additional bellows, KF port (KF port is short for KF vacuum connector, mainly used for gas transmission and sealing connection of vacuum system equipment), etc. Due to the simplification of the connecting pipeline, the corresponding leakage risk is also reduced; since no additional pipeline is required, the cost is also reduced; and without the deviation caused by different pipelines, the measurement is more accurate.

[0018] As an improvement, the third connecting part and the meter connecting head are threaded together, the third connecting part has a third internal thread, and the meter connecting head has an external thread that mates with the third internal thread.

[0019] As an improvement, a filter assembly is provided between the meter connector and the air inlet connector.

[0020] As an improvement, the filtration assembly includes a filter screen.

[0021] As an improvement, a sealing ring is provided between the filter assembly and the meter connector, which seals the connection between the meter connector and the air inlet.

[0022] As an improvement, the third connection part is provided with a third mounting hole, which includes a small diameter section with increasing hole diameter, a filter sealing section, a threaded section and an abutment section in sequence. The filter assembly and the sealing ring are located in the filter sealing section, and the threaded section forms the aforementioned third internal thread.

[0023] As an improvement, the second connection part is provided with an anti-backflow component, which includes a support member fixed in the second connection part and a movable lightweight seal. When the lightweight seal is subjected to pressure difference or buoyancy, the lightweight seal will seal the second connection part.

[0024] As an improvement, the second connecting part is provided with a second mounting hole, which includes an upper conical sealing section and a lower mounting section. The conical sealing section is larger at the top and smaller at the bottom. The support member is engaged with the mounting section, and an air inlet is formed on the support member.

[0025] As an improvement, the first connecting part is set horizontally; the second connecting part is set vertically; and the third connecting part is set horizontally.

[0026] As an improvement, the first connecting part has a first external thread, or the first connecting part adopts a KF port; the second connecting part is threadedly connected to the air inlet, the air inlet has an air inlet internal thread, and the second connecting part has a second external thread that mates with the air inlet internal thread.

[0027] The advantages of this rotary vane vacuum pump with integrated vacuum gauge are as follows: a third connection part for mounting the vacuum gauge is formed on the inlet connector, simplifying the installation of the vacuum gauge and eliminating the need for additional bellows, KF port (KF port is short for KF vacuum connector, mainly used for gas transmission and sealing connection in vacuum system equipment), etc.; due to the simplified connection pipeline, the corresponding leakage risk is reduced; since no additional pipeline is required, the cost is also reduced; and without the deviation caused by different pipelines, the measurement is more accurate. Furthermore, a filter structure is set to avoid or reduce contamination of the vacuum gauge due to its proximity to the pump body; and an anti-backflow oil structure is set. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the rotary vane vacuum pump with integrated vacuum gauge according to Embodiment 1 of this utility model.

[0029] Figure 2 This is an exploded view of the rotary vane vacuum pump with integrated vacuum gauge according to Embodiment 1 of this utility model.

[0030] Figure 3 This is an exploded view of some components of the rotary vane vacuum pump with integrated vacuum gauge according to Embodiment 1 of this utility model.

[0031] Figure 4 This is a cross-sectional view of the rotary vane vacuum pump with integrated vacuum gauge according to Embodiment 1 of this utility model.

[0032] Figure 5 This is a cross-sectional view of some components of the rotary vane vacuum pump with integrated vacuum gauge according to Embodiment 1 of this utility model.

[0033] Figure 6This is a cross-sectional view of the air inlet connector of the rotary vane vacuum pump with integrated vacuum gauge according to Embodiment 1 of this utility model.

[0034] In the diagram, 1 is the pump body; 11 is the air inlet.

[0035] 2. Air inlet connector; 21. First connecting part; 22. Second connecting part; 220. Second mounting hole; 221. Conical sealing section; 222. Mounting section; 23. Third connecting part; 230. Third mounting hole; 231. Small diameter section; 232. Filter sealing section; 233. Threaded section; 234. Abutment section;

[0036] 3. Meter connector;

[0037] 4. Filter components;

[0038] 5. Sealing ring;

[0039] 6. Supporting components;

[0040] 7. Lightweight seals. Detailed Implementation

[0041] The technical solutions of the embodiments of the present invention will be explained and described below. However, the following embodiments are only preferred embodiments of the present invention and not all of them. Other embodiments obtained by those skilled in the art based on the embodiments in the implementation methods without creative effort are all within the protection scope of the present invention.

[0042] See Figures 1 to 6 The rotary vane vacuum pump of the integrated vacuum gauge according to this utility model embodiment includes:

[0043] The pump body is equipped with an air inlet;

[0044] Air intake connector, installed on the air intake port;

[0045] Vacuum gauge, including gauge connector;

[0046] The air inlet connector has a first connecting part for connecting to a pipeline, a second connecting part for connecting to an air inlet, and a third connecting part for installing a vacuum gauge. The first connecting part, the second connecting part, and the third connecting part are connected to each other.

[0047] The rotary vane vacuum pump of this utility model integrates a vacuum gauge, with a third connection part formed on the inlet connector for mounting the vacuum gauge. The installation of the vacuum gauge is simple, requiring no additional bellows, KF port (KF port is short for KF vacuum connector, mainly used for gas transmission and sealing connection of vacuum system equipment), etc. Due to the simplification of the connecting pipeline, the corresponding leakage risk is also reduced; since no additional pipeline is required, the cost is also reduced; and without the deviation caused by different pipelines, the measurement is more accurate.

[0048] Example 1

[0049] See Figures 1 to 6 The rotary vane vacuum pump of the integrated vacuum gauge in Embodiment 1 of this utility model includes:

[0050] Pump body 1 is provided with air inlet 11;

[0051] Air intake connector 2 is installed on air intake port 11;

[0052] Vacuum gauge, including gauge connector 3;

[0053] The air inlet connector 2 has a first connecting part 21 for connecting to a pipeline, a second connecting part 22 for connecting to an air inlet 11, and a third connecting part 23 for installing a vacuum gauge. The first connecting part 21, the second connecting part 22, and the third connecting part 23 are connected to each other.

[0054] In this embodiment, only the meter connector 3 is shown; the other structures of the vacuum gauge are not shown.

[0055] In this embodiment, the third connecting part 23 and the meter connecting head 3 are threadedly connected. The third connecting part 23 has a third internal thread, and the meter connecting head 3 has an external thread that mates with the third internal thread.

[0056] In this embodiment, a filter assembly 4 is provided between the meter connector 3 and the air inlet connector 2.

[0057] In this embodiment, the filter component 4 includes a filter screen.

[0058] In this embodiment, a sealing ring 5 is provided between the filter assembly 4 and the meter connector 3, and the sealing ring 5 seals the meter connector 3 and the air inlet connector 2.

[0059] In this embodiment, the third connecting part 23 has a third mounting hole 230. The third mounting hole 230 includes a small diameter section 231 with increasing hole diameter, a filter sealing section 232, a threaded section 233 and an abutment section 234 in sequence. The filter assembly 4 and the sealing ring 5 are located in the filter sealing section 232, and the threaded section 233 forms the aforementioned third internal thread.

[0060] In this embodiment, the second connecting part 22 is provided with an anti-backflow component. The anti-backflow component includes a support member 6 fixed in the second connecting part 22 and a movable lightweight sealing member 7. When the lightweight sealing member 7 is subjected to pressure difference or buoyancy, the lightweight sealing member 7 seals the second connecting part 22.

[0061] In this embodiment, the second connecting portion 22 has a second mounting hole 220, which includes an upper conical sealing section 221 and a lower mounting section 222. The conical sealing section 221 is larger at the top and smaller at the bottom. The support member 6 is engaged with the mounting section 222, and an air inlet is formed on the support member 6. The conical sealing section 221 and the hole in the first connecting portion 21 are connected by equal-diameter holes.

[0062] In this embodiment, the first connecting part 21 is horizontally arranged; the second connecting part 22 is vertically arranged; and the third connecting part 23 is horizontally arranged.

[0063] In this embodiment, the first connecting part 21 has a first external thread. In other embodiments, the air inlet connector 2 and the pipe can also be connected via a KF port structure.

[0064] In this embodiment, the second connecting part 22 is threadedly connected to the air inlet 11. The air inlet 11 has an internal air inlet thread, and the second connecting part 22 has a second external thread that mates with the internal air inlet thread.

[0065] The beneficial effects of the rotary vane vacuum pump with integrated vacuum gauge in Embodiment 1 of this utility model are as follows: a third connection part 23 for installing the vacuum gauge is formed on the inlet connector 2, simplifying the installation of the vacuum gauge and eliminating the need for additional bellows, KF port pipes, etc.; the simplified connection pipes reduce the corresponding leakage risk; the elimination of additional piping reduces costs and results in a more compact structure; and the absence of deviations caused by different piping leads to more accurate measurements. Although the anti-backflow structure reduces backflow, it cannot prevent oil mist generated by pump oil evaporation from contaminating the vacuum gauge. This design incorporates a filtration structure to prevent or reduce contamination of the vacuum gauge due to its proximity to the pump body 1 (in the prior art, when the vacuum gauge is far from the pump body 1, the contamination from oil backflow is minimal and can be almost ignored). However, in this embodiment, the vacuum gauge is located at the air inlet of the pump body 1, resulting in a shorter path distance and a more pronounced oil backflow phenomenon compared to the prior art. The filtration structure uses a small-sized filter screen and includes an anti-oil backflow structure. The air inlet connector 2 is threadedly connected to the pump body 1, and the meter connector 3 is also threadedly connected to the air inlet connector 2, facilitating the disassembly and maintenance of all components.

[0066] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Those skilled in the art should understand that the present invention includes, but is not limited to, the content described in the above specific embodiments. Any modifications that do not depart from the functional and structural principles of the present invention will be included within the scope of the claims.

Claims

1. A rotary vane vacuum pump with an integrated vacuum gauge, characterized in that: Rotary vane vacuum pumps with integrated vacuum gauges include: The pump body (1) is provided with an air inlet (11); Air inlet connector (2) is installed on air inlet (11); Vacuum gauge, including gauge connector (3); The air inlet connector (2) has a first connection part (21) for connecting to a pipe, a second connection part (22) for connecting to an air inlet (11) and a third connection part (23) for installing a vacuum gauge, and the first connection part (21), the second connection part (22) and the third connection part (23) are connected to each other.

2. The rotary vane vacuum pump with integrated vacuum gauge according to claim 1, characterized in that: The third connecting part (23) and the meter connecting head (3) are threaded together. The third connecting part (23) has a third internal thread, and the meter connecting head (3) has an external thread that mates with the third internal thread.

3. The rotary vane vacuum pump with integrated vacuum gauge according to claim 2, characterized in that: A filter assembly (4) is provided between the meter connector (3) and the air inlet connector (2).

4. The rotary vane vacuum pump with integrated vacuum gauge according to claim 3, characterized in that: The filter assembly (4) includes a filter screen.

5. The rotary vane vacuum pump with integrated vacuum gauge according to claim 3, characterized in that: A sealing ring (5) is provided between the filter assembly (4) and the meter connector (3), and the sealing ring (5) seals the meter connector (3) and the air inlet connector (2).

6. The rotary vane vacuum pump with integrated vacuum gauge according to claim 5, characterized in that: The third connecting part (23) has a third mounting hole (230). The third mounting hole (230) includes a small diameter section (231) with increasing hole diameter, a filter sealing section (232), a threaded section (233) and an abutment section (234). The filter assembly (4) and the sealing ring (5) are located in the filter sealing section (232). The threaded section (233) forms the aforementioned third internal thread.

7. The rotary vane vacuum pump with an integrated vacuum gauge according to any one of claims 1 to 6, characterized in that: The second connecting part (22) is provided with an anti-backflow component, which includes a support member (6) fixed in the second connecting part (22) and a movable lightweight seal member (7). When the lightweight seal member (7) is subjected to pressure difference or buoyancy, the lightweight seal member (7) seals the second connecting part (22).

8. The rotary vane vacuum pump with integrated vacuum gauge according to claim 7, characterized in that: The second connecting part (22) has a second mounting hole (220), which includes an upper conical sealing section (221) and a lower mounting section (222). The conical sealing section (221) is larger at the top and smaller at the bottom. The support member (6) is engaged with the mounting section (222), and an air inlet is formed on the support member (6).

9. The rotary vane vacuum pump with integrated vacuum gauge according to claim 1, characterized in that: The first connecting part (21) is horizontally set; the second connecting part (22) is vertically set; and the third connecting part (23) is horizontally set.

10. The rotary vane vacuum pump with integrated vacuum gauge according to claim 1, characterized in that: The first connecting part (21) has a first external thread, or the first connecting part (21) adopts a KF port; The second connecting part (22) is threadedly connected to the air inlet (11), the air inlet (11) has an internal air inlet thread, and the second connecting part (22) has a second external thread that mates with the internal air inlet thread.

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