A vacuum chamber internal transmission structure
Patent Information
- Application Number
- CN202522541722.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-30
- Publication Date
- 2026-10-09
- Estimated Expiration
- 2035-11-30
AI Technical Summary
[0006]采用本实用新型后，将原本很长的传动轴分成几个长度较短的，每个之间通过柔性联轴器连接，降低了加工的难度也降低了装配调试的难度，能够确保传动稳定可靠性，每一段传动轴为独立的传动单元，可实现提前预组装，即模块化生产，提高了生产效率。
Smart Images
Figure CN224836049U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of vacuum coating equipment technology, specifically to a transmission structure within a vacuum cavity. Background Technology
[0002] The transmission system within the vacuum chamber is both crucial and challenging in vacuum coating equipment. It's responsible for moving the carrier plate and silicon wafer through the equipment at a set speed and according to the established process to complete the coating. The stability of the transmission system directly determines the equipment's production efficiency and coating quality. Compared to transmission systems on the outside of a typical chamber, the transmission system within the vacuum chamber reduces the use of magnetohydrodynamics, making the entire device simpler and more aesthetically pleasing. The conventional method involves power transmission via a long, thin main drive shaft with multiple helical gears fixed at regular intervals. Figure 1 As shown, when the main drive shaft is long, it is difficult to ensure the straightness and concentricity of the shaft, which places higher demands on machining and production assembly. Summary of the Invention
[0003] To address the aforementioned technical problems, this utility model provides a transmission structure within a vacuum cavity, which reduces the difficulty of processing, assembly, and debugging, enables pre-assembly, and improves production efficiency.
[0004] The technical solution is as follows: a transmission structure inside a vacuum cavity, comprising a transmission shaft and N upper helical gear mechanisms, where N is an integer greater than 1, and lower helical gears of the same number meshing with the upper helical gears in the upper helical gear mechanism are installed on the transmission shaft. The characteristic is that N transmission shafts are provided, each transmission shaft is connected to two support bearings and is equipped with one lower helical gear to form a transmission unit, and adjacent transmission units are connected by a flexible coupling.
[0005] A further feature is that the support bearing is installed on one side of the fixed upright plate, the bottom of the fixed upright plate is connected to the base plate, the upper helical gear mechanism includes an upper bearing seat installed on the fixed upright plate, an upper bearing is installed in the upper bearing seat, the upper helical gear is installed on an upper helical gear shaft connected to the upper bearing, and one end of the upper helical gear shaft passes through the fixed upright plate and connects to the transmission wheel.
[0006] By adopting this utility model, the originally long drive shaft is divided into several shorter ones, each connected by a flexible coupling. This reduces the difficulty of processing, assembly, and debugging, ensuring stable and reliable transmission. Each drive shaft segment is an independent transmission unit, which can be pre-assembled, i.e., modular production, thus improving production efficiency. Attached Figure Description
[0007] Figure 1 This is a schematic diagram of the existing technology structure; Figure 2 This is a front view of the structure of this utility model; Figure 3 for Figure 2 Sectional view along the AA direction; Figure 4 for Figure 2 Enlarged view of the cross section along the BB direction; Figure 5 This is a schematic diagram of the transmission unit structure. Detailed Implementation
[0008] See Figures 2 to 5 As shown, a transmission structure inside a vacuum cavity includes four transmission shafts 1 and four upper helical gear mechanisms 2, the number of which can be adjusted according to the size of the cavity. Lower helical gears 3, which mesh with the upper helical gears 2-1 in the upper helical gear mechanism 2 and are the same number of them, are installed on the transmission shafts 1. Each transmission shaft 1 is connected to two support bearings 4 and is equipped with a lower helical gear 3 to form a transmission unit. Adjacent transmission units are connected by a flexible coupling 5.
[0009] The support bearing 4 is installed on one side of the fixed plate 6. The bottom of the fixed plate 6 is connected to the base plate 7. The upper helical gear mechanism 2 also includes an upper bearing seat 2-2 installed on the fixed plate 6. An upper bearing 2-3 is installed in the upper bearing seat 2-2. The upper helical gear 2-1 is installed on the upper helical gear shaft 2-4 connected to the upper bearing 2-3. One end of the upper helical gear shaft 2-4 passes through the fixed plate 6 and connects to the transmission wheel 2-5.
[0010] This application reduces the difficulty of processing, and by using a flexible coupling to absorb the slight deviations between each transmission unit, it ensures the smoothness of transmission, enables modular production, effectively reduces production costs, and improves efficiency.
Claims
1. A transmission structure within a vacuum cavity, comprising a transmission shaft and N upper helical gear mechanisms, where N is an integer greater than 1, wherein lower helical gears, in the same number as the upper helical gears in the upper helical gear mechanisms, are mounted on the transmission shaft, characterized in that... The transmission shaft is provided in N parts. Each transmission shaft is connected to two support bearings and is equipped with a lower helical gear to form a transmission unit. Adjacent transmission units are connected by a flexible coupling.
2. The transmission structure within a vacuum cavity according to claim 1, characterized in that, The support bearing is installed on one side of the fixed upright plate, and the bottom of the fixed upright plate is connected to the base plate. The upper helical gear mechanism includes an upper bearing seat installed on the fixed upright plate, an upper bearing installed in the upper bearing seat, and an upper helical gear installed on an upper helical gear shaft connected to the upper bearing. One end of the upper helical gear shaft passes through the fixed upright plate and connects to the transmission wheel.