Three-way valve and exhaust gas treatment system

Abstract

The utility model provides a kind of three-way valve and tail gas treatment system, comprising: valve body, inside hollow and with first port, second port, third port and fourth port;First channel part, be located at first port and be used to connect with exhaust line;Second channel part, be located at second port and be used to connect with first tail gas treatment machine;Third channel part, be located at third port and be used to connect with second tail gas treatment machine;Fourth channel part, be located at fourth port and be used to connect with purging gas line, purging gas line is used to into the purging gas of set heating temperature to fourth channel part, to heat valve body inside and by-product in valve body is purged to first tail gas treatment machine and / or second tail gas treatment machine.The utility model is heated by fourth channel part and enters the purging gas of heating, sufficiently heats valve body inside, avoids by-product in valve body inner wall adhesion crystallization, ensures that three-way valve is clean, avoids three-way valve and leads to suction pump to choke due to action not in place.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a three-way valve and exhaust gas treatment system. Background Technology

[0002] Exhaust gas treatment equipment is an indispensable and important piece of equipment in the semiconductor wafer manufacturing process. Currently, it can be roughly divided into water washing exhaust gas treatment equipment, electric heating + water washing exhaust gas treatment equipment, combustion + water washing exhaust gas treatment equipment, plasma + water washing exhaust gas treatment equipment, and adsorption (dry) exhaust gas treatment equipment. In most of the harsh processes such as chemical vapor deposition (CVD), a large amount of dust is generated, which can easily clog exhaust pipes and exhaust gas treatment equipment. The exhaust gas treatment equipment and the standby machine's three-way pipeline are switched manually or automatically.

[0003] Industry practice typically involves installing heating elements in the exhaust pipe and three-way valve to maintain a high temperature in the pipe, preventing internal byproducts from adhering and crystallizing on the pipe wall. The three-way valve is periodically checked for blockages.

[0004] However, due to the inconsistent thickness of the exhaust pipe and the three-way valve, the exhaust pipe and the three-way valve are heated unevenly. The internal temperature of the three-way valve cannot be raised to the same level as that of the exhaust pipe. Byproducts are easily retained at the sealing ring inside the three-way valve, which can cause the three-way valve to fail to operate and fail to switch to the backup machine. This can cause the air pump to stall and damage the product.

[0005] In view of this, it is necessary to propose a three-way valve and exhaust gas treatment system to solve the above problems. Utility Model Content

[0006] The purpose of this invention is to provide a three-way valve and exhaust gas treatment system to improve the problem of easy blockage inside the existing three-way valve.

[0007] This utility model provides a three-way valve, comprising: The valve body is hollow inside and has a first port, a second port, a third port and a fourth port; The first channel section is located at the first port and is used to connect to the exhaust pipe; The second channel section is located at the second port and is used to connect to the first exhaust gas treatment unit; The third channel section is located at the third port and is used to connect to the second exhaust gas treatment unit; The fourth channel section is located at the fourth port and is used to connect to the purge gas pipeline. The purge gas pipeline is used to introduce purge gas with a set heating temperature into the fourth channel section to heat the inside of the valve body and purge the by-products inside the valve body to the first exhaust gas treatment machine and / or the second exhaust gas treatment machine.

[0008] In one possible embodiment, a heating device is provided on the purge gas pipeline to heat the purge gas in the purge gas pipeline.

[0009] In one possible embodiment, the purge gas pipeline is provided with a temperature sensor for detecting the temperature of the purge gas, and the heating device can adjust the heating temperature based on the temperature of the purge gas detected by the temperature sensor.

[0010] In one possible embodiment, the fourth channel section includes a connecting pipe and an air outlet plate disposed at one end of the connecting pipe. The air outlet plate is disposed at the fourth port and has a plurality of air outlets spaced apart. The air outlets are respectively connected to the connecting pipe and the internal space of the valve body.

[0011] In one possible embodiment, the air outlets are at least one group, each group being arranged in a linear array; or, The air outlet is at least one set, and each set of air outlets is arranged in a circular array with the center of the air outlet end plate as the center; or... At least one of the air outlets is located at the center of the air outlet end plate, and at least one group of the air outlets are arranged in a ring array with the center of the air outlet end plate as the center.

[0012] In one possible embodiment, the fourth channel portion is located at or near the bottom end of the valve body; and / or, The fourth channel is positioned toward the center of the valve body.

[0013] In one possible embodiment, the fourth channel section is provided with a check valve at one end near the valve body to prevent exhaust gas from flowing back into the purge gas pipeline.

[0014] In one possible embodiment, the set heating temperature ranges from 120°C to 180°C.

[0015] In one possible embodiment, the purging gas is an inert gas.

[0016] This utility model also provides an exhaust gas treatment system, including: an exhaust pipe, a first exhaust gas treatment machine, a second exhaust gas treatment machine, and a three-way valve as described in any of the above embodiments.

[0017] The beneficial effects of the three-way valve provided by this utility model are as follows: In addition to the existing first to third channel sections of the three-way valve, a fourth channel section is added. Purge gas at a set heating temperature is introduced into the fourth channel section through the purge gas pipeline to fully heat the inside of the valve body at high temperature. This prevents the process waste gas from changing from a gaseous state to a solid state on the inner wall of the valve body due to temperature changes, reduces the accumulation of by-products inside the three-way valve, extends the service life of the three-way valve, ensures the cleanliness of the inside of the three-way valve, and prevents the air pump from stalling due to incomplete operation of the three-way valve. Attached Figure Description

[0018] Figure 1 This is an exploded view of the three-way valve of this utility model.

[0019] Figure 2 This is a partially enlarged schematic diagram of the fourth channel portion of the three-way valve of this utility model.

[0020] Figure 3 This is a schematic diagram of the exhaust gas treatment system of this utility model.

[0021] Explanation of reference numerals in the attached drawings: 100, three-way valve; 110, valve body; 1101, first port; 120, first channel section; 121, first valve cover; 122, first sealing ring; 123, first valve seat; 130, second channel section; 131, second valve cover; 1311, second mounting groove; 132, second sealing ring; 133, second valve seat; 140, third channel section; 141, third valve seat; 150, fourth channel section; 151, connecting pipe; 152, air outlet plate; 1521, air outlet; 153. First flange; 160, top seat; 1601, through hole; 161, gland; 1611, perforation; 162, pressure ring; 170, seal; 180, valve stem; 181, first section; 182, second section; 190, valve ball; 191, opening; 200, purging gas pipeline; 210, heating device; 300, first tail gas treatment machine; 400, second tail gas treatment machine; 500, exhaust pipeline; 600, vacuum pump; 700, main equipment; 800, main pipeline; 900, acid discharge system. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0023] To address the problems existing in the prior art, embodiments of this utility model provide a three-way valve, see [link to relevant documentation]. Figure 1 The three-way valve 100 includes a valve body 110, a first channel portion 120, a second channel portion 130, a third channel portion 140, and a fourth channel portion 150. The valve body 110 is hollow and has a first port 1101, a second port, a third port, and a fourth port. The first channel portion 120 is located at the first port 1101 and is used to connect to the exhaust pipe 500. The second channel portion 130 is located at the second port and is used to connect to the first exhaust gas treatment machine 300. The third channel portion 140 is located at the third port and is used to connect to the second exhaust gas treatment machine 400. The fourth channel section 150 is located at the fourth port and is used to connect to the purge gas pipeline 200. The purge gas pipeline 200 is used to introduce purge gas with a set heating temperature into the fourth channel section 150 to heat the inside of the valve body 110 and purge the by-products inside the valve body 110 to the first tail gas treatment machine 300 and / or the second tail gas treatment machine 400. The first tail gas treatment machine 300 and the second tail gas treatment machine 400 are backups for each other.

[0024] This design improves the structure of the three-way valve 100 by adding a fourth channel 150. This fourth channel 150 connects to the purge gas pipeline 200. Heated purge gas from the pipeline 200 enters the valve body 110 through the fourth channel 150 and purges the interior of the valve body 110. Compared to the existing design that uses a heating element on the outside of the three-way valve 100, this design uses heated purge gas to directly heat the interior of the valve body 110, preventing byproducts from adhering to the inner wall of the valve body 110. During crystallization, the uncured byproducts inside the valve body 110 are blown to the first tail gas treatment machine 300 and / or the second tail gas treatment machine 400 under the purging action of the purging gas. This keeps the inside of the three-way valve 100 clean, avoids blockage of the three-way valve 100 which would affect its normal operation and switching, and avoids the risk of the air pump 600 stalling due to the three-way valve 100 not operating properly, which would cause machine downtime and affect production capacity. Furthermore, it can reduce the number of cleaning times, increase the uptime of the equipment, save manpower, and reduce pipeline cleaning costs.

[0025] In one embodiment, see Figure 3 A heating device 210 is provided on the purge gas pipeline 200 to heat the purge gas inside the purge gas pipeline 200. The heating device 210 can precisely control and adjust the heating temperature of the purge gas inside the purge gas pipeline 200.

[0026] Further, see Figure 3 The heating device 210 includes a heating strip disposed on the purge gas line 200.

[0027] Furthermore, the heating temperature range is set to 120℃-180℃. By heating the purge gas at high temperature, a high-temperature environment is ensured inside the three-way valve 100, preventing byproducts from adhering and crystallizing on the inner wall of the valve body 110.

[0028] In some specific embodiments, the purging gas is an inert gas, such as nitrogen, argon, or other non-reactive gases.

[0029] In one embodiment, see Figure 3 The purge gas pipeline 200 is equipped with a temperature detection element for detecting the temperature of the purge gas. The heating device 210 can adjust the heating temperature based on the purge gas temperature detected by the temperature detection element. Specifically, the temperature detection element is a temperature sensor.

[0030] Further, see Figure 3 The temperature detection element and the heating device 210 are respectively connected to a controller. The controller adjusts the heating temperature of the heating device 210 based on the temperature of the purge gas detected by the temperature detection element.

[0031] In one embodiment, see Figure 2 The fourth channel section 150 includes a connecting pipe 151 and an air outlet plate 152 located at one end of the connecting pipe 151. The air outlet plate 152 is located at the fourth port and has a plurality of air outlets 1521 spaced apart. The air outlets 1521 are respectively connected to the connecting pipe 151 and the internal space of the valve body 110. By using a plurality of dispersed air outlets 1521, the decentralized purging can improve the cleaning effect.

[0032] Furthermore, the aperture of the air outlet 1521 forms an angle with the horizontal direction, and the aperture is inclined, so that different air outlets 1521 can spray purging gas toward different areas inside the valve body 110, thereby further improving the purging and cleaning effect.

[0033] In the first embodiment, there is at least one set of air outlets 1521, and each set is arranged in a linear array. In the second embodiment, there is at least one set of air outlets 1521, and each set of air outlets 1521 is arranged in a ring array with the center of the air outlet end plate 152 as the center.

[0034] In the third specific embodiment, see Figure 2 At least one air outlet 1521 is located at the center of the air outlet end plate 152, and at least one group of air outlets 1521 are arranged in a ring array with the center of the air outlet end plate 152 as the center.

[0035] In one specific embodiment, see Figure 1 and Figure 2The fourth channel section 150 is located at or near the bottom of the valve body 110, and the purging gas is blown from the bottom of the valve body 110 into the interior of the valve body 110.

[0036] In another specific embodiment, see Figure 1 and Figure 2 The fourth channel section 150 is positioned towards the center of the valve body 110, and the purging gas is directed towards the center of the valve body 110.

[0037] In one embodiment, a check valve is provided at one end of the fourth channel portion 150 near the valve body 110 to prevent exhaust gas from flowing back into the purge gas line 200. Specifically, the check valve is a backflow valve.

[0038] In one embodiment, the fourth channel section 150 is detachably connected to the purge gas line 200 via a flange structure.

[0039] Further, see Figure 2 The flange structure includes a first flange 153 fitted and fixed to the other end of the connecting pipe 151, a second flange fitted and fixed to the end of the purging gas pipeline 200 near the fourth channel portion 150, and a sealing gasket sandwiched between the first flange 153 and the second flange. The first flange 153 and the second flange are locked and fixed by fasteners, such as bolts and screws.

[0040] In one embodiment, see Figure 1The three-way valve 100 also includes a top seat 160, a gland 161, a pressure ring 162, a seal 170, a valve stem 180, and a valve ball 190. The valve ball 190 is located inside the valve body 110. The valve ball 190 is hollow inside and has four openings 191 that communicate with its internal space. The top seat 160 is located on the top of the valve body 110. The top seat 160 has a through hole 1601 that communicates with the internal space of the valve body 110. The gland 161 has a through hole 1611. The valve stem 180 passes through the through hole 1601 and the through hole 1611 and its bottom end extends into the valve ball 190 and is installed and connected to the valve ball 190. The valve stem 180 includes a first section 181 and a second section 182 located at the bottom of the first section 181. The bottom of the second section 182 is installed and connected to the valve ball 190. The diameter of the first section 181 is smaller than the diameter of the second section 182. The connection between the first section 181 and the second section 182 is stepped. The through hole 1611 is adapted to the second section 182. The pressure cap 161 is fitted onto the second section 182 and threaded into the through hole 1601 so that the valve stem 180 is installed in the through hole 1601 and the valve stem 180 can rotate in the through hole 1601. By rotating the valve stem 180, the regulating valve ball 190 can be rotated so that at least two openings 191 are respectively connected to the corresponding channel section. The pressure ring 162 is sleeved on the valve stem 180 and sandwiched between the inner wall of the through hole 1601 and the pressure cap 161. The sealing element 170 is sleeved on the valve stem 180 and sandwiched between the pressure ring 162 and the pressure cap 161, so as to play a sealing role between the valve stem 180 and the through hole 1601.

[0041] In one specific embodiment, see Figure 1 The first channel portion 120 includes a tubular first valve cover 121, a first sealing ring 122, and an annular first valve seat 123. One end of the first valve cover 121 is threaded into the first port 1101. The inner wall of the first valve cover 121 is provided with a first mounting groove along the circumference of the first valve cover 121 on the side near the first port 1101. The first valve seat 123 is disposed in the first mounting groove and clamped between the inner wall of the valve body 110 and the inner wall of the first mounting groove. The first sealing ring 122 is disposed at the connection between the first valve cover 121 and the first port 1101 to seal the connection between the first valve cover 121 and the first port 1101.

[0042] In one specific embodiment, see Figure 1The second channel portion 130 includes a tubular second valve cover 131, a second sealing ring 132, and an annular second valve seat 133. One end of the second valve cover 131 is threaded into the second port. A second mounting groove 1311 is provided along the circumference of the second valve cover 131 on the side of the inner wall of the second valve cover 131 near the second port. The second valve seat 133 is disposed in the second mounting groove 1311 and clamped between the inner wall of the valve body 110 and the inner wall of the second mounting groove 1311. The second sealing ring 132 is disposed at the connection between the second valve cover 131 and the second port to seal the connection between the second valve cover 131 and the second port.

[0043] In one specific embodiment, see Figure 1 The third channel portion 140 includes a tubular third valve cover, a third sealing ring, and an annular third valve seat 141. One end of the third valve cover is threaded into the third port. The inner wall of the third valve cover is provided with a third mounting groove along the circumference of the third valve cover on the side near the third port. The third valve seat 141 is disposed in the third mounting groove and clamped between the inner wall of the valve body 110 and the inner wall of the third mounting groove. The third sealing ring is disposed at the connection between the third valve cover and the third port to seal the connection between the third valve cover and the third port.

[0044] This utility model also provides an exhaust gas treatment system, including: an exhaust pipe 500, a first exhaust gas treatment machine 300, a second exhaust gas treatment machine 400, and a three-way valve 100 as described in any of the above embodiments. An air extraction pump 600 is connected to the end of the exhaust pipe 500 away from the three-way valve 100. The air extraction pump 600 is connected to a main equipment 700 for wafer manufacturing via a main pipeline 800. The air extraction pump 600 is used to extract air from the process chamber within the main equipment 700, discharging waste gas and maintaining a vacuum in the process chamber. The first exhaust gas treatment machine 300 and the second exhaust gas treatment machine 400 are respectively connected to an acid removal system 900 for further treatment of the waste gas treated by the first exhaust gas treatment machine 300 and the second exhaust gas treatment machine 400.

[0045] In the description of this utility model, it should be understood that the terms "comprising" and "having" as used herein, and any variations thereof, are intended to cover non-exclusive inclusion, for example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such process, method, product, or device.

[0046] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0047] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0048] While the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as set forth in the claims. Furthermore, the utility model described herein may have other embodiments and can be implemented or realized in various ways. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains.

Claims

1. A three-way valve, characterized in that, include: The valve body is hollow inside and has a first port, a second port, a third port and a fourth port; The first channel section is located at the first port and is used to connect to the exhaust pipe; The second channel section is located at the second port and is used to connect to the first exhaust gas treatment unit; The third channel section is located at the third port and is used to connect to the second exhaust gas treatment unit; The fourth channel section is located at the fourth port and is used to connect to the purge gas pipeline. The purge gas pipeline is used to introduce purge gas with a set heating temperature into the fourth channel section to heat the inside of the valve body and purge the by-products inside the valve body to the first exhaust gas treatment machine and / or the second exhaust gas treatment machine.

2. The three-way valve according to claim 1, characterized in that, The purging gas pipeline is equipped with a heating device to heat the purging gas inside the pipeline.

3. The three-way valve according to claim 2, characterized in that, The purge gas pipeline is equipped with a temperature sensor for detecting the temperature of the purge gas, and the heating device can adjust the heating temperature based on the temperature of the purge gas detected by the temperature sensor.

4. The three-way valve according to claim 1, characterized in that, The fourth channel section includes a connecting pipe and an air outlet plate disposed at one end of the connecting pipe. The air outlet plate is disposed at the fourth port and has a plurality of air outlets spaced apart. The air outlets are respectively connected to the connecting pipe and the internal space of the valve body.

5. The three-way valve according to claim 4, characterized in that, The air outlets are in at least one group, each group arranged in a linear array; or... The air outlet is at least one set, and each set of air outlets is arranged in a circular array with the center of the air outlet end plate as the center; or... At least one of the air outlets is located at the center of the air outlet end plate, and at least one group of the air outlets are arranged in a ring array with the center of the air outlet end plate as the center.

6. The three-way valve according to any one of claims 1-5, characterized in that, The fourth channel portion is located at or near the bottom end of the valve body; and / or, The fourth channel is positioned toward the center of the valve body.

7. The three-way valve according to any one of claims 1-5, characterized in that, The fourth channel section is equipped with a check valve at one end near the valve body to prevent exhaust gas from flowing back into the purging gas pipeline.

8. The three-way valve according to any one of claims 1, 2, 4, and 5, characterized in that, The set heating temperature range is 120℃-180℃.

9. The three-way valve according to any one of claims 1-5, characterized in that, The purging gas is an inert gas.

10. An exhaust gas treatment system, characterized in that, include: The exhaust pipe, the first exhaust gas treatment unit, and the three-way valve as described in any one of claims 1-9.

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