High safety silicon tetrafluoride buffer tank

Abstract

The utility model provides a kind of high safety silicon tetrafluoride buffer tank.The kind of high safety silicon tetrafluoride buffer tank, including tank body, the tank body outer wall is fixedly installed with gas outlet pipe and gas inlet pipe, the gas inlet pipe outer wall is installed with the filtration component for impurity removal, the tank body upper end inner wall is fixedly installed with baffle, the baffle top is installed with the pressure relief component for adjusting pressure.The utility model provides a kind of high safety silicon tetrafluoride buffer tank, when the air pressure in the tank body below baffle reaches a certain degree, gas will extrude round block to move upwards, round block drives guiding rod to move upwards in the process of extruding spring, when round block moves to the above of gas outlet, the gas below baffle will pass through gas outlet and enter the tank body above baffle, temporary storage.

Description

Technical Field

[0001] This utility model relates to the field of buffer tank technology, and in particular to a high-safety silicon tetrafluoride buffer tank. Background Technology

[0002] A buffer tank consists of a tank body, inlet and outlet valves, pressure gauges, and vent valves. The tank body is typically made of steel plate, and valves are installed at the inlet and outlet for connecting fluid pipelines. Buffer tanks are usually equipped with air bladders or diaphragms to buffer changes in fluid pressure.

[0003] During storage or transportation, silicon tetrafluoride may experience abnormal pressure inside the tank due to temperature changes and flow fluctuations. If the buffer tank is not equipped with reliable pressure monitoring instruments and safety relief devices, or if these devices are not properly selected or maintained in a timely manner, the tank may burst due to overpressure.

[0004] Existing silicon tetrafluoride buffer tanks, when storing silicon tetrafluoride gas, have a limited buffering pressure range for the internal gas and cannot automatically release pressure once the pressure exceeds a certain limit.

[0005] Therefore, it is necessary to provide a high-safety silicon tetrafluoride buffer tank to solve the above-mentioned technical problems. Utility Model Content

[0006] This invention provides a high-safety silicon tetrafluoride buffer tank, which solves the problem that the buffer pressure range of the gas inside the buffer tank is limited and that it cannot release pressure on its own after the pressure exceeds a certain limit.

[0007] To solve the above-mentioned technical problems, this utility model provides a high-safety silicon tetrafluoride buffer tank, including a tank body. An outlet pipe and an inlet pipe are fixedly installed on the outer wall of the tank body. A filter assembly for removing impurities is installed on the outer wall of the inlet pipe. A baffle is fixedly installed on the inner wall of the upper end of the tank body. A pressure relief assembly for adjusting pressure is installed on the top of the baffle. A circulation assembly is installed between the outer wall of the tank body located at the upper end of the baffle and the outer wall of the tank body located at the lower end of the baffle.

[0008] Preferably, the pressure relief assembly includes a cylinder, which is fixed to the top of the partition. The bottom of the cylinder penetrates the bottom of the partition, and a guide rod is slidably connected to the top of the cylinder. A circular block is fixedly installed at the bottom of the guide rod, and the outer wall of the circular block is in close contact with the inner wall of the lower end of the cylinder. A spring is fixedly installed between the top of the circular block and the inner top of the cylinder, and the spring is sleeved on the outside of the guide rod. A limit plate is fixedly installed at the top of the guide rod, and several sets of air outlet holes are evenly opened on the outer wall of the upper end of the cylinder.

[0009] Preferably, the circulation assembly includes a gas supply pipe, which is fixedly installed between the outer wall of the tank at the upper end of the partition and the outer wall of the tank at the lower end of the partition, and a one-way valve is fixedly installed on the outer wall of the gas supply pipe.

[0010] Preferably, valve one is fixedly installed on the outer wall of the air outlet pipe, valve two and valve three are fixedly installed on the outer wall of the air inlet pipe respectively, and the filter assembly is installed between valve two and valve three.

[0011] Preferably, the filter assembly includes a rectangular plate, which is fixed between the outer walls of the air inlet pipes located between valve two and valve three. A rectangular groove is provided on the top of the rectangular plate, which penetrates the side wall of the air inlet pipe. A filter plate is inserted and connected to the inner wall of the rectangular groove, and a handle is fixedly installed on the top of the filter plate.

[0012] Preferably, a pressure relief valve and a pressure gauge are fixedly installed on the top of the tank, and both the pressure relief valve and the pressure gauge are connected to the inside of the tank above the partition.

[0013] Preferably, a control device and an observation window are fixedly installed on the outer wall of the tank, and the control device is connected to a pressure relief valve and a pressure gauge, respectively.

[0014] Compared with related technologies, the high-safety silicon tetrafluoride buffer tank provided by this utility model has the following beneficial effects: When the gas pressure inside the tank below the baffle reaches a certain level, the gas will compress the round block and move it upward. As the round block moves upward, it will compress the spring. When the round block moves above the vent, the gas below the baffle will enter the tank above the baffle through the vent for temporary storage. When the gas pressure inside the tank below the baffle is lower than the gas pressure inside the tank above the baffle, the gas above the baffle will automatically flow back to the tank below the baffle through the one-way valve and the gas delivery pipe, so as to replenish the gas in time and improve the overall pressure stabilization effect of the buffer tank for gas delivery. Attached Figure Description

[0015] Figure 1 A schematic diagram of a preferred embodiment of a high-safety silicon tetrafluoride buffer tank provided by this utility model; Figure 2 for Figure 1 The diagram shows the internal structure of the tank. Figure 3 for Figure 2 The enlarged schematic diagram of part A shown below; Figure 4 for Figure 2 The enlarged schematic diagram of part B is shown.

[0016] Numbered in the diagram: 1. Tank body, 2. Outlet pipe, 3. Inlet pipe, 4. Filter assembly, 41. Rectangular plate, 42. Rectangular groove, 43. Filter plate, 44. Handle, 5. Observation window, 6. Control device, 7. Circulation assembly, 71. Gas supply pipe, 72. One-way valve, 8. Pressure relief valve, 9. Pressure gauge, 10. Pressure relief assembly, 101. Limiting plate, 102. Cylinder, 103. Spring, 104. Guide rod, 105. Outlet, 106. Circular block, 11. Partition plate, 12. Valve 1, 13. Valve 2, 14. Valve 3. Detailed Implementation

[0017] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0018] Please refer to the following: Figure 1 A schematic diagram of a preferred embodiment of a high-safety silicon tetrafluoride buffer tank provided by this utility model; Figure 2 for Figure 1 The diagram shows the internal structure of the tank. Figure 3 for Figure 2 The enlarged schematic diagram of part A shown below; Figure 4 for Figure 2 The enlarged schematic diagram of part B is shown. A high-safety silicon tetrafluoride buffer tank includes: a tank body 1, an outlet pipe 2 and an inlet pipe 3 fixedly installed on the outer wall of the tank body 1, a filter assembly 4 for removing impurities installed on the outer wall of the inlet pipe 3, a baffle 11 fixedly installed on the upper inner wall of the tank body 1, a pressure relief assembly 10 for adjusting pressure installed on the top of the baffle 11, and a circulation assembly 7 installed between the outer wall of the tank body 1 at the upper end of the baffle 11 and the outer wall of the tank body 1 at the lower end of the baffle 11.

[0019] The pressure relief assembly 10 includes a cylinder 102, which is fixed to the top of the partition 11. The bottom of the cylinder 102 penetrates the bottom of the partition 11, and a guide rod 104 is slidably connected to the top of the cylinder 102. A circular block 106 is fixedly installed at the bottom of the guide rod 104. The outer wall of the circular block 106 is in contact with the inner wall of the lower end of the cylinder 102. A spring 103 is fixedly installed between the top of the circular block 106 and the inner top of the cylinder 102. The spring 103 is sleeved on the outside of the guide rod 104. A limit plate 101 is fixedly installed at the top of the guide rod 104. Several sets of air vents 105 are evenly opened on the outer wall of the upper end of the cylinder 102.

[0020] The damping coefficient of spring 103 is selected to be below the pressure resistance value of tank 1. When the gas pressure inside tank 1 below partition 11 reaches a certain level, the gas will squeeze the round block 106 to move upward. During the process of the round block 106 driving the guide rod 104 to move upward, it will squeeze the spring 103. When the round block 106 moves above the vent 105, the gas below partition 11 will enter the tank 1 above partition 11 through the vent 105 for temporary storage.

[0021] The circulation assembly 7 includes a gas supply pipe 71, which is fixedly installed between the outer wall of the tank 1 at the upper end of the partition 11 and the outer wall of the tank 1 at the lower end of the partition 11. A one-way valve 72 is fixedly installed on the outer wall of the gas supply pipe 71.

[0022] When the gas pressure inside the tank 1 below the partition 11 is lower than the gas pressure inside the tank above the partition 11, the gas above the partition 11 will automatically flow into the tank 1 below the partition 11 through the one-way valve 72 and the gas supply pipe 71.

[0023] A valve 12 is fixedly installed on the outer wall of the air outlet pipe 2, and valves 13 and 14 are fixedly installed on the outer wall of the air inlet pipe 3 respectively. The filter assembly 4 is installed between valves 13 and 14.

[0024] The installation of valves 12, 13, and 14 facilitates the control of gas entry and exit.

[0025] The filter assembly 4 includes a rectangular plate 41, which is fixed between the outer walls of the air inlet pipe 3 located between valve 2 13 and valve 3 14. A rectangular groove 42 is provided on the top of the rectangular plate 41, which penetrates the side wall of the air inlet pipe 3. A filter plate 43 is inserted and connected to the inner wall of the rectangular groove 42, and a handle 44 is fixedly installed on the top of the filter plate 43.

[0026] When the filter plate 43 needs to be replaced, close valve 13 and valve 14, and pull the handle 44 upwards to remove the filter plate 43.

[0027] A pressure relief valve 8 and a pressure gauge 9 are fixedly installed on the top of the tank body 1. Both the pressure relief valve 8 and the pressure gauge 9 are connected to the inside of the tank body 1 above the partition 11.

[0028] The pressure relief valve 8 is connected to an external collection device. When the pressure gauge 9 detects that the internal pressure of the tank 1 above the baffle 11 is too high, the pressure relief valve 8 discharges the gas inside the tank 1 above the baffle 11.

[0029] The outer wall of the tank 1 is fixedly equipped with a control device 6 and an observation window 5. The control device 6 is connected to the pressure relief valve 8 and the pressure gauge 9, respectively.

[0030] The control device 6 is a PLC controller, and the observation window 5 allows for easy viewing of the interior of the tank 1.

[0031] The working principle of the high-safety silicon tetrafluoride buffer tank provided by this utility model is as follows: Silicon tetrafluoride gas is delivered to the tank 1 through the inlet pipe 3. Before the silicon tetrafluoride enters the tank 1, the filter assembly 4 filters out impurities in the silicon tetrafluoride. When the gas pressure inside the tank 1 below the baffle 11 is high, the gas pressure below the baffle 11 will control the pressure relief assembly 10 to deliver excess gas to the tank 1 above the baffle 11. When the gas pressure inside the tank 1 below the baffle 11 is low, the circulation assembly 7 will deliver the gas inside the tank 1 above the baffle 11 to the tank 1 below the baffle 11 to replenish the gas in time and improve the overall pressure stabilization effect of the buffer tank for gas delivery.

[0032] Compared with related technologies, the high-safety silicon tetrafluoride buffer tank provided by this utility model has the following beneficial effects: When the gas pressure inside the tank 1 below the partition 11 reaches a certain level, the gas will squeeze the round block 106 to move upward. As the round block 106 moves the guide rod 104 upward, it will squeeze the spring 103. When the round block 106 moves above the vent 105, the gas below the partition 11 will enter the tank 1 above the partition 11 through the vent 105 for temporary storage. When the gas pressure inside the tank 1 below the partition 11 is lower than the gas pressure inside the tank above the partition 11, the gas above the partition 11 will automatically flow back to the tank 1 below the partition 11 through the one-way valve 72 and the gas supply pipe 71, so as to replenish the gas in time and improve the overall pressure stabilization effect of the buffer tank on gas delivery.

[0033] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the content of this utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A high-safety silicon tetrafluoride buffer tank, characterized in that, The device includes a tank body, on which an outlet pipe and an inlet pipe are fixedly installed on the outer wall of the tank body. A filter assembly for removing impurities is installed on the outer wall of the inlet pipe. A baffle is fixedly installed on the inner wall of the upper end of the tank body. A pressure relief assembly for adjusting pressure is installed on the top of the baffle. A circulation assembly is installed between the outer wall of the tank body located at the upper end of the baffle and the outer wall of the tank body located at the lower end of the baffle. The circulation assembly includes a gas supply pipe, which is fixedly installed between the outer wall of the tank at the upper end of the partition and the outer wall of the tank at the lower end of the partition. A one-way valve is fixedly installed on the outer wall of the gas supply pipe.

2. The high-safety silicon tetrafluoride buffer tank according to claim 1, characterized in that, The pressure relief assembly includes a cylinder fixed to the top of a partition. The bottom of the cylinder penetrates the bottom of the partition, and a guide rod is slidably connected to the top of the cylinder. A circular block is fixedly installed at the bottom of the guide rod, and the outer wall of the circular block is in contact with the inner wall of the lower end of the cylinder. A spring is fixedly installed between the top of the circular block and the inner top of the cylinder, and the spring is sleeved on the outside of the guide rod. A limit plate is fixedly installed at the top of the guide rod, and several sets of air vents are evenly opened on the outer wall of the upper end of the cylinder.

3. The high-safety silicon tetrafluoride buffer tank according to claim 1, characterized in that, A valve is fixedly installed on the outer wall of the air outlet pipe, and valves two and three are fixedly installed on the outer wall of the air inlet pipe respectively. The filter assembly is installed between valves two and three.

4. A high-safety silicon tetrafluoride buffer tank according to claim 3, characterized in that, The filter assembly includes a rectangular plate, which is fixed between the outer walls of the air inlet pipes of valves two and three. A rectangular groove is provided on the top of the rectangular plate, which penetrates the side wall of the air inlet pipe. A filter plate is inserted into the inner wall of the rectangular groove, and a handle is fixedly installed on the top of the filter plate.

5. A high-safety silicon tetrafluoride buffer tank according to claim 1, characterized in that, A pressure relief valve and a pressure gauge are fixedly installed on the top of the tank, and both the pressure relief valve and the pressure gauge are connected to the inside of the tank above the partition.

6. A high-safety silicon tetrafluoride buffer tank according to claim 5, characterized in that, The outer wall of the tank is fixedly equipped with a control device and an observation window, and the control device is connected to a pressure relief valve and a pressure gauge, respectively.

Images