A large flow non-corrosive chemical medium uninterrupted delivery system

Abstract

The utility model discloses a kind of large-flow non-corrosive chemical medium uninterrupted conveying system, including at least two source barrels with heating and liquid level monitoring, a centralized feeding cabinet and external heat preservation pipeline.Integrated with the pumping module of automatic switching, filtering module, pressure and temperature control module and pneumatic and control unit in centralized feeding cabinet.Through central controller real-time monitoring liquid level, pressure and temperature signal, and control pneumatic valve and the coordinated action of conveying pump, realize when main source barrel liquid level is insufficient, system can automatically, without interruption, switch to standby source barrel continue to feed.The utility model passes through modularization integration and intelligent control, effectively solved the conveying interruption problem caused by barrel or pump maintenance in prior art, and ensure the high stability of temperature and pressure in conveying process, especially suitable for semiconductor, chemical and other fields to fluid conveying have high continuity and stability requirement's occasion.

Description

Technical Field

[0001] This utility model relates to the field of industrial fluid transportation technology, specifically to an uninterrupted transportation system for large-flow-rate non-corrosive chemical media. Background Technology

[0002] In the manufacturing processes of industries such as semiconductors, photovoltaics, display panels, and fine chemicals, it is often necessary to continuously and stably supply large volumes of non-corrosive chemical media, such as certain high-purity solvents, photoresists, and developers, to the process equipment (i.e., gas consumption points). These media typically have strict requirements for the stability of delivery temperature, pressure, and flow rate. If the delivery is interrupted or the parameters fluctuate, it will directly lead to a decrease in product yield.

[0003] In existing technologies, a single-source material tank combined with a single pump is commonly used for conveying. When the medium in the source material tank is depleted or the conveying pump requires maintenance, the system must be shut down for replacement or repair, which cannot meet the needs of uninterrupted operation in modern production lines. In addition, existing systems are often not precise or comprehensive enough in temperature control, and are prone to changes in the physical properties of the medium due to changes in ambient temperature; in terms of pressure control, there is also a lack of effective pulsation suppression and precise adjustment methods, resulting in unstable conveying flow.

[0004] Therefore, there is an urgent need for a high-flow-rate chemical media delivery system that can achieve high stability, high reliability, and uninterrupted delivery capability. Utility Model Content

[0005] The purpose of this invention is to overcome the shortcomings of existing technologies and provide a high-flow-rate, non-corrosive chemical media uninterrupted conveying system. Through modular integration and intelligent control, this system achieves automatic switching of the feeding path and precise regulation of temperature and pressure, thereby ensuring the uninterrupted and stable conveying process.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A high-flow-rate, non-corrosive chemical medium uninterrupted delivery system, characterized in that it comprises: a source material tank unit comprising at least two source material tanks (A, B) arranged side by side, each source material tank being equipped with a heating device and a radar level gauge, and each source material tank having a pneumatic valve and a manual valve installed on its outlet pipe; and a centralized supply cabinet, which internally contains: The pumping module includes at least one delivery pump, the inlet of which is selectively fluidly connected to the outlet pipe of any of the source material barrels in the source material barrel unit via a pipe and valve assembly; A filter module is installed on the outlet pipe of the delivery pump; The pressure and temperature control module includes a pressure sensor, a temperature sensor, and a heat tracing device installed on the pipeline. An external insulated pipe connects the outlet of the centralized material supply cabinet to a remote gas consumption point; The system includes a pneumatic and control unit, which comprises a central controller connected to the pneumatic valve, delivery pump, pressure sensor, and temperature sensor. The central controller is used to control the opening and closing of the pneumatic valve and the start and stop of the delivery pump based on the signals from the radar level gauge, pressure sensor, and temperature sensor, so as to achieve automatic switching of the material supply path and uninterrupted delivery.

[0008] Preferably, the centralized feeding cabinet is also equipped with a damper to absorb pressure pulsations generated during pumping and stabilize the flow rate.

[0009] Preferably, the pressure and temperature control module further includes a pressure regulating valve for precisely controlling the outlet pressure.

[0010] Preferably, the pumping module includes two delivery pumps, which are connected in parallel and can be switched so that one is in use and the other is on standby, further improving the reliability of the system.

[0011] Preferably, the pipes in the source material hopper, the centralized supply cabinet, and the external conveying pipes are all equipped with independent heat tracing and insulation layers, and the temperature setting value of each heat tracing and insulation layer is consistent to ensure that the temperature of the medium remains constant throughout the entire conveying process.

[0012] Preferably, a check valve is also provided on the outlet pipe of the filter module to prevent backflow of the medium.

[0013] Preferably, the centralized feeding cabinet is also equipped with safety protection components, including a smoke detector, a high-temperature switch and a sprinkler head, to deal with abnormal situations such as fire.

[0014] Preferably, the centralized feeding cabinet is also equipped with a vacuum generator, which is used to evacuate the pipeline section during system maintenance to facilitate safe maintenance.

[0015] Preferably, the central controller is further configured to: when the radar level gauge of the feed source tank detects that the liquid level is lower than the first preset threshold, automatically open the pneumatic valve of the backup feed source tank and start the delivery pump; after the flow rate stabilizes, close the pneumatic valve of the original feed source tank to achieve seamless switching.

[0016] Compared with the prior art, the beneficial effects of this utility model are: 1. Uninterrupted delivery: Through the design of dual (or multiple) source material bins and automatic switching logic, it ensures that when one source material bin is exhausted, it can be switched to the backup source material bin without interruption, meeting the needs of 24 / 7 continuous production.

[0017] 2. High stability and reliability: The dual-pump design with one pump in use and one in standby, dampers to reduce pulsation, and comprehensive temperature and pressure monitoring and feedback control ensure extreme stability of the output medium flow rate, pressure, and temperature.

[0018] 3. Intelligence and Automation: The central controller integrates all sensors and actuators, realizing fully automatic control from liquid level monitoring and path switching to temperature and pressure regulation, reducing manual intervention and lowering the risk of operational errors.

[0019] 4. Convenient maintenance and high safety: The modular design of the centralized feeding cabinet facilitates maintenance; the vacuum generator allows for easy emptying of pipelines before maintenance; the manual valve serves as a backup for the pneumatic valve, improving operational flexibility; and the safety protection components effectively enhance the overall safety of the system. Attached Figure Description

[0020] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings: Figure 1 This is the complete PID flow chart for the device of this utility model. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] like Figure 1 As shown, the present invention provides a high-flow-rate, non-corrosive chemical medium uninterrupted conveying system, which mainly includes a source material tank unit, a centralized feeding cabinet, and an external insulated pipe.

[0023] The raw material tank unit consists of two 1.5T raw material tanks, A and B, arranged side-by-side in the room. Each raw material tank is externally encased in a heating jacket or heating cable as a heating device, and is equipped with a radar level gauge for real-time monitoring of the liquid level inside the tank. The raw material tank outlet pipe is connected to a centralized supply cabinet outside the room. Each raw material tank outlet pipe is equipped with a manual valve and a pneumatic valve in sequence. The manual valve is used for emergency shut-off or maintenance, and the pneumatic valve is used for automatic control.

[0024] The centralized material supply cabinet is the core of the system. It integrates the following components: Pumping module: This module consists of two parallel diaphragm pumps, operating in a one-in-use, one-on-standby mode. The pump inlets are connected to the outlet pipes of source material tanks A and B via a multi-way valve assembly (such as a pneumatic three-way ball valve), allowing both pumps to selectively draw media from either source material tank. The media is ultimately connected to a transfer tank via a flexible hose.

[0025] Filtration module: An online filter is installed in series on the outlet pipe of the delivery pump to filter out particulate impurities that may be present in the medium.

[0026] The chemical media, after being processed inside the cabinet, is transported to the remote point of use via external insulated pipes. The pneumatic valves throughout the system are driven by compressed air and controlled centrally by a central controller based on sensor signals, enabling fully automated operation.

[0027] Pressure and temperature control module: A damper (used to absorb pressure pulsations generated by the pump and stabilize flow), a pressure sensor, a temperature sensor, a pressure regulating valve, and a heat tracing device wrapped around the pipeline are installed sequentially on the main pipeline after the filter. The heat tracing device is controlled by a central controller using PID control based on feedback from the temperature sensor to ensure that the medium temperature remains constant at the set value (e.g., 25℃).

[0028] Safety and auxiliary components: The top of the cabinet is equipped with a smoke detector, a high-temperature switch, and a sprinkler head, which constitute a safety protection component and improve the safety of the system; a vacuum generator is installed at the high point of the pipeline or at the pump outlet to purge the pipeline section during system maintenance, which facilitates maintenance and cleaning; a check valve is installed before the system outlet to prevent backflow of the medium.

[0029] The external insulation pipe connects the outlet of the centralized material supply cabinet to the remote process machine (gas consumption point). This pipe is also equipped with an external insulation layer, and its temperature setting is consistent with that inside the cabinet and the source material barrel.

[0030] The pneumatic and control unit is the brain of the system. Its core is a programmable logic controller (PLC) as the central controller. The signal outputs of the radar level gauge, pressure sensor, and temperature sensor are connected to the PLC's analog input module. The PLC's outputs control the pneumatic valves of the material tank, the start and stop of the delivery pump, and the operation of the pressure regulating valve and heating device via relays and solenoid valves. The pressure regulating valve is used to precisely control the pressure of the medium within the pipeline.

[0031] The central controller is further configured to automatically open the pneumatic valve of the backup material tank and start the conveying pump when the radar level gauge of the feed source tank detects that the liquid level is lower than the first preset threshold. After the flow rate stabilizes, the pneumatic valve of the original feed source tank is closed, thereby realizing automatic switching of the feeding path and uninterrupted conveying.

[0032] The specific workflow is as follows: After the system starts, it supplies material from the source hopper A by default, opening its outlet pneumatic valve and starting a main delivery pump. The medium is pressurized by the pump, purified by the filter, stabilized by the damper, and its pressure and temperature are regulated before being transported to the point of use through an external insulated pipeline.

[0033] During this period, the central controller continuously monitors the liquid level in source material tank A. When the radar level gauge detects that the liquid level is lower than the first preset threshold (e.g., 15%), the PLC automatically executes the switching procedure: first, it opens the outlet pneumatic valve of the backup source material tank B and starts the backup delivery pump (if set to switch pumps as well), and after the pressure sensor confirms that the downstream pressure is stable within the set range, it closes the pneumatic valve of source material tank A. This process achieves uninterrupted switching of the material supply source.

[0034] If the operating delivery pump malfunctions, the system can automatically or manually switch to the standby pump to ensure uninterrupted delivery. Throughout the process, the temperature and pressure control modules operate continuously to ensure stable parameters of the output medium. Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the scope of the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A high-flow-rate, non-corrosive chemical medium uninterrupted delivery system, characterized in that, include: Source material tank unit: includes at least two source material tanks (A, B) arranged side by side, each source material tank is equipped with a heating device and a radar level gauge, and each source material tank is equipped with a pneumatic valve and a manual valve on its outlet pipe. The centralized material supply cabinet is equipped with: The pumping module includes at least one delivery pump, the inlet of which is selectively fluidly connected to the outlet pipe of any of the source material barrels in the source material barrel unit via a pipe and valve assembly; A filter module is installed on the outlet pipe of the delivery pump; The pressure and temperature control module includes a pressure sensor, a temperature sensor, and a heat tracing device installed on the pipeline. An external insulated pipe connects the outlet of the centralized material supply cabinet to a remote gas consumption point; The system includes a pneumatic and control unit, which comprises a central controller connected to the pneumatic valve, delivery pump, pressure sensor, and temperature sensor. The central controller is used to control the opening and closing of the pneumatic valve and the start and stop of the delivery pump based on the signals from the radar level gauge, pressure sensor, and temperature sensor, so as to achieve automatic switching of the material supply path and uninterrupted delivery.

2. The high-flow-rate, non-corrosive chemical medium uninterrupted delivery system according to claim 1, characterized in that: The centralized feeding cabinet is also equipped with a damper.

3. The high-flow-rate, non-corrosive chemical medium uninterrupted delivery system according to claim 1, characterized in that, The pressure and temperature control module also includes a pressure regulating valve.

4. The high-flow-rate, non-corrosive chemical medium uninterrupted delivery system according to claim 1, characterized in that, The pumping module includes two delivery pumps, which are connected in parallel and can be switched so that one is in use and the other is on standby.

5. The high-flow-rate, non-corrosive chemical medium uninterrupted delivery system according to claim 1, characterized in that: The raw material hopper, the pipes in the centralized feeding cabinet, and the external conveying pipes are all equipped with independent heat tracing and insulation layers, and the temperature setting value of each heat tracing and insulation layer is the same.

6. The high-flow-rate, non-corrosive chemical medium uninterrupted delivery system according to claim 1, characterized in that, A check valve is also installed on the outlet pipe of the filter module.

7. The high-flow-rate, non-corrosive chemical medium uninterrupted delivery system according to claim 1, characterized in that, The centralized feeding cabinet is also equipped with safety protection components, including a smoke detector, a high-temperature switch, and a spray head.

8. The high-flow-rate, non-corrosive chemical medium uninterrupted delivery system according to claim 1, characterized in that, The centralized feeding cabinet is also equipped with a vacuum generator, which is used to evacuate the pipeline section during system maintenance.

9. The high-flow-rate, non-corrosive chemical medium uninterrupted delivery system according to claim 1, characterized in that, The central controller is further configured to: when the radar level gauge of the feed source tank detects that the liquid level is lower than the first preset threshold, automatically open the pneumatic valve of the backup feed source tank and start the delivery pump; after the flow rate stabilizes, close the pneumatic valve of the original feed source tank.

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