A vacuum oxygen-free heating oven cavity structure

CN224838218UActive Publication Date: 2026-10-09ANHUI XUTENG MICROELECTRONICS EQUIP CO LTD
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Patent Information

Application Number
CN202620018076.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2026-01-08
Publication Date
2026-10-09
Estimated Expiration
2036-01-08

AI Technical Summary

Technical Problem

[0003]真空无氧加热烤箱为了维持真空度,一般来说会采用侧壁加热方式进行,避免循环热风进入腔体内,而这样设计会带来弊端,侧壁厚度过大会影响加热设备热传递效率,但是厚度过小真空环境下侧壁结构又容易发生形变变形

Benefits of technology

本实用新型所提供的真空无氧加热烤箱腔体结构通过第一S型风道和第二S型风道作为主要加热源,所述主腔体100为整体式结构,而所述第一S型风道和第二S型风道中用于引导气流的隔板110还可以对主腔体100侧壁结构进行补强,在满足加热同时利用隔板来增强真空过程中腔体的结构强度。

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Abstract

The utility model provides a kind of vacuum oxygen-free heating oven cavity structure, comprising: main cavity and outer protective cover, the main cavity inside is equipped with the accommodating cavity of placing material to be handled, the main cavity two sides are also equipped with first heating cavity and second heating cavity, and communication passage is equipped between the first heating cavity and second heating cavity;The outer protective cover is wrapped in the two sides and top of main cavity closed first heating cavity, second heating cavity and communication passage;The first heating cavity and second heating cavity are all equipped with several groups of baffle, and the first heating cavity and second heating cavity form S type air duct by baffle.The baffle for guiding airflow in the first S type air duct and second S type air duct provided by the utility model can also reinforce the main cavity side wall structure, while meeting heating, the structural strength of cavity in vacuum process is enhanced using baffle.
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Description

Technical Field

[0001] This utility model belongs to the technical field of oven cavity structure, and particularly relates to a vacuum oxygen-free heating oven cavity structure. Background Technology

[0002] Vacuum oxygen-free heating ovens use a vacuum pump to continuously extract air from inside the oven, creating a low-pressure or vacuum environment (typically up to 10). - The pressure is set at 3Pa level, and then high-purity nitrogen is introduced to remove impurities such as oxygen and moisture from the air. In a vacuum environment, the boiling point of water is significantly lowered, making it easier for moisture in the material to evaporate, while effectively preventing oxidation reactions at high temperatures.

[0003] To maintain the vacuum level, vacuum oxygen-free heating ovens generally use side wall heating to prevent circulating hot air from entering the cavity. However, this design has drawbacks: if the side wall thickness is too large, it will affect the heat transfer efficiency of the heating equipment; if the thickness is too small, the side wall structure is prone to deformation in a vacuum environment. Utility Model Content

[0004] This utility model provides a vacuum oxygen-free heating oven cavity structure, which is implemented as follows: A vacuum oxygen-free heating oven cavity structure includes: The main cavity and the outer protective cover are provided. The main cavity has a cavity for holding the material to be processed. The main cavity also has a first heating cavity and a second heating cavity on both sides. A communication channel is provided between the first heating cavity and the second heating cavity. The outer protective cover covers the sides and top of the main cavity and seals the first heating cavity, the second heating cavity and the communication channel. The first heating chamber and the second heating chamber are each provided with several sets of partitions, and the first heating chamber and the second heating chamber form an S-shaped air duct through the partitions.

[0005] Preferably, the first heating chamber is provided with several sets of parallel partitions, the ends of adjacent partitions are alternately connected to the main cavity, and the gaps divided by the partitions form a first S-shaped air duct. The partitions in the second heating chamber have the same structure as the partitions in the first heating chamber, forming a second S-shaped air duct.

[0006] Preferably, the connecting channel is located on the top outer side of the main cavity, and the first S-shaped air duct located in the first heating cavity and the second S-shaped air duct located in the second heating cavity are connected to each other through the connecting channel.

[0007] Preferably, the front end face of the main cavity is provided with a door, and the receiving cavity is connected to the outside through the door.

[0008] Preferably, the main cavity is provided with an upper assembly groove and a lower assembly groove on the side of the cavity door, and the upper assembly groove and the lower assembly groove are provided with a delivery conduit that communicates with the inside of the main cavity.

[0009] Preferably, the conveying conduit in the upper assembly slot is an air inlet conduit, and the conveying conduit in the lower assembly slot is an air outlet conduit.

[0010] Preferably, the number of conveying conduits in both the upper and lower assembly slots is no less than two sets.

[0011] Preferably, the receiving cavity is further provided with a first embedding groove and a second embedding groove, the delivery conduit in the lower assembly groove is connected to the first embedding groove, and the delivery conduit in the upper assembly groove is connected to the second embedding groove.

[0012] Preferably, both the first and second embedding slots are provided with airflow grids at their openings.

[0013] Compared with the prior art, the embodiments of this application have the following main advantages: The vacuum oxygen-free heating oven cavity structure provided by this utility model uses the first S-shaped air duct and the second S-shaped air duct as the main heating source. The main cavity 100 is an integral structure. The baffles 110 in the first S-shaped air duct and the second S-shaped air duct can also reinforce the side wall structure of the main cavity 100. While satisfying the heating requirements, the baffles are used to enhance the structural strength of the cavity during the vacuum process. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the cavity structure of a vacuum oxygen-free heating oven provided by this utility model.

[0015] Figure 2 This is a schematic diagram of the main cavity and outer protective cover structure of a vacuum oxygen-free heating oven cavity structure provided by this utility model.

[0016] Figure 3 This is a schematic diagram of the main cavity structure of a vacuum oxygen-free heating oven cavity structure provided by this utility model.

[0017] Figure 4 This is a schematic diagram of the second heating chamber in a vacuum oxygen-free heating oven cavity structure provided by this utility model.

[0018] Figure 5 This is a schematic diagram of the first heating chamber structure of a vacuum oxygen-free heating oven cavity structure provided by this utility model.

[0019] Explanation of reference numerals in the attached figures: 100. Main cavity; 110. Partition; 101. First heating cavity; 102. Connecting channel; 103. Second heating cavity; 104. Upper assembly slot; 105. Lower assembly slot; 200. Outer protective cover; 300. Front sealing door; 400. Receiving cavity. Detailed Implementation

[0020] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used herein in the specification of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application; the terms "comprising" and "having," and any variations thereof, in the specification, claims, and foregoing drawings of this application are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the specification, claims, or foregoing drawings of this application are used to distinguish different objects, not to describe a particular order.

[0021] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0022] This utility model embodiment provides a vacuum oxygen-free heating oven cavity structure, such as... Figures 1-5 As shown, the cavity structure of the vacuum oxygen-free heating oven includes: The main cavity 100 has an internal cavity 400 for holding the material to be processed. The main cavity 100 is further provided with a first heating cavity 101 and a second heating cavity 103 on both sides, and a connecting channel 102 is provided between the first heating cavity 101 and the second heating cavity 103; the front end face of the main cavity 100 is provided with a cavity door, and the receiving cavity 400 is connected to the outside through the cavity door. A front sealing door 300 is provided at the cavity door. The front sealing door 300 adopts existing technology, and a sealing ring is provided at the edge of the cavity door to isolate the connection with the outside; other temperature control and other structures of the vacuum oxygen-free heating oven are existing mature technologies, and will not be described in detail in this application. The first heating chamber 101 and the second heating chamber 103 are each provided with a number of partitions 110. The first heating chamber 101 is provided with a number of parallel partitions 110. The ends of adjacent partitions 110 are alternately connected to the main cavity 100. The gaps divided by the partitions 110 form a first S-shaped air duct. The partitions 110 in the second heating chamber 103 have the same structure as the partitions 110 in the first heating chamber 101, forming a second S-shaped air duct.

[0023] The connecting channel 102 is located on the top outer side of the main cavity 100, and the first S-shaped air duct located in the first heating cavity 101 and the second S-shaped air duct located in the second heating cavity 103 are connected to each other through the connecting channel 102. An outer protective cover 200 is made of heat-insulating material to minimize heat loss. The outer protective cover 200 wraps around the sides and top of the main cavity 100, sealing the first heating cavity 101, the second heating cavity 103, and the connecting channel 102. A partition 110 is fixedly connected to the inner wall of the outer protective cover 200 by bolts. The partition 110 acts as a connector to pull the main cavity 100, so that the outer protective cover 200 distributes the pressure of the main cavity 100 and avoids damage to the main cavity 100 due to negative pressure. In this embodiment, hot air from the outside is supplied through the first S-shaped air duct and the second S-shaped air duct, and the hot air flowing in the first S-shaped air duct and the second S-shaped air duct heats the main cavity 100. The main cavity 100 is also provided with a delivery conduit communicating with the interior of the main cavity 100. The delivery conduit is used for vacuuming or filling with nitrogen for protection. In this application, the first S-shaped air duct and the second S-shaped air duct serve as the main heating source. The main cavity 100 is an integral structure. The baffles 110 in the first S-shaped air duct and the second S-shaped air duct, which are used to guide the airflow, can also reinforce the side wall structure of the main cavity 100. While satisfying the heating requirement, the baffles are used to enhance the structural strength of the cavity during the vacuum process.

[0024] In a preferred embodiment of this invention, the main cavity 100 is provided with an upper assembly groove 104 and a lower assembly groove 105 on the side where the cavity door is located. The upper assembly groove 104 and the lower assembly groove 105 are provided with delivery conduits that communicate with the interior of the main cavity 100. The number of delivery conduits in the upper assembly groove 104 and the lower assembly groove 105 is not less than two sets. The conveying conduit in the upper assembly slot 104 is an air inlet conduit, and the conveying conduit in the lower assembly slot 105 is an air outlet conduit. The air outlet conduit is connected to an external vacuum device through a pipe, and the air inlet conduit is connected to a nitrogen supply device through a pipe. Both the air inlet conduit and the air outlet conduit are equipped with electromagnetic control valves to control their opening and closing. In a preferred embodiment of this invention, the receiving cavity 400 is further provided with a first embedding groove 201 and a second embedding groove. The first embedding groove 201 is provided at the bottom of the receiving cavity 400, and the second embedding groove is provided at the top of the receiving cavity 400. The delivery conduit in the lower assembly groove 105 is connected to the first embedding groove 201, and the delivery conduit in the upper assembly groove 104 is connected to the second embedding groove.

[0025] In this embodiment, the first embedding groove 201 and the second embedding groove adopt a rectangular structure, and both the first embedding groove 201 and the second embedding groove are provided with a grid for dispersing airflow at the groove opening; the airflow grid design enhances the airflow adsorption or airflow release area and improves the airflow circulation efficiency inside the receiving cavity 400.

[0026] It should be noted that, for the sake of simplicity, the foregoing embodiments are all described as a series of actions. However, those skilled in the art should understand that the present invention is not limited to the described order of actions, as some steps may be performed in other orders or simultaneously according to the present invention. Furthermore, those skilled in the art should also understand that the embodiments described in the specification are preferred embodiments, and the actions and modules involved are not necessarily essential to the present invention.

[0027] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit the scope of protection of this utility model. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on these embodiments, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Although this utility model has been described in detail with reference to the above embodiments, those skilled in the art can still combine, add, delete, or otherwise adjust the features of the various embodiments of this utility model according to the circumstances without conflict or creative effort, thereby obtaining different technical solutions that do not fundamentally depart from the concept of this utility model. These technical solutions are also within the scope of protection of this utility model.

Claims

1. A vacuum oxygen-free heating oven cavity structure, characterized in that, include: The main cavity (100) and the outer protective cover (200) are provided. The main cavity (100) is provided with a receiving cavity (400) for placing materials to be processed. The main cavity (100) is also provided with a first heating cavity (101) and a second heating cavity (103) on both sides. A connecting channel (102) is provided between the first heating cavity (101) and the second heating cavity (103). The outer protective cover (200) covers the sides and top of the main cavity (100) and seals the first heating cavity (101), the second heating cavity (103) and the connecting channel (102). The first heating chamber (101) and the second heating chamber (103) are each provided with several sets of partitions (110), and the first heating chamber (101) and the second heating chamber (103) form an S-shaped air duct through the partitions (110).

2. The cavity structure of a vacuum oxygen-free heating oven as described in claim 1, characterized in that, The first heating chamber (101) is provided with several sets of parallel partitions (110), the ends of adjacent partitions (110) are alternately connected to the main cavity (100), and the gaps divided by the partitions (110) form a first S-shaped air duct. The partitions (110) in the second heating chamber (103) have the same structure as the partitions (110) in the first heating chamber (101) to form a second S-shaped air duct.

3. The vacuum oxygen-free heating oven cavity structure as described in claim 2, characterized in that, The connecting channel (102) is located on the top outer side of the main cavity (100), and the first S-shaped air duct located in the first heating cavity (101) and the second S-shaped air duct located in the second heating cavity (103) are connected to each other through the connecting channel (102).

4. The cavity structure of a vacuum oxygen-free heating oven as described in claim 3, characterized in that, The main cavity (100) has a door on its front end face, and the receiving cavity (400) is connected to the outside through the door.

5. The vacuum oxygen-free heating oven cavity structure as described in claim 4, characterized in that, The main cavity (100) is provided with an upper assembly groove (104) and a lower assembly groove (105) on one side of the cavity door. The upper assembly groove (104) and the lower assembly groove (105) are provided with delivery conduits that communicate with the inside of the main cavity (100).

6. The vacuum oxygen-free heating oven cavity structure as described in claim 5, characterized in that, The conveying conduit installed in the upper assembly slot (104) is an air inlet conduit, and the conveying conduit installed in the lower assembly slot (105) is an air outlet conduit.

7. The vacuum oxygen-free heating oven cavity structure as described in claim 6, characterized in that, The number of conveying conduits in both the upper assembly slot (104) and the lower assembly slot (105) is no less than two sets.

8. The vacuum oxygen-free heating oven cavity structure as described in claim 7, characterized in that, The receiving cavity (400) is further provided with a first embedding groove (201) and a second embedding groove. The delivery conduit in the lower assembly groove (105) is connected to the first embedding groove (201), and the delivery conduit in the upper assembly groove (104) is connected to the second embedding groove.

9. The vacuum oxygen-free heating oven cavity structure as described in claim 8, characterized in that, Both the first embedding groove (201) and the second embedding groove are provided with a grille for dispersing airflow at the opening.