A heat treatment furnace with a material hydrogen impurity purification system

Abstract

The utility model discloses a heat treatment furnace with material hydrogen impurity purification system, which comprises a rack, a horizontal vacuum cylinder arranged on the rack, a vacuum heating furnace chamber of high alloy austenitic heat-resistant stainless steel material arranged in the vacuum cylinder, resistance heating wires embedded in the inner wall of the vacuum cylinder, and a circulating water cooling pipeline arranged on the surface of the vacuum cylinder; the inner end of the vacuum cylinder is sealingly connected with a molecular pump through a C-shaped sealing sleeve with a water cooling channel, and the molecular pump and a mechanical vacuum pump cooperatively form a high-vacuum extraction system; a plurality of temperature measuring flanges are further installed in the vacuum cylinder. The utility model integrates vacuum extraction, precise heating, circulating cooling and stable sealing functions, promotes hydrogen atoms to fully escape and efficiently discharge through a high-temperature and high-vacuum environment, guarantees the vacuum stability through the water cooling design of the sealing sleeve, realizes precise temperature regulation and control through the temperature measuring flanges, significantly improves the hydrogen impurity removal rate and the product quality consistency, and is suitable for hydrogen impurity purification treatment of ceramic tube seat plating layers.

Description

Technical Field

[0001] This utility model relates to heat treatment furnaces, specifically to a heat treatment furnace with a material hydrogen impurity purification system. Background Technology

[0002] In the field of modern electronics and semiconductor packaging, ceramic sockets are core packaging materials, and the quality of their surface coating directly affects the reliability and lifespan of components. However, during the coating process, hydrogen atoms can easily penetrate into the coating and remain. These residual hydrogens can cause hydrogen embrittlement, leading to deterioration of coating performance, decreased structural stability of components, and seriously affecting the long-term reliability of electronic devices.

[0003] Existing hydrogen impurity removal equipment suffers from problems such as low functional integration, insufficient purification efficiency, and poor temperature control accuracy. Some equipment only performs heating or vacuuming functions, requiring multiple devices to complete the purification process, which is cumbersome and inefficient. Some integrated equipment has heating chambers with insufficient heat resistance and poor temperature uniformity, resulting in insufficient hydrogen atom escape. Simultaneously, sealing components are prone to aging and failure under high-temperature environments, affecting vacuum maintenance and further reducing purification effectiveness. Therefore, there is an urgent need for an integrated, efficient, and stable hydrogen impurity purification heat treatment device to solve the problem of hydrogen residue in ceramic tube base plating. Summary of the Invention

[0004] The purpose of this invention is to overcome the shortcomings of the prior art and provide a heat treatment furnace for purifying hydrogen impurities in ceramic tube base coatings. By integrating vacuum extraction, precise heating, circulating cooling and a stable sealing structure, it achieves efficient removal of hydrogen impurities and improves the quality of ceramic tube base products.

[0005] To solve the above-mentioned technical problems, this utility model provides the following solution: A heat treatment furnace with a material hydrogen impurity purification system, comprising a frame, a chamber and an installation platform within the frame, and further comprising: A vacuum cylinder is horizontally mounted on the mounting platform. Its outer end is provided with a vacuum heating chamber door, which is located on the side of the frame. The inner end of the vacuum cylinder is provided with a pump connection part, and its inner wall is embedded with a resistance heating wire. A vacuum heating furnace chamber is located inside the vacuum cylinder; A circulating water-cooling pipeline installed on the surface of the vacuum cylinder; A sealing sleeve is respectively fitted onto the outer end pipe wall of the vacuum cylinder and the pipe wall of the pump connection part, and the sealing sleeve is provided with a circulating water cooling channel for heat dissipation. A molecular pump is installed on the mounting platform and has three interfaces. The first interface is connected to the pump connection part, and the second interface facing downwards is connected to the vacuum pipeline. A mechanical vacuum pump, the first end of which is connected to the third interface of the molecular pump, and the second end of which is connected downward to the vacuum pumping line.

[0006] Furthermore, the shell of the vacuum heating furnace is made of stainless steel.

[0007] Furthermore, the stainless steel shell is made of high-alloy austenitic heat-resistant stainless steel.

[0008] Furthermore, the sealing sleeve is a circular sealing sleeve formed by the butt joint of the ends of two C-shaped sealing strips.

[0009] Furthermore, the vacuum heating furnace is arranged along the length of the vacuum cylinder and is located in the central region of the vacuum cylinder.

[0010] Furthermore, a temperature measuring flange is also installed inside the vacuum cylinder.

[0011] Furthermore, the temperature measuring flange is provided with multiple flanges.

[0012] Compared with the prior art, the beneficial effects of this utility model are: 1. The heat treatment furnace of this utility model has an integrated design and comprehensive functions: This utility model integrates vacuum extraction (mechanical vacuum pump + molecular pump), precise heating (resistance heating wire + heat-resistant furnace chamber), circulating cooling (vacuum cylinder water-cooled pipeline + sealing sleeve water-cooled channel) and stable sealing structure into one unit, eliminating the need for multiple devices, simplifying the operation process and improving purification efficiency.

[0013] 2. The heat treatment furnace of this utility model has excellent purification effect: The vacuum heating furnace chamber is made of high alloy austenitic heat-resistant stainless steel, combined with the resistance heating wire embedded in the inner wall of the vacuum cylinder, which ensures good temperature uniformity and strong heat resistance during the heating process, so that the hydrogen atoms in the ceramic tube base coating can fully obtain energy and escape; at the same time, the mechanical vacuum pump and the molecular pump work together to form a high vacuum environment, accelerate the discharge of hydrogen atoms, and significantly improve the hydrogen impurity removal rate.

[0014] 3. The heat treatment furnace of this utility model is stable and reliable in operation: the circulating water cooling pipeline on the surface of the vacuum cylinder can effectively avoid temperature surges and ensure the overall thermal stability of the equipment; the sealing sleeve adopts a C-shaped sealing strip docking structure, which, together with the internal circulating water cooling channel, can efficiently dissipate heat for the sealing components in a high-temperature environment, avoid the aging and failure of the rubber sealing ring, continuously maintain the sealing performance of the vacuum cylinder, and ensure the vacuum degree requirements of the purification process.

[0015] 4. The heat treatment furnace of this utility model has precise temperature control: the setting of multiple temperature measuring flanges can monitor the temperature of different areas inside the vacuum cylinder in real time, which facilitates precise adjustment of heating parameters, ensures the consistency of the purification process, and improves the stability of product quality. Attached Figure Description

[0016] Figure 1 This is a perspective view of the visible external structure of the heat treatment furnace of this utility model.

[0017] Figure 2 This is a diagram showing the internal structure of the heat treatment furnace of this utility model.

[0018] Figure 3 This is a structural diagram of the vacuum heating furnace chamber of this utility model.

[0019] Figure 4 This is a structural diagram of the vacuum cylinder of this utility model.

[0020] Figure 5 This is a structural diagram of the C-type sealing strip of this utility model.

[0021] Figure 6 This is a structural diagram of the combination of multiple temperature measuring flanges of this utility model.

[0022] In the attached diagram, the following labels are used: 1-Frame; 2, 3-Vacuum heating chamber door; 4-Molecular pump; 5-Mechanical vacuum pump; 6-Sealing sleeve; 7-Vacuum cylinder; 8-Circulating water-cooled pipeline; 9-Pump connection; 10-Vacuum heating furnace; 11-Temperature measuring flange. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments, so that the advantages and features of the present utility model can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the protection scope of the present utility model. Obviously, the embodiments described in this utility model are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0024] Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0025] Example 1: The specific structure of this utility model is as follows: Please refer to the appendix. Figure 1-6 The present invention discloses a heat treatment furnace with a material hydrogen impurity purification system, comprising a frame 1, which is an integral support structure, having a chamber and an installation platform inside, and a warning light 2 on the top of the frame 1.

[0026] The heat treatment furnace also includes a vacuum cylinder 7, a vacuum heating furnace chamber 10, a circulating water cooling pipeline 8, a sealing sleeve 6, a molecular pump 4, and a mechanical vacuum pump 5.

[0027] The vacuum cylinder 7 is horizontally mounted on the installation platform, and its outer end is provided with a vacuum heating chamber door 3. The vacuum heating chamber door 3 is located on the side of the frame 1. The inner end of the vacuum cylinder 7 is provided with a pump connection part 9, and the inner wall of its inner cavity is embedded with a resistance heating wire. The vacuum heating chamber door 3 facilitates the placement and removal of ceramic tube seats, and can achieve vacuum sealing when closed. When the resistance heating wire is energized, it generates heat to provide a heating environment for the ceramic tube seats in the vacuum heating furnace 10, allowing hydrogen atoms in the coating to gain energy and escape.

[0028] A vacuum heating furnace chamber 10 is located within the inner cavity of the vacuum cylinder 7. Specifically, the vacuum heating furnace chamber 10 is positioned along the length of the vacuum cylinder 7 and is located in the central region of the vacuum cylinder 7. The vacuum heating furnace chamber 10 is used to house ceramic tube holders. The shell of the vacuum heating furnace chamber 10 is made of stainless steel, specifically, high-alloy austenitic heat-resistant stainless steel. This material possesses high heat resistance and good temperature uniformity, ensuring uniform heating of the ceramic tube holders at all locations within the furnace chamber and sufficient escape of hydrogen atoms. Its central location along the length of the vacuum cylinder 7 maximizes the absorption of heat from the resistance heating wire, thereby improving heating efficiency.

[0029] A circulating water-cooled pipeline 8 is installed on the surface of the vacuum cylinder 7. The circulating water carries away the heat from the surface of the vacuum cylinder 7, preventing a temperature surge during the heating process and ensuring the structural stability and service life of the equipment.

[0030] The sealing sleeve 6 is a circular structure formed by the joint of the ends of two C-shaped sealing strips. The two sealing sleeves 6 are respectively fitted onto the outer end wall of the vacuum cylinder 7 and the pipe wall of the pump connection part 9, thus sealing the connection between the two ends of the vacuum cylinder 7. The circulating water-cooling channel inside the sealing sleeve 6 is circulated with cooling water, which helps the sealing sleeve 6 dissipate heat in the heated environment and maintain good sealing performance.

[0031] Both the molecular pump 4 and the mechanical vacuum pump 5 are mounted on the installation platform. The mechanical vacuum pump, as a backing pump, first performs rough vacuuming on the vacuum cylinder 7. Then, the molecular pump 4 is started to perform high vacuum extraction. The two work together to create a high vacuum environment in the vacuum cylinder 7 that meets the requirements for the escape of hydrogen impurities. The three ports of the molecular pump 4 are respectively connected to the pump connection part 9, the vacuum pipeline and the mechanical vacuum pump 5. The vacuum pipeline is set downwards for easy pipeline layout and maintenance.

[0032] Multiple temperature measuring flanges 11 are evenly installed inside the vacuum cylinder 7, which can monitor the temperature data of different areas inside the vacuum cylinder 7 in real time. The operator can adjust the heating power of the resistance heating wire according to the temperature data to ensure that the heating temperature is accurately controlled within the process requirements and to ensure the consistency of the purification effect. Example 2

[0033] The following is the working process of the heat treatment furnace of this utility model: Open the vacuum heating chamber door 3, place the ceramic tube base to be purified into the vacuum heating furnace chamber 10, close the vacuum heating chamber door 3 and seal it; start the mechanical vacuum pump 5 to perform rough vacuuming, and after the vacuum degree reaches the preset value, start the molecular pump 4 to perform high vacuum extraction; at the same time, the resistance heating wire is energized to heat, and the temperature is monitored and the heating power is adjusted through the temperature measuring flange 11 to maintain the temperature in the vacuum heating furnace chamber 10 at the optimal process temperature for hydrogen impurity escape; during the heating process, cooling water is continuously introduced into the circulating water cooling pipe 8 and the water cooling channel in the sealing sleeve 6 to dissipate heat from the vacuum cylinder 7 and the sealing sleeve 6 respectively; under the high temperature and high vacuum environment, the hydrogen atoms in the coating of the ceramic tube base fully escape and are extracted by the vacuum pump. After the hydrogen impurity purification is completed, turn off the heating components, and after the temperature drops to a safe range, turn off the vacuum pump, open the vacuum heating chamber door 3 and take out the product.

[0034] In summary, the integrated design of this utility model heat treatment furnace offers comprehensive functionality: it integrates vacuum extraction (mechanical vacuum pump + molecular pump), precise heating (resistance heating wire + heat-resistant furnace chamber), circulating cooling (vacuum cylinder water-cooled pipeline + sealing sleeve water-cooled channel), and a stable sealing structure into one unit, eliminating the need for multiple devices, simplifying the operation process, and improving purification efficiency.

[0035] This utility model heat treatment furnace has excellent purification effect: the vacuum heating furnace chamber is made of high alloy austenitic heat-resistant stainless steel, combined with the resistance heating wire embedded in the inner wall of the vacuum cylinder, ensuring good temperature uniformity and strong heat resistance during the heating process, which enables hydrogen atoms in the ceramic tube base coating to fully obtain energy and escape; at the same time, the mechanical vacuum pump and the molecular pump work together to form a high vacuum environment, accelerate the discharge of hydrogen atoms, and significantly improve the hydrogen impurity removal rate.

[0036] This utility model heat treatment furnace operates stably and reliably: the circulating water-cooling pipeline on the surface of the vacuum cylinder can effectively prevent temperature surges and ensure the overall thermal stability of the equipment; the sealing sleeve adopts a C-shaped sealing strip docking structure, combined with the internal circulating water-cooling channel, which can efficiently dissipate heat for the sealing components in high-temperature environments, prevent the rubber sealing ring from aging and failing, continuously maintain the sealing performance of the vacuum cylinder, and ensure the vacuum degree requirements of the purification process.

[0037] This utility model's heat treatment furnace offers precise temperature control: the multiple temperature measuring flanges allow for real-time monitoring of temperatures in different areas within the vacuum chamber, facilitating accurate adjustment of heating parameters, ensuring consistency in the purification process, and improving product quality stability.

[0038] The above description is only a preferred embodiment of the present utility model and does not limit the patent scope of the present utility model. Any equivalent structural or procedural transformations made based on the contents of the present utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of the present utility model.

Claims

1. A heat treatment furnace with a material hydrogen impurity purification system, comprising a frame (1), wherein the frame (1) is provided with a chamber and an installation platform, characterized in that, The heat treatment furnace also includes: Vacuum cylinder (7), which is horizontally installed on the installation platform, has a vacuum heating chamber door (3) at its outer end, which is located on the side of the frame (1), and has a pump connection part (9) at its inner end, with a resistance heating wire embedded in the inner wall of its inner cavity; A vacuum heating furnace (10) is located inside the vacuum cylinder (7); A circulating water-cooled pipeline (8) is installed on the surface of the vacuum cylinder (7); A sealing sleeve (6) is respectively fitted onto the outer end pipe wall of the vacuum cylinder (7) and the pipe wall of the pump connection part (9). The sealing sleeve (6) is provided with a circulating water cooling channel for heat dissipation. A molecular pump (4) is installed on the platform and has three interfaces. The first interface is connected to the pump connection part (9) and the second interface is connected to the vacuum pipeline facing downward. A mechanical vacuum pump (5) is provided, with its first end connected to the third port of the molecular pump (4) and its second end connected downwards to the vacuum line.

2. The heat treatment furnace with a material hydrogen impurity purification system according to claim 1, characterized in that, The shell of the vacuum heating furnace (10) is made of stainless steel.

3. A heat treatment furnace with a material hydrogen impurity purification system according to claim 2, characterized in that, The stainless steel shell is made of high-alloy austenitic heat-resistant stainless steel.

4. A heat treatment furnace with a material hydrogen impurity purification system according to claim 1, characterized in that, The sealing sleeve (6) is a circular sealing sleeve composed of the ends of two C-shaped sealing strips joined together.

5. A heat treatment furnace with a material hydrogen impurity purification system according to claim 1, characterized in that, The vacuum heating furnace (10) is arranged along the length of the vacuum cylinder (7) and is located in the central area of ​​the vacuum cylinder (7).

6. A heat treatment furnace with a material hydrogen impurity purification system according to claim 1, characterized in that, A temperature measuring flange (11) is also installed inside the vacuum cylinder (7).

7. A heat treatment furnace with a material hydrogen impurity purification system according to claim 6, characterized in that, The temperature measuring flange (11) is provided with multiple flanges.

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