CVD-hip integrated apparatus

Abstract

The utility model provides a kind of CVD-heat pressure sintering integrated equipment, belong to heat pressure sintering field, including vacuum heat pressure sintering bin, air extractor, air intake machine and control panel, the surface of vacuum heat pressure sintering bin is provided with placing assembly, the surface of vacuum heat pressure sintering bin is provided with limit component.The utility model, by setting limit piece, after material bin is moved to the top of support bar by sliding mode, the bottom plate surface of material bin will be in contact with the surface of limit piece, at this moment, limit piece will limit the front and rear movement range of material bin, after material bin is pushed to the inside of vacuum heat pressure sintering bin, the setting of limit plate will limit the left and right movement range of material bin, avoid the phenomenon that material bin generates displacement due to the vibration of vacuum heat pressure sintering bin, solve the problem that cannot guarantee that material pile tray remains stable in sintering device, the setting of limit piece also avoids the phenomenon that material bin appears vertical movement, further guarantee the stability of material bin.

Description

Technical Field

[0001] This utility model relates to the field of hot pressing sintering, and more specifically, to an integrated CVD-hot pressing sintering equipment. Background Technology

[0002] The CVD-hot pressing sintering integrated equipment is an advanced material preparation equipment that integrates the two core processes of chemical vapor deposition (CVD) and hot pressing sintering. It can realize "one-step" production from material synthesis to densification and is mainly used to prepare high-performance, high-density advanced inorganic materials. In the operation of existing integrated equipment, the materials to be sintered are usually placed in the equipment through a stacking tray, so that the materials are sintered on the surface of the stacking tray.

[0003] During operation, existing integrated sintering equipment experiences vibrations due to the movement of internal components, causing the main body to shake. However, these equipment cannot limit the movement of the material stacking tray, leading to tray displacement when the equipment shakes. This makes it difficult to remove the tray after sintering, affecting the sintering efficiency. Solving these problems is a pressing issue for those skilled in the art. Summary of the Invention

[0004] To overcome the above deficiencies, this utility model provides an integrated CVD-hot pressing sintering equipment, which aims to solve the problem of not being able to ensure the stability of the material stack within the sintering device.

[0005] This utility model is implemented as follows: This utility model provides an integrated CVD-hot pressing sintering equipment, including a vacuum hot pressing sintering chamber, a vacuum pump, an air inlet, and a control panel. The vacuum pump is fixedly connected to the right side of the vacuum hot pressing sintering chamber, the air inlet is fixedly connected to the left side of the vacuum hot pressing sintering chamber, the control panel is located on the front of the vacuum hot pressing sintering chamber, the surface of the vacuum hot pressing sintering chamber is provided with placement components, and the surface of the vacuum hot pressing sintering chamber is provided with limit components.

[0006] The placement assembly includes a sealing plate, a support rod, a limiting component, a material bin, a fixing rod, a limiting plate, a support component, a protrusion, a groove, a moving plate, and a track. The sealing plate is disposed on the surface of the vacuum hot-pressing sintering chamber. The support rod is fixedly connected to the surface of the sealing plate. The limiting component is fixedly connected to the top of the support rod. The material bin is disposed on the top of the support rod. The fixing rod is fixedly connected to the inner wall surface of the vacuum hot-pressing sintering chamber. The limiting plate is fixedly connected to one end of the fixing rod. The support component is disposed inside the vacuum hot-pressing sintering chamber. The protrusion is fixedly connected to the bottom of the support rod. The groove is formed on the surface of the support component. The moving plate is fixedly connected to the surface of the support component. The track is formed on the inner surface of the vacuum hot-pressing sintering chamber.

[0007] Preferably, the sealing plate consists of an outer plate, an inner plate, and a sealing plate. The outer plate is located on the outer wall surface of the vacuum hot-pressing sintering chamber and is at the same horizontal plane as the outer wall surface of the vacuum hot-pressing sintering chamber. The inner plate is located on the surface of the vacuum hot-pressing sintering chamber and is in contact with the inner wall surface of the vacuum hot-pressing sintering chamber. The sealing plate is fixedly connected to the outer wall of the outer plate and is fixedly connected to the surface of the inner plate.

[0008] By adopting the above technical solution, the outer plate is pushed so that the inner plate is in contact with the surface of the vacuum hot pressing sintering chamber under the action of the sealing plate, and then sealed by the sealing plate.

[0009] Preferably, the support rod is slidably connected to the material bin, and the bottom plate of the material bin is slidably connected to the surface of the limiting member.

[0010] By adopting the above technical solution, the material bin can be placed on the top of the support rod by sliding, and initially limited by the limiting component.

[0011] Preferably, the surface of the support member has a hollow groove, the end of the support rod away from the closed plate extends into the hollow groove of the support member and is slidably connected to the surface of the support member, the protrusion engages with the groove, and the movable plate is located inside the track and is slidably connected to the track.

[0012] By adopting the above technical solution, the support member can support the support rod. The protrusion and groove can enable the support rod to pull the support member to move. When the support member moves, it can drive the moving plate to move inside the track.

[0013] Preferably, the limiting component includes a frame, a trapezoidal plate, a top plate, a bent rod, a column, and a spring. The frame is fixedly connected to the surface of the vacuum hot-pressing sintering chamber, the trapezoidal plate is disposed on the surface of the vacuum hot-pressing sintering chamber, the top plate is fixedly connected to the top of the trapezoidal plate, the bent rod is fixedly connected to the top of the top plate, the column is disposed on the top of the top plate, and the spring is fixedly connected to the top surface of the column.

[0014] Preferably, the trapezoidal plate passes through the frame and extends to the bottom of the frame. The trapezoidal plate is slidably connected to the frame, and the side of the trapezoidal plate away from the vacuum hot pressing sintering chamber has an inclined surface.

[0015] By adopting the above technical solution, the closed plate can push the trapezoidal plate to slide on the surface of the frame through the inclined surface.

[0016] Preferably, the bottom end of the column penetrates through the top plate and is fixedly connected to the frame; the column is slidably connected to the top plate; and the bottom of the spring is fixedly connected to the top of the top plate.

[0017] By adopting the above technical solution, when the top plate moves under the drive of the trapezoidal plate, it will slide on the surface of the column, and the spring can drive the top plate to press down and reset.

[0018] The beneficial effects of this utility model are: 1. By setting a limiting component, after the material bin is moved to the top of the support rod by sliding, the bottom plate of the material bin will contact the surface of the limiting component. At this time, the limiting component will restrict the forward and backward movement range of the material bin. After the material bin is pushed into the vacuum hot pressing sintering chamber, the limiting plate will restrict the left and right movement range of the material bin. This effectively avoids the displacement of the material bin due to the vibration of the vacuum hot pressing sintering chamber, and solves the problem of not being able to ensure the stability of the stacking tray in the sintering device. At the same time, the setting of the limiting component also prevents the material bin from moving vertically, further ensuring the stability of the material bin.

[0019] By setting protrusions and grooves, when the support rod is moved, the protrusions can be engaged with the grooves, allowing the support to support one end of the support rod, thus ensuring the stability of the support rod during movement. At the same time, when the sealing plate moves into the vacuum hot-pressing sintering chamber, its edge will contact the inclined surface of the trapezoidal plate and generate an upward thrust, pushing the trapezoidal plate to slide upward along the frame. When the sealing plate is fully closed and the outer plate is flush with the outer wall of the vacuum hot-pressing sintering chamber, the thrust of the sealing plate on the trapezoidal plate disappears, and the spring generates a downward restoring force due to the previous tension, causing the top plate and trapezoidal plate to slide downward. At this time, the horizontal end face of the trapezoidal plate is in contact with the outer wall of the sealing plate, thus limiting the sealing plate and preventing it from loosening during equipment operation. Attached Figure Description

[0020] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained from these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the overall structure of an integrated CVD-hot pressing sintering equipment provided by an embodiment of this utility model; Figure 2 This is a schematic diagram of the internal structure of the vacuum hot pressing sintering chamber of a CVD-hot pressing sintering integrated equipment provided by an embodiment of this utility model; Figure 3 This is a utility model Figure 2 Enlarged schematic diagram of the structure at point A in the middle; Figure 4This is a side view of the component placement structure of an integrated CVD-hot pressing sintering equipment according to an embodiment of the present invention; Figure 5 This is a side view of the internal structure of a CVD-hot pressing sintering integrated equipment support component provided by an embodiment of this utility model.

[0022] In the diagram: 1. Vacuum hot pressing sintering chamber; 2. Evacuator; 3. Inlet fan; 4. Control panel; 5. Placement component; 501. Enclosure plate; 5011. Outer plate; 5012. Inner plate; 5013. Sealing plate; 502. Support rod; 503. Limiting component; 504. Material bin; 505. Fixing rod; 506. Limiting plate; 507. Support component; 508. Protrusion; 509. Groove; 510. Moving plate; 511. Track; 6. Limiting component; 601. Frame; 602. Trapezoidal plate; 603. Top plate; 604. Bending rod; 605. Column; 606. Spring. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0024] Reference Figures 1-5 A CVD-hot pressing sintering integrated equipment includes a vacuum hot pressing sintering chamber 1, a vacuum pump 2, an air inlet 3, and a control panel 4. The vacuum pump 2 is fixedly connected to the right side of the vacuum hot pressing sintering chamber 1, the air inlet 3 is fixedly connected to the left side of the vacuum hot pressing sintering chamber 1, the control panel 4 is located on the front of the vacuum hot pressing sintering chamber 1, a placement component 5 is provided on the surface of the vacuum hot pressing sintering chamber 1, and a limit component 6 is provided on the surface of the vacuum hot pressing sintering chamber 1.

[0025] The placement component 5 includes a sealing plate 501, a support rod 502, a limiting member 503, a material bin 504, a fixing rod 505, a limiting plate 506, a support member 507, a protrusion 508, a groove 509, a moving plate 510, and a track 511. The sealing plate 501 is disposed on the surface of the vacuum hot-pressing sintering chamber 1. The sealing plate 501 is composed of an outer plate 5011, an inner plate 5012, and a sealing plate 5013. The outer plate 5011 is located on the outer wall surface of the vacuum hot-pressing sintering chamber 1 and is at the same horizontal plane as the outer wall surface of the vacuum hot-pressing sintering chamber 1. The inner plate 5012 is located on the surface of the vacuum hot-pressing sintering chamber 1 and is flush with the vacuum wall surface. The inner wall surface of the hot-press sintering chamber 1 is in contact with the sealing plate 5013, which is fixedly connected to the outer wall of the outer plate 5011 and to the surface of the inner plate 5012. Pushing the outer plate 5011 causes the inner plate 5012 to adhere to the surface of the vacuum hot-press sintering chamber 1 under the action of the sealing plate 5013, and seals it through the sealing plate 5013. The support rod 502 is fixedly connected to the surface of the sealing plate 501, and the limiting member 503 is fixedly connected to the top of the support rod 502. The material bin 504 is located on the top of the support rod 502, and the support rod 502 and the material bin 504 are slidably connected. The bottom plate of the material bin 504 is in contact with the limiting member 5012. The surface of the 03 sliding connection allows the material bin 504 to be placed on top of the support rod 502 by sliding, and is initially limited by the limiting member 503. The fixing rod 505 is fixedly connected to the inner wall surface of the vacuum hot pressing sintering chamber 1, and the limiting plate 506 is fixedly connected to one end of the fixing rod 505. The support member 507 is disposed inside the vacuum hot pressing sintering chamber 1. The surface of the support member 507 has a hollow groove. The end of the support rod 502 away from the closing plate 501 extends into the hollow groove of the support member 507 and is slidably connected to the surface of the support member 507. The support member 507 can support the support rod 502. The support has a supporting effect. The protrusion 508 is fixedly connected to the bottom of the support rod 502, and the groove 509 is opened on the surface of the support member 507. The protrusion 508 and the groove 509 are engaged. The setting of the protrusion 508 and the groove 509 allows the support rod 502 to pull the support member 507 to move. The moving plate 510 is fixedly connected to the surface of the support member 507. The moving plate 510 is located inside the track 511 and is slidably connected to the track 511. The track 511 is opened on the inner surface of the vacuum hot pressing sintering chamber 1. When the support member 507 moves, it can drive the moving plate 510 to move inside the track 511.

[0026] By setting the limiting component 503, after the material bin 504 is moved to the top of the support rod 502 by sliding, the bottom plate of the material bin 504 will contact the surface of the limiting component 503. At this time, the limiting component 503 will restrict the forward and backward movement range of the material bin 504. After the material bin 504 is pushed into the vacuum hot pressing sintering chamber 1, the setting of the limiting plate 506 will restrict the left and right movement range of the material bin 504, which effectively avoids the displacement of the material bin 504 due to the vibration of the vacuum hot pressing sintering chamber 1. This solves the problem of not being able to ensure the stability of the stacking tray in the sintering device. At the same time, the setting of the limiting component 503 also prevents the material bin 504 from moving vertically, further ensuring the stability of the material bin 504.

[0027] By setting the protrusion 508 and the groove 509, when the support rod 502 is moved, the protrusion 508 can be inserted into the groove 509, so that the support member 507 supports one end of the support rod 502, thereby ensuring the stability of the support rod 502 during the movement.

[0028] The limiting component 6 includes a frame 601, a trapezoidal plate 602, a top plate 603, a bent rod 604, a column 605, and a spring 606. The frame 601 is fixedly connected to the surface of the vacuum hot-pressing sintering chamber 1. The trapezoidal plate 602 is disposed on the surface of the vacuum hot-pressing sintering chamber 1, passing through the frame 601 and extending below the frame 601. The trapezoidal plate 602 is slidably connected to the frame 601. The side of the trapezoidal plate 602 away from the vacuum hot-pressing sintering chamber 1 has an inclined surface. The closing plate 501 can push the trapezoidal plate 602 to slide on the surface of the frame 601 through the inclined surface. The top plate 603 is fixedly connected to the frame 601. A fixed connection is made to the top of the trapezoidal plate 602, a bent rod 604 is fixedly connected to the top of the top plate 603, a column 605 is set on the top of the top plate 603, the bottom end of the column 605 passes through the top plate 603 and is fixedly connected to the frame 601, the column 605 is slidably connected to the top plate 603, when the top plate 603 moves under the drive of the trapezoidal plate 602, it will slide on the surface of the column 605, a spring 606 is fixedly connected to the top surface of the column 605, the bottom of the spring 606 is fixedly connected to the top of the top plate 603, the setting of the spring 606 can drive the top plate 603 to press down and reset.

[0029] When the sealing plate 501 moves into the vacuum hot-pressing sintering chamber 1, its edge contacts the inclined surface of the trapezoidal plate 602 and generates an upward thrust, pushing the trapezoidal plate 602 to slide upward along the frame 601. When the sealing plate 501 is completely closed and the outer plate 5011 is flush with the outer wall of the vacuum hot-pressing sintering chamber 1, the thrust of the sealing plate 501 on the trapezoidal plate 602 disappears, and the spring 606 generates a downward restoring force due to the previous tension, causing the top plate 603 and the trapezoidal plate 602 to slide downward. At this time, the horizontal end face of the trapezoidal plate 602 is in contact with the outer wall of the sealing plate 501, thereby limiting the sealing plate 501 and preventing it from loosening during equipment operation.

[0030] The working principle of this CVD-hot pressing sintering integrated equipment is as follows: The material to be hot pressed and sintered is placed inside the material bin 504 and moved to the top of the support rod 502 by sliding. It is then limited by the limiting member 503. Subsequently, the closing plate 501 is moved by sliding, so that the protrusion 508 is engaged in the groove 509 and pushes the closing plate 501 to move, so that the closing plate 501 is in contact with the surface of the vacuum hot pressing sintering chamber 1. During the movement, the closing plate 501 pushes the trapezoidal plate 602 to rise through the inclined surface of the trapezoidal plate 602 until the surface of the outer plate 5011 is at the same level as the surface of the vacuum hot pressing sintering chamber 1. The trapezoidal plate 602 descends under the action of the spring 606 and limits the outer plate 5011. After the material bin 504 is moved, the vacuum hot pressing sintering chamber 1 is started through the control panel 4 to start the hot pressing sintering operation on the material.

[0031] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A CVD-hot pressing sintering integrated equipment, comprising a vacuum hot pressing sintering chamber (1), a vacuum pump (2), an air inlet (3), and a control panel (4), wherein the vacuum pump (2) is fixedly connected to the right side of the vacuum hot pressing sintering chamber (1), the air inlet (3) is fixedly connected to the left side of the vacuum hot pressing sintering chamber (1), and the control panel (4) is disposed on the front of the vacuum hot pressing sintering chamber (1), characterized in that: The surface of the vacuum hot pressing sintering chamber (1) is provided with a placement component (5), and the surface of the vacuum hot pressing sintering chamber (1) is provided with a limiting component (6). The placement assembly (5) includes a closed plate (501), a support rod (502), a limiting member (503), a material bin (504), a fixed rod (505), a limiting plate (506), a support member (507), a protrusion (508), a groove (509), a moving plate (510), and a track (511). The closed plate (501) is disposed on the surface of the vacuum hot-pressing sintering chamber (1). The support rod (502) is fixedly connected to the surface of the closed plate (501). The limiting member (503) is fixedly connected to the top of the support rod (502). The material bin (504) is disposed on the support rod (505). The top of the rod (502), the fixed rod (505) is fixedly connected to the inner wall surface of the vacuum hot pressing sintering chamber (1), the limiting plate (506) is fixedly connected to one end of the fixed rod (505), the support member (507) is disposed inside the vacuum hot pressing sintering chamber (1), the protrusion (508) is fixedly connected to the bottom of the support rod (502), the groove (509) is opened on the surface of the support member (507), the moving plate (510) is fixedly connected to the surface of the support member (507), and the track (511) is opened on the inner surface of the vacuum hot pressing sintering chamber (1).

2. The CVD-hot pressing sintering integrated equipment according to claim 1, characterized in that: The sealing plate (501) is composed of an outer plate (5011), an inner plate (5012) and a sealing plate (5013). The outer plate (5011) is located on the outer wall surface of the vacuum hot-pressing sintering chamber (1) and is on the same horizontal plane as the outer wall surface of the vacuum hot-pressing sintering chamber (1). The inner plate (5012) is located on the surface of the vacuum hot-pressing sintering chamber (1) and is in contact with the inner wall surface of the vacuum hot-pressing sintering chamber (1). The sealing plate (5013) is fixedly connected to the outer wall of the outer plate (5011) and is fixedly connected to the surface of the inner plate (5012).

3. The CVD-hot pressing sintering integrated equipment according to claim 2, characterized in that: The support rod (502) is slidably connected to the material bin (504), and the bottom plate of the material bin (504) is slidably connected to the surface of the limiting member (503).

4. The CVD-hot pressing sintering integrated equipment according to claim 3, characterized in that: The surface of the support member (507) is provided with a hollow groove. The end of the support rod (502) away from the closed plate (501) extends into the hollow groove of the support member (507) and is slidably connected to the surface of the support member (507). The protrusion (508) is engaged with the groove (509). The moving plate (510) is located inside the track (511) and is slidably connected to the track (511).

5. The CVD-hot pressing sintering integrated equipment according to claim 4, characterized in that: The limiting component (6) includes a frame (601), a trapezoidal plate (602), a top plate (603), a bent rod (604), a column (605), and a spring (606). The frame (601) is fixedly connected to the surface of the vacuum hot-pressing sintering chamber (1). The trapezoidal plate (602) is disposed on the surface of the vacuum hot-pressing sintering chamber (1). The top plate (603) is fixedly connected to the top of the trapezoidal plate (602). The bent rod (604) is fixedly connected to the top of the top plate (603). The column (605) is disposed on the top of the top plate (603). The spring (606) is fixedly connected to the top surface of the column (605).

6. The CVD-hot pressing sintering integrated equipment according to claim 5, characterized in that: The trapezoidal plate (602) passes through the frame (601) and extends to the bottom of the frame (601). The trapezoidal plate (602) is slidably connected to the frame (601). The trapezoidal plate (602) has an inclined surface on the side away from the vacuum hot pressing sintering chamber (1).

7. The CVD-hot pressing sintering integrated equipment according to claim 6, characterized in that: The bottom end of the column (605) passes through the top plate (603) and is fixedly connected to the frame (601). The column (605) is slidably connected to the top plate (603). The bottom of the spring (606) is fixedly connected to the top of the top plate (603).

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