Auxiliary temperature measuring device for vertical furnace body

Abstract

The utility model discloses a kind of vertical furnace body auxiliary temperature measuring devices, including vertical furnace body, transmission shaft is arranged on the vertical furnace body, graphite tooling is also arranged in the vertical furnace body, quartz thermocouple sleeve is arranged on the transmission shaft and located in the inside of graphite tooling;Ceramic thermocouple tube is installed on the transmission shaft by auxiliary assembly, and the ceramic thermocouple tube is arranged in quartz thermocouple sleeve.The utility model is by setting auxiliary assembly and magnetically adsorbing ceramic thermocouple tube on transmission shaft, and utilize multistage adjustable support structure to realize the suspension fixed of ceramic thermocouple tube, make it vertically suspended in quartz thermocouple sleeve, so that ceramic thermocouple tube bottom approaches quartz sleeve bottom but does not contact, guarantee to realize the temperature in furnace cavity monitoring, simultaneously, it will not be worn with quartz sleeve bottom, and auxiliary assembly can also adjust the different height position of ceramic thermocouple tube in quartz sleeve, to meet the demand of different temperature measuring point of vertical epitaxial growth process.

Description

Technical Field

[0001] This utility model relates to the technical field of furnace body temperature measurement equipment, specifically to a vertical furnace body auxiliary temperature measurement device. Background Technology

[0002] In the vertical liquid phase epitaxial growth process, it is necessary to monitor the temperature inside the furnace cavity in real time for process operation. The current process is to insert a ceramic thermocouple tube with two thermocouple wires into the furnace cavity through a quartz sleeve for real-time temperature detection. In order to stabilize process parameters, the temperature detection point of the thermocouple wires needs to be consistent for each material growth.

[0003] The shortcomings of the existing technology are: the vertical epitaxial process requires rotation for epitaxial growth, and the ceramic thermocouple tube is directly placed inside the quartz sleeve. Due to gravity, the ceramic will wear against the bottom of the quartz sleeve. After a long time, the quartz sleeve will drive the thermocouple to rotate, causing the two thermocouple wires to break, thus affecting the epitaxial growth. Utility Model Content

[0004] The purpose of this invention is to provide an auxiliary temperature measuring device for vertical furnaces to address the aforementioned shortcomings in the prior art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a vertical furnace auxiliary temperature measuring device, comprising a vertical furnace body, a drive shaft disposed on the vertical furnace body, a graphite fixture disposed within the vertical furnace body, a quartz thermocouple sleeve disposed on the drive shaft and inside the graphite fixture; a ceramic thermocouple tube mounted on the drive shaft via an auxiliary component, the ceramic thermocouple tube being disposed within the quartz thermocouple sleeve, and a temperature sensor disposed on the drive shaft, the temperature sensor being electrically connected to the ceramic thermocouple tube via a temperature-sensing thermocouple wire.

[0006] As a further description of the above technical solution: The auxiliary component includes a magnet magnetically adsorbed on the drive shaft, a support plate one fixedly connected to the magnet, an adjustment groove on the support plate one, a support plate two provided on the support plate one through an adjustment unit one, a support screw provided on the support plate two through an adjustment unit two, and a fastener for installing a ceramic thermocouple tube provided at one end of the support screw.

[0007] As a further description of the above technical solution: The adjustment unit includes a bolt disposed between a support plate 1 and a support plate 2. The bolt is vertically slidably connected in the adjustment groove. A fastening nut 1 is threaded onto the bolt and abuts against the support plate 1.

[0008] As a further description of the above technical solution: The second adjustment unit includes a second fastening nut and a third fastening nut mounted on a support screw. The support screw slides through the second support plate, and the second and third fastening nuts respectively abut against both sides of the second support plate.

[0009] As a further description of the above technical solution: The fastener is a snap fastener that is fixed to the support threaded rod by a fastening nut.

[0010] As a further description of the above technical solution: The ceramic thermocouple tube is vertically suspended within the quartz thermocouple sleeve.

[0011] In the above technical solution, the vertical furnace auxiliary temperature measuring device provided by this utility model has the following beneficial effects: This invention uses an auxiliary component to magnetically attach a ceramic thermocouple tube to a drive shaft and employs a multi-level adjustable support structure to suspend and fix the ceramic thermocouple tube vertically within a quartz thermocouple sleeve. This ensures that the bottom of the ceramic thermocouple tube is close to but does not contact the bottom of the quartz sleeve, guaranteeing temperature monitoring within the furnace cavity without causing wear on the bottom of the quartz sleeve. Furthermore, the auxiliary component can adjust the height of the ceramic thermocouple tube within the quartz sleeve to meet the different temperature probe requirements of the vertical epitaxial growth process. This structure effectively prevents the ceramic thermocouple tube from rotating and the thermocouple wire from breaking due to friction during furnace rotation, significantly improving temperature measurement stability and equipment lifespan, and ensuring the continuity and consistency of the vertical epitaxial process.

[0012] It should be understood that the foregoing general description and the following detailed description are exemplary and illustrative only, and are not intended to limit this disclosure.

[0013] This application provides an overview of various implementations or examples of the technology described in this disclosure, and is not a full disclosure of the entire scope or all features of the disclosed technology. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings.

[0015] Figure 1 A schematic diagram of the overall structure provided for an embodiment of this utility model; Figure 2 A schematic diagram of the auxiliary component structure provided in the embodiment of this utility model; Figure 3 for Figure 1Enlarged view of point A in the middle.

[0016] Explanation of reference numerals in the attached figures: 1. Vertical furnace body; 2. Drive shaft; 3. Graphite tooling; 4. Quartz thermocouple sleeve; 5. Ceramic thermocouple tube; 6. Temperature sensor; 7. Temperature sensing thermocouple wire; 8. Magnet; 9. Support plate one; 10. Adjustment groove; 11. Support plate two; 12. Support screw; 13. Fastener; 14. Bolt; 15. Fastening nut one; 16. Fastening nut two; 17. Fastening nut three. Detailed Implementation

[0017] To make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the described embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0018] Please see Figure 1-3 This embodiment provides an auxiliary temperature measuring device for a vertical furnace, including a vertical furnace body 1, a drive shaft 2 mounted on the vertical furnace body 1, a graphite fixture 3 also mounted inside the vertical furnace body 1, a quartz thermocouple sleeve 4 mounted on the drive shaft 2 and located inside the graphite fixture 3; a ceramic thermocouple tube 5 mounted on the drive shaft 2 via an auxiliary component, the ceramic thermocouple tube 5 being disposed inside the quartz thermocouple sleeve 4, the ceramic thermocouple tube 5 being vertically suspended within the quartz thermocouple sleeve 4; a temperature sensor 6 is also mounted on the drive shaft 2, the temperature sensor 6 being electrically connected to the ceramic thermocouple tube 5 via a temperature-sensing thermocouple wire 7. Next, this device is used for temperature measurement in vertical liquid phase epitaxial growth. By setting an auxiliary component, the ceramic thermocouple tube 5 is magnetically adsorbed onto the drive shaft 2, and a multi-level adjustable support structure is used to suspend and fix the ceramic thermocouple tube 5, so that it is vertically suspended in the quartz thermocouple sleeve 4. This ensures that the bottom of the ceramic thermocouple tube 5 is close to the bottom of the quartz sleeve but does not contact it, thus ensuring that the temperature inside the furnace cavity is monitored without wear on the bottom of the quartz sleeve. Furthermore, the auxiliary component can also adjust the different height positions of the ceramic thermocouple tube 5 inside the quartz sleeve to meet the needs of different temperature probe points in the vertical epitaxial growth process.

[0019] In a further embodiment of this utility model, the auxiliary component includes a magnet 8 magnetically adsorbed on the drive shaft 2. The magnet 8 is used to adsorb the auxiliary component onto the platform of the drive shaft 2. A support plate 9 is fixedly connected to the magnet 8. An adjustment groove 10 is provided on the support plate 9. A support plate 11 is provided on the support plate 9 through an adjustment unit 1. A support screw 12 is provided on the support plate 11 through an adjustment unit 2. A fastener 13 for installing a ceramic thermocouple tube 5 is provided at one end of the support screw 12.

[0020] Furthermore, the adjustment unit includes a bolt 14 disposed between the support plate 9 and the support plate 11. The bolt 14 is vertically slidably connected in the adjustment groove 10. A fastening nut 15 is threaded onto the bolt 14. The fastening nut 15 abuts against the support plate 9. The fastening nut 15 and the bolt 14 cooperate to fix the support plate 11 and can adjust the fixed height position of the support screw 12.

[0021] Furthermore, the adjustment unit 2 includes a second fastening nut 16 and a third fastening nut 17 mounted on the support screw 12. The support screw 12 slides through the support plate 2 11. The second fastening nut 16 and the third fastening nut 17 abut against both sides of the support plate 2 11. The second fastening nut 16 and the third fastening nut 17 cooperate to fix the support screw 12 and can adjust the front and rear distance between the support screw 12 and the vertical furnace cavity.

[0022] In a further embodiment of this utility model, the fastener 13 is a buckle fixed to the support threaded rod by a fastening nut 4, used to fix the ceramic thermocouple tube 5.

[0023] The foregoing description only illustrates certain exemplary embodiments of the present invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A vertical furnace auxiliary temperature measuring device, comprising a vertical furnace body (1), characterized in that: A drive shaft (2) is provided on the vertical furnace body (1), and a graphite tooling (3) is also provided in the vertical furnace body (1). A quartz thermocouple sleeve (4) is provided on the drive shaft (2) and inside the graphite tooling (3). A ceramic thermocouple tube (5) is installed on the drive shaft (2) through an auxiliary component. The ceramic thermocouple tube (5) is set inside the quartz thermocouple sleeve (4). A temperature sensor (6) is also set on the drive shaft (2). The temperature sensor (6) is electrically connected to the ceramic thermocouple tube (5) through a temperature-sensing thermocouple wire (7).

2. The auxiliary temperature measuring device for a vertical furnace body according to claim 1, characterized in that, The auxiliary components include a magnet (8) magnetically adsorbed on the drive shaft (2), a support plate (9) fixedly connected to the magnet (8), an adjustment groove (10) on the support plate (9), a support plate (11) on the support plate (9) through an adjustment unit, a support screw (12) on the support plate (11) through an adjustment unit, and a fastener (13) for installing a ceramic thermocouple tube (5) at one end of the support screw (12).

3. The auxiliary temperature measuring device for a vertical furnace body according to claim 2, characterized in that, The first adjustment unit includes a bolt (14) disposed between the first support plate (9) and the second support plate (11). The bolt (14) is vertically slidably connected in the adjustment groove (10). A fastening nut (15) is threaded onto the bolt (14) and the fastening nut (15) abuts against the first support plate (9).

4. The auxiliary temperature measuring device for a vertical furnace body according to claim 2, characterized in that, The second adjustment unit includes a second fastening nut (16) and a third fastening nut (17) provided on the support screw (12). The support screw (12) slides through the second support plate (11), and the second fastening nut (16) and the third fastening nut (17) abut against the two sides of the second support plate (11) respectively.

5. The auxiliary temperature measuring device for a vertical furnace body according to claim 2, characterized in that, The fastener (13) is a snap fastener that is fixed to the support threaded rod by a fastening nut.

6. The auxiliary temperature measuring device for a vertical furnace body according to claim 1, characterized in that, The ceramic thermocouple tube (5) is vertically suspended in the quartz thermocouple sleeve (4).

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