A zero return mechanism for a scanning probe

Abstract

The utility model discloses a kind of zero return mechanisms applied to scanning probe, including scanning probe main body, scanning probe main body has the function of arbitrary one-dimensional scanning, arbitrary two-dimensional combined scanning and full three-dimensional combined scanning measurement, one or more leaf spring mechanism is detachably installed on the scanning probe main body, the leaf spring mechanism includes the rectangular space structure formed by two groups of symmetrical longitudinal floating plate and two groups of symmetrical transverse side plate, the zero return device is detachably connected in the rectangular space structure, the detachable connection between the scanning probe main body and the leaf spring mechanism is bolt connection, the detachable connection between the rectangular space structure and the zero return device is bolt connection, the zero return device includes two groups of symmetrical convex positioning frame, the convex positioning frame is bolted on the inner side end face of two groups of symmetrical longitudinal floating plate.

Description

Technical Field

[0001] This utility model belongs to the field of scanning probe technology, specifically relating to a zero-return mechanism applied to a scanning probe. Background Technology

[0002] The probe is a key component of a coordinate measuring machine (CMM), and its performance directly affects the measurement accuracy and efficiency. Scanning probes, also known as linear probes, differ from trigger probes in that when the probe stylus contacts the workpiece, it not only emits an aiming signal but also provides information on the micro-displacement of the probe tip, thus simultaneously possessing aiming and micro-measurement functions. The key technology for this type of probe is providing a frictionless, backlash-free, and highly sensitive micro-guide system. The output of a scanning probe is proportional to the stylus offset, and it simultaneously possesses the functions of spatial coordinate point position detection and curve and surface scanning.

[0003] As a type of probe with high precision, powerful functions, and wide adaptability, scanning probes are widely used, especially in high-precision measuring instruments or measurement fields where a high density of sampling points is required. Major coordinate measuring machine and precision measuring instrument manufacturers have all launched typical scanning probes. RENISHAW's high-performance scanning probes use optical methods to measure the precise position of the probe tip, but are expensive. Currently, scanning probe devices produced by companies such as Zeiss (Germany), Leitz (Germany), Mecartex (Switzerland), and Harbin Measuring & Cutting Tool Group Co., Ltd. (China) mostly use inductive sensors, resulting in electronic zero-position errors.

[0004] In existing technologies, scanning probe devices typically use sliders or springs as guiding mechanisms. The leaf spring mechanism in scanning probe devices is mostly a mechanical contact zero-return structure. This structure is complex, and friction exists during actual measurement. The zero-return accuracy is affected by the friction of the bearings and fulcrum, resulting in zero-position error.

[0005] In view of the above factors, this utility model provides a zero-return mechanism for scanning probes to solve the above problems. Utility Model Content

[0006] The purpose of this invention is to provide a zero-return mechanism for scanning probes to solve the problems mentioned in the background art.

[0007] The purpose of this utility model is achieved through the following technical solution: a zero-return mechanism for a scanning probe, comprising a scanning probe body, the scanning probe body having the functions of arbitrary one-dimensional scanning, arbitrary two-dimensional combined scanning and full three-dimensional combined scanning measurement, and one or more leaf spring mechanisms being detachably installed on the scanning probe body.

[0008] The leaf spring mechanism includes a rectangular space structure formed by two sets of symmetrical longitudinal floating plates and two sets of symmetrical transverse side plates, and a zero-return device is detachably connected within the rectangular space structure.

[0009] Furthermore, the detachable connection between the scanning probe body and the leaf spring mechanism is a bolt connection;

[0010] The rectangular spatial structure and the zeroing device are detachably connected by bolts.

[0011] Furthermore, the zero-return device includes two sets of symmetrical U-shaped positioning frames, which are bolted to the inner end faces of the two sets of symmetrical longitudinal floating plates.

[0012] A magnet bracket is connected to the U-shaped positioning frame. The magnet bracket includes a magnet head and a screw end fixedly connected to the magnet head. The screw end mates with a threaded hole on the U-shaped positioning frame. A magnet fixing nut is connected to the end of the screw end away from the magnet head.

[0013] Furthermore, the magnet supports are symmetrically arranged, and there is a gap between the symmetrical magnet supports. The distance between the symmetrical magnet heads can be adjusted by the screw end cooperating with the threaded hole on the convex positioning frame.

[0014] Furthermore, the two sets of symmetrical longitudinal floating plates are connected to the two sets of symmetrical transverse side plates by elastic springs.

[0015] The two sets of symmetrical transverse side plates are provided with spring receiving grooves, one end of the elastic spring is embedded in the spring receiving groove and the elastic spring is fixed on the two sets of symmetrical transverse side plates by bolts.

[0016] The other end of the elastic spring contacts two sets of symmetrical longitudinal floating plates and is fixed by a pressure plate / bolt connection.

[0017] Furthermore, a damping sleeve is bolted to the convex-shaped positioning frame, the damping sleeves are symmetrically arranged, and a damping shaft frame is bolted to the convex-shaped positioning frame, the damping shaft frame being arranged opposite to the damping sleeve;

[0018] The end of the damping sleeve is a hollow cylindrical cavity structure. A hexagon socket screw is threadedly fixed at the position of the damping shaft opposite to the hollow cylindrical cavity structure. The hexagon socket screw is coaxially arranged with the hollow cylindrical cavity structure and extends into the hollow cylindrical cavity structure.

[0019] The hollow cylindrical cavity structure is equipped with resistance grease / buffer grease;

[0020] Rectangular through holes are provided on the two sets of symmetrical transverse side plates opposite to the damping sleeve.

[0021] Furthermore, the leaf spring mechanism is also provided with a grating detection device, which includes a grating ruler bracket and a grating head bracket that are bolted to the leaf spring mechanism, with a gap between the grating ruler bracket and the grating head bracket;

[0022] A grating ruler is fixedly installed on the grating ruler bracket, and a grating head is connected to the grating head bracket by bolts. The grating head is arranged opposite to the grating ruler.

[0023] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0024] The magnet heads of this novel zero-return device are designed in a relatively non-contact manner. The magnitude of the measuring force is adjusted by changing the distance between the magnet heads. The non-contact structure does not involve any other mechanical structures, which effectively improves the zero-return accuracy. Attached Figure Description

[0025] Figure 1 This is a three-dimensional schematic diagram of the present invention;

[0026] Figure 2 This is an enlarged schematic diagram of the leaf spring mechanism of this utility model;

[0027] Figure 3 This is a schematic diagram of the zero-return device of this utility model;

[0028] Figure 4 This is a utility model Figure 2 A cross-sectional schematic diagram;

[0029] Figure 5 This is a three-dimensional schematic diagram of the grating detection device of this utility model;

[0030] Figure 6 This is a schematic diagram of the grating ruler bracket of this utility model;

[0031] Figure 7 This is a schematic diagram of the mating of the damping sleeve and the damping shaft frame of this utility model. Detailed Implementation

[0032] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0033] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0034] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0035] like Figure 1-7 As shown, a zero-return mechanism for a scanning probe includes a scanning probe body 1, which has the functions of arbitrary one-dimensional scanning, arbitrary two-dimensional combined scanning and full three-dimensional combined scanning measurement. One or more leaf spring mechanisms 2 are detachably installed on the scanning probe body 1.

[0036] The scanning probe body 1 is equipped with at least one leaf spring mechanism 2 (one-dimensional scanning). When two (two-dimensional combined scanning) or three (three-dimensional combined scanning) leaf spring mechanisms 2 need to be installed, the leaf spring mechanisms 2 are connected to each other by bolts and are bolted to the scanning probe body 1.

[0037] The leaf spring mechanism 2 includes a rectangular space structure formed by two sets of symmetrical longitudinal floating plates 3 and two sets of symmetrical transverse side plates 4, and a zeroing device 5 is detachably connected within the rectangular space structure.

[0038] To facilitate disassembly and installation during use, the scanning probe body 1 and the leaf spring mechanism 2 are detachably connected by bolts. One end of the leaf spring mechanism 2 is connected to the scanning probe by bolts, and the other end away from the scanning probe is connected to the scanning probe body 1 by bolts. The rectangular space structure and the zeroing device 5 are detachably connected by bolts.

[0039] In order to facilitate the mechanical return to zero effect by setting symmetrical magnet heads in use, with opposite magnets attracting each other, the zeroing device 5 includes two sets of symmetrical convex-shaped positioning frames 6, which are bolted to the inner end faces of the two sets of symmetrical longitudinal floating plates 3.

[0040] A magnet bracket is connected to the U-shaped positioning frame 6. The magnet bracket includes a magnet head 7 and a screw end 8 fixedly connected to the magnet head 7. The screw end 8 is engaged with a threaded hole on the U-shaped positioning frame 6. A magnet fixing nut 9 is connected to one end of the screw end 8 away from the magnet head 7.

[0041] To facilitate adjustment of the distance between the magnet heads during use, the magnet brackets are symmetrically arranged with a gap between them. The distance between the symmetrical magnet heads 7 can be adjusted by engaging the threaded hole on the convex positioning bracket 6 with the screw end 8.

[0042] The magnet head adopts a relatively non-contact setting. The magnitude of the measuring force is adjusted by adjusting the distance between the magnet heads. The non-contact structure does not involve other mechanical structures, which effectively improves the zeroing accuracy.

[0043] In order to ensure that the material at the contact surface undergoes elastic deformation under the action of the spring when the contact surface is very small during use, the two sets of symmetrical longitudinal floating plates 3 and the two sets of symmetrical transverse side plates 4 are connected by elastic spring sheets 10.

[0044] The two sets of symmetrical transverse side plates 4 are provided with spring receiving grooves 11. One end of the elastic spring 10 is embedded in the spring receiving groove 11 and the elastic spring 10 is fixed on the two sets of symmetrical transverse side plates 4 by bolts.

[0045] The other end of the elastic spring 10 contacts two sets of symmetrical longitudinal floating plates 3 and is fixed by a pressure plate / bolt connection.

[0046] To facilitate the reduction of vibration and impact during use by setting damping sleeves and damping shaft brackets, thereby improving stability and safety, damping sleeves 12 are bolted to the convex-shaped positioning frame 6. The damping sleeves 12 are symmetrically arranged. Damping shaft brackets 13 are bolted to the convex-shaped positioning frame 6. The damping shaft brackets 13 are arranged opposite to the damping sleeves 12.

[0047] The end of the damping sleeve 12 is a hollow cylindrical cavity structure 14. A hexagon socket screw is threadedly fixed to the damping shaft bracket 13 opposite to the hollow cylindrical cavity structure 14. The damping shaft bracket 13 has a threaded hole that engages with the hexagon socket screw. The hexagon socket screw is coaxial with the hollow cylindrical cavity structure 14 and extends into the hollow cylindrical cavity structure 14. There is a gap between the damping sleeve 12 and the damping shaft bracket 13.

[0048] The hollow cylindrical cavity structure 14 is provided with resistance grease / buffer grease;

[0049] Rectangular through holes are provided on the two sets of symmetrical transverse side plates 4 opposite to the damping sleeve 12.

[0050] To facilitate the measurement of displacement by the grating detection device during use, the leaf spring mechanism 2 is also equipped with a grating detection device. The grating detection device includes a grating ruler bracket 16 and a grating head bracket 17 that are bolted to the leaf spring mechanism 2. A gap is left between the grating ruler bracket 16 and the grating head bracket 17.

[0051] A grating ruler 18 is fixedly installed on the grating ruler bracket 16, and a grating head 19 is connected to the grating head bracket 17 by bolts. The grating head 19 is arranged opposite to the grating ruler 18. The grating head 19 is connected to the grating signal processing system (not shown in the figure) through a grating cable.

[0052] While maintaining contact with the surface of the workpiece (gear), the scanning probe at the front end of the scanning probe body 1 moves continuously along a predetermined path. Through the coordinated action of the grating head and its connected motion control card (the motion control card is connected to an external computer, adopting a "motion control card + grating ruler" scheme, which is existing technology and not disclosed in the figure), the data from the grating ruler is read as the final position certificate.

[0053] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0054] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A zero-return mechanism for a scanning probe, comprising a scanning probe body (1), the scanning probe body (1) having the functions of arbitrary one-dimensional scanning, arbitrary two-dimensional combined scanning, and full three-dimensional combined scanning measurement, characterized in that: One or more leaf spring mechanisms (2) are detachably installed on the main body (1) of the scanning probe; The leaf spring mechanism (2) includes a rectangular space structure formed by two sets of symmetrical longitudinal floating plates (3) and two sets of symmetrical transverse side plates (4), and a zero-return device (5) is detachably connected within the rectangular space structure.

2. The zero-return mechanism for a scanning probe according to claim 1, characterized in that: The detachable connection between the scanning probe body (1) and the leaf spring mechanism (2) is a bolt connection; The rectangular spatial structure and the zeroing device (5) are detachably connected by bolts.

3. The zero-return mechanism for a scanning probe according to claim 1, characterized in that: The zeroing device (5) includes two sets of symmetrical convex-shaped positioning frames (6), which are bolted to the inner end faces of the two sets of symmetrical longitudinal floating plates (3). A magnet bracket is connected to the convex-shaped positioning frame (6). The magnet bracket includes a magnet head (7) and a screw end (8) fixedly connected to the magnet head (7). The screw end (8) is engaged with a threaded hole on the convex-shaped positioning frame (6). A magnet fixing nut (9) is connected to one end of the screw end (8) away from the magnet head (7).

4. The zero-return mechanism for a scanning probe according to claim 3, characterized in that: The magnet supports are symmetrically arranged, and there is a gap between the symmetrical magnet supports. The distance between the symmetrical magnet heads (7) can be adjusted by the screw end (8) cooperating with the threaded hole on the convex positioning frame (6).

5. The zero-return mechanism for a scanning probe according to claim 4, characterized in that: The two sets of symmetrical longitudinal floating plates (3) and the two sets of symmetrical transverse side plates (4) are connected by elastic springs (10); The two sets of symmetrical transverse side plates (4) are provided with spring receiving grooves (11), one end of the elastic spring (10) is embedded in the spring receiving groove (11) and the elastic spring (10) is fixed on the two sets of symmetrical transverse side plates (4) by bolts. The other end of the elastic spring (10) contacts two sets of symmetrical longitudinal floating plates (3) and is fixed by a pressure plate / bolt connection.

6. The zero-return mechanism for a scanning probe according to claim 5, characterized in that: The convex-shaped positioning frame (6) is connected to the damping sleeve (12) by bolts. The damping sleeve (12) is symmetrically arranged. The convex-shaped positioning frame (6) is connected to the damping shaft frame (13) by bolts. The damping shaft frame (13) is arranged opposite to the damping sleeve (12). The end of the damping sleeve (12) is a hollow cylindrical cavity structure (14). A hexagonal screw is threadedly fixed to the position of the damping shaft bracket (13) opposite to the hollow cylindrical cavity structure (14). The hexagonal screw is coaxially arranged with the hollow cylindrical cavity structure (14) and extends into the hollow cylindrical cavity structure (14). The hollow cylindrical cavity structure (14) is provided with resistance grease / buffer grease; Rectangular through holes are provided on two sets of symmetrical transverse side plates (4) opposite to the damping sleeve (12).

7. The zero-return mechanism for a scanning probe according to claim 6, characterized in that: The leaf spring mechanism (2) is also provided with a grating detection device. The grating detection device includes a grating ruler bracket (16) and a grating head bracket (17) that are bolted to the leaf spring mechanism (2). There is a gap between the grating ruler bracket (16) and the grating head bracket (17). A grating ruler (18) is fixedly installed on the grating ruler bracket (16), and a grating head (19) is connected to the grating head bracket (17) by bolts. The grating head (19) is arranged opposite to the grating ruler (18).

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