An interference-resistant thermocouple temperature sensor
Patent Information
- Application Number
- CN202522440825.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-18
- Publication Date
- 2026-10-09
- Estimated Expiration
- 2035-11-18
AI Technical Summary
[0003]本申请的目的在于,提供一种抗干扰热电偶温度传感器,能够消减电磁干扰的同时,改善金属套管可能释放金属离子而造成设备腔室污染的缺陷
1.本申请提供一种抗干扰热电偶温度传感器,通过在热电偶芯外部设置金属套管,并利用导电组件将金属套管与外部接地线连接,及时地导走金属套管上积压的电荷,有效消减周围电磁场对热电偶芯的干扰,同时,利用外部的绝缘套管将金属套管封装在内,避免金属套管高温下释放金属离子造成设备内部的腔室污染,利用连接组件将接线套管、金属套管和绝缘套管可拆卸固定连接,能够便捷地实现热电偶温度传感器的拆装和检修。
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Figure CN224839173U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of thermocouples, and in particular to an anti-interference thermocouple temperature sensor. Background Technology
[0002] Thermocouple temperature sensors measure temperature based on the thermoelectric effect. They use connecting wires to transmit the thermoelectric potential formed between the hot and cold ends of two different conductors in a closed circuit to a display instrument, which then displays the corresponding temperature value based on the magnitude of the thermoelectric potential. However, in actual industrial environments, alternating magnetic fields generated during the operation of equipment such as high-power transformers, high-frequency radio frequency heating devices, and variable frequency motors can induce alternating electromotive forces in the working circuit of surrounding thermocouple sensors, causing varying degrees of interference. This leads to increased errors in temperature measurement displays, decreased sensitivity, and data fluctuations. To eliminate the influence of external electromagnetic interference, thermocouple temperature sensors typically employ a metal sheath around the thermocouple to shield it from external electromagnetic energy. For example, Chinese patent application number 202323517657.9 discloses a thermocouple structure for use in semiconductor devices, utilizing multiple metal sheaths segmented and connected to the outside of the thermocouple body. At least one metal sheath includes a grounding terminal to conduct electromagnetic energy to the ground. However, in the semiconductor manufacturing industry, the metal sheath surrounding the thermocouple may release metal ions under high temperatures or chemical reaction conditions, contaminating the chamber and causing it to fail to meet cleanliness requirements. Therefore, there is an urgent need to provide an interference-resistant thermocouple temperature sensor that can overcome the defect of chamber contamination caused by the release of metal ions from the external metal sheath. Utility Model Content
[0003] The purpose of this application is to provide an anti-interference thermocouple temperature sensor that can reduce electromagnetic interference while improving the defect that the metal sheath may release metal ions and cause contamination of the equipment chamber.
[0004] This application provides an anti-interference thermocouple temperature sensor, which includes a wiring sleeve, a thermocouple core, and an insulating sleeve. The hot end of the thermocouple core extends into the insulating sleeve for temperature measurement, and the cold end of the thermocouple core extends into the wiring sleeve and connects to a connecting wire to transmit the measured temperature signal to a temperature display. The sensor also includes a metal sleeve and a connecting structure. The metal sleeve is fitted over the thermocouple core and located inside the insulating sleeve. The connecting structure includes a connecting component and a conductive component. The connecting component detachably and securely connects the wiring sleeve, the metal sleeve, and the insulating sleeve, and the conductive component connects the metal sleeve to an external grounding wire.
[0005] By adopting the above technical solution, the metal sleeve fitted outside the thermocouple core achieves electromagnetic shielding, reducing interference from external electromagnetic fields on the thermocouple core. The conductive component promptly leads out and grounds the charge accumulated on the metal sleeve, improving the accuracy and stability of the thermocouple temperature sensor. The metal sleeve is fitted inside the external insulating sleeve to prevent the metal sleeve from releasing metal ions at high temperatures and causing contamination to the equipment chamber. At the same time, the connecting component allows for detachable and fixed connection of the wiring sleeve, metal sleeve, and insulating sleeve, enabling convenient disassembly, assembly, maintenance, and replacement of the thermocouple temperature sensor.
[0006] Optionally, the connecting assembly includes a first connecting assembly and a second connecting assembly, the wiring sleeve includes a terminal and a working end, the first connecting assembly detachably and fixedly connects the working end of the wiring sleeve and the open end of the metal sleeve, and the second connecting assembly detachably and fixedly connects the open end of the insulating sleeve to the first connecting assembly.
[0007] By adopting the above technical solution, the first connecting component and the second connecting component are used to realize the detachable and fixed connection of the wiring sleeve, the metal sleeve and the insulating sleeve respectively, thereby further improving the flexibility and stability of the structural installation.
[0008] Optionally, the first connecting component includes a conductive connecting sleeve and a first clamp. One end of the conductive connecting sleeve is detachably and fixedly connected to the wiring sleeve. The open end of the metal sleeve extends into the wiring sleeve and is fixed inside the wiring sleeve by the first clamp. The conductive component is detachably and fixedly connected to the conductive connecting sleeve. The first clamp is made of conductive material, and the conductive connecting sleeve abuts against the first clamp.
[0009] By adopting the above technical solution, the metal sleeve is fixed inside the wiring sleeve using the first clamp, and the electrical connection between the metal sleeve and the wiring sleeve is achieved using conductive material. The metal sleeve and the wiring sleeve are connected to the external grounding wire using conductive components. This facilitates the timely discharge of accumulated charge in the metal sleeve and the wiring sleeve to the ground, while eliminating electromagnetic interference to the thermocouple core and thermocouple connecting wires in the metal sleeve and the wiring sleeve, further improving the accuracy and stability of the thermocouple temperature sensor.
[0010] Optionally, the second connecting component includes a fastening nut and a second clamp, which detachably and securely connect the insulating sleeve to the conductive connecting sleeve.
[0011] By adopting the above technical solution, the insulating sleeve can be easily fixed and installed, improving the stability and compactness of the structure.
[0012] Optionally, the terminals of the wiring sleeve are securely sealed to the wires via metal glands.
[0013] By adopting the above technical solution, it is possible to achieve both the fastening and sealing of the thermocouple connecting wires, and also to adjust the position of the temperature measuring point by adjusting the fastening position.
[0014] Optionally, the conductive component includes a wiring bolt and a wiring fork, the wiring bolt being screwed onto the conductive connecting sleeve, and the wiring fork being fixedly connected to the external grounding wire.
[0015] By adopting the above technical solutions, the improvement of the typical structure of thermocouple temperature sensors is simplified, which is highly adaptable, reduces manufacturing difficulty and production costs, and is conducive to large-scale industrial promotion.
[0016] Optionally, the thermocouple core includes a thermocouple wire, an insulating core, and an insulating protective sleeve. The insulating protective sleeve is sealed to the end of the insulating core to form a sealed chamber. The thermocouple wire is fixed inside the insulating core, and the hot end of the thermocouple wire extending out of the insulating core is encapsulated in the sealed chamber.
[0017] By adopting the above technical solution, the thermocouple wire is sealed and protected by an insulating core and an insulating protective sleeve, which can prevent the release and overflow of metal ions from the metal sleeve at high temperatures from contaminating the thermocouple wire and causing a decrease in the temperature measurement accuracy of the thermocouple temperature sensor.
[0018] Optionally, the axial length of the sealed chamber is greater than the length of the thermocouple wire exposed in the insulating core.
[0019] By adopting the above technical solution, the distance and space for the thermocouple wire to expand due to heat are reserved, thus avoiding any adverse impact on the temperature measurement accuracy of the thermocouple temperature sensor.
[0020] Optionally, the wiring sleeve and the metal sleeve are independently selected from iron-based, nickel-based, cobalt-based, aluminum-based, or copper-based alloy tubes.
[0021] By adopting the above technical solutions and selecting appropriate materials to cope with different usage environments, the stability of connecting sleeves and metal sleeves can be improved and their service life extended.
[0022] Optionally, the insulating sleeve is made of alumina ceramic tube or quartz tube.
[0023] By adopting the above technical solutions, the structural stability and electrical insulation of the insulating sleeve are guaranteed in high-temperature environments.
[0024] In summary, this application has at least one of the following beneficial effects: 1. This application provides an anti-interference thermocouple temperature sensor. By setting a metal sleeve outside the thermocouple core and connecting the metal sleeve to an external grounding wire using a conductive component, the accumulated charge on the metal sleeve can be promptly conducted away, effectively reducing the interference of the surrounding electromagnetic field on the thermocouple core. At the same time, the metal sleeve is encapsulated inside by an external insulating sleeve to prevent the metal sleeve from releasing metal ions at high temperatures and causing contamination of the internal chamber of the device. The wiring sleeve, metal sleeve and insulating sleeve are detachably and fixedly connected by a connecting component, which can conveniently realize the disassembly, assembly and maintenance of the thermocouple temperature sensor.
[0025] 2. The anti-interference thermocouple temperature sensor provided in this application utilizes a conductive connecting sleeve that is detachably and fixedly connected to a wiring sleeve. While the conductive component grounds the metal sleeve, it also grounds the wiring sleeve, effectively achieving electromagnetic shielding and grounding protection for the thermocouple core and thermocouple connecting wires inside the wiring sleeve, further improving the anti-interference effect and safety stability of the thermocouple temperature sensor.
[0026] 3. This application provides an anti-interference thermocouple temperature sensor. The thermocouple core includes a thermocouple wire, an insulating core, and an insulating protective sleeve. The insulating protective sleeve is sealed to the end of the insulating core to form a sealed chamber. The thermocouple wire is fixed inside the insulating core, and the hot end of the thermocouple wire extending out of the insulating core is encapsulated in the sealed chamber. By using the insulating core and the insulating protective sleeve to seal and protect the thermocouple wire, it is possible to avoid the release and overflow of metal ions from the metal sleeve at high temperatures, which could contaminate the thermocouple wire and reduce the temperature measurement accuracy of the thermocouple temperature sensor. This further eliminates the possible interference that the metal sleeve may cause to the thermocouple wire. Attached Figure Description
[0027] Figure 1 This is a schematic diagram of the overall structure of the anti-interference thermocouple temperature sensor according to an embodiment of this application; Figure 2 This is a schematic diagram of the structure of the thermocouple core in an embodiment of this application. Detailed Implementation
[0028] This application provides an anti-interference thermocouple temperature sensor. To make the purpose, technical solution, and effects of this application clearer and more explicit, the following provides a more detailed description. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.
[0029] The following is in conjunction with the appendix Figure 1-2 The embodiments of this application will be described in further detail.
[0030] This application discloses an anti-interference thermocouple temperature sensor, referring to... Figure 1The thermocouple temperature sensor includes a wiring sleeve 1, a thermocouple core 2, and an insulating sleeve 3. The hot end of the thermocouple core 2 extends into the insulating sleeve 3 for temperature measurement, and the cold end of the thermocouple core 2 extends into the wiring sleeve 1 and connects to the connecting wire 4, transmitting the measured temperature signal to the temperature display. (Refer to...) Figure 2 In this embodiment, the thermocouple core 2 includes a thermocouple wire 21, an insulating core 22, and an insulating protective sleeve 23. It is understood that the thermocouple wire 21 is made of conventional materials, including but not limited to platinum-rhodium 10-platinum (S), nickel-chromium-nickel-silicon (K), nickel-chromium-constantan (E), iron-constantan (J), and copper-constantan (T). The insulating core 22 is made of typical high-temperature resistant insulating materials, including but not limited to alumina ceramics and quartz. The insulating core 22 has a hollow tube structure, enclosing the thermocouple wire 21 within it. The hot junction of the thermocouple wire 21 extends out and is exposed to the insulating core 22 to achieve accurate temperature measurement. (Refer to...) Figure 1 , Figure 2 The wiring sleeve 1 includes a wiring terminal and a working terminal. The wiring terminal is used to connect the connecting wire 4 to the thermocouple wire 21 inside the thermocouple core 2, and the working terminal is used to connect with the insulating sleeve 3 to form a protective structure for encapsulating the thermocouple core 2.
[0031] Reference Figure 1 The thermocouple temperature sensor also includes a metal sheath 5 and a connecting structure 6. The metal sheath 5 is a hollow structure with one end closed and the other open. In this embodiment, the metal sheath 5 is disposed outside the thermocouple core 2 to shield the thermocouple core 2 from interference from surrounding electromagnetic fields. Preferably, the connecting sleeve 1 and the metal sheath 5 are made of high-temperature alloy tubes, including, but not limited to, iron-based, nickel-based, cobalt-based, aluminum-based, and copper-based alloys. To avoid the release of metal ions into the equipment chamber and causing contamination due to the instability of the metal when the thermocouple temperature sensor is used for temperature measurement in industrial equipment, this embodiment places the metal sheath 5 inside an insulating sleeve 3. The insulating sleeve 3 is made of a material that is stable under high temperatures or corrosive environments, including but not limited to alumina ceramic tubes or quartz tubes. The connection structure 6 includes a connection component 61 and a conductive component 62. The connection component is used to detachably and fix the wiring sleeve 1, the metal sleeve 5 and the insulating sleeve 3. The conductive component 62 connects the metal sleeve 5 to the external grounding wire 8. The grounding wire 8 promptly outputs any charge that may accumulate on the metal sleeve 5 to the ground, ensuring the accuracy and stability of the thermocouple temperature sensor.
[0032] The connecting component 61 includes a first connecting component 611 and a second connecting component 612. The first connecting component 611 detachably and fixedly connects the working end of the wiring sleeve 1 and the open end of the metal sleeve 5. The second connecting component 612 detachably and fixedly connects the open end of the insulating sleeve 3 and the first connecting component 611.
[0033] Specifically, the first connecting component 611 includes a conductive connecting sleeve 6111 and a first clamp 6112. One end of the conductive connecting sleeve 6111 is detachably and fixedly connected to the wiring sleeve 1. In this embodiment, the detachable fixed connection uses a threaded connection. The connecting ends of the conductive connecting sleeve 6111 and the wiring sleeve 1 respectively form mutually mating internal and external threads. The open end of the metal sleeve 5 extends into the mounting groove of the wiring sleeve 1 and is fixed inside the wiring sleeve 1 by the first clamp 6112. The first clamp 6112 is made of a conductive material. Exemplarily, the conductive material includes, but is not limited to, spring steel, brass, or conductive rubber. Mounting grooves are formed on the inner surfaces of both ends of the conductive connecting sleeve 6111. The end of the first clamp 6112 forms a tapered surface, and a tapered groove that abuts against the first clamp 6112 is formed on the inner surface of the mounting groove at the end of the conductive connecting sleeve 6111. Before starting the threaded connection of the bushing 1 and the conductive connection bushing 6111, the first clamp 6112 is first fitted onto the end of the metal sleeve 5. Then, the first clamp 6112 and the metal sleeve 5 are installed in the mounting groove of the bushing 1. Next, the conductive connection bushing 6111 is fitted onto the metal sleeve 5. During the process of tightening the conductive connection bushing 6111 toward the bushing 1, the conical groove of the conductive connection bushing 6111 presses against the conical surface of the first clamp 6112, causing the first clamp 6112 to deform and grip the metal sleeve 5, thereby clamping and fixing the metal sleeve 5 in the mounting groove at the end of the bushing 1.
[0034] Reference Figure 1The second connecting component 612 in this embodiment includes a second clamp 6121 and a fastening nut 6122. The fastening nut 6122 and the second clamp 6121 detachably and fixedly connect the insulating sleeve 3 to the conductive connecting sleeve 6111. Correspondingly, a thread is formed on the outer surface of the end of the conductive connecting sleeve 6111 that engages with the thread of the fastening nut 6122, and a mounting groove is formed on the inner surface of the end of the conductive connecting sleeve 6111 and a tapered groove is formed on the inner surface of the fastening nut 6122. The two ends of the second clamp 6121 form tapered surfaces. The second clamp 6121 is made of an elastic material, including but not limited to nylon or polytetrafluoroethylene. First, the insulating sleeve 3 is fitted onto the metal sleeve 5, and then the connecting end of the insulating sleeve 3 is installed on the conductive connecting sleeve 611. In the mounting groove at one end, the second clamp 6121 is then installed on the insulating sleeve 3, and the fastening nut 6122 is fitted onto the insulating sleeve 3 and tightened toward the conductive connecting sleeve 6111. During this process, the fastening nut 6122 pushes the second clamp 6121, causing the conical surface of the second clamp 6121 to abut against the conductive connecting sleeve 6111 and the conical groove of the fastening nut 6122, deforming and gripping the insulating sleeve 3, thereby achieving a fixed connection between the insulating sleeve 3 and the conductive connecting sleeve 6111. In this embodiment, the wiring end of the wiring sleeve 1 is fastened and sealed to the wire 4 via a metal gland 7.
[0035] Reference Figure 1 The conductive component 62 includes a connecting bolt 621 and a connecting fork 622. The connecting bolt 621 is screwed onto the conductive connecting sleeve 6111, and the conductive connecting sleeve 6111 has a corresponding threaded hole. The connecting end of the connecting fork 622 is fixedly connected to the external grounding wire 8, and the U-shaped end is pressed and fixed below the bolt head of the connecting bolt 621 to achieve electrical connection. Since the conductive connecting sleeve 6111 is electrically connected to the metal sleeve 5 and the connecting sleeve 1 respectively through the first clamp 6112 made of conductive material, the conductive component 62 electrically connects the metal sleeve 5, the connecting sleeve 1 and the external grounding wire 8 through the conductive connecting sleeve 6111. This can promptly conduct away the charge accumulated on the metal sleeve 5 and the connecting sleeve 1, effectively reducing the interference of the surrounding electromagnetic field on the thermocouple core 2. In addition, grounding the connecting sleeve 1 can also effectively shield the electromagnetic interference of the thermocouple core 2 and the thermocouple connecting wire 4 inside the connecting sleeve 1. Because the external insulating sleeve 3 encapsulates the metal sleeve 5 inside, it prevents the metal sleeve 5 from releasing metal ions at high temperatures, thus avoiding contamination of the internal chambers of the equipment.
[0036] Reference Figure 2The thermocouple core 2 also includes an insulating protective sleeve 23, which is sealed to the end of the insulating core 22 to form a sealed chamber. The thermocouple wire 21 extends from the hot end of the insulating core 22 and is encapsulated within the sealed chamber. The insulating core 22 and the insulating protective sleeve 23 seal and protect the thermocouple wire, preventing the release of metal ions from the metal sleeve 5 at high temperatures from contaminating the internal thermocouple wire and thus reducing temperature measurement accuracy. The sealing connection between the insulating protective sleeve 23 and the insulating core 22 can be achieved using a high-temperature resistant adhesive or a high-temperature sealant. Preferably, the axial length of the sealed chamber formed by the insulating protective sleeve 23 and the insulating core 22 is greater than the length of the thermocouple wire 21 exposed outside the insulating core 22. By allowing for the distance and space for the thermocouple wire 21 to expand under heat, adverse effects on temperature measurement accuracy are avoided.
[0037] It should be understood that the application of this application is not limited to the examples above. Those skilled in the art can make improvements or modifications based on the above description, and all such improvements and modifications should fall within the protection scope of the appended claims.
Claims
1. An anti-interference thermocouple temperature sensor, characterized in that, The temperature sensor includes a wiring sleeve, a thermocouple core, and an insulating sleeve. The hot end of the thermocouple core extends into the insulating sleeve for temperature measurement, and the cold end of the thermocouple core extends into the wiring sleeve and connects to a connecting wire to transmit the measured temperature signal to a temperature display. It also includes a metal sleeve and a connecting structure. The metal sleeve is fitted over the thermocouple core and located inside the insulating sleeve. The connecting structure includes a connecting component and a conductive component. The connecting component detachably and securely connects the wiring sleeve, the metal sleeve, and the insulating sleeve, and the conductive component connects the metal sleeve to an external grounding wire.
2. The anti-interference thermocouple temperature sensor according to claim 1, characterized in that, The connecting assembly includes a first connecting assembly and a second connecting assembly. The wiring sleeve includes a terminal and a working end. The first connecting assembly detachably and fixedly connects the working end of the wiring sleeve and the open end of the metal sleeve. The second connecting assembly detachably and fixedly connects the open end of the insulating sleeve to the first connecting assembly.
3. The anti-interference thermocouple temperature sensor according to claim 2, characterized in that, The first connecting component includes a conductive connecting sleeve and a first clamp. One end of the conductive connecting sleeve is detachably and fixedly connected to the wiring sleeve. The open end of the metal sleeve extends into the wiring sleeve and is fixed inside the wiring sleeve by the first clamp. The conductive component is detachably and fixedly connected to the conductive connecting sleeve. The first clamp is made of conductive material, and the conductive connecting sleeve abuts against the first clamp.
4. The anti-interference thermocouple temperature sensor according to claim 3, characterized in that, The second connecting component includes a fastening nut and a second clamp, which detachably and securely connect the insulating sleeve to the conductive connecting sleeve.
5. The anti-interference thermocouple temperature sensor according to claim 2, characterized in that, The terminals of the wiring sleeve are securely sealed to the wires via metal glands.
6. The anti-interference thermocouple temperature sensor according to claim 3, characterized in that, The conductive component includes a wiring bolt and a wiring fork. The wiring bolt is screwed onto the conductive connecting sleeve, and the wiring fork is fixedly connected to the external grounding wire.
7. The anti-interference thermocouple temperature sensor according to claim 1, characterized in that, The thermocouple core includes a thermocouple wire, an insulating core, and an insulating protective sleeve. The insulating protective sleeve is sealed to the end of the insulating core to form a sealed chamber. The thermocouple wire is fixed inside the insulating core, and the thermocouple wire extends out of the hot end of the insulating core and is encapsulated in the sealed chamber.
8. The anti-interference thermocouple temperature sensor according to claim 7, characterized in that, The axial length of the sealed chamber is greater than the length of the thermocouple wire exposed in the insulating core.
9. The anti-interference thermocouple temperature sensor according to claim 1, characterized in that, The wiring sleeve and the metal sleeve are independently selected from iron-based, nickel-based, cobalt-based, aluminum-based, or copper-based alloy tubes.
10. The anti-interference thermocouple temperature sensor according to claim 1, characterized in that, The insulating sleeve is made of alumina ceramic tube or quartz tube.
Citation Information
Patent Citations
Thermocouple structure used in semiconductor device and semiconductor device
CN221976310U