Semiconductor heat disc welding and leakage testing tool

Abstract

The utility model discloses a kind of semiconductor heating disc welding and leak detection tool, including first disc body, second disc body, the first disc body is symmetrically distributed with second disc body, the second disc body is opened with movable cavity, movable cavity is movably provided with extension plate, the first disc body side is opened with butt joint groove, and the extension plate one end extends to butt joint groove inside;Two groups of movable slots are opened on the second disc body, two groups The movable slot is symmetrically distributed about the second disc body central axis, screw rod is arranged in the movable slot, and one end of the screw rod is fixedly connected with one side of extension plate.The utility model discloses a kind of semiconductor heating disc welding and leak detection tool, to avoid that different thickness heating disc cannot be adapted, conveniently place heating disc effectively between disc body, to avoid affecting the leak detection effect of heating disc in turn, so that the tool does not need to be replaced multiple times, improve production efficiency, greatly reduce production cost.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor heating plate welding and leak testing fixtures, and in particular to a semiconductor heating plate welding and leak testing fixture. Background Technology

[0002] Semiconductor heating plate welding refers to the process of welding heating plates during the manufacturing of semiconductor devices or equipment. Heating plates play a very important role in semiconductor equipment, often used for functions such as heating, temperature control, or heat treatment to ensure the normal operation of the equipment.

[0003] After welding, existing heating plates must be checked for proper sealing at the weld points using a leak-testing fixture to prevent any gas leakage and ensure the heating plate's performance and the equipment's normal operation. The heating plate is placed on the lower plate of the fixture, with the upper plate covering it. However, leak-testing fixtures are typically designed for heating plates of a specific size. When the thickness of the heating plates varies, they cannot be effectively positioned between the plates, affecting the leak detection results. This necessitates multiple adjustments or replacements to the fixture, impacting production efficiency and increasing costs. Utility Model Content

[0004] The main purpose of this utility model is to provide a semiconductor heating plate welding and leak testing fixture, which can effectively solve the technical problems in the background art.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0006] A semiconductor heating plate welding and leak testing fixture includes a first plate and a second plate, which are symmetrically distributed. The second plate has a movable cavity, in which an extension plate is movably disposed. A mating groove is formed on one side of the first plate, and one end of the extension plate extends into the mating groove. Two sets of movable grooves are formed on the second plate, which are symmetrically distributed about the central axis of the second plate. A screw is disposed in each movable groove, and one end of the screw is fixedly connected to one side of the extension plate. A fixing plate is threaded onto the screw. A fixing assembly is provided on the first plate to fix the extension plate in the mating groove.

[0007] As a further embodiment of this utility model, the fixing component includes two sets of movable plates disposed on one side of the first disc body. The two sets of movable plates are symmetrically distributed about the central axis of the first disc body. Bolts are threadedly connected to the movable plates, and one end of the bolts is rotatably connected to one side of the first disc body.

[0008] As a further embodiment of this utility model, the fixing assembly also includes two sets of fixing rods disposed on one side of the moving plate. The two sets of fixing rods are symmetrically distributed about the central axis of the moving plate. The fixing rods penetrate into the docking groove. The extension plate has a fixing hole, and one end of the fixing rod is inserted into the fixing hole.

[0009] As a further embodiment of this utility model, a limiting plate is fixedly connected to one end of the screw.

[0010] As a further embodiment of this utility model, the second disk body is provided with a plurality of limiting grooves, and the plurality of limiting grooves are distributed in an array at equal intervals.

[0011] As a further embodiment of this utility model, the extension plate is provided with a plurality of limiting plates, one end of which extends into the limiting groove.

[0012] As a further embodiment of this utility model, a sealing gasket is provided on one side of the movable cavity and the docking groove, and the other side of the sealing gasket is attached to one side of the extension plate.

[0013] The beneficial effects of this utility model are as follows:

[0014] The extension plate slides inside the movable cavity, allowing it to be pulled out and adjusted to the appropriate position for the heating plate. A fixed plate on the rotating screw moves to the outer wall of the second plate, ensuring a tight fit. The fixed plate, in conjunction with the screw, secures the extension plate within the movable cavity. After the heating plate is placed inside the first plate, the extension plate is placed in the mating groove and then fixed by the fixing assembly, thus connecting the first and second plates together. This design avoids compatibility issues with heating plates of varying thicknesses, facilitates efficient placement of the heating plate between plates, and prevents interference with leak detection. This eliminates the need for frequent tooling changes, improving production efficiency and significantly reducing production costs.

[0015] After one end of the extension plate is inserted into the docking groove, the bolt rotates, causing the moving plate to move. The moving plate then moves the fixing rod, which moves into the fixing hole. One end of the extension plate is then fixed inside the docking groove, thus connecting the first and second discs together for easy use by staff. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of a semiconductor heating plate welding and leak detection fixture according to the present invention;

[0017] Figure 2 This is a side cross-sectional view of a semiconductor heating plate welding and leak testing fixture according to the present invention.

[0018] Figure 3 This is a top cross-sectional view of a semiconductor heating plate welding and leak detection fixture according to the present invention.

[0019] Figure 4 This utility model relates to a semiconductor heating plate welding and leak testing fixture. Figure 2 Enlarged view of point A in the middle;

[0020] Figure 5 This utility model relates to a semiconductor heating plate welding and leak testing fixture. Figure 3 Enlarged view of section B in the middle.

[0021] In the diagram: 1. First disc; 2. Second disc; 3. Movable cavity; 4. Extension plate; 5. Connecting groove; 6. Movable groove; 7. Screw; 8. Fixing plate; 9. Limiting plate; 10. Moving plate; 11. Bolt; 12. Fixing rod; 13. Fixing hole; 14. Sealing gasket; 15. Limiting groove; 16. Limiting plate. Detailed Implementation

[0022] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0023] like Figures 1-5 As shown, a semiconductor heating plate welding and leak testing fixture includes a first plate body 1 and a second plate body 2, which are symmetrically distributed. The second plate body 2 has a movable cavity 3, and an extension plate 4 is movably disposed in the movable cavity 3. A docking groove 5 is provided on one side of the first plate body 1, and one end of the extension plate 4 extends into the docking groove 5. Two sets of movable grooves 6 are provided on the second plate body 2, and the two sets of movable grooves 6 are symmetrically distributed about the central axis of the second plate body 2.

[0024] In this embodiment, a screw 7 is provided in the movable groove 6, one end of the screw 7 is fixedly connected to one side of the extension plate 4, and a fixing plate 8 is threadedly connected to the screw 7; a fixing component is provided on the first disc 1, which is used to fix the extension plate 4 in the docking groove 5.

[0025] To accommodate heating plates of varying thicknesses, when encountering a thicker heating plate, the extension plate 4 is first slid inside the movable cavity 3, then pulled out and adjusted to the appropriate position for the heating plate. The fixing plate 8 on the rotating screw 7 is then moved to the outer wall of the second plate body 2, ensuring a tight fit between them. The fixing plate 8, in conjunction with the screw 7, secures the extension plate 4 within the movable cavity 3. After placing the heating plate inside the first plate body 1, the extension plate 4 is placed in the mating groove 5, and then fixed by the fixing assembly, thus connecting the first plate body 1 and the second plate body 2. This avoids the inability to accommodate heating plates of different thicknesses, facilitates the effective placement of the heating plate between the plates, and prevents interference with leak detection. This eliminates the need for frequent tooling changes, improving production efficiency and significantly reducing production costs.

[0026] One end of the screw 7 is fixedly connected to a limiting plate 9, which restricts the other end of the screw 7 to prevent the fixing plate 8 from falling off the screw 7.

[0027] In this embodiment, the fixing component includes two sets of movable plates 10 disposed on one side of the first disc body 1. The two sets of movable plates 10 are symmetrically distributed about the central axis of the first disc body 1. Bolts 11 are threadedly connected to the movable plates 10. One end of the bolts 11 is rotatably connected to one side of the first disc body 1. The fixing component also includes two sets of fixing rods 12 disposed on one side of the movable plates 10. The two sets of fixing rods 12 are symmetrically distributed about the central axis of the movable plates 10. The fixing rods 12 penetrate into the docking groove 5. Fixing holes 13 are opened on the extension plate 4. One end of the fixing rod 12 is inserted into the fixing hole 13.

[0028] When one end of the extension plate 4 is inserted into the docking groove 5, the bolt 11 rotates to move the moving plate 10, and the moving plate 10 moves the fixing rod 12 in sync, moving the fixing rod 12 into the fixing hole 13, and fixing one end of the extension plate 4 inside the docking groove 5, thereby connecting the first disc 1 and the second disc 2 together, making it convenient for workers to use.

[0029] In this embodiment, the second disc 2 is provided with a plurality of limiting grooves 15, which are distributed in an array at equal intervals. The extension plate 4 is provided with a plurality of limiting plates 16, one end of which extends into the limiting groove 15.

[0030] When the extension plate 4 moves in the movable groove 6, the limiting plate 16 slides in the limiting groove 15 at the same time. The limiting groove 15 cooperates with the limiting plate 16 to restrict the extension plate 4, thereby preventing the extension plate 4 from shifting when it moves.

[0031] In this embodiment, a sealing gasket 14 is provided on one side of the movable cavity 3 and the docking groove 5, and the other side of the sealing gasket 14 is attached to one side of the extension plate 4.

[0032] The sealing performance of the equipment is improved by setting a sealing gasket 14 to enhance the seal at the connection.

[0033] It should be noted that this utility model is a semiconductor heating plate welding and leak testing fixture. In use, firstly, the extension plate 4 is pulled and slid inside the movable cavity 3 to remove the extension plate 4 from the movable cavity 3. The extension plate 4 is then adjusted to the appropriate position of the heating plate. The fixing plate 8 on the rotating screw 7 is moved to the outer wall of the second plate 2, so that the fixing plate 8 and the second plate 2 are tightly fitted together. The fixing plate 8, in conjunction with the screw 7, fixes the position of the extension plate 4 in the movable cavity 3. After the heating plate is placed in the first plate 1, the extension plate 4 is placed in the docking groove 5. Then, the bolt 11 is rotated to drive the moving plate 10 to move. The moving plate 10 synchronously drives the fixing rod 12 to move, moving the fixing rod 12 into the fixing hole 13. One end of the extension plate 4 is fixed inside the docking groove 5, thereby connecting the first plate 1 and the second plate 2 together.

[0034] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A semiconductor heating plate welding and leak testing fixture, comprising a first plate body (1) and a second plate body (2), characterized in that: The first disc body (1) and the second disc body (2) are symmetrically distributed. The second disc body (2) has a movable cavity (3) and an extension plate (4) is movably arranged in the movable cavity (3). The first disc body (1) has a docking groove (5) on one side and one end of the extension plate (4) extends into the docking groove (5). The second disc (2) is provided with two sets of movable slots (6). The two sets of movable slots (6) are symmetrically distributed about the central axis of the second disc (2). A screw (7) is provided in the movable slot (6). One end of the screw (7) is fixedly connected to one side of the extension plate (4). A fixing plate (8) is threaded on the screw (7). The first disc body (1) is provided with a fixing component, which is used to fix the extension plate (4) in the docking groove (5).

2. The semiconductor heating plate welding and leak testing fixture according to claim 1, characterized in that: The fixing component includes two sets of movable plates (10) disposed on one side of the first disc body (1). The two sets of movable plates (10) are symmetrically distributed about the central axis of the first disc body (1). Bolts (11) are threaded onto the movable plates (10), and one end of the bolts (11) is rotatably connected to one side of the first disc body (1).

3. The semiconductor heating plate welding and leak testing fixture according to claim 1, characterized in that: The fixing assembly also includes two sets of fixing rods (12) disposed on one side of the moving plate (10). The two sets of fixing rods (12) are symmetrically distributed about the central axis of the moving plate (10). The fixing rods (12) penetrate into the docking groove (5). The extension plate (4) is provided with fixing holes (13). One end of the fixing rod (12) is inserted into the fixing hole (13).

4. The semiconductor heating plate welding and leak testing fixture according to claim 1, characterized in that: One end of the screw (7) is fixedly connected to a limiting plate (9).

5. The semiconductor heating plate welding and leak testing fixture according to claim 1, characterized in that: The second disk body (2) has a number of limiting slots (15) and the number of limiting slots (15) are distributed in an array at equal intervals.

6. The semiconductor heating plate welding and leak testing fixture according to claim 1, characterized in that: The extension plate (4) is provided with a plurality of limiting plates (16), one end of which extends into the limiting groove (15).

7. The semiconductor heating plate welding and leak testing fixture according to claim 1, characterized in that: A sealing gasket (14) is provided on one side of the active cavity (3) and the docking groove (5), and the other side of the sealing gasket (14) is attached to one side of the extension plate (4).

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