An internal test device for an integrating sphere

CN224839376UActive Publication Date: 2026-10-09泰克半导体装备(深圳)有限公司
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Patent Information

Application Number
CN202522610095.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-12-09
Publication Date
2026-10-09
Estimated Expiration
2035-12-09

AI Technical Summary

Technical Problem

[0004]为了克服现有技术的不足,本实用新型提供一种积分球内部测试装置,解决了现有技术中在积分球的端部进行测试导致测试准确性较低的问题

Benefits of technology

[0015]本实用新型的有益效果是:本实用新型的积分球内部测试装置,将载物支架设置于积分球内,通过将承载样品的载物支架直接固定于积分球内部,通过进料窗口将样品放置于在于支架上进行测试,积分球内部能够更完整地收集样品发出的全部光线,显著提高了积分球的光收集效率和测试精度。

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Abstract

The utility model discloses a kind of internal testing devices of integrating sphere, it includes pedestal, integrating sphere, probe test platform and optical test component;Integrating sphere is set on pedestal, and the object carrier support for bearing sample is fixedly arranged in integrating sphere, the top end of integrating sphere is equipped with feeding window, and sample can be placed on object carrier support from feeding window;Probe test platform includes probe base and test probe, probe base is connected with pedestal, test probe is connected with probe base, integrating sphere has probe opening, test probe is inserted into integrating sphere from probe opening, and the object carrier support is equipped with let go of through-hole, and test probe is contacted with sample pin through let go of through-hole;Optical test component is set to the light outlet of integrating sphere, for transmitting processing to the test light signal collected by integrating sphere.The present application has the advantages of detecting sample in the interior of integrating sphere, and high detection precision.
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Description

Technical Field

[0001] This utility model relates to the field of integrating sphere equipment technology, and in particular to an internal testing device for an integrating sphere. Background Technology

[0002] Integrating spheres, as optical measurement devices, are widely used for testing parameters such as luminous flux and color temperature of light sources and luminaires. Currently, common integrating sphere testing structures typically mount the sample to be tested at the end of the integrating sphere (i.e., the opening in the sphere wall). When testing at the end of the integrating sphere, scattered light emitted from the sample surface and areas near the mounting position cannot be uniformly received and fully integrated by the inner wall of the sphere. Especially for luminaires with a certain size or non-standard shape, the spatial light distribution can be interfered with by the mounting conditions, thus affecting the accuracy and repeatability of the measurement results.

[0003] In view of this, the purpose of this utility model is to provide a new technical solution to solve the existing technical problems. Utility Model Content

[0004] To overcome the shortcomings of the prior art, this utility model provides an internal testing device for an integrating sphere, which solves the problem of low testing accuracy caused by testing at the end of the integrating sphere in the prior art.

[0005] The technical solution adopted by this utility model to solve its technical problem is: An integrating sphere internal testing device includes a base, an integrating sphere, a probe testing platform, and optical testing components; The integrating sphere is disposed on the base, and a sample support is fixedly disposed inside the integrating sphere. A feeding window is provided at the top of the integrating sphere, and the sample can be placed on the sample support through the feeding window. The probe testing platform includes a probe holder and a test probe. The probe holder is connected to the base, and the test probe is connected to the probe holder. The integrating sphere has a probe opening, and the test probe extends into the integrating sphere through the probe opening. The carrier support has a clearance through hole, and the test probe contacts the sample pin through the clearance through hole. The optical testing component is located at the light outlet of the integrating sphere and is used to transmit and process the test optical signal collected by the integrating sphere.

[0006] In the above structure, the integrating sphere includes an interlocking upper integrating hemisphere, a lower integrating hemisphere, and a fastening knob. The lower integrating hemisphere is connected to the base. The load support is fixedly disposed on the side of the upper integrating hemisphere facing the lower integrating hemisphere. The end of the fastening knob passes through the upper integrating hemisphere and is threaded to the lower integrating hemisphere.

[0007] In the above structure, the optical testing component includes an optical fiber, a brightness probe, and an optical parameter analysis module. The optical fiber is disposed on one side of the lower integrating hemisphere, the brightness probe is disposed on the other side of the lower integrating hemisphere, and the integrating sphere is connected to the optical parameter analysis module through the optical fiber.

[0008] In the above structure, the probe testing platform further includes an X-axis module for driving the test probe to move along the X-axis direction, a Y-axis module for driving the test probe to move along the Y-axis direction, and a Z-axis module for driving the test probe to move along the Z-axis direction.

[0009] In the above structure, the X-axis module includes an X-axis base, an X-axis slide, and an X-axis adjusting rod. A first mounting bracket is fixedly mounted on the base, and the X-axis base is fixedly mounted on the first mounting bracket. The X-axis slide can slide along the X-axis direction on the X-axis base. The X-axis adjusting rod is rotatably connected to the X-axis base and the X-axis slide to drive the X-axis slide to slide on the X-axis base. An X-axis return spring is provided between the X-axis slide and the X-axis base. The X-axis base is provided with an X-axis slide rail extending along the X-axis direction. An X-axis slider is fixedly connected to the X-axis slide block. The X-axis slider is slidably connected to the X-axis slide rail. A linear bearing is provided on the X-axis slide block. The X-axis adjusting rod is rotatably connected to the X-axis slide block through the linear bearing.

[0010] In the above structure, the Y-axis module includes a Y-axis slide block, a Y-axis adjusting rod, a contact block, and a pushing block. The X-axis slide block is fixedly provided with a Y-axis slide rail extending along the Y-axis direction. A Y-axis slider is fixedly connected to the Y-axis slide block and slidably connected to the Y-axis slide rail. The contact block is rotatably disposed on the Y-axis slide block. The Y-axis adjusting rod is rotatably connected to the Y-axis slide block, and the end of the Y-axis adjusting rod abuts against the contact block to push the contact block to rotate. The pushing block is fixedly connected to the X-axis slide block, and the contact block abuts against the pushing block. A Y-axis return spring is provided between the Y-axis slide and the X-axis slide, and the Y-axis return spring is used to drive the Y-axis slide to slide and return to its original position along the Y-axis direction.

[0011] In the above structure, a reset block is fixedly provided on one side of the X-axis slide, and the Y-axis reset spring is provided between the reset block and the Y-axis slide. One end of the Y-axis reset spring is fixedly connected to the Y-axis slide, and the other end is fixedly connected to the reset block.

[0012] In the above structure, the Z-axis module includes a Z-axis slide, a Z-axis adjusting rod, and a Z-axis return spring. A Z-axis slide rail extending along the Z-axis direction is fixedly connected to the Y-axis slide. A Z-axis slider is fixedly connected to the Z-axis slide and slidably connected to the Z-axis slide rail. A mounting block is fixedly installed on the Y-axis slide. The Z-axis adjusting rod is rotatably connected to the mounting block, and the end of the Z-axis adjusting rod abuts against the Z-axis slide to push the Z-axis slide downward along the Z-axis. A lower abutment plate is connected to the Y-axis slide. One end of the Z-axis return spring is connected to the Z-axis slide, and the other end is connected to the lower abutment plate to push the Z-axis slide upward along the Z-axis. The probe seat is fixedly connected to the Z-axis slide.

[0013] In the above structure, the probe holder has a mounting groove at one end facing the integrating sphere, the test probe is detachably mounted in the mounting groove, and the probe holder is provided with a probe pressing block, which is detachably and fixedly connected to the probe holder to press the test probe.

[0014] The above structure also includes a precision alignment module, which is mounted on the base and located below the integrating sphere. The lower integrating hemisphere has an adjustment window, and the camera of the precision alignment module is aligned with the adjustment window.

[0015] The beneficial effects of this utility model are as follows: The integrating sphere internal testing device of this utility model sets the sample support inside the integrating sphere. By directly fixing the sample support inside the integrating sphere, the sample is placed on the support for testing through the feeding window. The integrating sphere can collect all the light emitted by the sample more completely, which significantly improves the light collection efficiency and testing accuracy of the integrating sphere. Attached Figure Description

[0016] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0017] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic cross-sectional view of the present invention; Figure 3 This is a schematic diagram showing the disassembled structure of the integrating sphere of this utility model; Figure 4 This is a schematic diagram of the probe testing platform structure of this utility model; Figure 5 This is a schematic diagram of the connection structure of the detection and testing platform of this utility model.

[0018] Figure label: 1. Base; 11. First mounting bracket; 12. Second mounting bracket; 2. Integrating sphere; 21. Upper integrating hemisphere; 211. Feed window; 22. Lower integrating hemisphere; 221. Probe opening; 23. Load holder; 24. Fastening knob; 3. Probe testing platform; 31. Probe holder; 311. Mounting slot; 312. Probe clamping block; 32. Test probe; 33. X-axis module; 331. X-axis base; 332. X-axis slide; 333. X-axis adjusting rod; 334. X-axis return spring; 335. X-axis slide rail; 336. X-axis slider; 337. Return block; 34. Y-axis module; 341. Y-axis slide; 342. Y-axis adjusting rod; 343. Abutment block; 345. Push block; 346. Y-axis return spring; 347. Y-axis slide rail; 348. Y-axis slider; 35. Z-axis module; 351. Z-axis slide; 352. Z-axis adjusting rod; 353. Z-axis return spring; 354. Z-axis slide rail; 355. Z-axis slider; 356. Mounting block; 357. Lower abutment plate; 4. Optical testing components; 41. Optical fiber; 42. Brightness probe; 5. Precision alignment module; 6. Sample. Detailed Implementation

[0019] The following is in conjunction with the appendix Figure 1-5 The present invention will be further described below.

[0020] The following will clearly and completely describe the concept, specific structure, and technical effects of this utility model in conjunction with embodiments and accompanying drawings, so as to fully understand the purpose, features, and effects of this utility model. Obviously, the described embodiments are only a part of the embodiments of this utility model, not all of them. Other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are all within the scope of protection of this utility model. Furthermore, all connections / linkages involved in the patent do not simply refer to direct contact between components, but rather to the ability to form a better connection structure by adding or reducing connecting accessories according to specific implementation conditions. The various technical features in this utility model can be combined interactively without contradicting each other.

[0021] Reference Figures 1 to 5This utility model discloses an integrating sphere internal testing device, which can be applied to the performance testing of LEDs, etc. It includes a base 1, an integrating sphere 2, a probe testing platform 3, and an optical testing assembly 4. The base 1 serves as the base of the entire device, supporting and mounting all components. The integrating sphere 2 is mounted on the base 1, and a sample support 23 is provided inside the integrating sphere 2 to support the sample 6 to be tested. A feed window 211 is provided at the top of the integrating sphere 2, allowing the sample 6 to be placed onto the sample support 23 via a transfer mechanism. The probe testing platform 3 is located on one side of the integrating sphere 2 and includes a test probe 32 and a probe... The probe holder 31 is used to mount the test probe 32. The test probe 32 is detachably mounted on the probe holder 31. The integrating sphere 2 has a probe opening 221 on the side facing the probe test platform 3. The test probe 32 can extend into the integrating sphere 2 through the probe opening 221. The carrier support 23 has a clearance through hole (not shown in the figure) in the middle. The test probe 32 can pass through the clearance through hole. When the sample 6 is placed on the carrier support 23, the test probe 32 contacts the pin of the sample 6 through the clearance through hole. The optical test component 4 is set at the light outlet of the integrating sphere 2 to transmit and process the test light signal collected by the integrating sphere 2.

[0022] Compared to testing sample 6 by placing it at the port of the sphere, where the light emitted from the sample 6 itself is blocked by its own lamp body or base, resulting in the light being unable to enter the sphere or requiring complex reflections to enter, leading to a measured value lower than the actual value, the integrating sphere internal testing device of this invention places the carrier support 23 inside the integrating sphere 2. When sample 6 is placed inside the integrating sphere 2, its own structure does not block the light emitted in any direction. The inner wall of the integrating sphere 2 can collect all the light emitted by sample 6 more completely, thereby accurately measuring the light output of sample 6 under actual use conditions.

[0023] In this embodiment, a first mounting bracket 11 and a second mounting bracket 12 are fixedly disposed on the base 1, wherein the probe testing platform 3 is disposed on the first mounting bracket 11 and the integrating sphere 2 is disposed on the second mounting bracket 12.

[0024] Reference Figure 4 The probe holder 31 has a mounting groove 311 for mounting the test probe 32 at one end facing the integrating sphere 2. The test probe 32 is detachably mounted in the mounting groove 311. A probe pressing block 312 is detachably fixed on the probe holder 31. The probe pressing block 312 is used to press the test probe 32 to achieve the connection and fixation of the test probe 32 to the probe holder 31.

[0025] Reference Figure 2 and Figure 3Furthermore, the integrating sphere 2 includes an interlocking upper integrating hemisphere 21, a lower integrating hemisphere 22, and a fastening knob 24. The upper integrating hemisphere 21 and the lower integrating hemisphere 22 interlock to form a hollow sphere. The lower integrating hemisphere 22 is fixedly connected to the second mounting bracket 12, and the load support 23 is fixedly disposed on the side of the upper integrating hemisphere 21 facing the lower integrating hemisphere 22. The end of the fastening knob 24 passes through the upper integrating sphere 2 and is threadedly connected to the lower integrating hemisphere 22, thereby achieving the connection and fixation of the upper integrating hemisphere 21 and the lower integrating hemisphere 22. Setting the integrating sphere 2 as a split structure effectively reduces the difficulty of installing and adjusting the detection probe inside the integrating sphere 2, and also facilitates the inspection and maintenance of the internal structure of the integrating sphere 2.

[0026] The optical testing component 4 includes an optical fiber 41, a brightness probe 42, and an optical parameter analysis module (not shown in the figure). The optical fiber 41 is located on one side of the lower integrating sphere 2, and the brightness probe 42 is located on the other side of the lower integrating hemisphere 22. The integrating sphere 2 is connected to the optical parameter analysis module through the optical fiber 41.

[0027] Reference Figure 4 and Figure 5 The probe testing platform 3 also includes an X-axis module 33, a Y-axis module 34, and a Z-axis module 35. The X-axis module 33 controls the movement of the test probe 32 along the X-axis; the Y-axis module 34 controls the movement of the test probe 32 along the Y-axis; and the Z-axis module 35 controls the movement of the test probe 32 along the Z-axis. It should be noted that in this embodiment, the direction of the test probe 32's forward and backward movement along the probe holder 31 is defined as the X-axis direction, the direction of the test probe 32's left and right movement is defined as the Y-axis direction, and the vertical lifting motion of the test probe 32 is defined as the Z-axis direction.

[0028] The X-axis module 33 includes an X-axis base 331, an X-axis slide 332, and an X-axis adjusting rod 333. The X-axis base 331 is fixedly mounted on the first mounting bracket 11. The probe seat 31 is connected to the X-axis slide 332, and the X-axis slide 332 is slidably connected to the X-axis base 331. The X-axis adjusting rod 333 connects the X-axis base 331 and the X-axis slide 332, and drives the X-axis slide 332 to slide on the X-axis base 331. Specifically, an X-axis slide rail 335 extending along the X-axis direction is fixedly mounted on the side of the X-axis base 331 facing the X-axis slide 332, and an X-axis slider 336 is fixedly mounted on the side of the X-axis slide 332 facing the X-axis base 331. The X-axis slider 336 is slidably connected to the X-axis slide rail 335. A linear bearing is provided on the X-axis slide 332, and the X-axis adjusting rod 333 is rotatably connected to the X-axis slide 332 through the linear bearing. By rotating the X-axis adjusting rod 333, the X-axis slide block 332 can be slid against the X-axis base 331, thereby adjusting the position of the test probe 32 in the X-axis direction.

[0029] Furthermore, an X-axis return spring 334 is fitted onto the X-axis adjusting rod 333. One end of the X-axis return spring 334 is connected to the X-axis slide 332, and the other end is connected to the X-axis base 331. In this embodiment, rotating the X-axis adjusting rod 333 clockwise causes the X-axis slide 332 to move forward along the X-axis direction, at which time the X-axis return spring 334 is elastically stretched; rotating the X-axis adjusting rod 333 counterclockwise causes the X-axis slide 332 to move backward along the X-axis direction, during which the return spring is elastically released, pushing the X-axis slide 332 to return to its original position.

[0030] The Y-axis module 34 includes a Y-axis slide 341, a Y-axis adjusting rod 342, an abutment block 343, and a pushing block 345. The Y-axis slide 341 is slidably connected to the X-axis slide 332 along the Y-axis direction. The abutment block 343 is rotatably connected to the Y-axis slide 341. The pushing block 345 is fixedly mounted on the X-axis slide 332, and the abutment block 343 can abut against and push the pushing block 345 during rotation. The Y-axis adjusting rod 342 is rotatably connected to the Y-axis slide 341, and its end abuts against the abutment block 343. By rotating the Y-axis adjusting rod 342, the abutment block 343 is pushed to rotate, and the abutment block 343 abuts against and pushes the pushing block 345, thereby achieving the sliding drive of the Y-axis slide 341 on the X-axis slide 332. A Y-axis return spring 346 is provided between the Y-axis slide block 341 and the X-axis slide block 332. The Y-axis return spring 346 elastically releases and drives the Y-axis slide block 341 to slide and reset along the Y-axis direction.

[0031] Furthermore, a Y-axis slide rail 347 extending along the Y-axis direction is fixedly mounted on the X-axis slide 332, and a Y-axis slider 348 is fixedly connected to the Y-axis slide 341, sliding on the Y-axis slide rail 347. A linear bearing is provided on the Y-axis slide 341, and the Y-axis adjusting rod 342 is rotatably connected to the Y-axis slide 341 through the linear bearing. A reset block 337 is fixedly mounted on the X-axis slide 332, and a Y-axis reset spring 346 is disposed between the reset block 337 and the Y-axis slider 348, with the spring force direction of the Y-axis spring parallel to the Y-axis direction. One end of the Y-axis reset spring 346 is fixedly connected to the Y-axis slider 348, and the other end is fixedly connected to the reset block 337. In this embodiment, rotating the Y-axis adjusting rod 342 clockwise causes the abutment block 343 to rotate counterclockwise and abut against the pushing block 345. Under the push of the interaction force, the Y-axis slide block 341 slides to the left along the Y-axis direction onto the X-axis slide block 332. At this time, the Y-axis return spring 346 is elastically compressed. Rotating the Y-axis adjusting rod 342 counterclockwise causes the end of the Y-axis adjusting rod 342 to separate from the abutment block 343. At this time, under the action of the Y-axis return spring 346, the Y-axis slide block 341 slides to the right along the Y-axis direction onto the X-axis slide block 332.

[0032] Z-axis module 35 includes Z-axis slide 351, Z-axis adjusting rod 352, and Z-axis return spring 353. Z-axis slide 351 can slide along the Z-axis direction on Y-axis slide 341. Z-axis adjusting rod 352 is connected to Z-axis slider 355 and Y-axis slide 341. Z-axis return spring 353 is disposed between Z-axis slide 351 and Y-axis slide 341. Z-axis adjusting rod 352 and Z-axis return spring 353 cooperate to realize the sliding action of Z-axis slide 351 along the Z-axis direction. Probe seat 31 is connected and fixed to Z-axis slide 351. When Z-axis slide 351 moves, it drives probe seat 31 to move, thereby realizing the position movement of test probe 32.

[0033] Specifically, a Z-axis slide rail 354 extending along the Z-axis direction is fixedly connected to the Y-axis slide 341, and a Z-axis slider 355 is fixedly connected to the Z-axis slide 351, slidably connected to the Z-axis slide rail 354. A mounting block 356 is fixedly mounted on the Y-axis slide 341, and a linear bearing is connected to the mounting block 356. The Z-axis adjusting rod 352 is rotatably connected to the mounting block 356 through the linear bearing, and the end of the Z-axis adjusting rod 352 abuts against the Z-axis slide 351 to push the Z-axis slide 351 to move downward along the Z-axis. A lower abutment plate 357 is connected to the Y-axis slide 341, and one end of the Z-axis return spring 353 is fixedly connected to the Z-axis slide 351, and the other end is fixedly connected to the lower abutment plate 357 to push the Z-axis slide 351 to move upward along the Z-axis. The probe seat 31 is fixedly connected to the Z-axis slide 351. In this embodiment, rotating the Z-axis adjusting rod 352 clockwise pushes the Z-axis slide block 351 to slide downward along the Z-axis onto the Y-axis slide block 341, at which time the Z-axis return spring 353 elastically contracts; rotating the Z-axis adjusting rod 352 counterclockwise causes the Z-axis slide block 351 to disengage from the Z-axis adjusting rod 352's abutment, and the elastic release of the Z-axis return spring causes the Z-axis slide block 351 to move upward along the Z-axis direction to reset.

[0034] The X-axis module 33, Y-axis module 34 and Z-axis module 35 work together to adjust the test probe 32 in the X-axis, Y-axis and Z-axis directions, so that the test probe 32 can be accurately moved to the pin of the sample 6 to match different models of test samples 6, effectively expanding the application range of the testing device inside the integrating sphere.

[0035] It should be noted that the number of probe test platforms 3 can be set as needed and is not limited here; in this embodiment, four sets of probe test platforms 3 are provided.

[0036] Furthermore, refer to Figure 1 and Figure 2The integrating sphere internal testing device also includes a precision alignment module 5, which is mounted on the base 1 and located below the integrating sphere 2. An adjustment window is provided on the side of the lower integrating hemisphere 22 facing the precision alignment module 5, and the camera of the precision alignment module 5 is aligned with the adjustment window. Using the precision alignment module 5 to position and image the test probe 32 reduces the difficulty of adjusting the position of the test probe 32 and effectively ensures the positional accuracy of the test probe 32. It also ensures precise alignment between the sample 6 and the test probe 32.

[0037] The above is a detailed description of the preferred embodiments of the present utility model. However, the present utility model is not limited to the described embodiments. Those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present utility model. All such equivalent modifications or substitutions are included within the scope defined by the claims of this application.

Claims

1. An internal testing device for an integrating sphere, characterized in that: Includes base, integrating sphere, probe testing platform and optical testing components; The integrating sphere is disposed on the base, and a sample support is fixedly disposed inside the integrating sphere. A feeding window is provided at the top of the integrating sphere, and the sample can be placed on the sample support through the feeding window. The probe testing platform includes a probe holder and a test probe. The probe holder is connected to the base, and the test probe is connected to the probe holder. The integrating sphere has a probe opening, and the test probe extends into the integrating sphere through the probe opening. The carrier support has a clearance through hole, and the test probe contacts the sample pin through the clearance through hole. The optical testing component is located at the light outlet of the integrating sphere and is used to transmit and process the test optical signal collected by the integrating sphere.

2. The integrating sphere internal testing device according to claim 1, characterized in that: The integrating sphere includes an interlocking upper integrating hemisphere, a lower integrating hemisphere, and a fastening knob. The lower integrating hemisphere is connected to the base. The load support is fixedly disposed on the side of the upper integrating hemisphere facing the lower integrating hemisphere. The end of the fastening knob passes through the upper integrating hemisphere and is threaded to the lower integrating hemisphere.

3. The integrating sphere internal testing device according to claim 2, characterized in that: The optical testing assembly includes an optical fiber, a brightness probe, and an optical parameter analysis module. The optical fiber is disposed on one side of the lower integrating hemisphere, the brightness probe is disposed on the other side of the lower integrating hemisphere, and the integrating sphere is connected to the optical parameter analysis module through the optical fiber.

4. The integrating sphere internal testing device according to claim 1, characterized in that: The probe testing platform further includes an X-axis module for driving the test probe to move along the X-axis direction, a Y-axis module for driving the test probe to move along the Y-axis direction, and a Z-axis module for driving the test probe to move along the Z-axis direction.

5. The integrating sphere internal testing device according to claim 4, characterized in that: The X-axis module includes an X-axis base, an X-axis slide, and an X-axis adjusting rod. A first mounting bracket is fixedly mounted on the base, and the X-axis base is fixedly mounted on the first mounting bracket. The X-axis slide can slide along the X-axis direction on the X-axis base. The X-axis adjusting rod is rotatably connected to the X-axis base and the X-axis slide to drive the X-axis slide on the X-axis base. An X-axis return spring is provided between the X-axis slide and the X-axis base. The X-axis base is provided with an X-axis slide rail extending along the X-axis direction. An X-axis slider is fixedly connected to the X-axis slide block. The X-axis slider is slidably connected to the X-axis slide rail. A linear bearing is provided on the X-axis slide block. The X-axis adjusting rod is rotatably connected to the X-axis slide block through the linear bearing.

6. The integrating sphere internal testing device according to claim 5, characterized in that: The Y-axis module includes a Y-axis slide block, a Y-axis adjusting rod, a stop block, and a push block. The X-axis slide block is fixedly provided with a Y-axis slide rail extending along the Y-axis direction. A Y-axis slider is fixedly connected to the Y-axis slide block and slidably connected to the Y-axis slide rail. The stop block is rotatably disposed on the Y-axis slide block. The Y-axis adjusting rod is rotatably connected to the Y-axis slide block, and the end of the Y-axis adjusting rod abuts against the stop block to push the stop block to rotate. The push block is fixedly connected to the X-axis slide block, and the stop block abuts against the push block. A Y-axis return spring is provided between the Y-axis slide and the X-axis slide, and the Y-axis return spring is used to drive the Y-axis slide to slide and return to its original position along the Y-axis direction.

7. The integrating sphere internal testing device according to claim 6, characterized in that: A reset block is fixedly installed on one side of the X-axis slide, and the Y-axis reset spring is disposed between the reset block and the Y-axis slide. One end of the Y-axis reset spring is fixedly connected to the Y-axis slide, and the other end is fixedly connected to the reset block.

8. The integrating sphere internal testing device according to claim 7, characterized in that: The Z-axis module includes a Z-axis slide, a Z-axis adjusting rod, and a Z-axis return spring. A Z-axis slide rail extending along the Z-axis direction is fixedly connected to the Y-axis slide. A Z-axis slider is fixedly connected to the Z-axis slide and slidably connected to the Z-axis slide rail. A mounting block is fixedly installed on the Y-axis slide. The Z-axis adjusting rod is rotatably connected to the mounting block, and the end of the Z-axis adjusting rod abuts against the Z-axis slide to push the Z-axis slide downward along the Z-axis. A lower abutment plate is connected to the Y-axis slide. One end of the Z-axis return spring is connected to the Z-axis slide, and the other end is connected to the lower abutment plate to push the Z-axis slide upward along the Z-axis. The probe seat is fixedly connected to the Z-axis slide.

9. The integrating sphere internal testing device according to claim 1, characterized in that: The probe holder has a mounting groove at one end facing the integrating sphere. The test probe is detachably mounted in the mounting groove. The probe holder is provided with a probe pressing block, which is detachably and fixedly connected to the probe holder to press the test probe.

10. The integrating sphere internal testing device according to claim 2, characterized in that: It also includes a precision alignment module, which is mounted on the base and located below the integrating sphere. The lower integrating hemisphere has an adjustment window, and the camera of the precision alignment module is aligned with the adjustment window.