Test device for electrostatic chucking

Abstract

The utility model belongs to electrostatic chuck technical field relates to a testing arrangement for electrostatic chuck processing, include: base, base top surface fixedly connected with a plurality of support, four support top surface fixedly connected with the top plate, the test component of test function is fixedly arranged in the top plate bottom surface, the inside of base is provided with the limiting component of limit function, test component includes setting in the electric telescopic handle of top plate bottom surface, electric telescopic handle output fixedly connected with first connecting plate, first connecting plate inside slide connection has four scale shafts, scale shaft bottom surface fixedly connected with second connecting plate, second connecting plate bottom surface is connected with the pressing plate, second connecting plate top surface fixedly connected with first threaded rod, first threaded rod outer wall slide connection has first spring, through the mutual cooperation between the structure, can replace the pressing plate fast, thereby being convenient for the test of different shape electrostatic chuck, thereby improved the scope of application of this device.

Description

Technical Field

[0001] This utility model relates to the field of electrostatic chuck technology, and in particular to a testing device for electrostatic chuck processing. Background Technology

[0002] An electrostatic chuck is a device that uses the principle of electrostatic adsorption to fix and move objects. Its core function is to establish an electrostatic field between the chuck and the object being adsorbed, thereby generating a non-contact or weak-contact adsorption force, thus replacing traditional mechanical clamping, vacuum adsorption and other methods.

[0003] However, some existing processing devices are limited by the shape of electrostatic chucks when testing them, and can only test a single model of electrostatic chuck. This reduces the scope of application of the testing device and prevents it from testing most electrostatic chucks.

[0004] Therefore, it is necessary to provide a testing device for electrostatic chuck processing to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a testing device for electrostatic chuck processing, which can solve the problem that some processing devices are limited by the shape of the electrostatic chuck when testing it, and can only test a single type of electrostatic chuck, resulting in a narrow range of application of the testing device and the inability to test most electrostatic chucks.

[0006] According to the technical solution provided by this utility model: a testing device for electrostatic chuck processing includes: a base, a plurality of supports are fixedly connected to the top surface of the base, a top plate is fixedly connected between the top surfaces of the four supports, a testing component with testing function is fixedly arranged on the bottom surface of the top plate, and a limiting component with limiting function is arranged on the inner side of the base;

[0007] The test assembly includes an electric telescopic rod disposed on the bottom surface of the top plate. The output end of the electric telescopic rod is fixedly connected to a first connecting plate. Four scale shafts are slidably connected to the inner side of the first connecting plate. A second connecting plate is fixedly connected between the bottom surfaces of the scale shafts. A pressure plate is connected to the bottom surface of the second connecting plate. A first threaded rod is fixedly connected to the top surface of the second connecting plate. A first spring is slidably connected to the outer wall of the first threaded rod. The upper and lower ends of the first spring are fixedly connected to the first connecting plate or the second connecting plate, respectively.

[0008] Preferably, the limiting component includes a placement component disposed on the inner side of the base. The outer wall of the placement component is threadedly connected to a ratchet, and the ratchet is rotatably connected to the base. A rotating plate is fixedly connected to the outer wall of the ratchet. A limiting wheel is fixedly connected to the top surface of the rotating plate. A plurality of moving rods are slidably connected to the inner wall of the base. A gear is threadedly connected to the outer wall of the moving rod, and the gear meshes with the limiting wheel.

[0009] Preferably, the placement assembly includes a second threaded rod disposed on the inner side of the base, a placement plate disposed on the top surface of the second threaded rod, a third threaded rod fixedly connected to the bottom surface of the placement plate, and the third threaded rod and the second threaded rod being threadedly connected, and a placement groove matching the placement plate is provided on the top surface of the base.

[0010] In a preferred embodiment of the electrostatic chuck processing testing device of this utility model, the limiting wheel includes a connecting ring disposed on the top surface of the rotating plate. Multiple telescopic shafts are fixedly connected to the top surface of the connecting ring. Gears are fixedly connected between the top surfaces of the four telescopic shafts. A second spring is sleeved on the outer wall of each telescopic shaft, and the upper and lower ends of the limiting wheel are fixedly connected to the connecting ring or the gears, respectively. An adjusting ring is fixedly connected to the outer wall of each gear.

[0011] Preferably, the adjustment assembly includes an adjustment rod disposed on the inner side of the moving rod, a limiting shaft is fixedly connected to the side of the adjustment rod near the placement plate, a nut is fixedly connected to the outer wall of the limiting shaft by threads, and a limiting plate is fixedly connected to the side of the adjustment rod near the second threaded rod.

[0012] Preferably, the moving rod has an adjustment groove matching the limiting shaft on the side near the placement plate, and stripes are provided on one side between the moving rod and the adjustment rod.

[0013] The positive and progressive effects of this application are as follows:

[0014] The testing device for electrostatic chuck processing provided in this embodiment of the invention has the following advantages:

[0015] 1. Through the cooperation between the structures, the pressure plate can be quickly replaced, which facilitates the testing of electrostatic chucks of different shapes, thereby improving the applicability of this device.

[0016] 2. The interoperability of the structures facilitates simultaneous testing of the pressure resistance and suction force of electrostatic chucks of different shapes. This also reduces the risk of edge damage to the electrostatic chucks due to mismatch in the shape of the pressure structure during pressure testing, thereby improving the safety of the electrostatic chucks after testing. For simple dimensional changes, the nuts on the limit shaft surface can be loosened to loosen the connection between the adjusting rod and the moving rod. Then, the adjusting rod can be pulled out from inside the moving rod to match the size of the adjusting component with that of the electrostatic chuck. Attached Figure Description

[0017] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0018] Figure 2 This is a front view sectional structural diagram of the present invention.

[0019] Figure 3 This is a schematic diagram of the connection structure between the test component and the limiting component of this utility model.

[0020] Figure Descriptions: 1. Base; 2. Bracket; 3. Top Plate; 4. Test Component; 41. Electric Telescopic Rod; 42. First Connecting Plate; 43. Scale Shaft; 44. Second Connecting Plate; 45. Pressure Plate; 46. First Threaded Rod; 47. First Spring; 5. Limiting Component; 51. Placement Component; 511. Second Threaded Rod; 512. Placement Plate; 513. Third Threaded Rod; 52. Rotating Plate; 53. Limiting Wheel; 531. Connecting Ring; 532. Gear; 533. Telescopic Shaft; 534. Second Spring; 535. Adjusting Ring; 54. Moving Rod; 55. Gear; 56. Adjusting Component; 561. Adjusting Rod; 562. Limiting Shaft; 563. Nut; 564. Limiting Plate; 565. Adjusting Groove; 57. Placement Groove; 58. Ratchet. Detailed Implementation

[0021] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0022] like Figure 1-3 As shown, this utility model is a testing device for electrostatic chuck processing; it includes: a base 1, a plurality of supports 2 fixedly connected to the top surface of the base 1, a top plate 3 fixedly connected between the top surfaces of the four supports 2, a testing component 4 with testing function fixedly arranged on the bottom surface of the top plate 3, and a limiting component 5 with limiting function arranged on the inner side of the base 1.

[0023] Test component 4 includes an electric telescopic rod 41 disposed on the bottom surface of top plate 3. The output end of the electric telescopic rod 41 is fixedly connected to a first connecting plate 42. Four scale shafts 43 are slidably connected to the inner side of the first connecting plate 42. A second connecting plate 44 is fixedly connected between the bottom surfaces of the scale shafts 43. A pressure plate 45 is connected to the bottom surface of the second connecting plate 44. A first threaded rod 46 is fixedly connected to the top surface of the second connecting plate 44. A first spring 47 is slidably connected to the outer wall of the first threaded rod 46. The upper and lower ends of the first spring 47 are fixedly connected to the first connecting plate 42 or the second connecting plate 44, respectively.

[0024] After the electrostatic chuck is processed, it needs to be tested. The electrostatic chuck is placed on the surface of the limiting component 5, and then the structure of the testing component 4 is activated to test the compressive strength of the electrostatic chuck. The electric telescopic rod 41 drives the second connecting plate 44 and the pressure plate 45 through the first spring 47 to apply pressure to the surface of the electrostatic chuck. The compressive strength of the electrostatic chuck is observed by observing the degree through the first connecting plate 42 on the surface of the scale shaft 43. When it is necessary to test electrostatic chucks of different shapes, the first threaded rod 46 and the second connecting plate 44 need to be separated by rotating the pressure plate 45. Then, the pressure plate 45 of the corresponding model can be replaced to continue the test.

[0025] Preferably, the limiting component 5 includes a placement component 51 disposed on the inner side of the base 1. The outer wall of the placement component 51 is connected to a ratchet 58 by a thread, and the ratchet 58 is rotatably connected to the base 1. A rotating plate 52 is fixedly connected to the outer wall of the ratchet 58. A limiting wheel 53 is fixedly connected to the top surface of the rotating plate 52. A plurality of moving rods 54 are slidably connected to the inner wall of the base 1. A gear 55 is connected to the outer wall of the moving rod 54 by a thread, and the gear 55 meshes with the limiting wheel 53.

[0026] During the pressure application of the electrostatic chuck by the pressure plate 45, the electrostatic chuck causes the placement component 51 to move downwards. The placement component 51 drives the rotating plate 52 to rotate via its surface threads. The rotating plate 52 drives the limiting wheel 53 to rotate. The teeth on the surface of the limiting wheel 53 drive the gear 55 to rotate, causing the gear 55 to drive the moving rod 54 to move inwards via its internal threads, thus limiting the surface of the electrostatic chuck. This ensures that the electrostatic chuck and the placement component 51 remain connected during the upward movement of the pressure plate 45 by the electric telescopic rod 41. The suction force of the electrostatic chuck is tested through the scale exposed by the scale shaft 43 passing through the first connecting plate 42. The mutual cooperation between the structures facilitates the simultaneous testing of the pressure resistance and suction force of electrostatic chucks of different shapes. At the same time, it reduces the occurrence of edge damage to the electrostatic chuck due to mismatch in the shape of the pressure structure during the pressure test, thereby improving the safety of the electrostatic chuck after testing.

[0027] Preferably, the placement component 51 includes a second threaded rod 511 disposed on the inner side of the base 1, a placement plate 512 disposed on the top surface of the second threaded rod 511, a third threaded rod 513 fixedly connected to the bottom surface of the placement plate 512, and the third threaded rod 513 and the second threaded rod 511 are connected by threads, and a placement groove 57 matching the placement plate 512 is opened on the top surface of the base 1.

[0028] By setting the structure of the placement component 51, the third threaded rod 513 and the second threaded rod 511 can be separated by rotating the placement plate 512, thereby connecting the placement plate 512 that matches the shape of the electrostatic chuck, thereby improving the fit between the adjustment component 56 and the electrostatic chuck, thereby improving the tightness of the structural connection and improving the accuracy of the electrostatic chuck test. The placement groove 57 is set to accommodate the electrostatic chuck, which facilitates the storage and placement of the structure.

[0029] Preferably, the limiting wheel 53 includes a connecting ring 531 disposed on the top surface of the rotating plate 52, a plurality of telescopic shafts 533 are fixedly connected to the top surface of the connecting ring 531, a toothed gear 532 is fixedly connected between the top surfaces of the four telescopic shafts 533, a second spring 534 is sleeved on the outer wall of the telescopic shafts 533, and the upper and lower ends of the limiting wheel 53 are fixedly connected to the connecting ring 531 or the toothed gear 532 respectively.

[0030] An adjusting ring 535 is fixedly connected to the outer wall of the gear 532. By setting the structure of the limiting wheel 53, the limiting of the electrostatic chuck by the adjusting component 56 can be terminated after the device has completed the test. By pressing down the adjusting ring 535, the adjusting ring 535 drives the gear 532 to move downward and compress the second spring 534, so that the telescopic shaft 533 and the second spring 534 retract, thereby separating the gear 532 from the gear 55, releasing the limiting of the electrostatic chuck by the adjusting component 56, and thus allowing the electrostatic chuck to be replaced. The structure and operation are simple, and the test can be carried out quickly, thereby improving the efficiency of the device in testing electrostatic chucks.

[0031] Preferably, the adjustment assembly 56 includes an adjustment rod 561 disposed on the inner side of the moving rod 54. A limiting shaft 562 is fixedly connected to the side of the adjustment rod 561 near the placement plate 512. A nut 563 is fixedly connected to the outer wall of the limiting shaft 562 by threads. A limiting plate 564 is fixedly connected to the side of the adjustment rod 561 near the second threaded rod 511. An adjustment groove 565 matching the limiting shaft 562 is opened on the side of the moving rod 54 near the placement plate 512. Stripes are provided on one side between the moving rod 54 and the adjustment rod 561.

[0032] When testing electrostatic chucks of different shapes, the structure of the adjustment component 56 needs to be changed to adapt to the new shape of the electrostatic chuck. This can be achieved by loosening the nut 563 to reduce the connection between the adjustment rod 561 and the moving rod 54, thereby replacing the limiting plate 564. For simple dimensional changes, the nut 563 on the surface of the limiting shaft 562 can be loosened to loosen the connection between the adjustment rod 561 and the moving rod 54. Then, the adjustment rod 561 can be pulled inside the moving rod 54 to match the size of the adjustment component 56 with the size of the electrostatic chuck, thereby improving the applicability of the device. The adjustment groove 565 facilitates the sliding adjustment of the adjustment rod 561, and the stripes between the moving rod 54 and the adjustment rod 561 improve the stability of the limiting plate 564 when limiting the electrostatic chuck.

[0033] The work process is as follows:

[0034] After the electrostatic chuck is processed, it needs to be tested. The electrostatic chuck is placed on the surface of the limiting component 5, and then the structure of the testing component 4 is activated to test the compressive strength of the electrostatic chuck. The electric telescopic rod 41 drives the second connecting plate 44 and the pressure plate 45 through the first spring 47 to apply pressure to the surface of the electrostatic chuck. The compressive strength of the electrostatic chuck is observed by observing the degree through the first connecting plate 42 on the surface of the scale shaft 43. When it is necessary to test electrostatic chucks of different shapes, the pressure plate 45 needs to be rotated to separate the first threaded rod 46 from the second connecting plate 44. Then, the pressure plate 45 of the corresponding model can be replaced to continue the test. Through the cooperation between the structures, the pressure plate 45 can be quickly replaced, which facilitates the testing of electrostatic chucks of different shapes and improves the applicability of this device.

[0035] It is understood that the above embodiments are merely exemplary implementations used to illustrate the principles of this utility model, and the utility model is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of this utility model, and these modifications and improvements are also considered to be within the protection scope of this utility model.

Claims

1. A testing device for electrostatic chuck processing, characterized in that, include: The base (1) has multiple brackets (2) fixedly connected to its top surface. A top plate (3) is fixedly connected between the top surfaces of the four brackets (2). A test component (4) with testing function is fixedly installed on the bottom surface of the top plate (3). A limit component (5) with limit function is installed on the inner side of the base (1). The test assembly (4) includes an electric telescopic rod (41) disposed on the bottom surface of the top plate (3). The output end of the electric telescopic rod (41) is fixedly connected to a first connecting plate (42). Four scale shafts (43) are slidably connected to the inner side of the first connecting plate (42). A second connecting plate (44) is fixedly connected between the bottom surfaces of the scale shafts (43). A pressure plate (45) is connected to the bottom surface of the second connecting plate (44). A first threaded rod (46) is fixedly connected to the top surface of the second connecting plate (44). A first spring (47) is slidably connected to the outer wall of the first threaded rod (46). The upper and lower ends of the first spring (47) are fixedly connected to the first connecting plate (42) or the second connecting plate (44) respectively.

2. The testing device for electrostatic chuck processing as described in claim 1, characterized in that: The limiting component (5) includes a placement component (51) disposed on the inner side of the base (1). The outer wall of the placement component (51) is connected to a ratchet (58) by a thread, and the ratchet (58) is rotatably connected to the base (1). The outer wall of the ratchet (58) is fixedly connected to a rotating plate (52), and the top surface of the rotating plate (52) is fixedly connected to a limiting wheel (53). The inner wall of the base (1) is slidably connected to a plurality of moving rods (54), and the outer wall of the moving rods (54) is connected to a gear (55) by a thread, and the gear (55) meshes with the limiting wheel (53).

3. The testing device for electrostatic chuck processing as described in claim 1, characterized in that: The placement assembly (51) includes a second threaded rod (511) disposed on the inner side of the base (1), a placement plate (512) disposed on the top surface of the second threaded rod (511), a third threaded rod (513) fixedly connected to the bottom surface of the placement plate (512), and the third threaded rod (513) and the second threaded rod (511) are connected by threads. The top surface of the base (1) is provided with a placement groove (57) that matches the placement plate (512).

4. The testing device for electrostatic chuck processing as described in claim 2, characterized in that: The limiting wheel (53) includes a connecting ring (531) disposed on the top surface of the rotating plate (52). Multiple telescopic shafts (533) are fixedly connected to the top surface of the connecting ring (531). A toothed gear (532) is fixedly connected between the top surfaces of the four telescopic shafts (533). A second spring (534) is sleeved on the outer wall of the telescopic shaft (533). The upper and lower ends of the limiting wheel (53) are fixedly connected to the connecting ring (531) or the toothed gear (532) respectively. An adjusting ring (535) is fixedly connected to the outer wall of the toothed gear (532).

5. The testing device for electrostatic chuck processing as described in claim 3, characterized in that: The adjustment assembly (56) includes an adjustment rod (561) disposed on the inner side of the moving rod (54). The adjustment rod (561) is fixedly connected to a limiting shaft (562) on the side near the placement plate (512). A nut (563) is fixedly connected to the outer wall of the limiting shaft (562) by a thread. A limiting plate (564) is fixedly connected to the side of the adjustment rod (561) near the second threaded rod (511).

6. The testing device for electrostatic chuck processing as described in claim 5, characterized in that: The moving rod (54) has an adjustment groove (565) that matches the limiting shaft (562) on the side near the placement plate (512), and stripes are provided on one side between the moving rod (54) and the adjustment rod (561).

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