Spray head cleaning detection profiling jig

Abstract

The utility model relates to tooling jig technical field discloses a kind of shower head cleaning detection profiling fixture, including shower seat and shower plate, shower seat includes pedestal and cylinder being connected with each other, and through the air inlet channel being provided on shower seat;Shower plate is connected in the side of pedestal away from cylinder, and shower plate has the accommodating cavity opening towards pedestal, and shower plate is also provided with several showering holes being communicated with accommodating cavity;Wherein, shower plate and pedestal are detachably connected, when shower plate and pedestal are connected, air inlet channel is communicated with accommodating cavity;The utility model can be after cleaning to multiple shower head and shower head cleaning detection profiling fixture, by separating shower head cleaning detection profiling fixture and directly observing the cleaning condition of accommodating cavity, to improve the cleaning detection accuracy of shower head.

Description

Technical Field

[0001] This utility model relates to the field of tooling and fixture technology, specifically to a conformal fixture for cleaning and testing spray heads. Background Technology

[0002] In thin film deposition equipment, the spray head (also known as a gas dispersion disk) is the core component that sprays deposition gas into the thin film deposition chamber. Its core performance indicators are the uniformity and purity of the sprayed gas, and the presence of impurity particles (micron-sized) inside the spray head has a critical impact on these indicators. Therefore, the spray head needs to be cleaned after a certain period of use to ensure its performance.

[0003] Currently, after the spray head is cleaned, the inside of the spray head needs to be inspected to determine whether the cleaning is thorough. In related technologies, the cleaning of spray heads is carried out in batches using a standardized cleaning production line. After multiple spray heads have been cleaned, one spray head can be randomly inspected to make a preliminary judgment on the cleaning status of the other products.

[0004] Conventional testing involves LPC (Liquid Particle Counting), which involves passing high-purity liquid into the cavity of the spray head and then detecting the particulate matter in the liquid after it flows out. This method is cumbersome and costly. Furthermore, because the spray head cannot be easily disassembled, staff cannot directly observe its internal structure, resulting in a single testing indicator and an incomplete assessment. Utility Model Content

[0005] In view of this, the present invention provides a spray head cleaning and testing conformal fixture to solve the problem that since the spray head cannot be easily disassembled, the cleanliness of the spray head can only be judged by detecting the particulate matter in the high-purity liquid flowing out of its cavity, resulting in a single detection index and an incomplete judgment result.

[0006] In a first aspect, this utility model provides a spray head cleaning and testing conformal fixture, comprising: A spray base includes a base and a cylinder that are connected to each other, and the spray base has a through air intake channel. A spray plate is connected to the base on the side away from the cylinder. The spray plate has a receiving cavity that opens toward the base. The spray plate also has a plurality of spray holes that communicate with the receiving cavity. The spray plate is detachably connected to the base, and when the spray plate is connected to the base, the air inlet channel is connected to the receiving cavity.

[0007] Beneficial effects: With the detachable spray seat and spray plate, the spray head cleaning and inspection mold can be cleaned simultaneously when cleaning multiple spray heads. After cleaning, the condition of the cavity can be directly observed by detecting the particulate matter in the cleaning medium and by disassembling the spray head cleaning and inspection mold. In this way, the internal condition of the product can be judged by cleaning the mold while cleaning the product, thereby improving the accuracy and comprehensiveness of the spray head cleaning and inspection.

[0008] In one optional embodiment, the base is provided with a plurality of first connecting portions, and the spray plate is provided with a plurality of second connecting portions; It also includes several locking elements, which are adapted to pass sequentially through a first connecting portion and a second connecting portion to make the spray plate and the base threadedly connected.

[0009] Beneficial effects: Through a plurality of first connecting parts on the base, a plurality of second connecting parts on the spray plate, and a plurality of locking members disposed between the base and the spray plate, the first connecting parts and the second connecting parts in this embodiment are respectively first connecting holes and second connecting holes, and the locking members in this embodiment are locking bolts. When connecting the spray base and the spray plate, firstly, any first connecting part is aligned with a second connecting part, and then the locking members are passed through the first connecting parts and the second connecting parts in sequence. In this way, the spray base and the spray plate can be threadedly connected, and the connection and disassembly of the spray base and the spray plate can be realized.

[0010] In an alternative embodiment, a seal is further included, the seal being disposed between the spray plate and the base to seal the gap between the spray plate and the base.

[0011] Beneficial effects: By using a sealing element, which is a sealing ring in this embodiment, between the spray plate and the base, the sealing element can be placed between the spray plate and the base when connecting the spray plate and the base. In this way, the gap between the spray plate and the base can be sealed by the sealing element, so that the cleaning medium will not leak when it enters the receiving cavity through the air inlet channel. This makes the profiling fixture closer to the actual product, thus making the test results more meaningful.

[0012] In one optional embodiment, a plurality of support members are provided on the side of the spray plate facing the base. The support members are spaced apart on the spray plate and are arranged to avoid the spray holes. The end of any of the support members abuts against the base.

[0013] Beneficial effects: By setting several support members on the spray plate, which are support columns in this embodiment, all the support members are specifically set on the side of the spray plate facing the base. All the support members are evenly spaced on the spray plate. In this way, when the cleaning medium is introduced into the receiving cavity, all the support members can realize the diversion of the cleaning medium, so that the cleaning medium can cover the entire receiving cavity more quickly. Moreover, each support member is set to avoid spray holes to avoid blocking the spray holes. When the spray plate and the base are connected, the end of each support member can abut against the base to support the bottom wall of the receiving cavity and prevent the bottom wall of the receiving cavity from deforming and being damaged due to external forces.

[0014] In one alternative embodiment, any of the support members is a metal component; it also includes a magnetic suction element disposed on the side of the base facing the spray plate, and an end of any of the support members is adapted to abut against the magnetic suction element.

[0015] Beneficial effects: By setting the support component to be a metal component and the magnetic component set on the base, the magnetic component in this embodiment is a magnetic plate, and the magnetic component is specifically set on the side of the base facing the spray plate. In this way, when the spray plate and the base are connected, the end of the support component can abut against the magnetic component. Since the support component is a metal component, the connection between the end of the support component and the magnetic component is more reliable. Moreover, when the product specifications change, that is, when the specifications or quantity of the support component changes, the support component can be replaced or moved to adapt to different product specifications, which helps to improve the adaptability of the product.

[0016] In one alternative embodiment, the base has a mounting portion on the side facing the spray plate, and the magnetic suction member is disposed in the mounting portion.

[0017] Beneficial effects: By opening a mounting part on the base, which in this embodiment is a mounting groove, and specifically opening the mounting part on the side of the base facing the spray plate, the magnetic suction component can be installed in the mounting part, thereby providing the installation stability of the magnetic suction component.

[0018] In one optional embodiment, the base has a diffuser opening on the side facing the spray plate, and the diffuser opening is connected to the air intake channel.

[0019] Beneficial effects: Through the diffuser opening on the base, specifically on the side of the base facing the spray plate, when the cleaning medium flows into the receiving cavity through the air inlet channel, the cleaning medium can diffuse through the diffuser opening to accelerate the rate at which the cleaning medium covers the bottom surface of the receiving cavity.

[0020] In one optional embodiment, the spray plate is provided with a positioning member, which is positioned relative to the diffuser; it also includes a dispersing member, which has a positioning part, and the dispersing member is adapted to be connected to the positioning member through the positioning part.

[0021] Beneficial effects: By setting a positioning member on the spray plate and a dispersing member on the spray plate, the positioning member and the dispersing member in this embodiment respectively position the column and the dispersing plate. The positioning member is set relative to the diffuser, and the dispersing member is provided with a positioning part, which is a positioning hole in this embodiment. In this way, the dispersing member can be connected to the positioning member through the positioning part, so that the dispersing member can be installed on the spray plate. The dispersing member can disperse the cleaning medium falling on it through the diffuser to flow in all directions.

[0022] In one optional embodiment, the cylinder and the base are integrally formed, and the axis of the cylinder coincides with the axis of the base.

[0023] Beneficial effects: By setting the cylinder and base as an integral molding structure, it is convenient to mass-produce the cylinder and base. The axis of the cylinder coincides with the axis of the base, so that when the cleaning medium flows into the receiving cavity through the air inlet channel, the cleaning medium can flow to all sides to completely cover the bottom surface of the receiving cavity.

[0024] In one alternative embodiment, the cylinder is further provided with a receiving portion, which is suitable for placing a heating element.

[0025] Beneficial effects: By providing a receiving portion on the cylinder, which in this embodiment is a receiving groove, the heating element can be placed inside the receiving portion, thereby allowing the heating element to heat the cleaning medium in the air intake channel to meet the optimal cleaning temperature for different cleaning media. Attached Figure Description

[0026] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0027] Figure 1 This is a cross-sectional schematic diagram of a spray head cleaning and testing conformal fixture according to an embodiment of the present utility model; Figure 2 This is a schematic diagram of the structure of a spray head cleaning and testing conformal fixture according to an embodiment of the present utility model; Figure 3This is an exploded view of a spray head cleaning and testing conformal fixture according to an embodiment of the present invention.

[0028] Explanation of reference numerals in the attached figures: 1-Sprayer base; 11-Base; 111-First connecting part; 112-Diffuser port; 113-Mounting part; 12-Cylinder body; 121-Air inlet channel; 122-Receiving part; 2-Spray plate; 21-Spray hole; 22-Second connecting part; 23-Receiving cavity; 3-Locking component; 4-Sealing component; 5-Supporting component; 6-Magnetic component; 7-Positioning component; 8-Dispersing component. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0030] The following is combined Figures 1 to 3 The following describes embodiments of the present invention.

[0031] According to embodiments of this utility model, on one hand, a spray head cleaning and testing conformal fixture is provided, such as... Figures 1 to 3 As shown, the system includes a spray base 1 and a spray plate 2. The spray base 1 includes a base 11 and a cylinder 12 connected to each other. The spray base 1 has a through air intake channel 121. The spray plate 2 is connected to the side of the base 11 away from the cylinder 12. The spray plate 2 has a receiving cavity 23 that opens toward the base 11. The spray plate 2 also has a plurality of spray holes 21 that communicate with the receiving cavity 23. The spray plate 2 is detachably connected to the base 11. When the spray plate 2 is connected to the base 11, the air intake channel 121 communicates with the receiving cavity 23.

[0032] The above-described spray head cleaning and inspection conformal fixture is connected to a spray seat 1 and a spray plate 2. The spray seat 1 includes a base 11 and a cylinder 12. The cylinder 12 is mounted on the base 11 and has a through air inlet channel 121. The spray plate 2 has a receiving cavity 23 that opens toward the base 11 and has several spray holes 21 that communicate with the receiving cavity 23. The base 11 and the spray plate 2 are detachably connected to allow for connection and disassembly. When the spray seat 1 and the spray plate 2 are connected, the receiving cavity 23 is located between the spray seat 1 and the spray plate 2, and the air inlet channel 121 communicates with the receiving cavity 23.

[0033] Specifically, when the spray base 1 and the spray plate 2 are connected, the cleaning medium can be introduced into the receiving cavity 23 through the air inlet channel 121, so that the cleaning medium can clean the inner wall of the receiving cavity 23. After cleaning the receiving cavity 23, the cleaning medium can flow out through the spray hole 21. When the cleaning medium passes through the air inlet channel 121 and the spray hole 21, the cleaning medium can also clean the air inlet channel 121 and the spray hole 21. When the cleaning medium flows out, the cleaning status can be judged by detecting the particulate matter in the cleaning medium. In addition, the cleaning status in the receiving cavity 23 can be directly observed by disassembling the spray base 1 and the spray plate 2, thereby improving the accuracy of cleaning detection.

[0034] It should be noted that the structure of the spray head cleaning and testing profiling fixture provided in this embodiment is the same as that of a conventional spray head. When cleaning multiple spray heads, the spray head cleaning and testing profiling fixture can be cleaned simultaneously. After cleaning, since the spray seat 1 and spray plate 2 of the spray head cleaning and testing profiling fixture can be disassembled, the condition of particulate matter in the cleaning medium can be detected, and the condition of the receiving cavity 23 can be directly observed by disassembling the spray head cleaning and testing profiling fixture. In this way, the cleaning and testing accuracy of the spray head can be improved by using the spray head cleaning and testing profiling fixture.

[0035] In addition, the material of the spray head cleaning and testing profiling fixture provided in this embodiment is the same as that of conventional spray heads. Since the cleaning medium achieves cleaning through its own chemical properties, some of the cleaning medium may corrode the spray head. However, the cleaning medium cleans the inside of the spray head, and the spray head cannot be easily disassembled. Therefore, after cleaning with the cleaning medium, the spray head cleaning and testing profiling fixture can be disassembled. In this way, the condition of the receiving cavity 23 can be directly observed, and it can be intuitively understood whether the cleaning medium has a corrosive effect.

[0036] In summary, by using the detachably connected spray seat 1 and spray plate 2, the spray head cleaning and inspection mold can be cleaned simultaneously when cleaning multiple spray heads. After cleaning, the condition of particulate matter in the cleaning medium can be detected, and the condition of the receiving cavity 23 can be directly observed by disassembling the spray head cleaning and inspection mold. Thus, the internal condition of the product can be judged by cleaning the mold while cleaning the product, thereby improving the accuracy and comprehensiveness of the spray head cleaning and inspection.

[0037] In one embodiment, such as Figures 1 to 3 As shown, the base 11 has a plurality of first connecting parts 111, and the spray plate 2 has a plurality of second connecting parts 22; it also includes a plurality of locking members 3, which are adapted to pass through a first connecting part 111 and a second connecting part 22 in sequence so that the spray plate 2 and the base 11 are threadedly connected.

[0038] The above-described spray head cleaning and inspection conformal fixture, through a plurality of first connecting parts 111 formed on the base 11, a plurality of second connecting parts 22 formed on the spray plate 2, and a plurality of locking members 3 disposed between the base 11 and the spray plate 2, wherein the first connecting parts 111 and the second connecting parts 22 are respectively first connecting holes and second connecting holes in this embodiment, and the locking members 3 are locking bolts in this embodiment, when connecting the spray seat 1 and the spray plate 2, firstly, any first connecting part 111 is aligned with a second connecting part 22, and then the locking members 3 are sequentially passed through the first connecting parts 111 and the second connecting parts 22, thereby threading the spray seat 1 and the spray plate 2, and realizing the connection and disassembly of the spray seat 1 and the spray plate 2.

[0039] In one embodiment, such as Figure 1 As shown, it also includes a seal 4, which is disposed between the spray plate 2 and the base 11 to seal the gap between the spray plate 2 and the base 11. Specifically, a sealing groove is provided on the side of the spray plate 2 facing the base 11, and the seal 4 is embedded in the sealing groove. In some optional examples, the seal 4 is a sealing ring made of perfluoroether rubber.

[0040] The above-described spray head cleaning and testing conformal fixture, through the sealing element 4 set between the spray plate 2 and the base 11, can seal the gap between the spray plate 2 and the base 11 when connecting the spray plate 2 and the base 11. In this way, the sealing element 4 can seal the gap between the spray plate 2 and the base 11, so that when the cleaning medium is introduced into the receiving cavity 23 through the air inlet channel 121, the cleaning medium will not leak. This makes the conformal fixture closer to the actual product, thus making the test results more meaningful.

[0041] In one embodiment, such as Figure 1 and Figure 3 As shown, a number of support members 5 are provided on the side of the spray plate 2 facing the base 11. The support members 5 are spaced apart on the spray plate 2 and are arranged to avoid the spray holes 21. When the spray plate 2 is connected to the base 11, the end of any support member 5 abuts against the base 11.

[0042] The above-described spray head cleaning and inspection conformal fixture uses several support members 5 on the spray plate 2. In this embodiment, the support members 5 are support columns. All the support members 5 are specifically located on the side of the spray plate 2 facing the base 11. All the support members 5 are evenly spaced on the spray plate 2. In this way, when the cleaning medium is introduced into the receiving cavity 23, all the support members 5 can divert the cleaning medium, so that the cleaning medium can cover the entire receiving cavity 23 more quickly. Each support member 5 is set to avoid the spray hole 21 to avoid blocking the spray hole 21. When the spray plate 2 and the base 11 are connected, the end of each support member 5 can abut against the base 11 to support the bottom wall of the receiving cavity 23 and prevent the bottom wall of the receiving cavity 23 from deforming and being damaged due to external force.

[0043] In one embodiment, such as Figure 1 As shown, any one of the support members 5 is a metal part; it also includes a magnetic suction member 6, which is disposed on the side of the base 11 facing the spray plate 2, and the end of any one of the support members 5 is adapted to abut against the magnetic suction member 6.

[0044] The above-described spray head cleaning and inspection conformal fixture, by setting the support member 5 to be a metal part and the magnetic suction member 6 set on the base 11, in this embodiment the magnetic suction member 6 is a magnetic suction plate, specifically set on the side of the base 11 facing the spray plate 2. In this way, when the spray plate 2 and the base 11 are connected, the end of the support member 5 can abut against the magnetic suction member 6. Since the support member 5 is a metal part, the connection between the end of the support member 5 and the magnetic suction member 6 is more reliable. Moreover, when the product specifications change, that is, when the specifications or quantity of the support members change, the position of the support members can be replaced or moved to adapt to different specifications of products, which helps to improve the adaptability of products. This allows for better simulation of products with different numbers and specifications of support members 5. With appropriate adjustments, one set of fixtures can be used to adapt to the inspection of multiple models of products, thereby reducing costs.

[0045] In one embodiment, such as Figure 1 As shown, the base 11 has a mounting part 113 on the side facing the spray plate 2, and the magnetic suction member 6 is disposed in the mounting part 113.

[0046] The above-described spray head cleaning and inspection conformal fixture, through the mounting part 113 opened on the base 11, which in this embodiment is a mounting groove, specifically opened on the side of the base 11 facing the spray plate 2, so that the magnetic suction member 6 can be installed in the mounting part 113, thereby providing the installation stability of the magnetic suction member 6.

[0047] In one embodiment, such as Figure 1 As shown, a diffuser 112 is provided on the side of the base 11 facing the spray plate 2, and the diffuser 112 is connected to the air intake channel 121.

[0048] The above-described spray head cleaning and testing profilograph fixture, through the diffuser 112 opened on the base 11, can better simulate the actual spray head product. In addition, the diffuser 112 is specifically opened on the side of the base 11 facing the spray plate 2. When the cleaning medium flows into the receiving cavity 23 through the air inlet channel 121, the cleaning medium can diffuse through the diffuser 112 to accelerate the rate at which the cleaning medium covers the bottom surface of the receiving cavity 23.

[0049] In one embodiment, such as Figure 1 and Figure 3 As shown, the spray plate 2 is provided with a positioning member 7, which is opposite to the diffuser 112; it also includes a dispersing member 8, which has a positioning part, and the dispersing member 8 is adapted to be connected to the positioning member 7 through the positioning part.

[0050] The above-described spray head cleaning and testing conformal fixture uses a positioning member 7 and a dispersing member 8 on the spray plate 2. In this embodiment, the positioning member 7 and the dispersing member 8 are respectively a positioning column and a dispersing plate. The positioning member 7 is positioned relative to the diffuser 112, and the dispersing member 8 has a positioning part, which is a positioning hole in this embodiment. In this way, the dispersing member 8 can be connected to the positioning member 7 through the positioning part, so that the dispersing member 8 can be installed on the spray plate 2. The dispersing member 8 can disperse the cleaning medium falling on it through the diffuser 112 to flow in all directions.

[0051] In one embodiment, such as Figures 1 to 3 As shown, the cylinder 12 and the base 11 are integrally formed structures, and the axis of the cylinder 12 coincides with the axis of the base 11.

[0052] The above-described spray head cleaning and inspection conformal fixture, by setting the cylinder 12 and the base 11 as an integrally formed structure, can facilitate the mass production of the cylinder 12 and the base 11. The axis of the cylinder 12 coincides with the axis of the base 11, so that when the cleaning medium flows into the receiving cavity through the air inlet channel 121, the cleaning medium can flow to all sides to completely cover the bottom surface of the receiving cavity.

[0053] In one embodiment, such as Figure 1 and Figure 2 As shown, the cylinder 12 is also provided with a receiving part 122, which is suitable for placing the heating element.

[0054] The above-described spray head cleaning and testing conformal fixture, through the receiving part 122 opened on the cylinder 12 (in this embodiment, the receiving part 122 is a receiving groove), allows the heating element to be placed in the receiving part 122, thereby allowing the heating element to heat the cleaning medium in the air inlet channel 121 to meet the optimal cleaning temperature of different cleaning media.

[0055] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A spray head cleaning and testing conformal fixture, characterized in that, include: The spray base (1) includes a base (11) and a cylinder (12) connected to each other, and the spray base (1) has a through air inlet channel (121); A spray plate (2) is connected to the side of the base (11) away from the cylinder (12). The spray plate (2) has a receiving cavity (23) opening toward the base (11). The spray plate (2) also has a plurality of spray holes (21) communicating with the receiving cavity (23). The spray plate (2) is detachably connected to the base (11), and when the spray plate (2) is connected to the base (11), the air inlet channel (121) is connected to the accommodating cavity (23).

2. The spray head cleaning and testing conformal fixture according to claim 1, characterized in that, The base (11) is provided with a plurality of first connecting parts (111), and the spray plate (2) is provided with a plurality of second connecting parts (22); It also includes several locking elements (3), which pass through a first connecting part (111) and a second connecting part (22) in sequence to make the spray plate (2) and the base (11) threadedly connected.

3. The spray head cleaning and testing conformal fixture according to claim 2, characterized in that, It also includes a seal (4) disposed between the spray plate (2) and the base (11) to seal the gap between the spray plate (2) and the base (11).

4. The spray head cleaning and testing conformal fixture according to any one of claims 1-3, characterized in that, The spray plate (2) is provided with a plurality of support members (5) on the side facing the base (11). The support members (5) are spaced apart on the spray plate (2). The support members (5) are arranged to avoid the spray holes (21). The end of any support member (5) abuts against the base (11).

5. The spray head cleaning and testing conformal fixture according to claim 4, characterized in that, Each of the support members (5) is a metal part; it also includes a magnetic suction member (6), which is disposed on the side of the base (11) facing the spray plate (2), and the end of each of the support members (5) is adapted to abut against the magnetic suction member (6).

6. The spray head cleaning and testing conformal fixture according to claim 5, characterized in that, The base (11) has a mounting part (113) on the side facing the spray plate (2), and the magnetic suction member (6) is disposed in the mounting part (113).

7. The spray head cleaning and testing conformal fixture according to claim 6, characterized in that, The base (11) has a diffuser (112) on the side facing the spray plate (2), and the diffuser (112) is connected to the air intake channel (121).

8. The spray head cleaning and testing conformal fixture according to claim 7, characterized in that, The spray plate (2) is provided with a positioning member (7), which is positioned relative to the diffuser (112); it also includes a dispersing member (8), which has a positioning part, and the dispersing member (8) is adapted to be connected to the positioning member (7) through the positioning part.

9. The spray head cleaning and testing conformal fixture according to claim 1, characterized in that, The cylinder (12) and the base (11) are integrally formed, and the axis of the cylinder (12) coincides with the axis of the base (11).

10. The spray head cleaning and testing conformal fixture according to claim 9, characterized in that, The cylinder (12) is also provided with a receiving part (122), which is suitable for placing a heating element.

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