Chip vision inspection device with angle adjustment function

Abstract

The utility model discloses a chip visual inspection device of angle adjusting function, including first fixed frame, still including the slide platform subassembly, rotation subassembly and reverse synchronous illumination subassembly of installation on first fixed frame, the tilt adjusting subassembly of installation on rotation subassembly, the first drive subassembly and spacing component of installation on tilt adjusting subassembly, the vertical displacement component of installation on first drive subassembly output and the detection component of installation on vertical displacement component. The utility model discloses through rotation subassembly rotation, second gear synchronous rotation, through gear meshing makes fifth gear reverse rotation, and then drives the telescopic link and LED lamp strip to rotate to the angle opposite with detection component tilt direction, through mechanical linkage realizes the light source direction and the dynamic reverse synchronous of detection component tilt direction, thereby keeps the light source incidence angle constant, eliminates the chip surface illumination uneven problem caused by detection component tilt.

Description

Technical Field

[0001] This utility model relates to the field of chip inspection, specifically to a chip vision inspection device with angle adjustment function. Background Technology

[0002] In the fields of semiconductor manufacturing and electronic product testing, multi-angle, high-precision testing of chips is a crucial step in ensuring product quality and reliability. Traditional chip testing methods often rely on manual operation, which is inefficient and easily affected by human factors. With the continuous development of automation and intelligent technologies, automated testing is being used more and more widely in the field of chip testing.

[0003] Most common chip vision inspection devices currently use fixed light source configurations. When the inspection component is perpendicular to the chip surface, it can provide relatively uniform illumination. However, in actual inspection, due to the irregular shape of the chip and the variety of inspection requirements, the inspection component often needs to be adjusted in tilt angle. When the inspection component is tilted, the fixed light source configuration will cause the incident angle of the light source to change significantly and deviate from the optimal range, resulting in uneven illumination on the chip surface. This can lead to some areas reflecting light and obscuring features, while other areas are dark and lose details. This seriously affects the image acquisition and processing of the vision inspection system, reduces the accuracy and reliability of defect identification, and may even cause false positives or missed detections, which is detrimental to chip quality control. Utility Model Content

[0004] In order to overcome the shortcomings of the existing technology, the purpose of this utility model is to provide a chip visual inspection device with angle adjustment function. Through mechanical linkage, the direction of the light source and the tilt direction of the detection component are dynamically reversed and synchronized, thereby maintaining a constant incident angle of the light source and eliminating the problem of uneven illumination on the chip surface caused by the tilt of the detection component.

[0005] The objective of this utility model is achieved through the following technical solution: The chip vision inspection device with angle adjustment function includes a first fixed frame; it also includes a slide assembly, a rotation assembly and a reverse synchronous illumination assembly mounted on the first fixed frame, a tilt adjustment assembly mounted on the rotation assembly, a first drive assembly and a limiting assembly mounted on the tilt adjustment assembly, a vertical displacement assembly mounted on the output end of the first drive assembly, and a detection assembly mounted on the vertical displacement assembly. The first drive assembly and the limiting assembly cooperate to drive the vertical displacement assembly to perform vertical displacement. The reverse synchronous irradiation assembly includes a post mounted on a first fixed frame. A second gear, a third gear, a fourth gear, and a fifth gear are rotatably connected to the post and mesh in sequence. The second gear is equipped with a gear mounting bracket connected to the rotating assembly, and the fifth gear is equipped with a telescopic rod. When the rotating assembly rotates, the telescopic rod rotates in the opposite direction to the rotation of the rotating assembly through the indirect meshing of the gears.

[0006] In one optional embodiment, the slide assembly includes a support plate mounted on a first fixed frame, a limiting block mounted on the support plate, a first slide slidably connected to the limiting block, a first rack mounted on the first slide, and a slide gear rotatably connected to a first knob. The first rack meshes with the slide gear, and when the first knob is rotated, it drives the first slide away from or towards the first fixed frame.

[0007] In one optional embodiment, the rotating assembly includes a rotating fixed frame rotatably connected to a first fixed frame, an insertion hole formed on the rotating fixed frame, a fixed column mounted on the rotating fixed frame, a sleeve slidably connected to the fixed column, and a fastening bolt threaded onto the sleeve, wherein the insertion hole and the gear mounting bracket are compatible.

[0008] In one optional embodiment, the tilt adjustment assembly includes a hinge frame mounted on a sleeve, a fixed plate mounted on the hinge frame, an adjusting bolt threaded onto the fixed plate, and a first U-shaped mounting bracket rotatably connected to the hinge frame. The adjusting bolt is used to drive the first U-shaped mounting bracket to rotate around the hinge frame.

[0009] In one optional embodiment, the first drive assembly includes two second knobs rotatably connected to the first U-shaped mounting bracket, two rotary dampers mounted on the first U-shaped mounting bracket, and a sixth gear mounted on the second knobs. The rotary dampers are disposed on the second knobs. The limiting assembly includes a second U-shaped mounting bracket mounted on the first U-shaped mounting bracket, two first limiting grooves formed on the second U-shaped mounting bracket, and two limiting frames mounted on the second U-shaped mounting bracket.

[0010] In one optional embodiment, the vertical displacement component includes a second rack slidably disposed on a limiting frame and a second slide disposed on a second U-shaped mounting bracket. The two second racks pass through the first limiting groove and are connected to each other with the second slide. A sixth gear meshes with the corresponding second rack. The tooth grooves on the two second racks are of different sizes. The rotation of the sixth gear drives the second rack to perform vertical displacement.

[0011] In one optional embodiment, the detection assembly includes a fixing ring mounted on a second slide, a zoom lens mounted on the fixing ring, a camera mounted on the zoom lens, and a light ring mounted on the zoom lens.

[0012] In one alternative embodiment, the reverse synchronous illumination assembly further includes a rotating frame mounted on a telescopic rod and an LED light strip mounted on the rotating frame.

[0013] Compared with the prior art, the beneficial effects of this utility model are as follows: 1. When the rotating component rotates, the second gear rotates synchronously, and the fifth gear rotates in the opposite direction through gear meshing. This drives the telescopic rod and LED light strip to rotate at an angle opposite to the tilt direction of the detection component. Through mechanical linkage, the direction of the light source and the tilt direction of the detection component are dynamically reversed and synchronized, thereby maintaining a constant incident angle of the light source and eliminating the problem of uneven illumination on the chip surface caused by the tilt of the detection component.

[0014] 2. The sliding stage assembly allows for quick and accurate adjustment of the chip position, reducing the time spent on repeated adjustments due to poor chip placement. At the same time, the multi-angle adjustment function allows the detection assembly to detect the chip from a more suitable angle, avoiding repeated detections caused by detection perspective issues, thereby improving overall detection efficiency.

[0015] 3. Through the combination of various adjustment components, this device can adapt to the chip detection needs of different sizes, shapes and placement angles. Whether it is a simple planar chip or a three-dimensional chip with a complex structure, it can achieve effective detection through flexible adjustment, which greatly improves the applicability of the device in different detection scenarios. Attached Figure Description

[0016] Figure 1 A three-dimensional structural diagram of a chip-based visual inspection device with angle adjustment function; Figure 2 A three-dimensional structural diagram of the slide assembly of a chip vision inspection device with angle adjustment function; Figure 3 A three-dimensional structural diagram of the detection component of a chip vision inspection device with angle adjustment function; Figure 4 A chip vision inspection device with angle adjustment function Figure 3 A magnified three-dimensional structural diagram of point A; Figure 5 A three-dimensional structural diagram of the reverse synchronous illumination component of a chip vision inspection device with angle adjustment function; Figure 6 A three-dimensional structural diagram of the first drive component and the vertical displacement component of a chip vision inspection device with angle adjustment function.

[0017] In the diagram: 1. First fixed frame; 2. Support plate; 201. Limiting block; 202. First slide table; 203. First rack; 204. First knob; 205. Slide table gear; 3. Rotating fixed frame; 301. Insertion hole; 302. Fixed column; 303. Clip; 304. Fastening bolt; 4. Hinge frame; 401. Fixed plate; 402. Adjusting bolt; 403. First U-shaped mounting frame; 5. Insertion column; 501. Gear mounting frame; 502. Second gear 503. Wheel; 504. Third gear; 505. Fourth gear; 506. Fifth gear; 507. Telescopic rod; 508. Rotating frame; 509. LED light strip; 6. Second U-shaped mounting bracket; 601. First limiting groove; 602. Limiting frame; 7. Second knob; 701. Rotation damper; 702. Sixth gear; 8. Second slide; 801. Second rack; 802. Fixing ring; 803. Zoom lens; 804. Camera; 805. Light ring. Detailed Implementation

[0018] The present invention will now be further described in conjunction with the accompanying drawings and specific embodiments. It should be noted that, without conflict, the various embodiments or technical features described below can be arbitrarily combined to form new embodiments. Unless otherwise specified, the materials and equipment used in this embodiment are all commercially available. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0019] In the description of this application, it should be understood that the terms "upper," "lower," "front," "rear," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. In the description of this application, "a plurality of" means two or more, unless otherwise precisely specified.

[0020] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "connected," "linked," and "connected" should be interpreted broadly. For example, they can refer to a fixed connection, a connection through an intermediary, the internal connection of two elements, or the interaction between two elements. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0021] The terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or apparatus.

[0022] Please refer to Figures 1-6 This utility model provides an embodiment of a chip vision inspection device with angle adjustment function, including a first fixed frame 1; it also includes a slide assembly, a rotation assembly and a reverse synchronous illumination assembly mounted on the first fixed frame 1, a tilt adjustment assembly mounted on the rotation assembly, a first drive assembly and a limiting assembly mounted on the tilt adjustment assembly, a vertical displacement assembly mounted on the output end of the first drive assembly, and a detection assembly mounted on the vertical displacement assembly. The first drive assembly and the limiting assembly cooperate to drive the vertical displacement assembly to perform vertical displacement. The reverse synchronous irradiation assembly includes a pin 5 mounted on a first fixed frame 1. A second gear 502, a third gear 503, a fourth gear 504, and a fifth gear 505 are rotatably connected to the pin 5 and mesh in sequence. The second gear 502 is equipped with a gear mounting bracket 501 connected to the rotating assembly, and the fifth gear 505 is equipped with a telescopic rod 506. When the rotating assembly rotates, the telescopic rod 506 rotates in the opposite direction to the rotation of the rotating assembly through indirect meshing with the gears.

[0023] In a preferred embodiment of this utility model, when the second gear 502 rotates, it drives the fifth gear 505 to rotate synchronously in the opposite direction through gear meshing, thereby causing the telescopic rod 506 mounted on the fifth gear 505 to rotate. When the detection component is in an inclined state, the rotation angle of the telescopic rod 506 can be adjusted synchronously so that the lighting element on it provides sufficient illumination for the detection component.

[0024] In a preferred embodiment of this utility model, the slide assembly includes a support plate 2 mounted on a first fixed frame 1, a limiting block 201 mounted on the support plate 2, a first slide 202 slidably connected to the limiting block 201, a first rack 203 mounted on the first slide 202, and a slide gear 205 rotatably connected to a first knob 204. The first rack 203 meshes with the slide gear 205. When the first knob 204 is rotated, it drives the first slide 202 away from or towards the first fixed frame 1. The first rack 203 is affected by the rolling motion of the slide gear 205, causing the first slide 202 to move closer to or away from the first fixed frame 1 under the limitation of the limiting block 201. The purpose is to facilitate the adjustment of the chip position when the chip is placed on the first slide 202.

[0025] In a preferred embodiment of this utility model, the rotating assembly includes a rotating fixed frame 3 rotatably connected to the first fixed frame 1, an insertion hole 301 opened on the rotating fixed frame 3, a fixed column 302 mounted on the rotating fixed frame 3, a sleeve 303 slidably connected to the fixed column 302, and a fastening bolt 304 threadedly mounted on the sleeve 303. The insertion hole 301 is adapted to the gear mounting bracket 501. The position of the sleeve 303 on the fixed column 302 can be adjusted by loosening or tightening the fastening bolt 304.

[0026] In a preferred embodiment of this utility model, the tilt adjustment assembly includes a hinge frame 4 mounted on the sleeve 303, a fixing plate 401 mounted on the hinge frame 4, an adjusting bolt 402 threaded onto the fixing plate 401, and a first U-shaped mounting bracket 403 rotatably connected to the hinge frame 4. The adjusting bolt 402 is used to drive the first U-shaped mounting bracket 403 to rotate around the hinge frame 4. When the adjusting bolt 402 rotates, one end of the adjusting bolt 402 abuts against the first U-shaped mounting bracket 403, which is used to drive the first U-shaped mounting bracket 403 to rotate along the hinge frame 4.

[0027] In a preferred embodiment of this utility model, the first drive assembly includes two second knobs 7 rotatably connected to the first U-shaped mounting bracket 403, two rotary dampers 701 mounted on the first U-shaped mounting bracket 403, and a sixth gear 702 mounted on the second knobs 7. The rotary dampers 701 are disposed on the second knobs 7. The limiting assembly includes a second U-shaped mounting bracket 6 mounted on the first U-shaped mounting bracket 403, two first limiting grooves 601 formed on the second U-shaped mounting bracket 6, and two limiting frames 602 mounted on the second U-shaped mounting bracket 6.

[0028] In a preferred embodiment of this invention, the vertical displacement assembly includes a second rack 801 slidably mounted on the limiting frame 602 and a second slide 8 mounted on the second U-shaped mounting bracket 6. The two second racks 801 pass through the first limiting groove 601 and are connected to the second slide 8. A sixth gear 702 meshes with the corresponding second rack 801. The tooth grooves on the two second racks 801 are of different sizes. The rotation of the sixth gear 702 drives the second rack 801 to perform vertical displacement. Because the tooth grooves on the two second racks 801 are of different sizes, rotating the first drive assembly can drive a large vertical displacement. When fine adjustments are needed, rotating the other first drive assembly can drive the vertical displacement assembly to perform a small displacement. In a preferred embodiment of this utility model, the detection component includes a fixing ring 802 mounted on the second slide 8, a zoom lens 803 mounted on the fixing ring 802, a camera 804 mounted on the zoom lens 803, and a light ring 805 mounted on the zoom lens 803. The camera 804 observes the chip on the first slide 202 by shooting through the zoom lens 803, and the light ring 805 is used to provide illumination.

[0029] In a preferred embodiment of this utility model, the reverse synchronous illumination assembly further includes a rotating frame 507 mounted on the telescopic rod 506 and an LED light strip 508 mounted on the rotating frame 507. The telescopic rod 506 can be extended, and when the fixed column 302 rotates, the rotation angle of the rotating frame 507 is adjusted to provide sufficient illumination when the detection assembly is tilted.

[0030] The slide assembly includes a first knob 204, a slide gear 205, and a first rack 203. The first knob 204, slide gear 205, and first rack 203 can be replaced with an electric drive. By installing an electric cylinder on the support plate 2 and connecting the output end of the electric cylinder to the bottom of the first slide 202, when the chip is placed on the first slide 202, the position of the chip can be conveniently and accurately adjusted by controlling the extension and retraction of the first knob 204 of the electric push rod. Compared with the original gear and rack transmission method, the electric push rod drive has the advantages of simpler control and smoother operation.

[0031] The tilt adjustment assembly includes a hinge frame 4, a fixing plate 401, and an adjusting bolt 402. The hinge frame 4 is replaced by a ball seat installed on the clamp 303. A ball head is set inside the ball head seat, and the other end of the ball head is fixedly connected to the first U-shaped mounting bracket 403. An adjustment knob is installed on one side of the ball head seat, and a tightening bolt is set on the knob. The first U-shaped mounting bracket 403 is adjusted to the required angle, and then the adjustment knob is tightened so that the tightening bolt tightens the ball head, fixing the first U-shaped mounting bracket 403 at the current angle. Compared with the original bolt pressing adjustment, the ball head adjustment method can achieve more flexible and wider angle adjustment.

[0032] Working principle: The chip is placed on the first slide 202 on the first fixed frame 1. The first knob 204 is rotated, which drives the slide gear 205 to rotate. The slide gear 205 meshes with the first rack 203. The first rack 203 rotates with the slide gear 205, causing the first slide 202 to slide on the limit block 201 to adjust the chip position. The components on the rotating fixed frame 3 are rotated, and the clamp 303 on the fixed post 302 rotates with the fixed post 302. Loosening or tightening the fastening bolt 304 can adjust the position of the clamp 303 on the fixed post 302. Rotating the adjusting bolt 402 on the fixed plate 401 causes one end of the adjusting bolt 402 to abut against the first U-shaped mounting bracket 403, driving the first U-shaped mounting bracket 403 to rotate around the hinge frame 4. The first U-shaped mounting bracket 403 drives the components on it to rotate. Rotating the second knob 7 on the first U-shaped mounting bracket 403 causes the sixth gear 702 to rotate. The sixth gear 702 meshes with the second rack 801. The second rack 801 slides within the limiting frame 602 on the second U-shaped mounting bracket 6. The two second racks 801 pass through the first limiting groove 601 and engage with the second rack. The first slide 8 is connected to the first slide 202. The rotation of the sixth gear 702 drives the second rack 801 to move vertically. Since the tooth grooves of the two second racks 801 are different in size, rotating different second knobs 7 can achieve large or small displacement adjustments. The second slide 8 drives the fixed ring 802, zoom lens 803, camera 804 and lamp ring 805 on it to move. The camera 804 observes the chip on the first slide 202 through the zoom lens 803. The lamp ring 805 provides illumination. When the rotating assembly rotates, the pin 5 on the first fixed frame 1 rotates, and the second gears 502 mesh sequentially on the pin 5. The third gear 503, the fourth gear 504, and the fifth gear 505 rotate. The second gear 502 drives the gear mounting bracket 501 connected to the rotating assembly, and the fifth gear 505 drives the telescopic rod 506 to rotate. The rotating bracket 507 on the telescopic rod 506 rotates with the telescopic rod 506. The LED light strip 508 on the rotating bracket 507 provides auxiliary lighting. When the detection assembly is tilted, the telescopic rod 506 rotates in the opposite direction to the rotation of the rotating assembly through gear indirect meshing, and the rotation angle of the telescopic rod 506 is adjusted synchronously so that the LED light strip 508 provides sufficient lighting for the detection assembly.

[0033] Although only certain components and embodiments of this application have been illustrated and described, many modifications and alterations will be apparent to those skilled in the art without actually departing from the scope and spirit of the claims, such as variations in the size, dimensions, structure, shape and proportion of the various elements, installation arrangement, material use, color, orientation, etc.

[0034] Finally, it should be noted that the above embodiments are only preferred embodiments of this utility model and should not be used to limit the scope of protection of this utility model. Any non-substantial changes and substitutions made by those skilled in the art based on this utility model shall fall within the scope of protection claimed by this utility model.

Claims

1. A chip vision inspection device with angle adjustment function, comprising a first fixing frame (1); characterized in that: It also includes a slide assembly, a rotating assembly and a reverse synchronous irradiation assembly mounted on the first fixed frame (1), a tilt adjustment assembly mounted on the rotating assembly, a first drive assembly and a limit assembly mounted on the tilt adjustment assembly, a vertical displacement assembly mounted on the output end of the first drive assembly, and a detection assembly mounted on the vertical displacement assembly. The first drive assembly and the limit assembly cooperate to drive the vertical displacement assembly to make vertical displacement. The reverse synchronous irradiation assembly includes a pin (5) mounted on a first fixed frame (1). A second gear (502), a third gear (503), a fourth gear (504), and a fifth gear (505) are rotatably connected to the pin (5) in sequence. The second gear (502) is equipped with a gear mounting bracket (501) connected to the rotating assembly, and the fifth gear (505) is equipped with a telescopic rod (506). When the rotating assembly rotates, the telescopic rod (506) rotates in the opposite direction to the rotation of the rotating assembly through the indirect meshing of the gears.

2. The chip vision inspection device with angle adjustment function according to claim 1, characterized in that: The slide assembly includes a support plate (2) mounted on a first fixed frame (1), a limiting block (201) mounted on the support plate (2), a first slide (202) slidably connected to the limiting block (201), a first rack (203) mounted on the first slide (202), and a slide gear (205) rotatably connected to a first knob (204). The first rack (203) meshes with the slide gear (205), and when the first knob (204) is rotated, it drives the first slide (202) away from or closer to the first fixed frame (1).

3. The chip vision inspection device with angle adjustment function according to claim 1, characterized in that: The rotating assembly includes a rotating fixed frame (3) rotatably connected to the first fixed frame (1), an insertion hole (301) opened on the rotating fixed frame (3), a fixed column (302) mounted on the rotating fixed frame (3), a sleeve (303) slidably connected to the fixed column (302), and a fastening bolt (304) threaded on the sleeve (303). The insertion hole (301) and the gear mounting bracket (501) are compatible.

4. The chip vision inspection device with angle adjustment function according to claim 3, characterized in that: The tilt adjustment assembly includes a hinge frame (4) mounted on a sleeve (303), a fixing plate (401) mounted on the hinge frame (4), an adjusting bolt (402) threaded onto the fixing plate (401), and a first U-shaped mounting bracket (403) rotatably connected to the hinge frame (4). The adjusting bolt (402) is used to drive the first U-shaped mounting bracket (403) to rotate around the hinge frame (4).

5. The chip vision inspection device with angle adjustment function according to claim 4, characterized in that: The first drive assembly includes two second knobs (7) rotatably connected to the first U-shaped mounting bracket (403), two rotary dampers (701) mounted on the first U-shaped mounting bracket (403), and a sixth gear (702) mounted on the second knobs (7). The rotary dampers (701) are located on the second knobs (7). The limiting assembly includes a second U-shaped mounting bracket (6) mounted on the first U-shaped mounting bracket (403), two first limiting grooves (601) opened on the second U-shaped mounting bracket (6), and two limiting frames (602) mounted on the second U-shaped mounting bracket (6).

6. The chip vision inspection device with angle adjustment function according to claim 5, characterized in that: The vertical displacement assembly includes a second rack (801) slidably disposed on a limiting frame (602) and a second slide (8) disposed on a second U-shaped mounting bracket (6). The two second racks (801) pass through the first limiting groove (601) and are connected to the second slide (8). The sixth gear (702) meshes with the corresponding second rack (801). The tooth grooves on the two second racks (801) are of different sizes. The rotation of the sixth gear (702) drives the second rack (801) to make vertical displacement.

7. The chip vision inspection device with angle adjustment function according to claim 6, characterized in that: The detection assembly includes a fixed ring (802) mounted on the second slide (8), a zoom lens (803) mounted on the fixed ring (802), a camera (804) mounted on the zoom lens (803), and a light ring (805) mounted on the zoom lens (803).

8. The chip vision inspection device with angle adjustment function according to claim 1, characterized in that: The reverse synchronous illumination assembly also includes a rotating frame (507) mounted on a telescopic rod (506) and an LED light strip (508) mounted on the rotating frame (507).

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