A quartz crucible inner wall flaw detection device

Abstract

The utility model provides a quartz crucible inner wall flaw detection device relates to crucible detection technical field, including main lift detection frame, side conveying frame and side movement support, the both sides of main lift detection frame all are provided with side conveying frame, and the middle part of side conveying frame is provided with side movement support, and the middle part fixed connection of main lift detection frame has the detection frame, and the both sides of main lift detection frame all annular array are provided with the side support pulley of rotation, and the both sides of main lift detection frame bottom all are connected with the scissor folding frame of sliding, and the lower end of scissor folding frame and lower connection slide frame rotation is connected, and the both sides of main lift detection frame all are fixedly connected with side guide inclined frame. Through side guide inclined frame guides the side movement support of both sides and sticks in quartz crucible outside, guarantees quartz crucible and main lift detection frame center alignment, has solved the positioning deviation of crucible and will appear detection distance fluctuation, has led to camera focusing fuzzy, the problem of flaw missed detection rate increase.

Description

Technical Field

[0001] This utility model relates to the field of crucible testing equipment technology, and in particular to a device for detecting defects in the inner wall of a quartz crucible. Background Technology

[0002] Quartz crucibles are refractory containers commonly used in the production of monocrystalline silicon. After the production of quartz crucibles is completed, the defects of the inner wall need to be detected. The detection device is used to detect defects such as cracks, bubbles, and impurities on the inner wall of the quartz crucible.

[0003] The quartz crucibles are placed on a conveyor belt by personnel for transport. However, the position of the quartz crucibles may deviate during the placement process. This deviation in the positioning of the crucibles will cause fluctuations in the detection distance, resulting in blurred camera focus. Blurred camera focus affects the efficiency of defect detection and increases the rate of missed defects. Summary of the Invention

[0004] This invention provides a device for detecting defects on the inner wall of a quartz crucible. As the main lifting detection frame rises, the side-moving brackets on both sides are guided by the side guide inclined frame to fit against the outside of the quartz crucible, ensuring that the center of the quartz crucible and the main lifting detection frame are aligned. This ensures that the distance between the middle detection frame and the inside of the quartz crucible is fixed, avoiding the problem of large crucible positioning deviation and camera focusing blur caused by fluctuations in detection distance in traditional detection devices, which increases the rate of missed defects.

[0005] This utility model provides a device for detecting defects on the inner wall of a quartz crucible, specifically including: a main lifting detection frame, side conveyor frames, and side moving supports. Side conveyor frames are provided on both sides of the main lifting detection frame, and a side moving support is located in the middle of the side conveyor frames. A central detection frame is fixedly connected to the middle of the main lifting detection frame. The central detection frame houses three sets of high-definition industrial cameras, each with a 20-megapixel resolution and a frame rate of 30fps, and is equipped with an LED light source. The cameras on the central detection frame are vertically spaced, and the cameras scan the quartz. Images of defects are collected on the inner wall of the crucible. Rotating side support pulleys are arranged in a circular array on both sides of the main lifting inspection frame. The side support pulleys support the quartz crucible from below. Scissor telescopic frames are slidably connected to both sides of the bottom of the main lifting inspection frame through sliding grooves. The lower end of the scissor telescopic frame is rotatably connected to the lower connecting slide. The lower connecting slide is horizontally slidably connected to the top of the lower base. An electric threaded rod is rotatably connected to the top of the lower base. Side vertical slide rails are fixedly connected to both sides of the top of the lower base. Side guide inclined frames are fixedly connected to both sides of the main lifting inspection frame.

[0006] Furthermore, both ends of the electric threaded rod are threadedly connected to lower connecting slides. The electric threaded rod is a ball screw, and left-hand and right-hand threads are machined at both ends of the electric threaded rod, respectively. When the electric threaded rod is driven to rotate by a servo motor, the lower connecting slides at both ends of the electric threaded rod move in opposite directions along the lower base, driving the scissor telescopic frame to extend and retract. The extension and retraction of the scissor telescopic frame supports the main lifting detection frame to move vertically along the side vertical slide rail, and the middle detection frame extends into the crucible.

[0007] Furthermore, the upper tensioning shaft of the side conveyor frame is connected to a middle conveyor belt for support and rotation. The middle conveyor belt is used to transport the quartz crucible to the testing station. A side slide is fixedly connected to the middle of the side conveyor frame, and a connecting spring is fixedly connected to the upper part of the side slide. The connecting spring pulls the side moving bracket to move away from the crucible.

[0008] Furthermore, both sides of the side-moving bracket are rotatably connected to drive shafts. The side-moving bracket drives the drive shafts to rotate via stepper motors. An upper roller is axially slidably connected to the upper part of the drive shaft, and a lower slide is fixedly connected to the lower side of the middle part of the side-moving bracket.

[0009] Furthermore, the side-moving bracket and the side slide are horizontally slidably connected, and the tail end of the connecting spring is fixedly connected to the side-moving bracket. In the initial state, the connecting spring is in a pre-stretched state. The connecting spring pulls the side-moving bracket to move towards the side slide. After the main lifting inspection frame completes the inspection, it moves downward. The connecting spring pulls the side-moving bracket to move away from the quartz crucible to both sides, so that the inspected crucible can be sent out by the side conveyor frame. At the same time, the side-moving bracket limits the placement position of the quartz crucible to be inspected conveyed by the side conveyor frame, ensuring that the position of the quartz crucible conveyed by the side conveyor frame is within a reasonable range. A photoelectric sensor is installed in the middle of the side conveyor frame. The photoelectric sensor model is E3Z-LS63. When the quartz crucible is conveyed to the inspection station, the photoelectric sensor triggers a signal to control the side conveyor frame to stop conveying. At the same time, the drive shaft and upper roller of the side-moving bracket start to rotate, driving the quartz crucible to rotate slowly, and cooperate with the middle inspection frame to complete the 360° defect scanning of the inner wall.

[0010] Furthermore, the side moving brackets are symmetrically arranged on both sides of the main lifting detection frame, the side guide bracket is located below the lower slide bracket, the upper inclined surface of the side guide bracket slides in contact with the lower slide bracket, and the upper roller of the guide side moving bracket moves and fits against the outside of the crucible.

[0011] Furthermore, when the sliding frame and the side guide bracket slide into contact, the sliding frame and the side moving bracket move toward the main lifting detection frame. The upper roller of the side moving bracket radially limits the quartz crucible conveyed by the side conveying frame, ensuring that the alignment deviation between the center of the crucible and the center of the central detection frame is ≤2mm, which is within the effective detection radius of 100 to 200mm for inner wall scanning.

[0012] This utility model provides a device for detecting defects on the inner wall of a quartz crucible, which has the following beneficial effects: The conveyor belt transports the quartz crucibles in an assembly line manner. The main lifting inspection frame and the middle inspection frame rise to inspect the inner wall of the rotating quartz crucible for defects. As the main lifting inspection frame rises, the side-moving brackets on both sides are guided by the side guide inclined frame to fit against the outside of the quartz crucible, ensuring that the center of the quartz crucible and the main lifting inspection frame are aligned. This ensures that the distance between the middle inspection frame and the inside of the quartz crucible is fixed, avoiding the problem of large crucible positioning deviation and camera focus blur caused by the fluctuation of inspection distance in traditional inspection devices, which increases the defect missed rate.

[0013] The main lifting and testing frame raises the quartz crucible via side support pulleys during the lifting process, keeping the quartz crucible and the central conveyor belt away from each other. This avoids frictional wear on the central conveyor belt when the quartz crucible rotates, extends the service life of the central conveyor belt, and significantly reduces maintenance costs. Attached Figure Description

[0014] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings of the embodiments will be briefly described below.

[0015] The accompanying drawings described below are only related to some embodiments of the present invention and are not intended to limit the scope of the present invention.

[0016] In the attached diagram: Figure 1 A schematic diagram of the structure of the quartz crucible for testing according to this application is shown; Figure 2 A schematic diagram of the overall structure of this application is shown; Figure 3 A schematic diagram of the main lifting detection frame structure of this application is shown; Figure 4 A schematic diagram of the side conveyor structure of this application is shown; Figure 5 A schematic diagram of the structure of the side-moving support of this application is shown; Figure 6 This invention presents a structural schematic diagram showing the main lifting detection frame, side conveyor frame, and side moving support in their separated states. Figure label: 1. Main lifting inspection frame; 101. Middle inspection frame; 102. Side support pulley; 103. Scissor lift telescopic frame; 104. Lower connecting slide; 105. Electric threaded rod; 106. Lower base; 107. Side vertical slide rail; 108. Side guide inclined frame; 2. Side conveyor frame; 201. Middle conveyor belt; 202. Side slide frame; 203. Connecting tension spring; 3. Side-moving support; 301. Drive shaft; 302. Upper roller; 303. Lower slide. Detailed Implementation

[0017] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the described embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0018] Example 1: Please refer to Figures 1 to 6 : This invention discloses a device for detecting defects on the inner wall of a quartz crucible, comprising a main lifting detection frame 1, a side conveyor frame 2, and a side moving support 3. A central detection frame 101 is fixedly connected to the middle of the main lifting detection frame 1. The central detection frame 101 has three sets of high-definition industrial cameras with a resolution of 20 megapixels and a frame rate of 30fps, and is equipped with an LED light source. The cameras on the central detection frame 101 are vertically spaced and scan the inner wall of the quartz crucible to acquire defect images. Both sides of the main lifting detection frame 1 are annular. The array is equipped with rotating side support pulleys 102, which support the quartz crucible from below. Scissor lift telescopic frames 103 are slidably connected to both sides of the bottom of the main lifting detection frame 1 via sliding grooves. The lower end of the scissor lift telescopic frame 103 is rotatably connected to the lower connecting slide 104. The lower connecting slide 104 is horizontally slidably connected to the top of the lower base 106. An electric threaded rod 105 is rotatably connected to the top of the lower base 106. Side vertical slide rails 107 are fixedly connected to both sides of the top of the lower base 106. The main lifting detection frame 1 is fixedly connected to both sides of the main lifting detection frame 1. A side guide inclined frame 108 is connected to the main lifting and testing frame 1. Side conveyor frames 2 are installed on both sides of the main lifting and testing frame 1. A tensioning shaft at the upper part of the side conveyor frame 2 is connected to a central conveyor belt 201, which is used to transport the quartz crucible to the testing station. A side slide frame 202 is fixedly connected to the middle of the side conveyor frame 2. A connecting spring 203 is fixedly connected to the upper part of the side slide frame 202. The connecting spring 203 pulls the side moving support 3 to move away from the crucible, releasing the limit and allowing unloading by the conveyor belt. The side moving support 3 is located in the middle of the side conveyor frame 2. Both sides of the frame 3 are rotatably connected to drive shafts 301. The side moving bracket 3 drives the drive shafts 301 to rotate via a stepper motor. The upper part of the drive shaft 301 is axially slidably connected to an upper roller 302. The lower side of the middle part of the side moving bracket 3 is fixedly connected to a lower slide frame 303. The side moving bracket 3 is symmetrically arranged on both sides of the main lifting detection frame 1. The side guide inclined frame 108 is located below the lower slide frame 303. The upper inclined surface of the side guide inclined frame 108 slides in contact with the lower slide frame 303. The upper roller 302 of the guide side moving bracket 3 moves and fits against the outside of the crucible.

[0019] In this embodiment, both ends of the electric threaded rod 105 are threadedly connected to a lower connecting slide 104. The electric threaded rod 105 is a ball screw, and left-hand and right-hand threads are respectively machined at both ends of the electric threaded rod 105. When the electric threaded rod 105 is driven to rotate by a servo motor, the lower connecting slides 104 at both ends of the electric threaded rod 105 move in opposite directions along the lower base 106, driving the scissor telescopic frame 103 to extend and retract. The extension and retraction of the scissor telescopic frame 103 supports the main lifting detection frame 1 to move vertically along the side vertical slide rail 107, and the middle detection frame 101 extends into the interior of the crucible.

[0020] In this embodiment, the side-moving bracket 3 and the side slide 202 are horizontally slidably connected. The tail end of the connecting spring 203 is fixedly connected to the side-moving bracket 3. Initially, the connecting spring 203 is in a pre-stretched state. The connecting spring 203 pulls the side-moving bracket 3 to move towards the side slide 202. After the main lifting detection frame 1 completes the detection, it moves downward. The connecting spring 203 pulls the side-moving bracket 3 to move away from the quartz crucible to both sides, so that the crucible after detection can be sent out by the side conveyor frame 2. At the same time, the side-moving bracket 3 conveys to the side. The placement of the quartz crucible to be inspected is limited by the side conveyor 2 to ensure that the position of the quartz crucible conveyed by the side conveyor 2 is within a reasonable range. A photoelectric sensor is installed in the middle of the side conveyor 2. The photoelectric sensor model is E3Z-LS63. When the quartz crucible is conveyed to the inspection station, the photoelectric sensor triggers a signal to control the side conveyor 2 to stop conveying. At the same time, the drive shaft 301 and the upper roller 302 of the side moving bracket 3 start to rotate, driving the quartz crucible to rotate slowly, and cooperate with the middle inspection frame 101 to complete the 360° defect scanning of the inner wall.

[0021] In this embodiment, when the sliding frame 303 and the side guide bracket 108 slide into contact, the sliding frame 303 and the side moving bracket 3 move toward the main lifting detection frame 1. The upper roller 302 of the side moving bracket 3 radially limits the quartz crucible conveyed by the side conveying frame 2, ensuring that the alignment deviation between the center of the crucible and the center of the central detection frame 101 is ≤2mm, which is within the effective detection radius of 100-200mm for inner wall scanning. This avoids the problem of large crucible positioning deviation and camera focusing blur caused by fluctuations in detection distance in traditional detection devices, which increases the rate of missed defects.

[0022] In this second embodiment, based on the first embodiment, the side-moving support 3 is also equipped with a detection mechanism. The side-moving support 3 performs defect detection on the quartz crucible from the outside, realizing dual detection from both inside and outside, improving detection efficiency and shortening the detection time of the quartz crucible.

[0023] The working principle of this embodiment: The middle conveyor belt 201 is made of high-temperature resistant silicone material, and continuously conveys the quartz crucible at a constant speed of 0.5~1m / min without manual intervention; in conjunction with the photoelectric sensor positioning of the side conveyor frame 2 (response time ≤0.1s), the crucible can be accurately stopped at the testing station; the main lifting testing frame 1 drives the scissor telescopic frame 103 through the electric threaded rod 105, and synchronously completes the "rise-test-fall" action at a speed of 5~10mm / s—when rising, the middle testing frame 101 is driven to extend into the inner wall of the crucible, and at the same time, the upper inclined surface of the side guide inclined frame 108 and the lower sliding frame 303 slide into contact, and the upper roller 302 of the guide side moving bracket 3 moves to fit against the outside of the crucible for limiting. During testing, the upper roller 302 drives the crucible to rotate 360° synchronously to achieve full coverage scanning of the inner wall; when falling, the connecting tension spring 203 pulls the side moving bracket 3 to move away from the crucible, releases the limit, and the conveyor belt completes the unloading, which is suitable for the testing needs of mass production in the photovoltaic industry; During the ascent of the main lifting inspection frame 1, the side guide inclined frames 108 on both sides slide into contact with the sliding frame 303 of the side moving support 3. The inclined plane thrust drives the side moving support 3 to move towards the crucible side, so that the upper roller 302 fits tightly against the outer wall of the crucible, forming a radial bidirectional limit, ensuring that the alignment deviation between the center of the crucible and the center of the central inspection frame 101 is ≤0.5mm, and the center alignment accuracy is improved by 75% compared with the traditional device. The detection distance between the high-definition industrial camera of the central inspection frame 101 and the inner wall of the crucible is fixed at 15±0.5mm (adapting to the camera's optimal focusing range), avoiding the focusing blur caused by distance fluctuation (±1.5mm) in the traditional device, increasing the detection rate of 0.1mm-level micro-cracks (key defects of photovoltaic crucibles) from the traditional 85% to over 99%, and reducing the defect omission rate by 87%. At the same time, there is no need for manual repeated adjustment of the camera focus, further shortening the inspection time and avoiding the problem of large crucible positioning deviation and camera focusing blur caused by detection distance fluctuation in the traditional inspection device, which increases the defect omission rate. During the ascent of the main lifting testing frame 1, the side support pulleys 102 on both sides simultaneously contact the outer wall of the crucible and lift it up, so that the crucible is completely separated from the surface of the middle conveyor belt 201. When the crucible rotates for testing, it only contacts the pulley with a low coefficient of friction. The conveyor belt has no frictional loss, which increases the service life of the conveyor belt and significantly reduces maintenance costs. It also avoids the fine particles generated by friction of traditional conveyor belts from adhering to the outer wall of the crucible, effectively ensuring the product quality of the crucible and reducing the scrap rate caused by testing.

[0024] The following points should be noted in this article: 1. The accompanying drawings of the embodiments disclosed herein only involve structures relevant to the embodiments disclosed herein; other structures may refer to general designs.

[0025] 2. Where there is no conflict, the embodiments of this disclosure and the features in the embodiments can be combined with each other to obtain new embodiments.

[0026] The above are merely specific embodiments of this disclosure, but the scope of protection of this disclosure is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this disclosure should be included within the scope of protection of this disclosure. Therefore, the scope of protection of this disclosure should be determined by the scope of the claims.

Claims

1. A device for detecting defects in the inner wall of a quartz crucible, comprising: The main lifting detection frame (1), side conveyor frames (2), and side moving brackets (3) are characterized in that side conveyor frames (2) are provided on both sides of the main lifting detection frame (1), and side moving brackets (3) are provided in the middle of the side conveyor frames (2). A middle detection frame (101) is fixedly connected to the middle of the main lifting detection frame (1). Rotating side support pulleys (102) are arranged in a circular array on both sides of the main lifting detection frame (1). The side support pulleys (102) support the quartz crucible from below. (1) is slidably connected to both sides of the bottom of the scissor telescopic frame (103). The lower end of the scissor telescopic frame (103) is rotatably connected to the lower connecting slide (104). The lower connecting slide (104) is horizontally slidably connected to the top of the lower base (106). The top of the lower base (106) is rotatably connected to an electric threaded rod (105). The top of the lower base (106) is fixedly connected to both sides of the top of the lower base (106) with side vertical slide rails (107). The main lifting detection frame (1) is fixedly connected to both sides with side guide inclined frames (108).

2. The device for detecting defects in the inner wall of a quartz crucible according to claim 1, characterized in that, Both ends of the electric threaded rod (105) are threadedly connected to the lower connecting slide (104). When the electric threaded rod (105) rotates, the lower connecting slides (104) at both ends of the electric threaded rod (105) move in opposite directions. The scissor telescopic frame (103) telescopically supports the main lifting detection frame (1) to move vertically along the side vertical slide rail (107).

3. The device for detecting defects in the inner wall of a quartz crucible according to claim 1, characterized in that, The upper shaft of the side conveyor frame (2) is fitted with a middle conveyor belt (201) for rotational connection. The middle part of the side conveyor frame (2) is fixedly connected to a side slide (202), and the upper part of the side slide (202) is fixedly connected to a connecting spring (203).

4. The device for detecting defects in the inner wall of a quartz crucible according to claim 3, characterized in that, Both sides of the side moving bracket (3) are rotatably connected to drive shafts (301), the upper part of the drive shaft (301) is axially slidably connected to an upper roller (302), and the lower side of the middle part of the side moving bracket (3) is fixedly connected to a slide frame (303).

5. The device for detecting defects in the inner wall of a quartz crucible according to claim 4, characterized in that, The side-moving bracket (3) and the side slide (202) are horizontally slidably connected. The tail end of the connecting spring (203) is fixedly connected to the side-moving bracket (3). The connecting spring (203) pulls the side-moving bracket (3) to move towards the side slide (202).

6. The device for detecting defects in the inner wall of a quartz crucible according to claim 5, characterized in that, The side moving bracket (3) is symmetrically arranged on both sides of the main lifting detection frame (1), and the side guide bracket (108) is located below the lower slide bracket (303).

7. The device for detecting defects in the inner wall of a quartz crucible according to claim 6, characterized in that, When the slide frame (303) and the side guide bracket (108) slide into contact, the slide frame (303) and the side moving bracket (3) move toward the main lifting detection frame (1).

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