Visual detection tool for defects on inner wall of reduction furnace cylinder

Abstract

The utility model relates to polycrystalline silicon production technical field especially, relating to the reduction furnace cylinder inner wall defect vision detection frock, solves the shortcoming that the polycrystalline silicon production exists in prior art, including base, rotating mechanism and adjusting support part, the base is fixedly connected with round table on, the conical slope is set to the round table outside, the rotating mechanism coincides with the round table center axis, the adjusting support part includes a plurality of support seat that can displace along the conical slope, a plurality of support seat are annularly evenly distributed with the round table center axis, the adjusting support part still includes the guide mechanism of keeping support seat own horizontal state, the guide mechanism includes liftable support guide plate, the both ends of support guide plate are penetrated and have the slide fit of support column, the outside of support column is sleeved with spring piece, the lower end of support column is fixed on base, the utility model discloses, has practicality is strong and the characteristics of automatic centering.

Description

Technical Field

[0001] This utility model relates to the field of polysilicon production technology, specifically to a visual inspection fixture for defects in the inner wall of a reduction furnace cylinder. Background Technology

[0002] Currently, the main production method for electronic-grade polysilicon is the modified Siemens process, which produces polysilicon rods through chemical vapor deposition. The core equipment is the reduction furnace. However, during long-term operation, the furnace cylinder inevitably develops tiny cracks. In addition, the inner wall of the furnace cylinder will be damaged when the rods are disassembled or when the rods are flipped due to production abnormalities. Timely inspection and repair are necessary to prevent the cracks from continuing to expand and causing the furnace cylinder to leak.

[0003] Currently, manual visual inspection is mainly used to check and maintain the furnace cylinder in a timely manner. With the advancement of technology, machine vision inspection technology has begun to be introduced. Machine vision inspection uses industrial cameras to take pictures of the inner wall of the furnace cylinder, and after image processing technology, the pictures are displayed on the terminal.

[0004] Because the furnace cylinder is cylindrical, the machine needs to rotate around the cylinder wall to take pictures. If its axis of rotation is not aligned with the center line of the furnace cylinder, the camera will be closer and farther away from the inner wall of the furnace cylinder when rotating to take pictures, which will easily lead to blurry images and affect the judgment of defects such as cracks and scratches on the furnace cylinder. Without precise positioning, the centering accuracy cannot be guaranteed.

[0005] Therefore, it is essential to design a visual inspection fixture for defects on the inner wall of the reduction furnace cylinder that is both practical and automatically aligned. Utility Model Content

[0006] The purpose of this invention is to provide a visual inspection fixture for defects in the inner wall of a reduction furnace cylinder, so as to solve the problems mentioned in the background art.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a visual inspection fixture for defects in the inner wall of a reduction furnace cylinder, comprising a base, a rotating mechanism, and an adjusting support. A frustum is fixedly connected to the base, and a tapered inclined surface is provided on the outer side of the frustum; The rotating mechanism coincides with the central axis of the frustum; The adjustable support includes several support seats that can be displaced along the conical inclined surface, and the several support seats are evenly distributed in a ring around the central axis of the frustum. The adjustable support also includes a guide mechanism that keeps the support base horizontal.

[0008] According to the above technical solution, the guiding mechanism includes a liftable support guide plate, with support columns slidingly fitted through both ends of the support guide plate, springs sleeved on the outer side of the support columns, and the lower end of the support columns fixed to the base. Several adaptation grooves are provided on the outer side of the truncated cone, and the adaptation grooves are adapted to one end of the support guide plate. The support seat moves along the support guide plate.

[0009] According to the above technical solution, the support base includes an upper support plate, a connecting plate is fixedly connected to the lower end of the upper support plate, a lower support plate is fixedly connected to the lower end of the connecting plate, a guide groove is provided through the middle side of the support guide plate, and the connecting plate passes through the guide groove and slides with it.

[0010] According to the above technical solution, a plurality of rollers are provided at the lower end of the upper support plate, and the rollers roll in contact with the upper surface of the support guide plate. The upper end of the lower support plate is provided with several rollers, which roll in contact with the lower surface of the support guide plate.

[0011] According to the above technical solution, the two ends of the lower support plate are rotatably connected to guide wheels, and the two sides of the adaptation groove are provided with inclined planes, and the guide wheels are adapted to the inclined planes.

[0012] According to the above technical solution, the lower end of the support column is fixedly connected to a fixing seat, and the fixing seat is fixed to the upper end of the base.

[0013] According to the above technical solution, the rotating mechanism includes a rotating rod, which is driven by a motor, and the motor is located inside a frustum.

[0014] According to the above technical solution, a number of mounting brackets and support rods are vertically arranged on one side of the rotating rod. A camera assembly is installed at the end of the mounting bracket, and an arc-shaped mounting plate is provided at the end of the support rod. A number of fill lights are provided at the lower end of the arc-shaped mounting plate. The mounting brackets and support rods are distributed alternately vertically.

[0015] Compared with the prior art, the beneficial effects achieved by this utility model are: By incorporating adjustable support components, the axis of the rotating mechanism can automatically align with the central axis of the furnace cylinder, ensuring that the distance between the industrial camera and the inner wall of the furnace cylinder remains constant, thus improving detection efficiency. Furthermore, the sliding of several support seats drives the overall displacement and position adjustment of the furnace cylinder, making the upper surface of the support seats and the bottom of the furnace cylinder almost relatively stationary. This prevents the furnace cylinder from experiencing severe sliding friction on the support seats, thereby greatly protecting the furnace cylinder and preventing serious scratches on its bottom, which could lead to damage to the furnace cylinder. Attached Figure Description

[0016] Figure 1This is a three-dimensional structural schematic diagram of the present invention; Figure 2 This is a cross-sectional schematic diagram of the adjustment support part of this utility model; Figure 3 This is a three-dimensional schematic diagram of the support base of this utility model; Figure 4 This is a three-dimensional schematic diagram of the upper support plate of this utility model; Figure 5 yes Figure 1 A magnified view of a portion of region A; Figure 6 This is a three-dimensional schematic diagram of the bottom of the arc-shaped mounting plate of this utility model; In the diagram: 1. Base; 101. Frustum; 2. Adjust the support section; 3. Support base; 301. Upper support plate; 302. Connecting plate; 303. Lower support plate; 304. Roller 1; 305. Roller 2; 306. Guide wheel; 307. Arc-shaped mating surface; 4. Rotating mechanism; 401. Rotating rod; 402. Motor; 403. Mounting bracket; 404. Support rod; 405. Arc-shaped mounting plate; 5. Adaptive groove; 501. Inclined plane; 6. Support guide plate; 601. Support column; 602. Guide groove; 603. Fixing seat. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0018] Please see Figure 1-6 This utility model provides a technical solution: a visual inspection fixture for defects in the inner wall of a reduction furnace cylinder, comprising a base 1, a rotating mechanism 4, and an adjusting support 2. A frustum 101 is fixedly connected to the base 1, and a tapered inclined surface is provided on the outer side of the frustum 101. The rotating mechanism 4 coincides with the central axis of the frustum 101; The adjusting support 2 includes several support seats 3 that can be displaced along the conical inclined plane, and the several support seats 3 are evenly distributed in a ring around the central axis of the frustum 101. The adjusting support 2 also includes a guide mechanism that keeps the support base 3 in a horizontal position.

[0019] Furthermore, when inspecting the furnace body, it needs to be lifted and covered outside the rotating mechanism 4. The bottom of the furnace body is placed on several support seats 3. Under its own weight, the support seats 3 are pressed down. If the axis of the furnace body is offset at this time, the support seat 3 on the offset side will slide down along the conical inclined surface of the frustum 101 and move to one side, thereby driving the furnace body to adjust its own position until the furnace body falls to the bottom. Then the offset furnace body is adjusted back to the correct position, so that the center line of the furnace body automatically coincides with the center line of the rotating mechanism 4. This can realize the rapid automatic centering of the furnace body. The operation is convenient, and the automatic centering can be achieved by using the weight of the furnace body itself. The structure design is simple and the practicality is strong. In this embodiment, the axis of the rotating mechanism 4 can be automatically aligned with the central axis of the furnace body by adjusting the support part 2, ensuring that the distance between the industrial camera and the inner wall of the furnace remains constant, thus improving detection efficiency. Furthermore, the sliding of several support seats 3 drives the overall displacement and position adjustment of the furnace body, so that the upper surface of the support seat 3 and the bottom of the furnace body are almost in a relatively stationary state. That is, the furnace body will not generate severe sliding friction on the support seat 3, thereby greatly protecting the furnace body and avoiding serious scratches on its bottom, which would otherwise damage the furnace body.

[0020] The guiding mechanism includes a liftable support guide plate 6, with support columns 601 running through and slidingly fitted at both ends of the support guide plate 6. A spring is sleeved on the outside of the support column 601, and the lower end of the support column 601 is fixed to the base 1. Several adaptation grooves 5 are opened on the outside of the truncated cone 101, and the adaptation grooves 5 are adapted to one end of the support guide plate 6. The support seat 3 moves along the support guide plate 6.

[0021] Furthermore, when the support base 3 descends under the influence of gravity, it undergoes horizontal linear displacement along the support guide plate 6, while the support guide plate 6 descends along a pair of support columns 601. The support columns 601 provide guidance, ensuring that the support guide plate 6 and the support base 3 remain horizontal as they descend. In this embodiment, by supporting the guide plate 6 to rise and fall vertically, it is ensured that the overall angle will not shift during the centering process of the furnace cylinder body, thus avoiding tipping and improving stability.

[0022] The support base 3 includes an upper support plate 301, a connecting plate 302 is fixedly connected to the lower end of the upper support plate 301, a lower support plate 303 is fixedly connected to the lower end of the connecting plate 302, a guide groove 602 is provided through the middle side of the support guide plate 6, and the connecting plate 302 passes through the guide groove 602 and slides with it.

[0023] Among them, the upper support plate 301 is set to L-shape. When the furnace cylinder body is hoisted, the position of several support seats 3 is manually adjusted so that the vertical surface of the upper support plate 301 is in contact with the inner wall of the furnace cylinder body, thereby determining the position of the furnace cylinder body on several upper support plates 301 and avoiding severe friction between the two during the subsequent alignment process. Furthermore, by sliding the connecting plate 302 into the guide groove 602, the stability of the horizontal displacement of the support base 3 is improved; Furthermore, by covering the surface of the upper support plate 301 with a low coefficient of friction coating, the surface smoothness is further improved, and the deflection on the upper support plate 301 is avoided when the furnace body is eccentrically hoisted and lowered, which would result in greater friction and affect the quality of the bottom of the furnace body. Preferably, the low-friction coefficient coating includes, but is not limited to, a polytetrafluoroethylene coating or a polyurethane coating; Furthermore, the vertical surface of the upper support plate 301 is provided with an arc-shaped fitting surface 307, the curvature of which is adapted to the inner wall of the furnace cylinder body, so as to facilitate fitting to the inner wall of the furnace cylinder body without scratching the inner wall.

[0024] Several rollers 304 are provided at the lower end of the upper support plate 301. The rollers 304 roll in contact with the upper surface of the support guide plate 6. The upper end of the lower support plate 303 is provided with several rollers 305, which roll in contact with the lower surface of the support guide plate 6.

[0025] Furthermore, by setting roller 304 and roller 305 to roll against the upper and lower sides of the support guide plate 6, the friction of the support base 3 along the support guide plate 6 is greatly reduced, thereby improving the smoothness of displacement and service life.

[0026] The lower support plate 303 is rotatably connected to both ends of the guide wheel 306, and the two sides of the adaptation groove 5 are provided with inclined plane 501, and the guide wheel 306 is adapted to the inclined plane 501.

[0027] Furthermore, by setting guide wheels 306 at both ends of the lower support plate 303, the lower support plate 303 is prevented from directly colliding with the conical inclined surface and causing damage. By having the guide wheels 306 replace the lower support plate 303 in contacting and rolling along the conical inclined surface, the friction between the two is greatly reduced, and the service life is improved. In addition, the inclined plane 501 is set to further conform to the wheel surface of the guide wheel 306, thereby improving the rolling stability.

[0028] The lower end of the support column 601 is fixedly connected to the fixing seat 603, which is fixed to the upper end of the base 1.

[0029] Furthermore, a fixed seat 603 is provided to support the support guide plate 6 that has been displaced to the bottom, so as to prevent the lower support plate 303 from directly contacting the base 1 and causing friction and scratches. It should be noted that the shape of the fixed base 603 is not fixed. Any structure that provides stable support for the support guide plate 6 without affecting the movement of the support base 3 is acceptable.

[0030] The rotating mechanism 4 includes a rotating rod 401, which is driven by a motor 402, which is located inside the frustum 101.

[0031] Several mounting brackets 403 and support rods 404 are vertically arranged on one side of the rotating rod 401. A camera assembly is installed at the end of the mounting bracket 403, and an arc-shaped mounting plate 405 is provided at the end of the support rod 404. Several fill lights are provided at the lower end of the arc-shaped mounting plate 405. The mounting brackets 403 and support rods 404 are distributed alternately in the vertical direction.

[0032] Furthermore, after the furnace cylinder body is placed and aligned, the rotating rod 401 is driven to rotate by the motor 402, thereby causing the camera assembly and the arc-shaped mounting plate 405 to move in a ring, so that the camera assembly can perform detection around the inner wall of the furnace cylinder body. Several supplementary lights are set at the lower end of the arc-shaped mounting plate 405 to provide supplementary lighting for the camera assembly to improve the detection quality. Preferably, the arc-shaped mounting plate 405 is rotatably mounted at the end of the support rod 404, which allows the fill light to illuminate at a low angle, thereby reducing light reflection that could lead to unclear images.

[0033] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A visual inspection fixture for defects in the inner wall of a reduction furnace cylinder, comprising a base (1), a rotating mechanism (4), and an adjusting support (2), characterized in that: A frustum (101) is fixedly connected to the base (1), and a conical inclined surface is provided on the outer side of the frustum (101); The rotating mechanism (4) coincides with the central axis of the frustum (101); The adjustable support part (2) includes a plurality of support seats (3) that can be displaced along the conical inclined plane, and the plurality of support seats (3) are evenly distributed in a ring around the central axis of the frustum (101). The adjustable support (2) also includes a guide mechanism that keeps the support seat (3) in a horizontal position.

2. The visual inspection fixture for defects in the inner wall of the reduction furnace cylinder according to claim 1, characterized in that: The guiding mechanism includes a liftable support guide plate (6), with support columns (601) running through and slidably fitted at both ends of the support guide plate (6). A spring is sleeved on the outside of the support column (601), and the lower end of the support column (601) is fixed on the base (1). Several adaptation grooves (5) are opened on the outside of the frustum (101), and the adaptation grooves (5) are adapted to one end of the support guide plate (6). The support seat (3) moves along the support guide plate (6).

3. The visual inspection fixture for defects in the inner wall of the reduction furnace cylinder according to claim 2, characterized in that: The support base (3) includes an upper support plate (301), a connecting plate (302) is fixedly connected to the lower end of the upper support plate (301), a lower support plate (303) is fixedly connected to the lower end of the connecting plate (302), a guide groove (602) is provided through the middle side of the support guide plate (6), and the connecting plate (302) passes through the guide groove (602) and slides with it.

4. The visual inspection fixture for defects in the inner wall of the reduction furnace cylinder according to claim 3, characterized in that: The lower end of the upper support plate (301) is provided with a plurality of rollers (304), which roll in contact with the upper surface of the support guide plate (6); The upper end of the lower support plate (303) is provided with several rollers (305), which roll in contact with the lower surface of the support guide plate (6).

5. The visual inspection fixture for defects in the inner wall of the reduction furnace cylinder according to claim 3, characterized in that: The lower support plate (303) is rotatably connected to guide wheels (306) at both ends, and the two sides of the adaptation groove (5) are provided with inclined planes (501), and the guide wheels (306) are adapted to the inclined planes (501).

6. The visual inspection fixture for defects in the inner wall of the reduction furnace cylinder according to claim 2, characterized in that: The lower end of the support column (601) is fixedly connected to a fixing seat (603), and the fixing seat (603) is fixed to the upper end of the base (1).

7. The visual inspection fixture for defects in the inner wall of the reduction furnace cylinder according to claim 1, characterized in that: The rotating mechanism (4) includes a rotating rod (401), which is driven by a motor (402) located inside a frustum (101).

8. The visual inspection fixture for defects in the inner wall of the reduction furnace cylinder according to claim 7, characterized in that: A plurality of mounting brackets (403) and support rods (404) are vertically arranged on one side of the rotating rod (401). A camera assembly is installed at the end of the mounting bracket (403), and an arc-shaped mounting plate (405) is provided at the end of the support rod (404). A plurality of fill lights are provided at the lower end of the arc-shaped mounting plate (405). The mounting brackets (403) and support rods (404) are staggered vertically.

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