A system for extracting and detecting acid-base contaminants on a substrate material surface

Abstract

The application discloses a substrate material surface acid-base contaminant extraction and detection system, which comprises a base for providing multi-dimensional motion simulating manual shaking; an extraction container installed on the base and used for supporting a substrate material; a cover arranged above the extraction container and used for isolating an external environment; a gas protection subsystem in communication with the inside of the cover and used for providing protective gas into the extraction container; an extraction liquid adding subsystem used for quantitatively adding extraction liquid to the surface of the substrate material; a sampling pipeline used for guiding liquid samples after extraction out; a switching valve connected to the output end of the sampling pipeline; an online detection subsystem with an input end connected to the sampling pipeline through the switching valve and used for performing online chromatographic analysis on the liquid samples; and a waste liquid treatment subsystem connected to the switching valve and used for discharging residual waste liquid in the extraction container. Through the embodiment of the application, the extraction process is automated, the sample pollution risk is reduced, and the detection efficiency is improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, specifically to a system for extracting and detecting acid and alkali contaminants on the surface of substrate materials. Background Technology

[0002] In semiconductor manufacturing processes, the cleanliness of the substrate material (such as silicon wafers and silicon carbide wafers) is a key factor determining the performance and yield of integrated circuits. Even trace amounts of acid and alkali contaminants (such as sulfur dioxide) existing at the ppt (parts per trillion) level are crucial. - ,Cl - NO3 - NH4 + Even small amounts of surface contaminants (such as carbon dioxide, sulfur dioxide, and particulate matter) can introduce defects at nanoscale process nodes, corrode substrates, and lead to device failure. Therefore, developing high-precision and high-reliability surface contaminant detection technologies is crucial, and efficient and pollution-free extraction of surface contaminants is the primary and critical step in the detection process. Currently, the industry commonly uses manual methods to extract acid and alkali contaminants from substrate materials. This method typically involves the operator using a handheld vacuum pen to adsorb the substrate material, exposing it to the environment, then covering its surface with an extraction solution and extracting it by manual shaking. After extraction, the extract is transferred to a sample vial using a pipette and finally sent to an ion chromatograph for offline analysis.

[0003] However, the aforementioned existing technologies have the following prominent drawbacks, which severely restrict the accuracy and efficiency of detection:

[0004] 1. Throughout the extraction process, the substrate material is exposed to the laboratory environment for a long time, making it susceptible to contamination by impurities in the air (such as ammonia exhaled by humans), which directly affects the authenticity of the test results.

[0005] 2. The extraction effect is overly dependent on the operator's skill and stability. Manual shaking makes it difficult to ensure the uniformity and thoroughness of the extract coverage, resulting in poor repeatability of the extraction results.

[0006] 3. During the sample transfer process, the sample needs to go through multiple intermediate steps such as pipettes and sample vials, which greatly increases the risk of sample contamination and reduces the accuracy of the final test data.

[0007] In summary, existing technologies lack a dedicated extraction system capable of automation, closed-loop operation, and online monitoring to overcome the contamination, uncertainty, and inefficiency associated with manual operation. The purpose of this application is to address at least one of these shortcomings by proposing an innovative extraction and detection system for acid and alkali contaminants on substrate material surfaces. Utility Model Content

[0008] This application aims to solve at least one technical problem existing in the prior art. Specifically, the embodiments of this application provide a substrate material surface acid and alkali contaminant extraction and detection system to solve the problems of pollution, uncertainty and low efficiency caused by manual operation in the prior art.

[0009] The objective of this application can be achieved through the following technical solutions:

[0010] This application provides a system for extracting and detecting acid and alkali contaminants on the surface of a substrate material, comprising:

[0011] The base is a six-degree-of-freedom platform used to provide multi-dimensional motion simulating artificial shaking;

[0012] An extraction container, mounted on the base, is used to support the substrate material;

[0013] A cover is placed over the extraction container to isolate it from the external environment;

[0014] A gas protection subsystem, connected to the interior of the enclosure, is used to provide protective gas to the extraction container;

[0015] An extract addition subsystem, whose output end passes through the cover and extends above the substrate material inside the extraction container, is used to quantitatively add extract to the surface of the substrate material.

[0016] The sampling tubing has its inlet end passing through the cover and extending to the bottom of the extraction container, for exporting the liquid sample after extraction;

[0017] A switching valve is connected to the output end of the sampling pipeline;

[0018] An online detection subsystem, whose input is connected to the sampling pipeline via the switching valve, is used for online chromatographic analysis of the liquid sample; and

[0019] A waste liquid treatment subsystem is connected to the switching valve and is used to discharge the remaining waste liquid in the extraction container.

[0020] Optionally, the gas protection subsystem includes a nitrogen source, a first buffer bottle, and a second buffer bottle connected in sequence, with the output end of the second buffer bottle connected to the air inlet of the cover.

[0021] Optionally, the extract addition subsystem includes an extract storage bottle, a metering pump, and an anion capture column connected in sequence, with the output end of the anion capture column extending through a pipeline above the substrate material inside the extraction container.

[0022] Optionally, the waste liquid treatment subsystem includes a first peristaltic pump and a first waste liquid tank, wherein the input end of the first peristaltic pump is connected to the switching valve and the output end is connected to the first waste liquid tank.

[0023] Optionally, the online detection subsystem includes an ion chromatograph, a second peristaltic pump, and a second waste liquid tank. The inlet of the ion chromatograph is connected to the switching valve via a three-way connector, the outlet of the ion chromatograph is connected to the input of the second peristaltic pump, and the output of the second peristaltic pump is connected to the second waste liquid tank.

[0024] Optionally, the substrate material surface acid and alkali contaminant extraction and detection system further includes a cleaning subsystem, which includes a cleaning solution storage bottle connected to an interface of the switching valve via a pipeline.

[0025] Optionally, the extraction container includes:

[0026] The base has a flat groove in its middle for placing substrate material.

[0027] The top cover has a ring-shaped structure and is movably connected to the base;

[0028] A pressure ring is detachably disposed in the recessed area of ​​the upper cover for pressing the edge of the substrate material; a sealing ring is embedded at the bottom of the pressure ring.

[0029] Optionally, both the base and the top cover are made of polypropylene.

[0030] Optionally, the base and the top cover are connected by two hinges, which are hinges that can be stopped at any position.

[0031] Optionally, the extraction container may further include buckles on both sides of the base or the top cover for fastening and fixing the top cover to the base.

[0032] The above-described one or more embodiments of this application have at least one or more of the following beneficial effects:

[0033] 1. The six-degree-of-freedom platform replaces manual shaking, automating the extraction process, avoiding contamination such as ammonium ions introduced by human operation, while ensuring uniform shaking frequency and amplitude, thus improving extraction repeatability.

[0034] 2. The enclosure works in conjunction with the gas protection subsystem to create a sealed, inert environment that isolates external air impurities and prevents the substrate material from being contaminated during the extraction process.

[0035] 3. The quantitative addition of extract is directly integrated with online detection, reducing intermediate steps such as pipette transfer and sample vial dispensing, thereby reducing the risk of sample contamination and improving the accuracy of test results.

[0036] 4. Each subsystem is integrated through switching valves to achieve continuous operation of extraction, detection, waste liquid treatment and pipeline cleaning, thereby improving detection efficiency and making it suitable for large-volume substrate material detection scenarios. Attached Figure Description

[0037] The present application will be further described below with reference to the accompanying drawings.

[0038] Figure 1 This is a schematic diagram of the structure of the substrate material surface acid and alkali contaminant extraction and detection system in one embodiment of this application;

[0039] Figure 2 This is a perspective view of the extraction container in one embodiment of this application;

[0040] Figure 3 This is a cross-sectional view of the extraction container in one embodiment of this application.

[0041] Explanation of reference numerals in the attached figures:

[0042] 10. Base; 11. Extraction container; 111. Base; 112. Top cover; 113. Pressure ring; 114. Sealing ring; 115. Hinge; 116. Buckle; 12. Cover; 13. Sampling pipeline; 14. Switching valve; 15. Nitrogen source; 16. First buffer bottle; 17. Second buffer bottle; 18. Extraction solution storage bottle; 19. Metering pump; 20. Anion capture column; 21. First peristaltic pump; 22. First waste liquid tank; 23. Ion chromatograph; 24. Second peristaltic pump; 25. Second waste liquid tank; 26. T-connector. Detailed Implementation

[0043] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0044] Please see Figure 1 As shown, in some embodiments, this application provides a substrate material surface acid and alkali contaminant extraction and detection system, including a base 10, an extraction container 11, a cover 12, a gas protection subsystem, an extraction liquid addition subsystem, a sampling pipeline 13, a switching valve 14, an online detection subsystem, and a waste liquid treatment subsystem.

[0045] The base 10 is a six-degree-of-freedom platform with a standardized installation interface reserved on the top of the platform. The extraction container 11 is fixed to the installation interface of the base 10 by bolts or buckles 116 to ensure that the extraction container 11 moves without displacement when it moves with the base 10.

[0046] The container body of the extraction container 11 is rigidly connected to the base 10. Its internal cavity size is adapted to the substrate material (8-inch (200mm), 12-inch (300mm) silicon substrate and 6-inch (150mm) silicon carbide substrate). The top opening of the container is sealed and connected to the bottom of the cover 12.

[0047] The cover 12 is made of polypropylene and has an inverted barrel-shaped structure. The bottom edge is equipped with a sealing strip and is fastened to the top edge of the extraction container 11 by buckle 116 to achieve complete sealing. The side wall of the cover 12 has 3 connection holes and 3 vent holes, which are used to connect the gas protection subsystem, the extract liquid addition subsystem and the sampling pipeline 13, respectively. The vent holes have built-in dust filters.

[0048] The gas protection subsystem is connected to one of the connection holes of the enclosure 12 via a pipeline, with the end of the pipeline extending to the upper part of the enclosure 12 to ensure that the protective gas can evenly cover the internal space of the container.

[0049] The output pipe of the extractant addition subsystem passes through the second connection hole of the cover 12 and is directly facing the center area of ​​the substrate material inside the extraction container 11, ensuring that the extractant is evenly sprayed on the substrate surface.

[0050] The input end of the sampling line 13 passes through the third connection hole of the cover 12 and extends to the lowest point of the bottom of the extraction container 11; the output end is directly connected to the 0 position interface of the switching valve 14.

[0051] The switching valve 14 is a multi-channel electromagnetic switching valve 14. In addition to the 0 position which is connected to the sampling pipeline 13, it is also equipped with the 1, 2 and 3 positions, which correspond to the online detection subsystem, the waste liquid treatment subsystem and the cleaning subsystem, respectively.

[0052] The online detection subsystem is connected to the No. 1 port of the switching valve 14 via a pipeline.

[0053] The waste liquid treatment subsystem is connected to the No. 2 port of the switching valve 14 via a pipeline.

[0054] In this embodiment, a six-degree-of-freedom platform replaces manual shaking, automating the extraction process, avoiding contamination such as ammonium ions introduced by human operation, while ensuring uniform shaking frequency and amplitude, thus improving extraction repeatability.

[0055] The cover 12 works in conjunction with the gas protection subsystem to create a sealed inert environment, isolating external air impurities and preventing the substrate material from being contaminated during the extraction process.

[0056] The quantitative addition of extract is directly integrated with online detection, reducing intermediate steps such as pipette transfer and sample vial dispensing, thereby lowering the risk of sample contamination and improving the accuracy of test results.

[0057] Each subsystem is integrated through switching valve 14 to achieve continuous operation of extraction, detection, waste liquid treatment and pipeline cleaning, thereby improving detection efficiency and making it suitable for large-volume substrate material detection scenarios.

[0058] Please see Figure 1 As shown, in some embodiments, the gas protection subsystem includes a nitrogen source 15, a first buffer bottle 16, and a second buffer bottle 17 connected in sequence, with the output end of the second buffer bottle 17 connected to the air inlet of the cover 12.

[0059] Specifically, the nitrogen source 15 uses a high-pressure nitrogen cylinder. The first buffer bottle 16 is filled with electronic-grade ultrapure water, and the output pipe of the nitrogen source 15 is inserted below the ultrapure water level in the first buffer bottle 16. The nitrogen is washed with water to remove impurities. The second buffer bottle 17 is an empty bottle, connected to the top outlet of the first buffer bottle 16 via a pipe. It is used to stabilize the nitrogen flow rate and avoid airflow fluctuations. At the same time, it can trap water vapor in the nitrogen through cylinder collision. The output pipe of the second buffer bottle 17 is connected to the air inlet of the cover 12.

[0060] Nitrogen gas is washed with water in the first buffer bottle 16 to remove any ionic impurities that may be present in the gas, preventing the protective gas itself from contaminating the substrate material. The second buffer bottle 17 eliminates pulsations in the nitrogen gas flow, ensuring a stable flow rate of nitrogen gas into the enclosure 12, ensuring thorough air replacement within the container, maintaining a stable inert environment, and further improving the cleanliness of the extraction process.

[0061] Please see Figure 1 As shown, in some embodiments, the extract addition subsystem includes an extract storage bottle 18, a metering pump 19, and an anion trapping column 20 connected in sequence, with the output end of the anion trapping column 20 extending through a pipeline above the substrate material inside the extraction container 11.

[0062] The metering pump 19 precisely controls the amount of extraction solution (such as ultrapure water) used, avoiding incomplete extraction or deviations in the final impurity content calculation caused by inaccurate dosage when added manually, thus improving the controllability of the extraction process. The anion capture column 20 pre-treats the extraction solution, removing anion impurities to ensure that the purity of the extraction solution itself meets the detection requirements, avoiding background interference, and improving the sensitivity of detecting trace contaminants on the substrate surface.

[0063] Please see Figure 1 As shown, in some embodiments, the waste liquid treatment subsystem includes a first peristaltic pump 21 and a first waste liquid tank 22. The input end of the first peristaltic pump 21 is connected to the switching valve 14, and the output end is connected to the first waste liquid tank 22.

[0064] The first peristaltic pump 21 can actively extract the remaining waste liquid in the extraction container 11 to avoid waste liquid residue in the container and prevent cross-contamination in subsequent testing; at the same time, the pumping rate of the first peristaltic pump 21 is controllable to avoid negative pressure in the container due to excessively fast pumping, which would affect the stability of the equipment.

[0065] The liquid level monitoring and alarm function of the first waste liquid tank 22 makes it convenient for operators to handle waste liquid in a timely manner, avoid waste liquid overflow and environmental pollution, and improve the safety and convenience of equipment use.

[0066] Please see Figure 1 As shown, in some embodiments, the online detection subsystem includes an ion chromatograph 23, a second peristaltic pump 24, and a second waste liquid tank 25. The ion chromatograph 23 is selected to have an automatic sample injection function. The injection port is connected to the interface of the switching valve 141 via a three-way connector 26. The other two interfaces of the three-way connector 26 are connected to the anion detection inlet and the cation detection inlet of the ion chromatograph 23, respectively. The second peristaltic pump 24 is installed between the sample outlet of the ion chromatograph 23 and the second waste liquid tank 25 to extract the waste liquid after chromatograph analysis, preventing waste liquid residue inside the instrument. The rotation speed of the second peristaltic pump 24 is matched to the chromatograph analysis rate to ensure that the waste liquid is discharged into the second waste liquid tank 25 in a timely manner.

[0067] The ion chromatograph 23 is directly connected to the sampling tubing 13, enabling online injection of the extract, reducing sample transfer time, and improving detection efficiency. Simultaneously, it avoids changes in sample components during transfer, ensuring the accuracy of the detection data. The second peristaltic pump 24 provides the power for sample extraction, drawing the sample into the ion chromatography quantitative loop for analysis. Simultaneously, it promptly discharges excess sample solution to the waste liquid, preventing waste liquid from depositing in the chromatograph flow path and extending the instrument's lifespan.

[0068] Please see Figure 1 As shown, in some embodiments, the substrate material surface acid and alkali contaminant extraction and detection system further includes a cleaning subsystem, which includes a cleaning solution storage bottle (in this application, it is the same bottle as the extraction solution storage bottle 18), and the cleaning solution storage bottle is connected to an interface of the switching valve 14 through a pipeline.

[0069] Specifically, the cleaning solution storage bottle contains electronic-grade ultrapure water (from the same source as the extraction solution), which is connected to the switching valve at position 143 via a pipeline; the pipeline is equipped with a solenoid valve, which is controlled by the control system. A nitrogen source 15 is connected to the cleaning solution storage bottle.

[0070] During cleaning, switching valve 14 is switched to the 0-3 connected state, and nitrogen source 15 pressurizes ultrapure water into sampling pipeline 13 through cleaning solution storage bottle. After the cleaning solution flows through switching valve 14 and sampling pipeline 13, switching valve 14 switches to 0-2 according to the set time. At the same time, the waste liquid system is activated to discharge the cleaning solution in pipeline 13 to the waste liquid. The cleaning time is set according to the volume of pipeline 13 until it is just full, ensuring that the residual sample in the pipeline is thoroughly rinsed.

[0071] A dedicated cleaning subsystem enables online cleaning of the sampling pipeline 13 and the switching valve 14, avoiding cross-contamination during the testing of different batches of samples and ensuring the accuracy of the test results. Furthermore, the cleaning fluid is propelled by nitrogen pressurization, eliminating the need for an additional power unit and simplifying the equipment structure. Simultaneously, the cleaning fluid and extraction fluid share the same origin, preventing the introduction of new impurities during the cleaning process and improving the cleaning effect.

[0072] Please see Figure 1-3 As shown, in some embodiments, the extraction container 11 includes a base 111, a top cover 112, and a pressure ring 113.

[0073] The base 111 is made of polypropylene (PP) and has a circular flat structure, providing sufficient structural strength to support the weight of the substrate material, extractant, and other components. A flat groove for placing the substrate material is formed in the center of the base 111. The shape of the groove matches the shape of the substrate material (e.g., a circular groove for a circular substrate). The diameter of the groove is 1mm-2mm larger than the diameter of a 12-inch substrate, and the depth is approximately 0.5mm-5mm, ensuring that the substrate material can be placed stably without significant displacement. The flatness error of the bottom surface of the groove is ≤0.01mm to prevent unevenness from causing insufficient contact between the substrate material and the extractant, which could affect the extraction efficiency of contaminants.

[0074] The top cover 112 has a ring-shaped structure. The inner ring diameter matches the diameter of the flat groove on the base 111, and the outer ring diameter matches the outer dimensions of the base 111. The top cover 112 and the base 111 are assembled by a movable connection (such as a hinge 115), which allows for vertical opening and closing relative to the base 111, facilitating the placement and removal of the substrate material.

[0075] The retaining ring 113 is made of polyetheretherketone (PEEK) material. The retaining ring 113 is annular in shape, and its outer diameter is either interference-fitted or transition-fitted with the inner ring diameter of the upper cover 112. It is detachably connected to the recessed area of ​​the upper cover 112 via an insert method. The bottom of the retaining ring 113 can be flush with the bottom of the upper cover 112, or the bottom of the retaining ring 113 can partially extend out of the inner ring of the upper cover 112. The inner diameter of the retaining ring 113 is designed according to the substrate material size. For 8-inch (200mm), 12-inch (300mm) silicon substrates, and 6-inch (150mm) silicon carbide substrates, retaining rings 113 with inner diameters of 190mm, 290mm, and 140mm are designed respectively, ensuring that the retaining ring 113 can accurately cover the edge area of ​​the substrate material. An annular groove is formed at the bottom of the pressure ring 113, and a sealing ring 114 (made of fluororubber) is embedded in the groove. The height of the sealing ring 114 is 0.5mm-1mm higher than the groove opening. When the pressure ring 113 presses against the substrate, the sealing ring 114 deforms to achieve a seal. The combined structure of the pressure ring 113 and the sealing ring 114 can both press the substrate material to prevent substrate displacement during extraction and achieve a seal for the extract to prevent leakage.

[0076] In some embodiments, both the base 111 and the top cover 112 are made of polypropylene. The low ion leaching properties of polypropylene prevent the container itself from releasing ionic impurities into the extraction solution, thus preventing background interference in the detection of contaminants on the substrate surface and ensuring the accuracy of the detection results. At the same time, polypropylene is resistant to acid and alkali corrosion, has a long service life, and reduces equipment maintenance costs.

[0077] Please see Figure 1-3 As shown, in some embodiments, the base 111 and the top cover 112 are connected by two hinges 115. The hinges 115 are existing damping or friction-type structures that can stop at any position. One end of the hinge 115 is fixedly connected to the outer wall of the base 111 by bolts, and the other end is fixedly connected to the outer wall of the top cover 112 by bolts, so that the top cover 112 can stop at any height within a certain range above the base 111, which facilitates the quick completion of substrate material handling operations and improves work efficiency.

[0078] Please see Figure 1-3 As shown, in some embodiments, the extraction container 11 further includes latches 116 disposed on both sides of the base 111 or the top cover 112 for fastening and fixing the top cover 112 and the base 111. The latches 116 are existing structures and will not be described in detail here. The number of latches 116 usually matches the number of hinges 115 (e.g., two hinges 115 correspond to two latches 116), and the latches 116 and hinges 115 are evenly distributed in the circumferential direction (e.g., hinges 115 are installed at both ends of a diameter, and latches 116 are installed at the other end of a diameter, forming a symmetrical structure), ensuring that after the top cover 112 is closed, the latches 116 can apply a fastening force evenly from both sides, so that the top cover 112 and the base 111 fit tightly together.

[0079] The buckle 116 has a simple structural design. The buckling and unlocking operations can be completed by simply rotating the movable end. The operation is convenient and fast. Compared with bolt fastening and other methods, it greatly shortens the opening and closing time of the extraction container 11 and improves the convenience of substrate material handling and device operation.

[0080] The foregoing has provided a detailed description of one embodiment of this application, but the description is merely a preferred embodiment and should not be construed as limiting the scope of this application. All equivalent variations and modifications made within the scope of this application should still fall within the patent coverage of this application.

[0081] It should be noted that the terms "first," "second," and similar terms used in this application do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Descriptions in this application regarding directions such as "left," "right," "left side," "right side," "upper part," "lower part," "top," and "bottom" are defined based on the orientation or positional relationships shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, not to indicate or imply that the described structure must be constructed and operated in a specific orientation, and therefore should not be construed as limiting this application. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0082] In the description of this application, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

Claims

1. A system for extracting and detecting acid and alkali contaminants on the surface of a substrate material, characterized in that, include: The base is a six-degree-of-freedom platform used to provide multi-dimensional motion simulating artificial shaking; An extraction container, mounted on the base, is used to support the substrate material; A cover is placed over the extraction container to isolate it from the external environment; A gas protection subsystem, connected to the interior of the enclosure, is used to provide protective gas to the extraction container; An extract addition subsystem, whose output end passes through the cover and extends above the substrate material inside the extraction container, is used to quantitatively add extract to the surface of the substrate material. The sampling tubing has its inlet end passing through the cover and extending to the bottom of the extraction container, for exporting the liquid sample after extraction; A switching valve is connected to the output end of the sampling pipeline; An online detection subsystem, whose input is connected to the sampling pipeline via the switching valve, is used for online chromatographic analysis of the liquid sample; and A waste liquid treatment subsystem is connected to the switching valve and is used to discharge the remaining waste liquid in the extraction container.

2. The substrate material surface acid and alkali contaminant extraction and detection system according to claim 1, characterized in that, The gas protection subsystem includes a nitrogen source, a first buffer bottle, and a second buffer bottle connected in sequence, with the output end of the second buffer bottle connected to the air inlet of the cover.

3. The substrate material surface acid and alkali contaminant extraction and detection system according to claim 1, characterized in that, The extraction solution addition subsystem includes an extraction solution storage bottle, a metering pump, and an anion capture column connected in sequence. The output end of the anion capture column extends through a pipeline to the top of the substrate material inside the extraction container.

4. The substrate material surface acid and alkali contaminant extraction and detection system according to claim 1, characterized in that, The waste liquid treatment subsystem includes a first peristaltic pump and a first waste liquid tank. The input end of the first peristaltic pump is connected to the switching valve, and the output end is connected to the first waste liquid tank.

5. The substrate material surface acid and alkali contaminant extraction and detection system according to claim 1, characterized in that, The online detection subsystem includes an ion chromatograph, a second peristaltic pump, and a second waste liquid tank. The inlet of the ion chromatograph is connected to the switching valve via a three-way connector, the outlet of the ion chromatograph is connected to the input of the second peristaltic pump, and the output of the second peristaltic pump is connected to the second waste liquid tank.

6. The substrate material surface acid and alkali contaminant extraction and detection system according to claim 1, characterized in that, The substrate material surface acid and alkali contaminant extraction and detection system also includes a cleaning subsystem, which includes a cleaning solution storage bottle connected to an interface of the switching valve via a pipeline.

7. The substrate material surface acid and alkali contaminant extraction and detection system according to claim 1, characterized in that, The extraction container includes: The base has a flat groove in its middle for placing substrate material. The top cover has a ring-shaped structure and is movably connected to the base; A pressure ring is detachably disposed in the recessed area of ​​the upper cover for pressing the edge of the substrate material; a sealing ring is embedded at the bottom of the pressure ring.

8. The substrate material surface acid and alkali contaminant extraction and detection system according to claim 7, characterized in that, Both the base and the top cover are made of polypropylene.

9. The substrate material surface acid and alkali contaminant extraction and detection system according to claim 7, characterized in that, The base and the top cover are connected by two hinges, which are hinges that can stop at any position.

10. The substrate material surface acid and alkali contaminant extraction and detection system according to claim 7, characterized in that, The extraction container also includes buckles on both sides of the base or the top cover for fastening and fixing the top cover and the base.

Images