A scanning probe microscope probe for large size samples

Abstract

The utility model relates to a kind of scanning probe microscope probe of large-size sample, including support assembly and probe component, the probe component is installed on the support assembly;Wherein, the probe component includes moving assembly, probe base, probe component and frame, the probe base is installed on the support assembly, the moving assembly is installed on the probe base, the frame is installed on the probe base, the probe component is installed on the frame, and make the probe component be located above the moving assembly. The movement of moving assembly is realized to the movement of sample, so that probe component can scan most areas of sample;By integrated compact design, size is significantly reduced and stress structure is optimized;The stiffness of the frame can improve the resistance of probe to resist external vibration and thermal drift by setting the integrally-formed high-rigidity arcuate frame.

Description

Technical Field

[0001] This utility model relates to the field of microscopy technology, and in particular to a scanning probe microscope probe for large-size samples. Background Technology

[0002] With the expansion of application requirements, the demand for high-resolution scanning probe microscopy analysis of wafer-level samples (such as semiconductor wafers, large-area functional thin films, biological tissue sections, etc.) is increasing. However, the standard scanning probe microscope probe structure design is mainly for samples of millimeter or smaller size. There is no mature design for wafer-level samples (such as 2-inch, 4-inch, etc.). When dealing with large-sized samples, a series of challenges such as structural rigidity, positioning ability and vibration resistance will be faced. Therefore, a scanning probe microscope probe for large-sized samples is proposed. Utility Model Content

[0003] This invention provides a scanning probe microscope probe for large-size samples, which solves at least one of the above-mentioned technical problems.

[0004] This utility model provides a scanning probe microscope probe for large-size samples, including a support assembly and a probe assembly, wherein the probe assembly is mounted on the support assembly; The probe assembly includes a movable component, a probe base, a probe assembly, and a frame. The probe base is mounted on the support component, the movable component is mounted on the probe base, the frame is mounted on the probe base, and the probe assembly is mounted on the frame, such that the probe assembly is positioned above the movable component.

[0005] In one embodiment, the moving component includes a linear moving stage and a rotary moving stage, the linear moving stage being mounted on the probe base and the rotary moving stage being mounted on the linear moving stage; Alternatively, the rotary stage is mounted on the probe base, and the linear stage is mounted on the rotary stage.

[0006] In one embodiment, the moving component includes a plurality of linear motion stages, which are stacked to enable the sample on the moving component to move along the first direction and the second direction.

[0007] In one embodiment, the linear motion stage includes a base plate, cross roller guides, multiple sets of first piezoelectric ceramic assemblies, a sliding plate, and a top plate. The multiple sets of first piezoelectric ceramic assemblies are mounted on the base plate and abut against the sliding plate. The sliding plate is mounted on the bottom of the top plate. The cross roller guides are respectively provided on both sides of the sliding plate, and the cross roller guides connect the bottom of the top plate to the base plate.

[0008] In one embodiment, the rotating stage includes a rotating base, a piezoelectric ceramic mounting base, a plurality of second piezoelectric ceramic assemblies, a first rotating shaft, a bearing, and a second rotating shaft. The piezoelectric ceramic mounting base is mounted on the rotating base. The plurality of second piezoelectric ceramic assemblies are mounted at equal intervals along the circumference of the piezoelectric ceramic mounting base. The piezoelectric ceramic mounting base is sleeved on the outside of the first rotating shaft, such that the plurality of second piezoelectric ceramic assemblies abut against the first rotating shaft. The first rotating shaft and the second rotating shaft are connected by the bearing.

[0009] In one embodiment, a fixing seat is further included. The fixing seat is sleeve-shaped and fitted around the outer periphery of the piezoelectric ceramic mounting base, such that the lower end of the fixing seat is connected to the rotating base, and the inner wall of the fixing seat is connected to the bearing.

[0010] In one embodiment, the support assembly includes a support base and a plurality of magnetic damping magnets, the probe base is disposed on the support base, and the plurality of magnetic damping magnets are disposed between the probe base and the support base.

[0011] In one embodiment, the system further includes multiple support rods and multiple sets of elastic elements. The multiple support rods are arranged at equal intervals along the circumference of the support base. One end of each elastic element is connected to the top of the support rod, and the other end is connected to the probe base.

[0012] In one embodiment, the frame is arched, and the top of the frame has mounting holes for mounting the probe assembly.

[0013] In one embodiment, the probe assembly includes a movable frame and a probe, the probe being mounted at a mounting hole in the frame via the movable frame.

[0014] Compared with the prior art, the advantages of this utility model are that the sample is moved by the moving component, enabling the probe assembly to scan most of the sample area; the size is significantly reduced and the stress structure is optimized through the integrated compact design; the one-piece molded high-rigidity arched frame improves the probe's resistance to external vibration and thermal drift, and its stable geometry ensures that the relative position between the probe assembly mounted on it and the sample will not change due to external vibration, thereby improving the resolution of atomic-level images. Attached Figure Description

[0015] The present invention will be described in more detail below based on embodiments and with reference to the accompanying drawings.

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is an exploded view of the linear moving stage of this utility model; Figure 3 This is a schematic diagram of the state of the linear moving stage of this utility model; Figure 4 This is a schematic diagram of the structure of the rotating moving platform of this utility model; Figure 5 yes Figure 4 Exploded view; Figure label: 1. Support assembly; 11. Support base; 12. Magnetic damping magnet; 13. Support rod; 14. Elastic element; 2. Probe assembly; 210. Linear moving stage; 211. First piezoelectric ceramic assembly; 212. Base plate; 213. Cross roller guide; 214. Sliding plate; 215. Top plate; 220. Rotary moving stage; 221. Rotary base; 222. Piezoelectric ceramic mounting base; 223. Second piezoelectric ceramic assembly; 224. First rotating shaft; 225. Bearing; 226. Fixing base; 227. Second rotating shaft; 23. Moving frame; 24. Probe; 25. Frame; 26. Probe base; 3. Sample. Detailed Implementation

[0017] The present invention will be further described below with reference to the accompanying drawings.

[0018] While existing scanning probe microscope probes can meet the high-resolution requirements of conventional millimeter-scale samples, they are limited by structural rigidity, positioning range, and vibration resistance when used for large-scale wafer-level samples, failing to achieve stable and reliable atomic-level resolution imaging. The scanning probe microscope probe design in this invention solves the problem of existing probes' inability to effectively characterize large-scale wafer-level samples, overcoming the limitations of millimeter-scale small samples while maintaining atomic-level resolution at the wafer-level.

[0019] Please refer to Figure 1 A scanning probe microscope probe for large-size samples includes a support assembly 1 and a probe assembly 2, with the probe assembly 2 mounted on the support assembly 1. The probe assembly 2 includes a movable component, a probe base 26, a probe assembly, and a frame 25. The probe base 26 is mounted on the support assembly 1, the movable component is mounted on the probe base 26, and the frame 25 is mounted on the probe base 26. The probe assembly is mounted on the frame 25, such that the probe assembly is positioned above the movable component.

[0020] To better implement this utility model, refer to Figure 1 and Figure 2In one embodiment, the moving component includes a linear moving stage 210 and a rotary moving stage 220. The linear moving stage 210 is mounted on the probe base 26, and the rotary moving stage 220 is mounted on the linear moving stage 210. Alternatively, the rotary moving stage 220 is mounted on the probe base 26, and the linear moving stage 210 is mounted on the rotary moving stage 220. The moving component enables the sample 3 to move along a first direction and rotate about the axis of the rotary moving stage 220.

[0021] Specifically, such as Figure 2 and Figure 3 As shown, the linear motion stage 210 includes a base plate 212, a cross roller guide rail 213, multiple sets of first piezoelectric ceramic assemblies 211, a sliding plate 214, and a top plate 215. The multiple sets of first piezoelectric ceramic assemblies 211 are mounted on the base plate 212 and abut against the sliding plate 214. The sliding plate 214 is mounted on the bottom of the top plate 215. Cross roller guide rails 213 are provided on both sides of the sliding plate 214, and the cross roller guide rails 213 connect the bottom of the top plate 215 to the base plate 212. That is, the cross roller guide rails 213 include inner rails and outer rails. The inner sides of the base plate 212 are connected to the outer rails of one cross roller guide rail 213, and the bottom sides of the top plate 215 are connected to the inner rails of one cross roller guide rail 213, so that the base plate 212 and the top plate 215 can slide relative to each other. With the direction of the cross roller track as the first direction, and the installation direction of the cross roller guide 213 and the sliding plate 214 being consistent, in this embodiment, two sets of first piezoelectric ceramic groups 211 are preferably provided. Under the operation of the first piezoelectric ceramic groups 211, the sliding plate 214 and the top plate 215 move, and the top plate 215 moves along the direction of the cross roller guide 213, thereby driving the rotary moving stage 220 to move in the first direction, that is, driving the sample 3 to move in the first direction. Figure 3 Figures a, 3b, and 3c show the working state diagrams of the linear motion stage 210.

[0022] Specifically, such as Figure 4 and Figure 5As shown, the rotary moving stage 220 includes a rotary base 221, a piezoelectric ceramic mounting base 222, multiple second piezoelectric ceramic assemblies 223, a first rotating shaft 224, a bearing 225, a second rotating shaft 227, and a fixed base 226. The piezoelectric ceramic mounting base 222 is mounted on the rotary base 221. The multiple second piezoelectric ceramic assemblies 223 are installed at equal intervals along the circumference of the piezoelectric ceramic mounting base 222. The piezoelectric ceramic mounting base 222 is sleeved on the outside of the first rotating shaft 224, so that the multiple second piezoelectric ceramic assemblies 223 abut against the first rotating shaft 224. The first rotating shaft 224 and the second rotating shaft 227 are connected through the inner ring of the bearing 225. The fixed base 226 is sleeve-shaped and is sleeved on the outer circumference of the piezoelectric ceramic mounting base 222, so that the lower end of the fixed base 226 is connected to the rotary base 221. The inner wall of the fixed base 226 is connected to the outer ring of the bearing 225. The bearing 225 plays an axial limiting role in the entire structure. The second piezoelectric ceramic assembly 223 drives the first rotating shaft 224 to rotate, thereby causing the bearing 225 and the second rotating shaft 227 to rotate. The top of the second rotating shaft 227 is used to mount the sample 3, thus enabling the sample 3 to rotate. The linear stage 210 and the rotary stage 220 allow the probe 24 to scan most of the sample 3. The integrated and compact design of the probe significantly reduces its size and optimizes the force structure. The thermal expansion paths between the various parts are shortened, reducing thermal drift and thus achieving excellent stability.

[0023] In another embodiment, the moving component includes multiple linear moving stages 210, i.e., two linear moving stages 210 are provided and stacked to enable the sample 3 on the moving component to move along a first direction and a second direction to achieve planar motion of the sample.

[0024] To better implement this utility model, refer to Figure 1 In one embodiment, the support assembly 1 includes a support base 11, multiple magnetic damping magnets 12, multiple support rods 13, and multiple sets of elastic elements 14. A probe base 26 is mounted on the support base 11, and multiple magnetic damping magnets 12 are disposed between the probe base 26 and the support base 11. Multiple support rods 13 are evenly spaced along the circumference of the support base 11. One end of each elastic element 14 is connected to the top of the support rod 13, and the other end is connected to the probe base 26. In this embodiment, four sets of support rods 13 and elastic elements 14 are provided. The magnetic damping magnets 12 and elastic elements 14 are used to isolate vibration.

[0025] To better implement this utility model, refer to Figure 1In one embodiment, the frame 25 is arched, and the top of the frame 25 has mounting holes for mounting the probe assembly. The frame 25 includes a transverse portion and two supporting portions, and the transverse portion and the two supporting portions are integrally formed. The two ends of the transverse portion are mounted on the probe base 26 through the supporting portions, making the frame 25 arched overall. The transverse portion has mounting holes for mounting the probe assembly. To ensure that the sample 3 can move in a first direction under the drive of the linear motion stage 210, the first direction is perpendicular to the plane on which the frame 25 is located, that is, the frame 25 is horizontally positioned on the linear motion stage 210. The probe assembly includes a moving frame 23 and a probe 24, and the probe 24 is mounted at the mounting holes of the frame 25 through the moving frame 23. The probe assembly may also include a moving component that enables the probe 24 to perform two-dimensional coarse movement. This adds two-dimensional coarse movement adjustment to the probe, making the probe 24 more flexible. It can achieve small-range movement and characterization within a large wafer-level sample by moving the probe 24 without moving the sample. This two-dimensional movement may be provided in only one direction or in multiple directions, such as both the first and second directions being able to perform large-range coarse movement.

[0026] The one-piece, high-rigidity frame 25 directly determines the probe's resistance to external vibrations and thermal drift. Its stable geometry ensures that the relative position between the precision probe mounted on it and the sample remains unchanged due to external forces. This zero deformation at the dimensional scale directly translates into high resolution for obtaining atomic-level images. The probe 24 can move along a first direction, a second direction, and a third direction on the moving frame 23. The second direction is perpendicular to the first direction and lies in the same plane. The third direction is the direction that brings the probe 24 closer to the sample 3. The movement of the probe 24 in all three directions is achieved using a piezoelectric inertial motor.

[0027] To better implement this utility model, refer to Figure 1 In one embodiment, the sample 3 is mounted on the top of the moving component via multiple sets of fixing components, so that the sample 3 is located below the probe 24, preventing relative displacement of the sample 3 when the moving component moves it and thus affecting the scanning results. In this embodiment, the fixing components are preferably elastic fixing plates, which hold and fix the sample 3 by pressing it on the top of the moving component. In this embodiment, the linear stage 210 is mounted on the probe base 26, and the rotary stage 220 is mounted on the top plate 215 of the linear stage 210. The sample 3 is held on the top of the second rotation axis 227 of the rotary stage 220 by elastic fixing plates.

[0028] Although the present invention has been described with reference to preferred embodiments, various modifications can be made thereto and components can be replaced with equivalents without departing from the scope of the invention. In particular, the technical features mentioned in the various embodiments can be combined in any manner, provided there is no structural conflict. The present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A scanning probe microscope probe for large-size samples, characterized in that, It includes a support assembly and a probe assembly, wherein the probe assembly is mounted on the support assembly; The probe assembly includes a movable component, a probe base, a probe assembly, and a frame. The probe base is mounted on the support component, the movable component is mounted on the probe base, the frame is mounted on the probe base, and the probe assembly is mounted on the frame, such that the probe assembly is positioned above the movable component.

2. The scanning probe microscope probe for large-size samples according to claim 1, characterized in that, The moving component includes a linear moving stage and a rotary moving stage, wherein the linear moving stage is mounted on the probe base and the rotary moving stage is mounted on the linear moving stage; Alternatively, the rotary stage is mounted on the probe base, and the linear stage is mounted on the rotary stage.

3. The scanning probe microscope probe for large-size samples according to claim 1, characterized in that, The moving component includes multiple linear motion stages, which are stacked to enable the sample on the moving component to move along a first direction and a second direction.

4. The scanning probe microscope probe for large-size samples according to claim 2, characterized in that, The linear moving stage includes a base plate, cross roller guides, multiple sets of first piezoelectric ceramic assemblies, a sliding plate, and a top plate. The multiple sets of first piezoelectric ceramic assemblies are mounted on the base plate and abut against the sliding plate. The sliding plate is mounted on the bottom of the top plate. The cross roller guides are respectively provided on both sides of the sliding plate, and the cross roller guides connect the bottom of the top plate to the base plate.

5. The scanning probe microscope probe for large-size samples according to claim 2, characterized in that, The rotating platform includes a rotating base, a piezoelectric ceramic mounting base, multiple second piezoelectric ceramic assemblies, a first rotating shaft, a bearing, and a second rotating shaft. The piezoelectric ceramic mounting base is mounted on the rotating base. The multiple second piezoelectric ceramic assemblies are installed at equal intervals along the circumference of the piezoelectric ceramic mounting base. The piezoelectric ceramic mounting base is sleeved on the outside of the first rotating shaft, such that the multiple second piezoelectric ceramic assemblies abut against the first rotating shaft. The first rotating shaft and the second rotating shaft are connected by the bearing.

6. The scanning probe microscope probe for large-size samples according to claim 5, characterized in that, It also includes a fixing seat, which is sleeve-shaped and fitted around the outer periphery of the piezoelectric ceramic mounting base, such that the lower end of the fixing seat is connected to the rotating base, and the inner wall of the fixing seat is connected to the bearing.

7. The scanning probe microscope probe for large-size samples according to any one of claims 1-6, characterized in that, The support assembly includes a support base and a plurality of magnetic damping magnets. The probe base is disposed on the support base, and the plurality of magnetic damping magnets are disposed between the probe base and the support base.

8. The scanning probe microscope probe for large-size samples according to claim 7, characterized in that, It also includes multiple support rods and multiple sets of elastic elements. Multiple support rods are provided at equal intervals along the circumference of the support base. One end of each elastic element is connected to the top of the support rod, and the other end is connected to the probe base.

9. The scanning probe microscope probe for large-size samples according to claim 8, characterized in that, The frame is arched, and the top of the frame has mounting holes for mounting the probe assembly.

10. The scanning probe microscope probe for large-size samples according to claim 1 or 9, characterized in that, The probe assembly includes a movable frame and a probe, the probe being mounted at a mounting hole in the frame via the movable frame.

Images