Motor-driven wheeled micro-prober

Abstract

A motor-driven wheeled micro-probe station belongs to the technical field of probe stations. The probe station is composed of a plane moving module and a probe moving module. The plane moving module adopts a trolley platform, is responsible for driving the whole device to move on a test table, and can be remotely controlled or moved automatically. The probe moving module is composed of a probe clamping device, a probe lifting device and a probe steering device, and is fixed on the plane moving module. Then, the probe is adjusted in position and inclination direction by a lifting motor and a steering motor, so that the probe contacts a to-be-tested point. The probe station has a relatively simple structure, low cost and easy operation.

Description

Technical Field

[0001] This utility model relates to the field of probe station technology, specifically a self-moving miniature probe station. Background Technology

[0002] Probe stations are core equipment in precision manufacturing fields such as semiconductors, playing a crucial role throughout the entire chip lifecycle. During the R&D phase, they verify design feasibility through wafer-level testing, promptly identifying defects and preventing later cost waste. In mass production, they act as a "quality filter," eliminating defective chips, reducing ineffective packaging costs, and even optimizing processes to improve yield. Furthermore, they support performance testing of precision devices such as optoelectronics and MEMS, ensuring reliability from R&D to mass production, making them a critical link between design and manufacturing.

[0003] The core function of a probe stage is to move the probe to the sample electrode under the guidance of imaging devices such as microscope cameras; therefore, the probe's travel distance cannot be too small. A common method to achieve probe movement is a servo (or stepper) motor-complex lead screw solution. However, this solution involves a complex lead screw that occupies a very large space (its dimensions must exceed the probe's travel distance), and is also costly.

[0004] To address the aforementioned problems, this invention proposes a self-moving miniature probe station that integrates the probe with a trolley. The trolley utilizes its own independently driven wheels to achieve translation and steering, employs a braking device mounted on the trolley for braking, and utilizes a probe control module mounted on the trolley to achieve precise control of the probe's direction and height. Utility Model Content

[0005] This invention discloses a miniature probe station that can move autonomously or be remotely controlled on a test platform. Traditional probe stations rely on external transmission devices such as slide rails and robotic arms for spatial movement, thus occupying a large amount of space. This invention can move and turn autonomously or remotely, and then fine-tune the corresponding vertical and tilt positions, thus greatly saving the required space, which is particularly beneficial for testing in enclosed cavities.

[0006] The present invention adopts the following solution:

[0007] A miniature probe station that can move automatically or remotely on a test platform consists of a planar movement module and a probe motion module.

[0008] The planar movement module uses a trolley platform to drive the entire device to move on the test bench; it can be remotely controlled or move autonomously, which can be achieved using conventional existing technologies.

[0009] The further planar movement module includes a vehicle body (2), a drive wheel (5), a driven wheel (1), and a braking device; at least one driven wheel is located at the front under the vehicle body; there are at least two drive wheels, each drive wheel consisting of a drive wheel motor (6), a wheel, and corresponding support parts, the corresponding support parts causing the two wheels to be located on both sides of the rear end under the vehicle body, and each wheel is matched with a drive wheel motor (6). Two drive wheel motors (6) can be synchronized or asynchronous, and their speed and direction of rotation can be controlled separately, thereby driving the vehicle body to translate and turn; the drive wheel motors (6) are connected and controlled by a controller, microcontroller, computer, remote control, infrared remote control, etc., to move autonomously; the braking device includes a brake block (4) driven by a brake motor (7) and a brake block limiting device (3). The brake block (4) is located below the middle of the vehicle body. The brake motor (7) is fixed on the vehicle body (2). The brake motor (7) is connected to the brake block (4) through the brake block limiting device (3). The brake block limiting device (3) includes an upright limiting pipe (3.4). The limiting pipe (3.4) passes through the vehicle body (2) and is fixed to the vehicle body (2). Inside the limiting pipe (3.4) is a vertical polygonal prism cavity. A vertical motor screw (3.1) is provided at the upper end of the cavity. The brake block (4) is fixedly connected to the brake motor (7). The lower end of the motor screw (3.1) is fixedly connected to the brake block (4) through an elastic material (3.3) such as a spring. At the same time, a limit lifting slider (3.2) is provided in the limit pipe (3.4). The outer periphery of the limit lifting slider (3.2) matches the polygonal prism cavity inside the pipe (3.4), so that the limit lifting slider (3.2) can only slide freely up and down in the polygonal prism cavity but cannot rotate left and right in the polygonal prism cavity. The center of the limit lifting slider (3.2) is provided with a threaded hole. The motor screw (3.1) passes through the threaded hole and matches the threaded hole, so that the brake block (4) is pressed down onto the test platform surface under the drive of the brake motor (7), so that the vehicle body remains stable on the test platform by pressure, friction, magnetic force and other means. The brake block (4) is a block structure. The brake motor (7) is electrically connected and controlled by a controller, a microcontroller, a computer, a remote control, an infrared remote control and other control devices.

[0010] The probe motion module consists of a probe clamping device, a probe lifting device, and a probe turning device, and is fixed on the planar moving module.

[0011] The probe clamping device includes a probe (13) and a probe clamp (12). One end of the probe clamp (12) is fixed on the probe lifting device, and the other end of the probe clamp (12) clamps the end of the probe (13), so that the entire probe extends outward and can be fixed on the probe lifting device in different tilting ways.

[0012] The probe lifting device includes a lifting motor (9), an upright lifting screw (8), and a horizontal connecting plate (14); the probe steering device consists of a steering motor (11) and a steering shaft (10).

[0013] The upper end of the lifting motor (9) is engaged with the upper end of the lifting screw (8), and the lifting motor (9) drives the lifting screw (8) to rotate. At the same time, the housing or the whole of the lifting motor (9) is fixed together with the upper end of the steering shaft (10). The steering shaft (10) passes through the hole of the horizontal connecting plate (14), and the lower end of the steering shaft (10) is fixedly connected to the rotating shaft of the steering motor (11), so that the steering motor (11) can drive the steering shaft (10) to swing around the rotating shaft of the steering motor (11) in the vertical plane. The lifting screw (8) passes through the horizontal connecting plate (14) and is engaged with a screw hole, which is used to drive the connecting plate (14) to move up and down along the lifting screw (8). The lower end of the lifting screw (8) is free to suspend.

[0014] When the steering shaft (10) passes through the hole in the horizontal connecting plate (14), the diameter of the hole in the connecting plate (14) is larger than the radial dimension of the steering shaft (10).

[0015] The steering motor (11) is fixed to the vehicle body; one end of the probe clamp (12) is fixed to the probe lifting device and the other end of the probe clamp (12) is fixed to the horizontal connecting plate (14).

[0016] The lifting motor (9) and the steering motor (11) are electrically connected and controlled by control devices such as a controller, a microcontroller, a computer, a remote controller, and an infrared remote controller. The location of the controller structure in this application is not limited and is not shown in the figure.

[0017] In use, a trolley is moved and turned on the test platform, and then the lifting motor and steering motor are used to finely adjust the up and down position and tilt direction so that the probe contacts the point to be tested.

[0018] This application utilizes various forces (including but not limited to friction and magnetism) between the brake block and the plane to ensure vehicle stability. The probe motion module is fixed to the planar movement module and consists of a probe clamping device, a lifting device, and a steering device, which can adjust the probe posture (to maintain an appropriate tilt angle), height, and direction respectively. This utility model, through its self-moving and steering design, significantly saves space, making it particularly suitable for testing scenarios within enclosed cavities, effectively improving the flexibility and applicability of the probe station. This application has a relatively simple structure, low cost, and is easy to operate. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the structure corresponding to the front view of the probe station in this embodiment.

[0021] Figure 2 This is a schematic diagram of the structure corresponding to the rear view of the probe station in this embodiment;

[0022] Figure 3 This is a schematic diagram showing the combination of the side view and the front view of the probe station in this embodiment;

[0023] Figure 4 This is a schematic diagram of the planar moving module-vehicle-wheel structure, showing (a) the positional structural relationship and (b) the correspondence between the side stones and the top view.

[0024] Figure 5 The diagram shows the relationship between the planar movement module and the braking device, (a) positional relationship; (b)

[0025] Correspondence between top view and sectional view;

[0026] Figure 6 The relationship between the probe motion modules; (a) the overall external structure; (b) a side view.

[0027] 1 Driven wheel, 2 Body, 3 Brake block limiting device, 4 Brake block, 5 Drive wheel, 6 Drive wheel motor, 7 Brake motor, 8 Lifting screw, 9 Lifting motor, 10 Steering shaft, 11 Steering motor, 12 Probe clamp, 13 Probe, 14 Horizontal connecting plate, 3.1 Motor screw, 3.2 Limiting lifting slider, 3.3 Elastic material, 3.4 Limiting pipe. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present utility model, and not all of them. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present utility model. The following description, in conjunction with the accompanying drawings... Figures 1-3 This application will be described in further detail.

[0029] A probe station (overall layout as follows) Figures 1-3 As shown), by a planar movement module (including Figure 4 Body and wheels, Figure 5 Braking device), probe motion module ( Figure 6 )composition.

[0030] The planar movement module consists of a body 2, drive wheels 5, driven wheels 1, a braking device, and corresponding support parts, and is responsible for driving the entire device to move on the test platform.

[0031] The body and wheels, such as Figure 3 As shown, there are two drive wheels 5, fixed to both sides of the vehicle body. Each drive wheel consists of a drive motor 6 and corresponding supporting parts. The two drive motors are not synchronized, and their speed and direction of rotation can be controlled separately, thereby driving the vehicle body to translate and steer.

[0032] One driven wheel is fixed to the front of the vehicle body.

[0033] Braking device ( Figure 5 The system consists of a brake block 4 driven by a brake motor 7, a brake block limiting pipe 3, and corresponding supporting parts. The brake block, driven by the brake motor 7, presses against the surface of the test platform, maintaining the vehicle's stability on the platform through the force between the brake block and the surface (including but not limited to friction and magnetism). In this case, a magnetic brake block is used (the force between the corresponding slider and the test platform plane includes magnetic force). The brake block limiting device 3 is installed in a through-hole inside the vehicle body and extends to the underside of the vehicle. The brake block limiting device 3 also prevents the brake block from moving too far and tipping over the vehicle. The brake block limiting pipe 3 contains a spring for pressure buffering, used to control the pressure when the brake block is limited, thereby protecting the brake motor.

[0034] The brake block limiting device 3 includes an upright limiting pipe 3.4, which passes through the vehicle body 2 and is fixed to it. Inside the limiting pipe 3.4 is a vertical polygonal (e.g., square) prism cavity. A vertical motor screw 3.1 is fixedly connected to the brake motor 7 at the upper end of the cavity. The lower end of the motor screw 3.1 is fixedly connected to the brake block 4 via an elastic material 3.3, such as a spring. A limiting lifting slider 3.2 is also provided inside the limiting pipe 3.4. The outer periphery of the limiting lifting slider 3.2 is connected to the pipe... The polygonal prism cavity inside the track 3.4 is matched, so that the limiting lifting slider 3.2 can only slide freely up and down inside the polygonal prism cavity, but cannot rotate left and right inside the polygonal prism cavity; the limiting lifting slider 3.2 has a threaded hole in the center, and the motor screw 3.1 passes through the threaded hole and matches the threaded hole, so that under the drive of the brake motor 7, the brake block 4 is pressed down onto the surface of the test platform, and the vehicle body is kept stable on the test platform by means of pressure, friction, magnetism, etc.; the brake block 4 is a block structure as a whole.

[0035] Probe motion module ( Figure 5It consists of a probe clamping device, a probe lifting device, and a probe turning device, and is fixed on a planar moving module.

[0036] The probe clamping device consists of a probe 13 and a corresponding clamping device 12, which fixes the probe at a 45-degree angle on the probe lifting device.

[0037] The probe lifting device mainly consists of a lifting motor 9, a lifting screw 8, and a horizontal connecting plate, which is used to drive the probe clamping device to move up and down on the lifting screw.

[0038] The probe steering device consists of a steering motor 11, a steering shaft 10, and corresponding supporting parts, and is used to drive the probe lifting device and the probe clamping device to rotate around the steering shaft on the planar moving module.

[0039] It should be understood that the above are only preferred embodiments of the present utility model, and the protection scope of the present utility model is not limited to the above embodiments. All technical solutions that fall within the scope of the present utility model are protected by the present utility model.

[0040] The accompanying drawings used in the above description of the embodiments only illustrate certain embodiments of the present invention and should not be considered as limiting the scope. Those skilled in the art can obtain other related drawings based on these drawings without any inventive effort.

Claims

1. A motor-driven wheeled miniature probe station, characterized in that, It consists of a planar movement module and a probe motion module; The planar movement module uses a trolley platform to drive the entire device to move on the test bench; it can be remotely controlled or move autonomously. The probe motion module consists of a probe clamping device, a probe lifting device, and a probe turning device, and is fixed on the planar moving module. The probe clamping device includes a probe (13) and a probe clamp (12). One end of the probe clamp (12) is fixed on the probe lifting device, and the other end of the probe clamp (12) clamps the end of the probe (13), so that the entire probe extends outward and can be fixed on the probe lifting device in different tilting ways. The probe lifting device includes a lifting motor (9), an upright lifting screw (8), and a horizontal connecting plate (14); the probe steering device consists of a steering motor (11) and a steering shaft (10). The upper end of the lifting motor (9) is engaged with the lifting screw (8), and the lifting motor (9) drives the lifting screw (8) to rotate. At the same time, the housing or the whole of the lifting motor (9) is fixed together with the upper end of the steering shaft (10). The steering shaft (10) passes through the hole of the horizontal connecting plate (14), and the lower end of the steering shaft (10) is fixedly connected to the rotating shaft of the steering motor (11), so that the steering motor (11) can drive the steering shaft (10) to swing around the rotating shaft of the steering motor (11) in the vertical plane. The lifting screw (8) passes through the horizontal connecting plate (14) and is engaged with a screw hole, which is used to drive the connecting plate (14) to move up and down along the lifting screw (8). The lower end of the lifting screw (8) is free to suspend.

2. A motor-driven wheeled miniature probe station according to claim 1, characterized in that, The planar movement module includes a vehicle body (2), drive wheels (5), driven wheels (1), and a braking device; there is at least one driven wheel located at the front under the vehicle body; there are at least two drive wheels, each drive wheel consisting of a drive wheel motor (6), a wheel, and corresponding support parts, the corresponding support parts causing the two wheels to be located on both sides of the rear end under the vehicle body, each wheel corresponding to a drive wheel motor (6); the two drive wheel motors (6) can be synchronous or asynchronous, their speed and rotation direction can be controlled separately, thereby driving the vehicle body to translate and turn; the drive wheel motors (6) are connected and controlled by a controller, microcontroller, computer, remote controller, and infrared remote control to move independently; the braking device includes a brake block (4) driven by a brake motor (7) and a brake block limiting device (3), the brake block (4) is located below the middle of the vehicle body, the brake motor (7) is fixed on the vehicle body (2), the brake motor (7) is connected to the brake block (4) through the brake block limiting device (3), the brake block limiting device (3) includes an upright limiting pipe (3.4), the limiting pipe (3.4) 4) Passing through the vehicle body (2) and fixed to the vehicle body (2), the limit pipe (3.4) is a vertical polygonal prism cavity. The upper end of the cavity is provided with a vertical motor screw (3.1) and fixedly connected to the brake motor (7). The lower end of the motor screw (3.1) is fixedly connected to the brake block (4) through an elastic material (3.3). At the same time, the limit lifting slider (3.2) is provided in the limit pipe (3.4). The outer periphery of the limit lifting slider (3.2) is connected to the polygonal prism cavity inside the pipe (3.4). The matching ensures that the limit lifting slider (3.2) can only slide freely up and down in the polygonal prism cavity but cannot rotate left and right in the polygonal prism cavity; the limit lifting slider (3.2) has a threaded hole in the center, and the motor screw (3.1) passes through the threaded hole and matches the threaded hole, so that under the drive of the brake motor (7), the brake block (4) is pressed down onto the test platform surface, so that the vehicle body remains stable on the test platform; the brake block (4) is a block structure; the brake motor (7) is electrically connected and controlled by the control equipment.

3. A motor-driven wheeled miniature probe station according to claim 1, characterized in that, When the steering shaft (10) passes through the hole in the horizontal connecting plate (14), the diameter of the hole in the connecting plate (14) is greater than the radial dimension of the steering shaft (10).

4. A motor-driven wheeled miniature probe station according to claim 1, characterized in that, The steering motor (11) is fixed to the vehicle body; one end of the probe clamp (12) is fixed to the probe lifting device and the other end of the probe clamp (12) is fixed to the horizontal connecting plate (14).

5. A motor-driven wheeled miniature probe station according to claim 1, characterized in that, The lifting motor (9) and the steering motor (11) are electrically connected to the control equipment for control.

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