Uniform coater for photomask and rotating mechanism for uniform coater

Abstract

The utility model belongs to the technical field of gluing, specifically relates to a uniform gluing machine for photomask and rotary mechanism for uniform gluing machine, and the uniform gluing machine for photomask includes: the upper surface of carousel is provided with containing groove, the lower surface of mounting plate is provided with mirror panel, the upper surface of mounting plate is connected with lifting mechanism, and it includes: clutching assembly and driver, wherein the upper surface of mounting plate is connected with driver through clutching assembly, is used for driving mounting plate to descend and is docked with carousel and makes clutching assembly be in the separation state, the carousel is used for driving mounting plate and mirror panel synchronous rotation, the uniform gluing machine for photomask and rotary mechanism for uniform gluing machine make lifting mechanism drive mounting plate and be docked with carousel after, lifting mechanism continues to descend and makes clutching assembly be in the separation state, subsequently, the carousel drives mounting plate and mirror panel synchronous rotation, and the disturbance of air between mirror panel and photomask to glue is reduced, thereby preventing the corrugation on the glue surface.

Description

Technical Field

[0001] This utility model belongs to the field of coating technology, specifically relating to rotary coating, and more particularly to a photomask spin coater and a spin coater mechanism. Background Technology

[0002] The working principle of a spin coater is to apply a liquid sample to the surface of a rotating substrate, and use centrifugal force to make the sample evenly distributed on the substrate surface, ultimately forming a uniform thin film.

[0003] In related technologies, when a photomask is rotated, the adhesive on it gradually spreads out, but during this process, the adhesive is disturbed by air and produces ripples.

[0004] Therefore, how to solve the above problems is a problem that urgently needs to be solved by those skilled in the art.

[0005] It should be noted that the information disclosed in this background section is only for understanding the background technology of the present application concept, and therefore, the above description is not considered to constitute prior art information. Utility Model Content

[0006] This disclosure provides at least one spin coater for photomasks and a rotating mechanism for the spin coater.

[0007] In a first aspect, embodiments of this disclosure provide a photomask spin coater, comprising: a turntable with a receiving groove on its upper surface; a mounting plate with a mirror panel on its lower surface; and a lifting mechanism connected to the upper surface of the mounting plate, comprising: a clutch assembly and a driver; wherein the driver is connected to the upper surface of the mounting plate via the clutch assembly, and is used to drive the mounting plate to descend and dock with the turntable and to disengage the clutch assembly; the turntable is used to drive the mounting plate and the mirror panel to rotate synchronously.

[0008] In one optional embodiment, the clutch assembly includes a fixed part and a lifting part; wherein the fixed part is connected to the upper surface of the mounting plate, the lifting part is connected to a driver, and the fixed part is hung on the lifting part; the driver is used to drive the lifting part to descend so that the mounting plate on the fixed part aligns with the turntable, and to disengage the lifting part from the fixed part.

[0009] In one optional embodiment, the fixing part includes: a connecting sleeve and a limiting sleeve; wherein the lower end of the connecting sleeve is connected to the mounting plate; the limiting sleeve is disposed inside the connecting sleeve and has a pair of limiting notches on its lower end face; the fixing part is adapted to be hung on the lifting part through the limiting notches.

[0010] In one optional embodiment, the lifting part includes: a connecting shaft and a pair of hooks; wherein the upper end of the connecting shaft is connected to a driver, and the lower end of the connecting shaft extends into a limiting sleeve; the two hooks are disposed on both sides of the extension end of the connecting shaft and are respectively aligned with corresponding limiting notches; wherein the lifting part is adapted to hook the limiting notches of the fixing part by means of the hooks.

[0011] In one optional embodiment, both the connecting shaft and the connecting sleeve are provided with strong magnets; wherein the two strong magnets are arranged facing each other and repel each other, so as to press down on the fixing part when the lifting part is disengaged from the fixing part.

[0012] In one alternative embodiment, a sensor trigger rod is provided on the mounting plate; a photoelectric sensor is provided at the lower end of the connecting shaft.

[0013] In one optional embodiment, the lower surface of the mounting plate is provided with a plurality of drive pins; the upper surface of the turntable is provided with a plurality of slots; wherein, the drive pins are used to extend into the slots so that the mounting plate and the mirror panel rotate synchronously with the turntable.

[0014] In one alternative embodiment, the receiving groove is square, rectangular, circular, or a regular polygon.

[0015] Secondly, this disclosure also provides a rotating mechanism for a spin coater, comprising: a turntable with a receiving groove on its upper surface; and a mirror panel located above and connected to the turntable; wherein the turntable is adapted to drive the mirror panel to rotate synchronously for spin coat application.

[0016] In one alternative embodiment, the rotating mechanism of the spin coater further includes a mounting plate; wherein the mirror panel is disposed on the lower surface of the mounting plate.

[0017] In one optional embodiment, the lower surface of the mounting plate is provided with a plurality of drive pins; the upper surface of the turntable is provided with a plurality of slots; wherein, the drive pins are used to extend into the slots so that the mounting plate and the mirror panel rotate synchronously with the turntable.

[0018] The beneficial effects of this utility model are that, by setting a mirror panel, the lifting mechanism drives the mounting plate to connect with the turntable, and then the lifting mechanism continues to descend to disengage the clutch assembly; subsequently, the turntable drives the mounting plate and the mirror panel to rotate synchronously, thereby reducing the disturbance of the adhesive by the air between the mirror panel and the photomask, thus preventing ripples from forming on the adhesive surface.

[0019] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and the accompanying drawings.

[0020] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0021] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the structure of a photomask spin coater provided in an embodiment of the present disclosure; Figure 2 This is a cross-sectional view of a photomask spin coater provided in an embodiment of the present disclosure; Figure 3 This is a schematic diagram of the structure of a fixing part provided in an embodiment of the present disclosure; Figure 4 This is a schematic diagram of the structure of a limiting sleeve provided in an embodiment of the present disclosure; Figure 5 This is a schematic diagram of the structure of a lifting unit provided in an embodiment of the present disclosure; Figure 6 This is a schematic diagram of the positional structure of a strong magnet provided in an embodiment of this disclosure.

[0023] In the picture: 1. Turntable; 11. Receiving slot; 12. Card slot; 2. Mounting plate; 21. Induction trigger rod; 22. Transmission pin; 3. Mirror panel; 4. Lifting mechanism; 41. Clutch assembly; 411. Fixing part; 4111. Connecting sleeve; 4112. Limiting sleeve; 4113. Limiting notch; 412. Lifting part; 4121. Connecting shaft; 4122. Hanging pin; 413. Strong magnet; 414. Photoelectric sensor; 42. Driver. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0025] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, in the figures, the thickness of parts may be exaggerated or reduced for the purpose of effectively depicting the technical content.

[0026] The following detailed description, with reference to the accompanying drawings, describes some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0027] like Figure 1 , Figure 2 As shown, at least one embodiment provides a photomask spin coater, including: a turntable 1, a mounting plate 2, a mirror plate 3, and a lifting mechanism 4.

[0028] Specifically, the upper surface of the turntable 1 is provided with a receiving groove 11. After the photomask is placed in the receiving groove 11, glue is dripped onto the upper surface of the photomask using a glue-drip device.

[0029] Specifically, a mirror panel 3 is provided on the lower surface of the mounting plate 2. The mounting plate 2 is used to drive the mirror panel 3 to rise and fall. After the mounting plate 2 is connected to the turntable 1, there is a small gap between the mirror panel 3 and the photomask, and it does not come into contact with the glue on the photomask. Then the turntable 1 drives the mounting plate 2 and the mirror panel 3 to rotate synchronously, that is, the photomask and the mirror panel 3 are in a relatively stationary state.

[0030] Specifically, the lifting mechanism 4 is connected to the upper surface of the mounting plate 2; the lifting mechanism 4 includes a clutch assembly 41 and a driver 42, the driver 42 is connected to the upper surface of the mounting plate 2 through the clutch assembly 41, and is used to drive the mounting plate 2 to lift and dock with the turntable 1.

[0031] In this embodiment, after the lifting mechanism 4 drives the mounting plate 2 to dock with the turntable 1, the lifting mechanism 4 continues to descend so that the clutch assembly 41 is in a disengaged state; then the turntable 1 drives the mounting plate 2 and the mirror panel 3 to rotate synchronously, thereby reducing the disturbance of the adhesive by the air between the mirror panel 3 and the photomask, thus preventing ripples from forming on the adhesive surface.

[0032] like Figure 2As shown, in some embodiments, the clutch assembly 41 includes a fixed part 411 and a lifting part 412; wherein the fixed part 411 is connected to the upper surface of the mounting plate 2, the lifting part 412 is connected to the driver 42, and the fixed part 411 is hung on the lifting part 412; the driver 42 is used to drive the lifting part 412 down so that the mounting plate 2 on the fixed part 411 docks with the turntable 1, and to disengage the lifting part 412 from the fixed part 411.

[0033] In this embodiment, the actuator 42 may be, but is not limited to, a cylinder; the lifting part 412 is disposed on the driving end of the actuator 42, and moves downward by the drive of the actuator 42 to make the mounting plate 2 dock with the turntable 1; wherein, after the mounting plate 2 docks with the turntable 1, the actuator 42 drives the lifting part 412 to continue to descend a distance, so that the lifting part 412 disengages from the fixed part 411, that is, the lifting part 412 no longer restricts the fixed part 411, so that the fixed part 411 can rotate under the drive of the mounting plate 2.

[0034] like Figure 3 , Figure 4 As shown, in some embodiments, the fixing part 411 includes: a connecting sleeve 4111 and a limiting sleeve 4112; wherein the lower end of the connecting sleeve 4111 is connected to the mounting plate 2; the limiting sleeve 4112 is disposed inside the connecting sleeve 4111 and has a pair of limiting notches 4113 on its lower end face; the fixing part 411 is adapted to be hung on the lifting part 412 through the limiting notches 4113.

[0035] In this embodiment, the limiting sleeve 4112 is fixedly installed inside the connecting sleeve 4111 and is coaxially arranged. The existence of the limiting notch 4113 can prevent the connecting sleeve 4111 from rotating during the lifting process.

[0036] like Figure 5 As shown, in some embodiments, the lifting part 412 includes: a connecting shaft 4121 and a pair of hooks 4122; wherein the upper end of the connecting shaft 4121 is connected to the driver 42, and the lower end of the connecting shaft 4121 extends into the limiting sleeve 4112; the two hooks 4122 are disposed on both sides of the extension end of the connecting shaft 4121 and are respectively aligned with the corresponding limiting notches 4113; wherein the lifting part 412 is adapted to hook the limiting notches 4113 of the fixing part 411 through the hooks 4122.

[0037] Specifically, the two pins 4122 are located on both sides of the connecting shaft 4121 and inside the connecting sleeve 4111.

[0038] In this embodiment, the diameter of the connecting shaft 4121 is smaller than the inner diameter of the limiting sleeve 4112, so that the limiting sleeve 4112 will not be obstructed when rotating.

[0039] like Figure 6As shown, in some embodiments, both the connecting shaft 4121 and the connecting sleeve 4111 are provided with strong magnets 413; wherein, the two strong magnets 413 are arranged facing each other and repel each other, so as to press down the fixing part 411 when the lifting part 412 is disengaged from the fixing part 411.

[0040] In this embodiment, after the mounting plate 2 is engaged with the turntable 1, the mounting plate 2 will be subjected to the downward pressure of the strong magnet 413 to prevent the engagement from failing when the mounting plate 2 rotates.

[0041] like Figure 3 As shown, in some embodiments, a sensing trigger rod 21 is provided on the mounting plate 2; a photoelectric sensor 414 is provided at the lower end of the connecting shaft 4121.

[0042] In this embodiment, the turntable 1 is controlled by a servo motor. At the same time, due to the presence of the photoelectric sensor 414 and the induction trigger rod 21, the number of rotations and angle of the turntable 1 can be precisely controlled, so that the hanging pin 4122 is located below the limiting notch 4113 each time it stops rotating.

[0043] like Figure 1 As shown, in some embodiments, the lower surface of the mounting plate 2 is provided with a plurality of drive pins 22; the upper surface of the turntable 1 is provided with a plurality of slots 12; wherein, the drive pins 22 are used to extend into the slots 12 so that the mounting plate 2 and the mirror panel 3 rotate synchronously with the turntable 1.

[0044] In some embodiments, the shape of the receiving groove is square, rectangular, circular, or regular polygonal.

[0045] At least one embodiment also provides a rotating mechanism for a spin coater, comprising: a turntable 1 having a receiving groove 11 on its upper surface; and a mirror panel 3 located above the turntable 1 and connected to the turntable 1; wherein the turntable 1 is adapted to drive the mirror panel 3 to rotate synchronously for spin coater application.

[0046] In this embodiment, after the lifting mechanism 4 drives the mounting plate 2 to dock with the turntable 1, the lifting mechanism 4 continues to descend so that the clutch assembly 41 is in a disengaged state; then the turntable 1 drives the mounting plate 2 and the mirror panel 3 to rotate synchronously, thereby reducing the disturbance of the adhesive by the air between the mirror panel 3 and the photomask, thus preventing ripples from forming on the adhesive surface.

[0047] In some embodiments, the rotating mechanism for the spin coater further includes: a mounting plate 2; wherein the mirror panel 3 is disposed on the lower surface of the mounting plate 2.

[0048] Specifically, the lower surface of the mounting plate 2 is provided with a mirror panel 3. The mounting plate 2 is used to drive the mirror panel 3 to rise and fall. After the mounting plate 2 is connected with the turntable 1, there is a small gap between the mirror panel 3 and the photomask, and it does not come into contact with the adhesive on the photomask.

[0049] In some embodiments, the lower surface of the mounting plate 2 is provided with a plurality of drive pins 22; the upper surface of the turntable 1 is provided with a plurality of slots 12; wherein, the drive pins 22 are used to extend into the slots 12 so that the mounting plate 2 and the mirror panel 3 rotate synchronously with the turntable 1.

[0050] In some embodiments, optionally, the upper surface of the mounting plate 2 is connected to the lifting mechanism 4; the lifting mechanism 4 includes a clutch assembly 41 and a driver 42, the driver 42 being connected to the upper surface of the mounting plate 2 via the clutch assembly 41, for driving the mounting plate 2 to lift and dock with the turntable 1.

[0051] In some embodiments, the clutch assembly 41 may optionally include a fixed part 411 and a lifting part 412; wherein the fixed part 411 is connected to the upper surface of the mounting plate 2, the lifting part 412 is connected to the driver 42, and the fixed part 411 is hung on the lifting part 412; the driver 42 is used to drive the lifting part 412 down so that the mounting plate 2 on the fixed part 411 mates with the turntable 1, and to disengage the lifting part 412 from the fixed part 411.

[0052] In summary, this photomask spin coater and its rotating mechanism, by setting up a mirror panel 3, allows the lifting mechanism 4 to drive the mounting plate 2 to align with the turntable 1. After the lifting mechanism 4 continues to descend, the clutch assembly 41 is in a disengaged state. Subsequently, the turntable 1 drives the mounting plate 2 and the mirror panel 3 to rotate synchronously. By reducing the disturbance of the adhesive caused by the air between the mirror panel 3 and the photomask, ripples are prevented from forming on the adhesive surface.

[0053] In this document, when it is said that the first component is located on the second component, this can mean that the first component can be directly formed on the second component, or that the third component can be inserted between the first component and the second component.

[0054] In this document, when an element or layer is referred to as being “located,” “joined to,” “connected to,” “attached to,” or “coupled to” another element or layer, it may be directly located, joined, connected, attached to, or coupled to the other element or layer, or there may be an intermediate element or layer.

[0055] In the description of the embodiments of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0056] Spatially relative terms, such as “inside,” “outside,” “below,” “below,” “down,” “above,” “up,” etc., may be used herein to describe the relationship between one element or feature illustrated in the figures and another element or feature. In addition to the orientations depicted in the figures, spatially relative terms may be intended to cover different orientations of the apparatus in use or operation.

[0057] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A spin coater for photomasks, characterized in that, include: A turntable (1) has a receiving groove (11) on its upper surface. Mounting plate (2), with a mirror panel (3) on its lower surface; The lifting mechanism (4) is connected to the upper surface of the mounting plate (2) and includes a clutch assembly (41) and a drive (42). in The driver (42) is connected to the upper surface of the mounting plate (2) via the clutch assembly (41) to drive the mounting plate (2) to descend and dock with the turntable (1) and to put the clutch assembly (41) in a disengaged state; The turntable (1) is used to drive the mounting plate (2) and the mirror panel (3) to rotate synchronously.

2. The photomask spin coater as described in claim 1, characterized in that, The clutch assembly (41) includes: a fixed part (411) and a lifting part (412); wherein The fixing part (411) is connected to the upper surface of the mounting plate (2), the lifting part (412) is connected to the driver (42), and the fixing part (411) is hung on the lifting part (412); The driver (42) is used to drive the lifting part (412) down so that the mounting plate (2) on the fixed part (411) docks with the turntable (1) and disengages the lifting part (412) from the fixed part (411).

3. The photomask spin coater as described in claim 2, characterized in that, The fixing part (411) includes: a connecting sleeve (4111) and a limiting sleeve (4112); wherein The lower end of the connecting sleeve (4111) is connected to the mounting plate (2); The limiting sleeve (4112) is disposed inside the connecting sleeve (4111), and a pair of limiting notches (4113) are provided on the lower end face. The fixing part (411) is adapted to be hung on the lifting part (412) through the limiting notch (4113).

4. The photomask spin coater as described in claim 3, characterized in that, The lifting part (412) includes: a connecting shaft (4121) and a pair of hooks (4122); wherein The upper end of the connecting shaft (4121) is connected to the driver (42), and the lower end of the connecting shaft (4121) extends into the limiting sleeve (4112); The two pins (4122) are provided on both sides of the extension end of the connecting shaft (4121) and are respectively aligned with the corresponding limiting notches (4113); The lifting part (412) is adapted to hook the limiting notch (4113) of the fixing part (411) by means of a hook pin (4122).

5. The photomask spin coater as described in claim 4, characterized in that, Both the connecting shaft (4121) and the connecting sleeve (4111) are provided with strong magnets (413). The two strong magnets (413) are arranged facing each other and repel each other, so as to press down the fixed part (411) when the lifting part (412) is separated from the fixed part (411). The lower surface of the mounting plate (2) is provided with a number of transmission pins (22); The upper surface of the turntable (1) is provided with several slots (12). The transmission pin (22) is used to extend into the slot (12) so that the mounting plate (2) and the mirror plate (3) rotate synchronously with the turntable (1).

6. The photomask spin coater as described in claim 4, characterized in that, The mounting plate (2) is provided with a sensor trigger rod (21); A photoelectric sensor (414) is provided at the lower end of the connecting shaft (4121).

7. The photomask spin coater as described in claim 1, characterized in that, The shape of the receiving groove (11) is square, rectangular, circular or regular polygonal.

8. A rotary mechanism for a spin coater, characterized in that, include: A turntable (1) has a receiving groove (11) on its upper surface. The mirror panel (3) is located above the turntable (1) and is connected to the turntable (1); The turntable (1) is adapted to drive the mirror panel (3) to rotate synchronously to evenly coat the adhesive.

9. The rotary mechanism for a spin coater as described in claim 8, characterized in that, Also includes: Mounting plate (2); in The mirror panel (3) is disposed on the lower surface of the mounting plate (2).

10. The rotary mechanism for a spin coater as described in claim 9, characterized in that, The lower surface of the mounting plate (2) is provided with a number of transmission pins (22); The upper surface of the turntable (1) is provided with several slots (12). The transmission pin (22) is used to extend into the slot (12) so that the mounting plate (2) and the mirror plate (3) rotate synchronously with the turntable (1).

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