Lithography machine with easy maintenance

Abstract

The utility model discloses a photolithography machine convenient to maintain, including the box, the left end of box and be close to the front end and be installed connection subassembly, the door board is equipped with with connection subassembly to the front side of box, the positioning mechanism includes switch subassembly, positioning stand and groove, switch subassembly installs in no. The positioning stand is fixed on the both ends of no. The groove is set up on switch subassembly, the utility model relates to photolithography machine technical field, this photolithography machine convenient to maintain, under the cooperation of gear and rack, there is certain friction between rack and guide rail when opening and closing, the rack position is influenced by gravity and changes when the door board opens, adopts standard self -locking gear rack when closing, realizes self -locking, does not need additional structure, is favorable to the maintenance of staff, has improved the practicality of photolithography machine.

Description

Technical Field

[0001] This utility model relates to the field of lithography machine technology, specifically a lithography machine that is easy to maintain. Background Technology

[0002] A lithography machine is also known as a mask alignment exposure machine, exposure system, or lithography system. The most commonly used lithography machine is the mask alignment lithography. A typical lithography process involves several steps, including cleaning and drying the silicon wafer surface, applying a primer, spin-coating photoresist, soft baking, alignment and exposure, post-baking, development, hard baking, and etching. Lithography means using light to create a pattern (process); it involves applying photoresist to the surface of a silicon wafer and then transferring the pattern from the mask onto the photoresist, temporarily "copying" a device or circuit structure onto a silicon wafer.

[0003] Photolithography machines are the core equipment for producing large-scale integrated circuits. Their manufacturing and maintenance require a high level of optical and electronic industrial expertise. As a result, photolithography machines are expensive, and their internal electronic components are very precise and fragile, requiring frequent maintenance. Most existing photolithography machines do not have dedicated maintenance windows, which makes it difficult for staff to perform maintenance and reduces the practicality of the machines.

[0004] Therefore, this invention provides a photolithography machine that is easy to maintain, and solves the above problems by using an opening and closing component. Utility Model Content

[0005] To address the shortcomings of existing technologies, this invention provides a photolithography machine that is easy to maintain, thus solving the aforementioned problems.

[0006] To achieve the above objectives, this utility model is implemented through the following technical solution: a photolithography machine that is easy to maintain, including a housing, a connecting component is installed at the left end of the housing and near the front end, and a door panel is installed on the front side of the housing through the connecting component;

[0007] A first fixing box is fixed to the front end of the door panel, and a second fixing box is fixedly connected to the front end of the door panel and to the right of the first fixing box.

[0008] The positioning mechanism includes a switch assembly, a positioning frame, and a slot. The switch assembly is installed inside the second fixed box, and multiple positioning frames are fixed at the upper and lower ends of the first and second fixed boxes. The slot is formed on the switch assembly.

[0009] Preferably, the connecting component includes a fixing member, which is fixed to the left end of the box and near the front end. A fixing rod is fixedly connected to the top of the fixing member. A connecting member is fixedly connected to the left end of the door panel. The connecting member is rotatably connected to the fixing rod. A rubber pad is installed between the box and the door panel.

[0010] Preferably, there are several door panels and connecting components, with multiple connecting components installed at the left and right ends of the housing, and multiple door panels installed symmetrically at the front of the housing.

[0011] Preferably, the switch assembly includes a guide ring, which is fixed to the bottom wall of the inner cavity of the second fixed box. A drive shaft is rotatably connected inside the guide ring, and a drive gear is fixedly connected to the drive shaft. A positioning block is fixedly connected to the top of the drive gear, and a knob is fixedly connected to the top of the drive shaft above the second fixed box.

[0012] Preferably, the right wall of the inner cavity of the second fixed box and the left wall of the inner cavity of the first fixed box are both fixedly connected to guide rails. A rack is slidably connected to the guide rail. The rack is meshed with the drive gear. The lower end of the rack extends to the lower side of the second fixed box and is fixedly connected to a clamping plate. The clamping plate cooperates with the positioning frame.

[0013] Preferably, a fixing block is fixedly connected to the top wall of the inner cavity of the second fixing box, and a groove is opened inside the fixing block. The groove is similar in shape to the positioning block, and the length, width and height of the positioning block are all larger than the groove.

[0014] Preferably, the front end of the door panel is equipped with an observation window, and a handle is fixedly connected to the front end of the door panel near the top. Beneficial effects

[0015] This invention provides a photolithography machine that is easy to maintain. Compared with the prior art, it has the following advantages:

[0016] (1) The lithography machine is easy to maintain and is equipped with an opening and closing assembly. With the cooperation of gears and racks, there is a certain friction between the rack and the guide rail when opening and closing. When the door is opened, the position of the rack is changed by gravity. When closed, a standard self-locking gear rack with a small module and a small pressure angle is used to achieve self-locking. No additional structure is required, which is conducive to maintenance by staff and improves the practicality of the lithography machine. Attached Figure Description

[0017] Figure 1 This is a perspective view of the external structure of this utility model;

[0018] Figure 2 This is a front view of the external structure of this utility model;

[0019] Figure 3 This is a schematic diagram of the connecting component structure of this utility model;

[0020] Figure 4 This is a schematic diagram of the switch assembly structure of this utility model;

[0021] Figure 5 This is a schematic diagram of the main cross-sectional structure of the switch assembly of this utility model;

[0022] Figure 6 This is a schematic diagram of the drive gear structure of this utility model.

[0023] In the diagram: 1. Box body; 2. Door panel; 3. Connecting assembly; 31. Fixing component; 32. Fixing rod; 33. Connecting component; 34. Rubber pad; 4. Handle; 5. Fixing box No. 1; 6. Fixing box No. 2; 7. Switch assembly; 71. Guide ring; 72. Drive shaft; 73. Drive gear; 74. Positioning block; 75. Fixing block; 76. Knob; 77. Guide rail; 78. Rack; 79. Clamping plate; 8. Positioning frame; 9. Slot; 10. Observation window. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Example 1:

[0026] Please see Figure 1-6 A photolithography machine that is easy to maintain includes a housing 1, a connecting component 3 is installed on the left end of the housing 1 near the front end, and a door panel 2 is installed on the front side of the housing 1 through the connecting component 3;

[0027] A first fixing box 5 is fixed to the front end of the door panel 2. A second fixing box 6 is fixedly connected to the front end of the door panel 2 and located to the right of the first fixing box 5.

[0028] The positioning mechanism includes a switch assembly 7, a positioning frame 8, and a slot 9. The switch assembly 7 is installed inside the second fixed box 6. Multiple positioning frames 8 are fixed at the upper and lower ends of the first fixed box 5 and the second fixed box 6. The slot 9 is opened on the switch assembly 7.

[0029] Furthermore, the switch assembly 7 includes a guide ring 71, which is fixed to the bottom wall of the inner cavity of the second fixed box 6. A drive shaft 72 is rotatably connected inside the guide ring 71. A drive gear 73 is fixedly connected to the drive shaft 72. A positioning block 74 is fixedly connected to the top of the drive gear 73. The top of the drive shaft 72 extends to the top of the second fixed box 6 and is fixedly connected to a knob 76. Guide rails 77 are fixedly connected to the right wall of the inner cavity of the second fixed box 6 and the left wall of the inner cavity of the first fixed box 5. A rack 78 is slidably connected to the guide rail 77. The rack 78 is meshed with the drive gear 73. The lower end of the rack 78 extends to the lower side of the second fixed box 6 and is fixedly connected to a locking plate 79. The locking plate 79 cooperates with the positioning frame 8. A fixing block 75 is fixedly connected to the top wall of the inner cavity of the second fixed box 6. A groove 9 is opened inside the fixing block 75. The groove 9 is similar in shape to the positioning block 74, and the length, width and height of the positioning block 74 are larger than those of the groove 9.

[0030] Furthermore, an observation window 10 is installed at the front end of the door panel 2, and a handle 4 is fixedly connected to the front end of the door panel 2 near the top.

[0031] Example 2:

[0032] Please see Figure 1-3 This embodiment provides a technical solution based on embodiment one: the connecting component 3 includes a fixing member 31, which is fixed to the left end of the box 1 and close to the front end. A fixing rod 32 is fixedly connected to the top of the fixing member 31. A connecting member 33 is fixedly connected to the left end of the door panel 2. The connecting member 33 is rotatably connected to the fixing rod 32. A rubber pad 34 is installed between the box 1 and the door panel 2. There are several door panels 2 and connecting components 3. Multiple connecting components 3 are installed at the left and right ends of the box 1, and multiple door panels 2 are symmetrically installed at the front of the box 1.

[0033] Furthermore, any content not described in detail in this specification is existing technology known to those skilled in the art.

[0034] During operation, when internal components of the lithography machine need to be inspected, the switch assembly 7 is activated. Rotating the knob 76 causes the drive shaft 72 to rotate inside the guide ring 71 and the second fixed box 5. The drive shaft 72 drives the drive gear 73, causing the rack 78 to slide under the constraint of the guide rail 77. The rack 78 causes the clamping plate 79 to separate from the positioning frame 8. Pulling the knob 76 causes the drive shaft 72 to move forward, driving the drive gear 73, so that the positioning block 74 enters the groove 9, thereby causing the gear to separate from the rack 78, making it convenient to open the door panel 2 for component repair. And maintenance, while the rack 78 and the guide rail 77 have a certain friction force to prevent the position of the rack 78 from changing due to gravity when the door panel 2 is opened. When closed, the left door panel 2 returns to its position and the right door panel 2 returns to its position. Pressing the knob 76 causes the drive shaft 72 to enter the guide ring 71. Rotating the knob 76 in the opposite direction causes the rack 78 to drive the locking plate 79 into the positioning frame 8. The standard self-locking gear rack 78 with a small module and a small pressure angle (such as below 20°) is used. Its design itself already meets the condition that the meshing angle ≤ the friction angle, and no additional structure is required.

[0035] At the same time, when the door panel 2 rotates to close, the connecting component 3 works, and the handle 4 is manually driven to make the door panel 2 drive the connecting piece 33 to rotate on the fixed rod 32. At the same time, the rubber pad 34 is placed between the box body 1 and the door panel 2 to ensure that the door panel 2 opens and closes smoothly.

[0036] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0037] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A photolithography machine that is easy to maintain, comprising a housing (1), characterized in that: A connecting component (3) is installed on the left end of the box (1) and near the front end. A door panel (2) is installed on the front side of the box (1) through the connecting component (3). A first fixing box (5) is fixed to the front end of the door panel (2), and a second fixing box (6) is fixedly connected to the front end of the door panel (2) and located to the right of the first fixing box (5). The positioning mechanism includes a switch assembly (7), a positioning frame (8), and a slot (9). The switch assembly (7) is installed inside the second fixed box (6). Multiple positioning frames (8) are fixed at the upper and lower ends of the first fixed box (5) and the second fixed box (6). The slot (9) is opened on the switch assembly (7).

2. The lithography machine for easy maintenance according to claim 1, characterized in that: The connecting component (3) includes a fixing member (31), which is fixed to the left end of the box (1) and close to the front end. A fixing rod (32) is fixedly connected to the top of the fixing member (31). A connector (33) is fixedly connected to the left end of the door panel (2). The connector (33) is rotatably connected to the fixing rod (32). A rubber pad (34) is installed between the box (1) and the door panel (2).

3. The lithography machine for easy maintenance according to claim 1, characterized in that: There are several door panels (2) and connecting components (3). Multiple connecting components (3) are installed on the left and right ends of the box body (1), and multiple door panels (2) are symmetrically installed on the left and right sides of the front of the box body (1).

4. The lithography machine for easy maintenance according to claim 1, characterized in that: The switch assembly (7) includes a guide ring (71) which is fixed to the bottom wall of the inner cavity of the second fixed box (6). The guide ring (71) is rotatably connected to a drive shaft (72). A drive gear (73) is fixedly connected to the drive shaft (72). A positioning block (74) is fixedly connected to the top of the drive gear (73). The top of the drive shaft (72) extends to the top of the second fixed box (6) and is fixedly connected to a knob (76).

5. A photolithography machine that is easy to maintain according to claim 4, characterized in that: The right wall of the inner cavity of the second fixed box (6) and the left wall of the inner cavity of the first fixed box (5) are both fixedly connected to guide rails (77). A rack (78) is slidably connected on the guide rail (77). The rack (78) is meshed with the drive gear (73). The lower end of the rack (78) extends to the lower side of the second fixed box (6) and is fixedly connected to a clamping plate (79). The clamping plate (79) cooperates with the positioning frame (8).

6. The lithography machine for easy maintenance according to claim 4, characterized in that: The top wall of the inner cavity of the second fixed box (6) is fixedly connected to a fixed block (75). The fixed block (75) has a groove (9) inside. The groove (9) is similar in shape to the positioning block (74), and the length, width and height of the positioning block (74) are all greater than those of the groove (9).

7. The lithography machine for easy maintenance according to claim 1, characterized in that: The front end of the door panel (2) is equipped with an observation window (10), and a handle (4) is fixedly connected to the front end of the door panel (2) near the top.

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