Insulation and graphite boat

Abstract

The application provides an insulating piece and a graphite boat, and relates to the technical field of semiconductor equipment. The insulating piece comprises an insulating piece body and a groove. The insulating piece body extends along a first direction, and the groove is formed by extending a surface of the insulating piece body along the first direction to the inside thereof along a second direction, and the groove surrounds the insulating piece body. The groove is a trapezoidal groove with a wider top and a narrower bottom. When a conductive film is deposited on the insulating piece, the uneven distribution of plasma energy on the sidewall of the groove and the limited diffusion of reactants can be effectively improved, so that the thickness of the conductive film deposited on the entire surface of the groove is similar, thereby effectively inhibiting the deposition of the conductive film on the corner area of the top of the groove from being too thick, effectively reducing the cleaning frequency of the insulating piece, thereby effectively prolonging the service life of the insulating piece, and also inhibiting the electrical conduction between adjacent boat pages, thereby enhancing the reliability of the graphite boat.

Description

Technical Field

[0001] This application relates to the field of semiconductor equipment technology, and more particularly to an insulating component and a graphite boat. Background Technology

[0002] When depositing conductive films on uncoated silicon wafers using PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment, a graphite boat is an essential carrier for the silicon wafer. It is formed by stacking multiple layers of interleaved positive and negative electrode graphite boat sheets, each insulated from the others. The graphite boat also includes an insulating element, which isolates two adjacent graphite boat sheets. The core function of the insulating element is to insulate two graphite boat sheets connected to different electrodes, preventing short circuits caused by conductivity during conductive film deposition. However, during the conductive film deposition process, a conductive film inevitably forms on the insulating element as well. With each deposition cycle, the thickness of the conductive film on the insulating element's surface gradually increases, eventually causing the insulating element to become a conductor, allowing electrical conduction between adjacent graphite boat sheets. This exacerbates the instability of the deposition process and may even malfunction the deposition equipment, severely impacting the repeatability of thin film deposition. Utility Model Content

[0003] In view of this, this application provides an insulating component and a graphite boat, as follows:

[0004] An insulating element comprising:

[0005] An insulating component body, the insulating component body extending along a first direction;

[0006] N grooves, N≥1, are arranged sequentially on the surface of the insulating component body along the first direction;

[0007] The groove is formed by extending inward from the surface of the insulating body along the first direction into the second direction, and the groove surrounds the insulating body; the second direction intersects the first direction;

[0008] The groove width gradually increases from the bottom to the opening, the opening is the side of the groove away from the insulating component body, the bottom is the side of the groove close to the insulating component body, and the width is the dimension of the groove along the first direction.

[0009] Optionally, the sidewall of the groove has an angle with the second direction, the angle being 10° to 15°, including the endpoint value.

[0010] Optionally, the width of the groove opening is in the range of 0.7mm to 1.2mm, including the endpoint values.

[0011] Optionally, the width of the groove bottom is in the range of 0.35mm to 0.6mm, including the endpoint values.

[0012] Optionally, along the second direction, the depth of the groove ranges from 2mm to 6mm, including the endpoint values.

[0013] Optionally, the grooves and the insulating body are coaxially arranged, and the N grooves are equidistantly spaced along the first direction.

[0014] Optionally, the insulating body is a cylindrical structure extending along the first direction;

[0015] The radial length of the insulating component along the second direction ranges from 14mm to 22mm, including the endpoint values.

[0016] Optionally, the length of the insulating body along the first direction ranges from 8mm to 15mm, including the endpoint values.

[0017] Optionally, the boundary area between the insulating component body and the groove opening is an outwardly convex arc-shaped surface, and the boundary area between the insulating component body and the groove bottom is an inwardly concave arc-shaped surface.

[0018] Optionally, the roughness of the insulating body is not greater than 1.6 μm, and the roughness of the surface of the groove is not greater than 1.6 μm.

[0019] Optionally, the insulating element may be made of one of the following materials: quartz, ceramic, mica, marble, and resin.

[0020] A graphite boat includes a plurality of insulating elements, wherein the insulating elements are any of the insulating elements described above, and two adjacent boat sheets in the graphite boat are isolated by the insulating elements.

[0021] Compared with related technologies, the beneficial effects of the technical solution of this application are as follows:

[0022] The insulating component includes an insulating component body and a groove disposed thereon. The insulating component body extends along a first direction, and the groove extends from the surface of the insulating component body extending along the first direction inwards along a second direction, and the groove surrounds the insulating component body. The first and second directions intersect. The width of the groove gradually increases from the bottom to the opening, and the width of the groove is the dimension of the groove along the first direction. Therefore, the groove disposed on the insulating component body is a trapezoidal groove with a wider top and a narrower bottom. When a conductive film is deposited on the insulating component, it can effectively improve the uneven distribution of plasma energy on the sidewalls of the groove and the limited diffusion of reactants, resulting in a more uniform thickness of the conductive film deposited throughout the groove. This effectively prevents excessively thick conductive film deposition in the corner area at the top of the groove, effectively reducing the cleaning frequency of the insulating component and thus effectively extending its service life. Furthermore, it can also prevent electrical conduction between adjacent planar plates due to excessively thick conductive film in the corner area at the top of the groove, enhancing the reliability of the graphite boat. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of this application or related technologies, the drawings used in the description of the embodiments or prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0024] The structures, proportions, sizes, etc., shown in the accompanying drawings are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the implementation conditions of this application. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size should still fall within the scope of the technical content disclosed in this application, provided that they do not affect the effects and purposes that this application can produce.

[0025] Figure 1 This is a schematic diagram of the structure of an insulating component in the prior art;

[0026] Figure 2 A schematic diagram of the structure of an insulating component provided in this application;

[0027] Figure 3 This application provides a schematic diagram of the structure of a graphite boat;

[0028] Figure 4 A partially enlarged view of an insulating component provided in this application;

[0029] Figure 5 This application provides a schematic diagram showing the dimensions of various parts of an insulating component.

[0030] Figure 6 for Figure 2 A side view of the insulating component along the first direction;

[0031] Figure 7 A schematic diagram of another insulating component provided in this application. Detailed Implementation

[0032] The embodiments of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0033] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, this application will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0034] As described in the background section, during the coating process, the insulating component is covered by a conductive film, and the thickness of the conductive film gradually increases with the number of coating cycles, eventually causing the insulating component to become a conductor, enabling electrical conduction between adjacent graphite boat sheets. However, frequent cleaning of the insulating component increases battery production costs and can cause irreversible damage to the structure of the insulating component, affecting its service life and thus increasing the probability of defects in the graphite boat product.

[0035] To improve the service life of insulating components, existing technologies often incorporate vertical grooves with high aspect ratios. However, due to the inherent surface reaction limitations and reactant transport characteristics of PECVD, when a conductive film is deposited on an insulating component with a high aspect ratio groove structure, uneven energy distribution on the sidewalls of the grooves can lead to differences in reactivity. This results in a difference in thickness between the corners at the top of the groove (such as the top edge or protruding parts at the top of the groove) and the conductive film deposited at the bottom of the groove, leading to issues such as… Figure 1 The "corner effect" shown Figure 1 In the diagram, "1" represents a groove, "2" represents a conductive film, and dashed box 4 represents an enlarged view of the local structure within dashed box 3. According to... Figure 1 It is known that the excessively thick conductive film at the corner of the top of the groove forms a conductive channel connecting adjacent graphite boat sheets, causing the graphite boat to short-circuit.

[0036] More importantly, the thickness of the coating layer on the silicon wafer of a TBC (Top-Contact Back-Contact) battery is approximately twice that of the mainstream TOPCon (Tunnel Oxide Passivating Contact) battery. Therefore, in the production of TBC batteries, the lifespan of the graphite boat with the grooved insulating structure will be halved. In other words, there are currently no effective means to extend the lifespan of the insulating component. Thus, how to effectively improve the lifespan of the insulating component remains a key issue for those skilled in the art.

[0037] Based on the above, this application provides an insulating component for use in a graphite boat. For example... Figure 2 As shown, Figure 2 This application provides a schematic diagram of the structure of an insulating component, which includes an insulating component body 100 and N grooves 200. The insulating component body 100 extends along a first direction, and the N grooves 200 are arranged sequentially along the first direction. It should be noted that the insulating component body 100 is typically a hollow structure, and the hollow region of the insulating component body 100 also extends along the first direction.

[0038] Specifically, the groove 200 extends from the surface 102 of the insulating body 100, which extends in a first direction, into the interior in a second direction, and the groove 200 surrounds the insulating body 100. The second direction intersects the first direction; for example, the second direction may be perpendicular to the first direction.

[0039] like Figure 3 As shown, Figure 3 This is a schematic diagram of the graphite boat used in an insulating component provided in this application. Two adjacent graphite boat sheets 300 (hereinafter referred to as boat sheets) are separated by an insulating component 700 sleeved on the mounting rod 600, maintaining a certain distance between the boat sheets 300 and providing support for them. The aforementioned insulating component 700 is the insulating component provided in this application, and it can be made of ceramic insulating material. Its main purpose is to prevent short circuits between adjacent boat sheets 300 of different poles, thus avoiding interference with the normal operation of the process. During the coating process, the flow direction of the reactive gas is as follows... Figure 3 As shown by the middle arrow, the reactive gas passes between the individual leaf blades 300 of the graphite boat and reacts between leaf blades 300 at different poles, forming the desired reactive film on the silicon wafer.

[0040] It should be noted that the surface 102 extending along the first direction of the insulating body 100 is the outer surface of the insulating body 100 extending along the first direction. For example, if the insulating body 100 is a hollow structure, the surface 102 extending along the first direction can be the outer surface surrounding the hollow region 400, that is, the surface away from the hollow region 400, so that the groove 200 can be exposed on the outer surface of the insulating body 100, thereby enabling the adjacent leaf blades 300 in the graphite boat to achieve insulation isolation based on the insulating body 100 and the groove 200. It should also be noted that the insulating component is fitted onto the mounting rod 600 through its hollow region 400.

[0041] For the insulating component described in this application, the width of the groove 200 gradually increases from the bottom to the opening, and the width of the groove 200 is the dimension of the groove 200 along the first direction. The opening of the groove 200 is the top of the groove 200, located on the side of the groove 200 away from the insulating component body 100, and the bottom of the groove 200 is the bottom of the groove 200, located on the side of the groove 200 close to the insulating component body 100. That is, along the second direction, the groove 200 is wider the further away from the insulating component body 100, or the groove 200 is narrower the closer to the insulating component body 100. In other words, the groove 200 provided on the insulating component body 100 in this insulating component is a trapezoidal groove with a wider top and a narrower bottom, that is, the groove 200 provided on the insulating component body 100 in this insulating component has a structure that is wider at the top and narrower at the bottom.

[0042] As described above, the groove 200 on the insulating body 100 of the insulating component is a groove that is wider at the top and narrower at the bottom. Since the groove 200 is wider closer to its top, when a conductive film is deposited on the insulating component, the trapezoidal groove, due to its wider top and narrower bottom structure, can effectively improve the uneven distribution of plasma energy and the limited diffusion of reactants, resulting in a more uniform thickness of the conductive film deposited on the surface of the groove 200, thus avoiding a thicker conductive film deposition at the corner area at the top of the groove 200. Figure 4 As shown, Figure 4 for Figure 2 Enlarged view of the area within the dashed box. Figure 4 The "500" in the figure represents a conductive film, according to Figure 4It is understood that, based on the groove 200 with its wide top and narrow bottom structure, the thickness of the conductive film deposited on the entire surface of the groove 200 is similar. This effectively prevents electrical conduction between adjacent blades in the corner area at the top of the groove 200 due to excessively thick conductive film, thereby effectively extending the service life of the insulating component. Specifically, the groove 200 with a wider top and narrower bottom in the insulating component effectively prevents excessively thick conductive film deposition in the corner area at the top of the groove 200, reducing the frequency of cleaning the insulating component and thus effectively extending its service life.

[0043] Furthermore, the groove 200 provided on the insulating body 100 in this insulating component is a groove that is wider at the top and narrower at the bottom, so that the thickness of the conductive film deposited throughout the entire groove 200 is similar (e.g., Figure 4 As shown, this can suppress the electrical conduction between adjacent boat blades caused by excessively thick conductive film deposition in the top corner area of ​​the groove 200, thereby enhancing the reliability of the insulating component and thus the reliability of the graphite boat.

[0044] In one embodiment of this application, such as Figure 2 As shown, the width of the groove 200 gradually decreases along the second direction, meaning the width of the groove 200 gradually increases from its bottom to its opening. The bottom and opening of the groove 200 can be coaxially arranged. Specifically, the opening of the groove 200 is the side of the groove 200 away from the insulating component body 100, and the bottom of the groove 200 is the side of the groove 200 close to the insulating component body 100. In other words, the opening of the groove 200 is the top of the groove 200, and the bottom of the groove 200 is the bottom of the groove 200. That is, the width of the groove 200 can gradually increase from bottom to top, meaning the sidewall of the groove 200 can be a slope, or the groove 200 can be a trapezoidal groove that is wider at the top and narrower at the bottom. Furthermore, along the direction from the bottom to the opening of the groove 200, the slope transitions smoothly at all points. Therefore, when the conductive film is deposited on the insulating component, the groove 200 can provide a progressive contact surface for the contact between the insulating component and the flap.

[0045] Due to graphite (thermal expansion coefficient is 4×10⁻⁶) -6 ~6×10 -6There is a difference in the coefficient of thermal expansion between the insulating component (200~500℃) and ceramics (Al2O3, with a coefficient of thermal expansion of 7×10~9×10 / ℃). Therefore, during the deposition of conductive films using the PECVD process (200~500℃), the expansion of the insulating component is greater than that of the boat. As the process temperature increases, the insulating component expands due to heat, causing mutual compression between the insulating component and the boat. As mentioned above, the groove 200 of the insulating component is a trapezoidal groove, which can provide a progressive contact surface. This allows the compression between the boat and the insulating component to gradually expand from a certain point on the inclined surface of the trapezoidal groove to a larger inclined surface range. This ensures that the compressive stress of the boat on the insulating component is always distributed on the gradually expanding inclined surface. Consequently, the contact force and stress caused by thermal expansion are gradually dispersed and smoothly transitioned, rather than being concentrated at a certain point in the groove at the moment of contact, such as at the top corner of the groove, causing the insulating component to crack.

[0046] Furthermore, the groove 200 on the insulating component is a trapezoidal groove, wider at the top and narrower at the bottom, with an obtuse angle at the top corner. The sidewall area of ​​the groove 200 is larger than that of a groove with a right angle at the top corner. Therefore, the pressure exerted by the graphite boat's blades on the insulating component gradually expands from a point on the inclined surface of the trapezoidal groove to a larger area. According to the stress formula: Stress = Load / Contact Area, the trapezoidal groove, wider at the top and narrower at the bottom, can reduce the stress peak at the top corner of the groove 200, further preventing the pressure from the graphite boat's blades on the insulating component from exceeding the brittle material tolerance limit of ceramic and causing cracking.

[0047] In one embodiment of this application, such as Figure 4 As shown, the sidewall of the groove 200 has an included angle A with the second direction. The value of the included angle A can be between 10° and 15°, including the endpoint values. It should be noted that the included angle between the sidewall of the groove 200 and the second direction is the angle between the line connecting a certain point at the top of the groove 200 and a certain point at the corresponding bottom of the groove 200 and the second direction.

[0048] In one embodiment of this application, such as Figure 5 As shown, the width L1 of the groove 200 ranges from 0.7mm to 1.2mm, including the endpoints. For example... Figure 5 As shown, the width L2 of the groove bottom of groove 200 ranges from 0.35mm to 0.6mm, including the endpoint values. For example... Figure 5As shown, along the second direction, the depth L3 of the groove 200 ranges from 2mm to 6mm, including the endpoint values. The opening of the groove 200 is the side of the groove 200 furthest from the insulating body 100, and the bottom of the groove 200 is the side of the groove 200 closest to the insulating body 100. That is, the width of the top of the groove 200 ranges from 0.7mm to 1.2mm, including the endpoint values; the width of the bottom of the groove 200 ranges from 0.35mm to 0.6mm, including the endpoint values; the depth of the groove 200 ranges from 2mm to 6mm, including the endpoint values; and the width of the groove 200 gradually increases from the bottom to the opening.

[0049] In one embodiment of this application, such as Figure 6 As shown, Figure 6 for Figure 2 Side view viewed along the first direction. Figure 6 In the diagram, "202" represents the bottom of groove 200. Groove 200 and insulating body 100 can be coaxially arranged, meaning the central axis of insulating body 100 coincides with the central axis of groove 200. Simultaneously, N ≥ 2, meaning N grooves 200 are spaced apart along the first direction, i.e., there is a gap between adjacent grooves 200. For example... Figure 2 As shown, N=8, and eight grooves 200 are equidistantly spaced along the first direction on the insulating component body 100. As can be seen from the above, the grooves 200 can be coaxially arranged with the insulating component body 100, and adjacent grooves 200 are equidistantly spaced. The layout of the grooves 200 is regular, which is more conducive to reducing the manufacturing difficulty of the insulating component. It should be noted that, as... Figure 6 The insulating body 100 of the insulating component shown is annular, and the groove 200 can also be annular or trapezoidal. However, this application does not limit this, and the insulating body 100 can also be a hollow structure with regular or irregular shapes such as square, and the groove 200 depends on the shape of the insulating body 100.

[0050] In one embodiment of this application, the number of N grooves 200 can range from 5 to 9, including endpoint values. However, this application does not limit this number and the specific number depends on the circumstances.

[0051] In one embodiment of this application, the insulating body 100 is a cylindrical structure extending along a first direction, for example, it can be a hollow cylindrical structure extending along the first direction. Wherein, as... Figure 5 As shown, the radial length L5 of the insulating component along the second direction can range from 14mm to 22mm, including the endpoint values. Figure 5 As shown, the length L4 of the insulating body 100 along the first direction can range from 8mm to 15mm, including the endpoint value.

[0052] In one embodiment of this application, such as Figure 7 As shown, Figure 7 for Figure 2 In the enlarged view within the dashed frame, the boundary area between the insulating component body 100 and the groove opening of the groove 200 is an outwardly convex arc-shaped surface, while the boundary area between the insulating component body 100 and the groove bottom of the groove 200 is an inwardly concave arc-shaped surface. Specifically, the groove opening of the groove 200 is the side of the groove 200 furthest from the insulating component body 100, and the groove bottom of the groove 200 is the side of the groove 200 closest to the insulating component body 100.

[0053] As can be seen from the above, the shape of the junction area between the top and bottom of the insulating body 100 and the groove 200 is an arc-shaped curved surface, so that the corners of the top and bottom of the insulating body 100 and the groove 200 are smooth and rounded structures with a gentle transition, which can reduce the probability of conductive film being deposited on the surface of the groove 200.

[0054] In one embodiment of this application, the roughness of the insulating body 100 is no greater than 1.6 μm, and the roughness of the surface of the groove 200 is no greater than 1.6 μm, so that the roughness of the insulating component is small, which can reduce the probability of conductive film being deposited on the surface of the insulating body 100 and the groove 200.

[0055] In one embodiment of this application, the material of the insulating element is not particularly limited; for example, it can be selected from insulating materials such as quartz, ceramic, mica, marble, and resin. Furthermore, the insulating element can be entirely manufactured from these insulating materials, or a layer of the aforementioned insulating material can be plated onto the entire surface of the insulating element.

[0056] This application also provides a graphite boat, such as Figure 3 As shown, the graphite boat includes multiple insulating elements 700, which are the insulating elements described in any of the above embodiments. In this graphite boat, two adjacent boat sheets 300 are insulated from each other by the insulating elements 700.

[0057] In summary, this application provides an insulating component and a graphite boat. The insulating component includes an insulating component body and a groove disposed thereon. The insulating component body extends along a first direction, and the groove extends from the surface of the insulating component body extending along the first direction inwards along a second direction, and the groove surrounds the insulating component body. The first and second directions intersect. The width of the groove gradually increases from the bottom to the opening, and the width of the groove is the dimension of the groove along the first direction. Therefore, the groove disposed on the insulating component body is a trapezoidal groove with a wider top and a narrower bottom. When a conductive film is deposited on the insulating component, it can effectively improve the uneven distribution of plasma energy on the sidewalls of the groove and the limited diffusion of reactants, resulting in a similar thickness of the conductive film deposited throughout the groove. This effectively suppresses excessively thick conductive film deposition in the corner area at the top of the groove, effectively reducing the cleaning frequency of the insulating component and thus effectively extending its service life. Furthermore, it can also prevent electrical conduction between adjacent boat blades due to excessively thick conductive film in the corner area at the top of the groove, enhancing the reliability of the insulating component and, consequently, the reliability of the graphite boat.

[0058] The various embodiments in this specification are described in a progressive, parallel, or combined manner. Each embodiment focuses on the differences from other embodiments, and the same or similar parts between the embodiments can be referred to each other.

[0059] It should be noted that, in the description of this application, the terms "upper," "lower," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. When a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be a component centrally located at the same time.

[0060] It should also be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that an article or apparatus comprising a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such an article or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the article or apparatus that includes the aforementioned element.

[0061] The above description of the disclosed embodiments enables those skilled in the art to make or use this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An insulating component, characterized in that, The insulating component includes: An insulating component body, the insulating component body extending along a first direction; N grooves, N≥1, are arranged sequentially on the surface of the insulating component body along the first direction; The groove is formed by extending inward from the surface of the insulating body along the first direction into the second direction, and the groove surrounds the insulating body; the second direction intersects the first direction; The width of the groove gradually increases from the bottom to the opening. The opening of the groove is the side of the groove away from the insulating component body, and the bottom of the groove is the side of the groove close to the insulating component body. That is, the closer to the insulating component body, the smaller the width of the groove. The width of the groove is the dimension of the groove along the first direction.

2. The insulating component according to claim 1, characterized in that, The sidewall of the groove has an angle with the second direction, and the angle ranges from 10° to 15°, including the endpoint value.

3. The insulating component according to claim 1, characterized in that, The width of the groove opening ranges from 0.7mm to 1.2mm, including the endpoint values.

4. The insulating component according to claim 1, characterized in that, The width of the groove bottom ranges from 0.35mm to 0.6mm, including the endpoint values.

5. The insulating component according to claim 1, characterized in that, Along the second direction, the depth of the groove ranges from 2mm to 6mm, including the endpoint values.

6. The insulating component according to any one of claims 1-5, characterized in that, The groove and the insulating body are coaxially arranged, and the N grooves are equidistantly spaced along the first direction.

7. The insulating component according to any one of claims 1-5, characterized in that, The insulating component body is a cylindrical structure extending along the first direction; The radial length of the insulating component along the second direction ranges from 14mm to 22mm, including the endpoint values.

8. The insulating element according to any one of claims 1-5, characterized in that, The length of the insulating component body along the first direction ranges from 8mm to 15mm, including the endpoint values.

9. The insulating component according to claim 1, characterized in that, The boundary area between the insulating component body and the groove opening is an outwardly convex arc-shaped surface, and the boundary area between the insulating component body and the groove bottom is an inwardly concave arc-shaped surface.

10. The insulating component according to claim 1, characterized in that, The surface roughness of the insulating component body is no greater than 1.6 μm, and the surface roughness of the groove is no greater than 1.6 μm.

11. The insulating element according to claim 1, characterized in that, The insulating component is made of one of the following materials: quartz, ceramic, mica, marble, and resin.

12. A graphite boat, characterized in that, It includes multiple insulating elements, wherein the insulating elements are the insulating elements according to any one of claims 1-11, and two adjacent leaf blades in the graphite boat are isolated by the insulating elements.

Images