Quartz reaction chamber head protection device

Abstract

The utility model relates to the technical field of semiconductor manufacturing equipment discloses a quartz reaction chamber head protection device, including the cover shell still include: connecting seat, the top end threaded connection in the cover shell of connecting seat, quartz ceiling, the middle position of connecting seat bottom is equipped with the connecting column, and a plurality of quartz ceilings are along the circumferential distribution in the bottom of connecting seat, and it is the sliding connection between connecting seat and quartz ceiling. The utility model has the advantages compared with prior art: provide a kind of quartz reaction chamber head protection device, realize the quick replacement of quartz component, and it is convenient to dismount, and subsequent maintenance is facilitated, further improve maintenance efficiency.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, specifically to a quartz reaction chamber head protection device. Background Technology

[0002] In semiconductor manufacturing processes, the quartz reaction chamber is one of the core pieces of equipment. Its head requires the assembly of both quartz and graphite components, which work together to achieve key functions such as process protection and thermal field maintenance. The quartz component, with its high temperature resistance and strong chemical stability, plays a crucial role in protecting the reaction chamber head, adsorbing process byproducts to meet different roughness requirements, and maintaining the uniformity of the thermal field within the chamber. The graphite component, on the other hand, needs to rotate at high speed during operation to facilitate the transfer of process materials and control the uniformity of the reaction.

[0003] In current semiconductor manufacturing processes, the process byproducts adsorbed by quartz components need to be cleaned or replaced regularly to ensure adsorption effect and thermal stability. Existing fixed structures require disassembling multiple components at the head of the reaction chamber during disassembly, which is cumbersome, time-consuming, and seriously affects production efficiency. Utility Model Content

[0004] I. Technical problems to be solved

[0005] The technical problem to be solved by this utility model is to overcome the above-mentioned technical difficulties and provide a quartz reaction chamber head protection device, which enables quick replacement of quartz components, is easy to disassemble and assemble, facilitates subsequent maintenance, and further improves maintenance efficiency.

[0006] II. Technical Solution

[0007] To solve the above-mentioned technical problems, the technical solution provided by this utility model is: a quartz reaction chamber head protection device, including a sealing shell, and further comprising:

[0008] Connecting seat; the top end of the connecting seat is threaded into the cover housing;

[0009] Quartz ceiling; a connecting post is provided at the middle position of the bottom end of the connecting seat, and several quartz ceilings are distributed circumferentially along the connecting post at the bottom end of the connecting seat, and the connecting seat and the quartz ceilings are slidably connected.

[0010] As an improvement, multiple partitions are evenly distributed around the bottom of the connector and the circumference of the connector column, dividing the bottom of the connector into several placement slots for use with quartz ceilings.

[0011] As an improvement, the top of the quartz ceiling is provided with a T-shaped slider, and the bottom of the connecting seat is provided with multiple T-shaped grooves for use with the T-shaped slider.

[0012] As an improvement, the connecting column is provided with multiple recessed slots for use with quartz ceilings.

[0013] III. Beneficial Effects

[0014] The advantages of this utility model compared with the prior art are as follows:

[0015] 1. The quartz ceiling adopts a sliding fit design of T-shaped slider and T-shaped groove. When disassembling, there is no need to remove the cover shell. Simply pull out the quartz ceiling along the T-shaped groove. The efficiency of cleaning or replacement is greatly improved and the maintenance cost is significantly reduced.

[0016] 2. The quartz ceiling is evenly distributed and fits tightly against the head of the reaction chamber, effectively adsorbing process byproducts and protecting the head of the reaction chamber from corrosion. Simultaneously, the precise positioning structure ensures uniform thermal field, improves product processing quality, and extends the service life of the reaction chamber. Attached Figure Description

[0017] Figure 1 This is a three-dimensional schematic diagram of a head protection device for a quartz reaction chamber according to this utility model. Figure 1 .

[0018] Figure 2 This is a three-dimensional schematic diagram of a head protection device for a quartz reaction chamber according to this utility model. Figure 2 .

[0019] Figure 3 This is a schematic diagram illustrating the explosion effect of a quartz reaction chamber head protection device according to this utility model. Figure 1 .

[0020] Figure 4 This is a schematic diagram illustrating the explosion effect of a quartz reaction chamber head protection device according to this utility model. Figure 2 .

[0021] As shown in the figure: 1. Cover shell; 2. Connecting seat; 3. Embedded groove; 4. Connecting column; 5. Partition; 6. Quartz ceiling; 7. T-shaped slider; 8. T-shaped slide. Detailed Implementation

[0022] In the description of this utility model, it should be understood that the terms "center," "lateral," "upper," "lower," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more. Additionally, the term "comprising" and any variations thereof are intended to cover non-exclusive inclusion.

[0023] The present invention will now be described in further detail with reference to the accompanying drawings.

[0024] To facilitate overall maintenance and quick disassembly / reassembly, combined with the attached... Figure 1 Appendix Figure 2 and attached Figure 3 A protective device for the head of a quartz reaction chamber includes a sealing housing 1 and a connecting seat 2; the top end of the connecting seat 2 is threaded into the sealing housing 1. Because the sealing housing 1 and the connecting seat 2 are detachably fixed, they simultaneously serve to seal and protect the internal components.

[0025] To facilitate the replacement of the quartz ceiling panel 6 and improve subsequent maintenance efficiency, in conjunction with the attached... Figure 1 Appendix Figure 3 and attached Figure 4 The quartz ceiling 6; a connecting post 4 is provided at the middle position of the bottom end of the connecting seat 2, and several quartz ceilings 6 are distributed around the bottom end of the connecting seat 2 along the circumference of the connecting post 4, and the connecting seat 2 and the quartz ceilings 6 are slidably connected. Multiple partitions 5 are evenly distributed around the bottom end of the connecting seat 2 and the circumference of the connecting post 4, dividing the bottom end of the connecting seat 2 into several placement grooves for use with the quartz ceilings 6. The top of each quartz ceiling is provided with a T-shaped slider 7, and the bottom end of the connecting seat 2 is provided with multiple T-shaped grooves 8 for use with the T-shaped sliders 7. Multiple embedding grooves 3 for use with the quartz ceilings 6 are provided on the connecting post 4.

[0026] Because the T-shaped slider 7 slides into the T-shaped groove 8 of the connecting seat 2, the quartz ceiling 6 and the connecting seat 2 are slidably connected. Moreover, the inner end of the quartz ceiling 6 is adapted to be embedded in the embedding groove 3 of the connecting column 4. Through the circumferential limiting of the partition 5 and the radial positioning of the embedding groove 3, a double fixing structure is formed. Furthermore, when disassembling, there is no need to disassemble the cover shell 1. The quartz ceiling 6 can be pulled out along the T-shaped groove 8, which greatly improves the efficiency of cleaning or replacement.

[0027] In specific implementation of this utility model:

[0028] First, screw the connecting seat 2 into the internal thread of the cover housing 1 through the external thread at the top, and tighten it until it is sealed and fits.

[0029] Then, select the corresponding number of quartz ceiling panels 6, align the T-shaped slider 7 at the top of each quartz ceiling panel 6 with the corresponding T-shaped groove 8 at the bottom of the connecting seat 2, and slide it in radially until the inner end of the quartz ceiling panel 6 is completely embedded in the groove of the connecting column 4. At this time, the outer end of the quartz ceiling panel 6 is in contact with the partition 5 to form a circumferential limit.

[0030] The assembled device is installed at the head of the quartz reaction chamber. After installation, the graphite component fits tightly against the outer end of the quartz ceiling 6. During operation, the graphite component rotates at high speed. The quartz ceiling 6 is double-limited by the embedded groove and the partition 5 to ensure that the quartz ceiling 6 does not shift. At the same time, the quartz ceiling 6 adsorbs process by-products and maintains a uniform thermal field in the chamber.

[0031] When the process byproducts adsorbed by the quartz ceiling 6 reach the threshold, the equipment stops running, and the quartz ceiling 6 is directly pulled out along the T-shaped slide 8 for cleaning or replacement before being slid back in for installation. The entire process does not require disassembling the cover housing 1, which greatly improves maintenance efficiency.

[0032] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

[0033] The present invention and its embodiments have been described above. This description is not restrictive, and the accompanying drawings are only one embodiment of the present invention; the actual structure is not limited thereto. In conclusion, if those skilled in the art are inspired by this description and design similar structures and embodiments without departing from the inventive spirit of the present invention, such designs should fall within the protection scope of the present invention.

Claims

1. A protective device for the head of a quartz reaction chamber, comprising a sealing shell (1), characterized in that, Also includes: Connecting seat (2); the top end of the connecting seat (2) is threaded into the cover housing (1); Quartz ceiling (6); A connecting post (4) is provided at the middle position of the bottom end of the connecting seat (2), and several quartz ceilings (6) are distributed around the bottom end of the connecting seat (2) along the connecting post (4), and the connecting seat (2) and the quartz ceiling (6) are slidably connected.

2. The quartz reaction chamber head protection device according to claim 1, characterized in that: Multiple partitions (5) are evenly distributed around the bottom of the connecting seat (2) and the circumference of the connecting column (4), dividing the bottom of the connecting seat (2) into several placement slots for use with the quartz ceiling (6).

3. The quartz reaction chamber head protection device according to claim 1, characterized in that: The top of each quartz ceiling (6) is provided with a T-shaped slider (7), and the bottom of the connecting seat (2) is provided with multiple T-shaped grooves (8) that cooperate with the T-shaped sliders (7).

4. The quartz reaction chamber head protection device according to claim 1, characterized in that: The connecting column (4) is provided with multiple recessed slots (3) for use with the quartz ceiling (6).

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