Joints and radio frequency power sources

Abstract

The utility model discloses an embodiment provides a kind of joint and radio frequency power supply, joint includes insulating component, fixed component, cover component, first electric connection component and second electric connection component;Insulating component includes sequentially connected first insulating part, second insulating part and third insulating part, second insulating part is formed on the outer side of first insulating part and third insulating part, and insulating component further includes through-hole;Fixed component is covered on first insulating part, or fixed component is covered on first insulating part and second insulating part;At least a part of first electric connection component is arranged in the through-hole of insulating component, and first electric connection component and second electric connection component are physically and electrically connected, and the connecting position of first electric connection component and second electric connection component is located at the end of third insulating part away from first insulating part;Cover component uses insulating material, and cover component covers the connecting position of first electric connection component and second electric connection component.

Description

Technical Field

[0001] This application relates to the field of radio frequency power supply connections, and more particularly to a connector and a radio frequency power supply. Background Technology

[0002] In the prior art, the radio frequency power supply includes a housing and a connector disposed on the housing. One end of the connector penetrates through the housing and protrudes outside the housing, while the other end of the connector is placed inside the housing. The end of the connector located inside the housing is connected to the electrical components of the radio frequency power supply, such as a circuit board. Utility Model Content

[0003] This application provides a connector and a radio frequency power supply. The first electrical connection component of the connector of the radio frequency power supply is surrounded by a first shielding plate and a fixing component. The fixing component and the first shielding plate together serve to shield external signals, which can effectively shield external signals.

[0004] This application provides a connector, which includes: an insulating component, a fixing component, a sleeve component, a first electrical connection component, and a second electrical connection component; The insulating component includes a first insulating portion, a second insulating portion, and a third insulating portion connected in sequence. The second insulating component is formed on the outer surface of the first insulating portion and the third insulating portion. The insulating component also includes a through hole penetrating the first insulating portion, the second insulating portion, and the third insulating portion. The fixing component is made of shielding material and is hollow. The fixing component is sleeved on the first insulating part, or the fixing component is sleeved on the first insulating part and the second insulating part. The fixing component can be fixed on the preset component to restrict the movement of the insulating component toward the first direction. At least a portion of the first electrical connection component is disposed in the through hole of the insulating component, the first electrical connection component and the second electrical connection component are physically and electrically connected, and the connection position of the first electrical connection component and the second electrical connection component is located at the end of the third insulating portion away from the first insulating portion. The sleeve component is made of insulating material. The sleeve component covers the connection position of the first electrical connection component and the second electrical connection component, and the sleeve component covers the electrical connection body of the second electrical connection component, exposing the electrical connection terminal of the second electrical connection component.

[0005] In one optional embodiment of this application, the first electrical connection component, the insulating component, and the fixing component are coaxially arranged.

[0006] In one optional embodiment of this application, the first electrical connection component includes a first electrical connection portion and a second electrical connection portion, the size of the first electrical connection portion is smaller than the size of the second electrical connection portion, and a first step surface is defined between the first electrical connection portion and the second electrical connection portion. The through-hole of the insulating component includes a first insulating space and a second insulating space, the first insulating space being smaller than the second insulating space, and the insulating component further includes a second stepped surface located between the first insulating space and the second insulating space; The first electrical connection portion is disposed within the first insulating space, and the second electrical connection portion is disposed within the second insulating space. The first step surface and the second step surface can fit together. The second step surface is used to restrict the movement of the second electrical connection portion toward a second direction, which is opposite to the first direction.

[0007] In one optional embodiment of this application, the first electrical connection component has a connection groove at one end away from the second electrical connection component, and a first screw hole at the other end; A second screw hole is provided at the end of the electrical connection body away from the electrical connection terminal; A screw is disposed in the first screw hole and the second screw hole to fix the first electrical connection component and the second electrical connection component, and to electrically connect the first electrical connection component and the second electrical connection component.

[0008] In one optional embodiment of this application, the sleeve component includes a first sleeve body and a second sleeve body. The first sleeve body covers the connection position of the first electrical connection component and the second electrical connection component, the second sleeve body covers the connection body of the second electrical connection component, and the first sleeve body covers a portion of the second sleeve body.

[0009] This application embodiment also provides a radio frequency power supply, which includes: a shielding housing and a connector, wherein the shielding housing includes a first shielding plate; The connector is the same as described above; The first shielding plate includes an outer side and an inner side that are opposite to each other. The first shielding plate includes a through hole that penetrates the outer side and the inner side of the first shielding plate and a groove disposed on the outer side of the first shielding plate. The groove and the through hole of the first shielding plate are connected. At least a portion of the first insulating portion extends beyond the outer side of the first shielding plate, the second insulating portion is disposed in the groove of the first shielding plate, a portion of the third insulating portion is disposed in the through hole of the first shielding plate, and another portion of the third insulating portion extends into the inner side of the first shielding plate. The fixing component is fixed to the first shielding plate; the second electrical connection component is disposed inside the inner side of the first shielding plate; the sleeve component is disposed inside the inner side of the first shielding plate. The sleeve component, the fixing component, and the insulating component together define a mounting groove, and the mounting groove is located between the sleeve component and the fixing component. A portion of the first shielding plate is disposed within the mounting groove.

[0010] In one optional embodiment of this application, the fixing component includes a first fixing part and a second fixing part connected together. The first fixing part is sleeved on the first insulating part, and the second fixing part is sleeved on the second insulating part. The second fixing part is disposed in the groove of the first shielding plate body, and the second fixing part and the first shielding plate body are connected.

[0011] In one optional embodiment of this application, the radio frequency power supply further includes a first carrier plate, which is disposed on the inner side of the first shielding plate. The first carrier plate and the first shielding plate are connected. A first notch is provided at the end of the first carrier plate that is connected to the first shielding plate. A part of the connecting body of the second electrical connection component and a part of the sleeve component are disposed in the first notch of the first carrier plate, and the sleeve component is connected to the first carrier plate.

[0012] In one optional embodiment of this application, the radio frequency power supply further includes a detection device, the detection device including a detection component and a detection carrier, the detection carrier including a through hole, and the detection component disposed in the through hole of the detection carrier; The detection component is sleeved on the third insulating part, and the connection positions of the detection component and the first electrical connection component and the second electrical connection component are spaced apart. A part of the third insulating part is located in the through hole of the detection carrier. The detection component and the detection carrier are located between the sleeved part and the fixing part. The detection component is disposed in the mounting groove, and a part of the detection carrier is disposed in the mounting groove.

[0013] In one optional embodiment of this application, the radio frequency power supply further includes a first carrier plate and a second carrier plate; The first carrier plate is disposed on the inner side of the first shielding plate, and the first carrier plate and the first shielding plate are connected. One end of the first carrier plate connected to the first shielding plate is provided with a first notch and a second notch. A part of the connecting body of the second electrical connection component and a part of the sleeve component are disposed in the first notch of the first carrier plate, and the sleeve component is connected to the first carrier plate. A part of the detection carrier is disposed in the second notch of the first carrier plate, and the second notch is larger than the first notch. The second carrier plate is disposed on the inner side of the first shielding plate. The second carrier plate and the first shielding plate are connected. A third notch is provided at the end of the second carrier plate that is connected to the first shielding plate. A portion of the detection carrier is disposed in the third notch of the second carrier plate.

[0014] Beneficial effects: In this embodiment, the first electrical connection component is surrounded by a first shielding plate and a fixing component. The fixing component and the first shielding plate work together to shield external signals, effectively blocking them. Furthermore, while the fixing component is connected to the first shielding plate, it also connects the insulating component and the first electrical connection component to the first shielding plate. The sleeve component insulates the connection points of the first and second electrical connection components from other functional devices, and insulates the portion of the second electrical connection component, excluding the electrical connection terminals, from other functional devices, thereby preventing arcing. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] To gain a more complete understanding of this application and its beneficial effects, the following description will be provided in conjunction with the accompanying drawings, wherein the same reference numerals in the following description denote the same parts.

[0017] Figure 1 , Figure 2 and Figure 3 This is a structural diagram of the output structure of an embodiment of this application.

[0018] Figure 4 This is an exploded view of the connector in an embodiment of this application.

[0019] Figure 5 for Figure 2 The connector shown is a cross-sectional view along the AA direction.

[0020] Figure 6 for Figure 3 The connector shown is a cross-sectional view along the BB direction.

[0021] Figure 7 This is a cross-sectional view of the fixing component in the connector of an embodiment of this application.

[0022] Figure 8 This is a cross-sectional view of the insulating component in the connector of an embodiment of this application.

[0023] Figure 9 This is a cross-sectional view of the first electrical connection component and the second electrical connection component in the connector of the embodiment of this application.

[0024] Figure 10 , Figure 13 , Figure 14 , Figure 16 , Figure 17 This is a structural diagram of the radio frequency power supply according to an embodiment of this application.

[0025] Figure 11 and Figure 15 This is an exploded view of the radio frequency power supply according to an embodiment of this application.

[0026] Figure 12 This is a partial view of the first and second carrier plates of the radio frequency power supply according to an embodiment of this application.

[0027] in, 10. Radio frequency power supply; 100. Connector; 101. Mounting slot; 102. Connection position; 110. First electrical connection component; 111. First electrical connection portion; 112. Second electrical connection portion; 113. First screw hole; 114. Connection groove; 115. First stepped surface; 120. Second electrical connection component; 121. Connection body; 122. Electrical connection terminal; 123. Second screw hole; 130. Insulating component; 131. First insulating part; 132. Second insulating part; 133. Third insulating part; 134. Through hole; 135. Second stepped surface; 136. Inclined surface; 1341. First Insulating space; 1342, Second insulating space; 1343, Third insulating space; 1344, Fourth insulating space; 140, Fixing component; 141, First fixing part; 142, Second fixing part; 143, Through hole; 1431, First fixing space; 1432, Second fixing space; 1411, First wall surface; 1421, Second wall surface; 150, Sleeving component; 150A, First sleeve body; 150B, Second sleeve body; 151, First sleeve space; 152, Second sleeve space; 153, First clearance space; 154, Second clearance space; 160, Screw; 200. Shielding shell; 210. First shielding plate; 220. Second shielding plate; 230. Third shielding plate; 240. Fourth shielding plate; 250. Fifth shielding plate; 260. Sixth shielding plate; 211. Inner side; 212. Outer side; 213. Through hole; 214. Groove; 300. Detection device; 310. Detection component; 320. Detection carrier; 321. Through hole; 410. First load-bearing plate; 411. First notch; 412. Second notch; 413. Support structure; 420. Second load-bearing plate; 421. Third notch; F1, first direction; F2, second direction. Detailed Implementation

[0028] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the application or its application or use. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the protection scope of this application.

[0029] In this document, references to "embodiment" or "implementation" mean that a particular feature, structure, or characteristic described in connection with an embodiment or implementation may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0030] like Figures 1 to 17 As shown, this utility model embodiment provides a connector 100 and an RF power supply 10. The connector 100 of this application embodiment can be used in RF power supplies such as the RF power supply 10 with an RF frequency range of 400K-60M. It can be understood that the connector 100 can be used in RF scenarios with an RF frequency range of 400K-60M.

[0031] Please refer to the following first. Figures 1 to 9 The structure of the connector 100 in the embodiments of this application will be described exemplarily.

[0032] The connector 100 includes a first electrical connection component 110, a second electrical connection component 120, an insulating component 130, a fixing component 140, and a sleeve component 150. It is understood that both the first electrical connection component 110 and the second electrical connection component 120 are made of conductive materials, and may be made of conductive metals, such as copper. It is also understood that the insulating component 130 is made of insulating material, such as insulating plastic.

[0033] The insulating component 130 includes a first insulating portion 131, a second insulating portion 132, and a third insulating portion 133 connected in sequence. The second insulating portion 132 is formed on the outer surface of the first insulating portion 131 and the third insulating portion 133, which can be understood as the second insulating portion 132 protruding beyond the outer surface of the first insulating portion 131 and the third insulating portion 133. The insulating component 130 also includes a through hole 134 penetrating the first insulating portion 131, the second insulating portion 132, and the third insulating portion 133.

[0034] The fixing component 140 is made of a shielding material, such as aluminum. The fixing component 140 is hollow, thus defining a through hole 143. The fixing component 140 is sleeved on the first insulating part 131, or on both the first insulating part 131 and the second insulating part 132. The fixing component 140 can be fixed to a predetermined component to restrict the movement of the insulating part 130 toward the first direction F1. The predetermined component is, for example, one of the shielding plates of an RF power supply, such as... Figure 10 , Figure 11 , Figure 13 , Figure 14 , Figure 15 and Figure 17 The first shielding plate 210 is shown in the diagram. When the fixing member 140 is fitted onto the first insulating portion 131, the first insulating portion 131 is disposed within the through hole 143 of the fixing member 140. When the fixing member 140 is fitted onto both the first insulating portion 131 and the second insulating portion 132, both the first insulating portion 131 and the second insulating portion 132 are disposed within the through hole 143 of the fixing member 140.

[0035] At least a portion of the first electrical connection component 110 is disposed in the through hole 134 of the insulating component 130. The first electrical connection component 110 and the second electrical connection component 120 are physically and electrically connected, and the connection position 102 of the first electrical connection component 110 and the second electrical connection component 120 is located at the end of the third insulating part 133 away from the first insulating part 131.

[0036] The sleeve component 150 is made of insulating material, such as insulating plastic. The sleeve component 150 covers the connection position 102 of the first electrical connection component 110 and the second electrical connection component 120, and covers the electrical connection body 121 of the second electrical connection component 120, exposing the electrical connection terminal 122 of the second electrical connection component 120. The electrical connection body 121 and the electrical connection terminal 122 are integrally connected, with the electrical connection body 121 fixedly connected to the first electrical connection component 110, and the electrical connection terminal 122 located at the end of the electrical connection body 121 furthest from the first electrical connection component 110.

[0037] The first electrical connection component 110 is surrounded and limited by the fixing component. The fixing component not only shields external signals but also restricts the movement of the first electrical connection component 110 and the insulating component 130 in the first direction F1. The sleeve component 150 insulates the connection position 102 of the first electrical connection component 110 and the second electrical connection component 120 from other functional devices, and insulates the part of the second electrical connection portion 120, excluding the electrical connection terminal 122, i.e., the electrical connection body 121, from other functional devices. The electrical connection terminal 122 has a sufficiently large gap from other functional devices to prevent arcing.

[0038] Other functional devices, such as the detection component 300 of the RF power supply 10, will be described exemplarily below.

[0039] In this embodiment, the connector 100, consisting of a first electrical connection component 110, an insulating component 130, and a fixing component 140, forms a three-layer structure: an inner layer, a middle layer, and an outer layer. The first electrical connection component 110 in the inner layer is used for electrical connection with other connectors to transmit signals. The insulating component 130 in the middle layer separates the first electrical connection component 110 from the fixing component 140 and also isolates the first electrical connection component 110 from other functional devices. The fixing component 140 in the outer layer serves as signal shielding and also restricts the insulating component 130 and the first electrical connection component 110.

[0040] For example, the first electrical connection component 110, the insulating component 130 and the fixing component 140 are coaxially arranged, that is, the first electrical connection component 110, the insulating component 130 and the fixing component 140 have the same central axis.

[0041] For example, the first electrical connection component 110, the insulating component 130, and the fixing component 140 are all fixedly connected together by an interference fit. Specifically, the first electrical connection component 110 is fixed in the through hole 134 of the insulating component 130 by an interference fit, and at least a portion of the insulating component 130, such as the first insulating portion 131, is fixed in the through hole 143 of the fixing component 140 by an interference fit. It should be noted that the first electrical connection component 110, the insulating component 130, and the fixing component 140 can also be connected in other ways, and this embodiment of the application does not impose any limitations.

[0042] For example, the first electrical connection component 110 includes a first electrical connection portion 111 and a second electrical connection portion 112. The size of the first electrical connection portion 111 is smaller than the size of the second electrical connection portion 112, for example, the diameter of the first electrical connection portion 111 is smaller than the diameter of the second electrical connection portion 112. A first stepped surface 115 is defined between the first electrical connection portion 111 and the second electrical connection portion 112. The through hole 134 of the insulating component 130 includes a first insulating space 1341 and a second insulating space 1342. The first insulating space 1341 is smaller than the second insulating space 1342. The insulating component 130 also includes a second stepped surface 135 located between the first insulating space 1341 and the second insulating space 1342. The first electrical connection portion 111 is disposed in the first insulating space 1341, and the second electrical connection portion 112 is disposed in the second insulating space 1342. The first step surface 115 and the second step surface 135 can fit together. The second step surface 135 is used to restrict the movement of the second electrical connection portion 112 toward the second direction F2, which is opposite to the first direction F1.

[0043] The statement that the first insulating space 1341 is smaller than the second insulating space 1342 should be understood as meaning that the diameter of the hole wall forming the first insulating space 1341 is smaller than the diameter of the hole wall forming the second insulating space 1342.

[0044] During actual installation, the first electrical connection component 110 is first inserted into the second insulating space 1342 by inserting the first electrical connection portion 111 of the first electrical connection component 110 into the second insulating space 1342, and then the first electrical connection component 110 is continued to be inserted until the first electrical connection portion 111 is inserted into the first insulating space 1341 and the second electrical connection portion 112 is inserted into the second insulating space 1342, and the first step surface 115 and the second step surface 135 are in contact.

[0045] For example, the first electrical connection component 110 and the second electrical connection component 120 are detachably connected, meaning they can be connected together and separated. In an optional embodiment, the first electrical connection component 110 and the second electrical connection component 120 can be connected or separated by a locking component. This locking component is, for example, a screw 160. The first electrical connection component 110 has a connecting groove 114 at one end away from the second electrical connection component 120 and a first screw hole 113 at the other end. The electrical connection body 121 of the second electrical connection component 120 has a second screw hole 123 at one end away from the electrical connection terminal 122. The locking component, such as the screw 160, is disposed within the first screw hole 113 and the second screw hole 123 to fix the first electrical connection component 110 and the second electrical connection component 120 and electrically connect them. The connecting groove 114 of the first electrical connection component 120 is used for insertion with other connectors.

[0046] To facilitate the insertion of the first electrical connection component 110 into other connectors, in this embodiment of the insulating component 130, the first insulating component 131 defines a third insulating space 1343, which is larger than the second insulating space 1342. The fact that the third insulating space 1343 is larger than the second insulating space 1342 should be understood as meaning that the diameter of the hole wall forming the third insulating space 1343 is larger than the diameter of the hole wall forming the second insulating space 1342. This facilitates the insertion of other connectors into the third insulating space 1343 of the insulating component 130 and into the first electrical connection component 110. For example, in the embodiment of this application, the inner side of the first insulating part 131 away from the third insulating part 133 in the insulating component 130 is provided with a slope 136. The slope 136 defines a fourth insulating space 1344. The diameter of the slope 136 gradually decreases from one end of the third insulating part 133 to the end close to the third insulating part 133, which makes it more convenient for other connectors to extend into the third insulating space 1343 of the insulating component 130 and be plugged into the first electrical connection component 110.

[0047] In this design, the electrical connection body 121 of the second electrical connection component 120 and the first electrical connection component 110 are approximately perpendicular to each other. For example, the first electrical connection component 110 is positioned along a first direction F1 or a second direction F2, while the second electrical connection component 120 is positioned perpendicular to either direction F1 or F2. The electrical connection body 121 and the electrical connection terminal 122 are bent, for example, the electrical connection terminal 120 and the electrical connection body 121 are perpendicular to each other. The electrical connection terminal 122 extends from the end of the electrical connection body 121 away from the first electrical connection component 110 towards the second direction F2. The electrical connection terminal 122 can be electrically connected to other components, such as to the circuit board of the RF power supply 10. For example, the electrical connection terminal 122 has a through hole 124 to facilitate connection between the electrical connection terminal 122 and a structure on the circuit board, such as by screwing or soldering.

[0048] For example, the fixing member 140 includes a first fixing part 141 and a second fixing part 142 connected together. The first fixing part 141 is sleeved on the first insulating part 131, and the second fixing part 142 is sleeved on the second insulating part 132. The inner diameter of the first fixing part 141 is smaller than the inner diameter of the second fixing part 142, and the outer diameter of the first fixing part 141 is smaller than the outer diameter of the second fixing part 142. The inner surface of the first fixing part 141 can fit against the outer surface of the first insulating part 131, and the inner surface of the second fixing part 142 can fit against the outer surface of the second insulating part 132.

[0049] For example, the through hole 143 of the fixing member 140 includes a first fixing space 1431 defined by the first fixing part 141 and a second fixing space 1432 jointly defined by the first fixing part 141 and the second fixing part 142. The second fixing space 1432 is defined by the first wall surface 1411 and the second wall surface 1421. The second wall surface 1421 can be understood as the inner surface of the second fixing part 142. The outer surface of the second insulating part 132 can fit against the second wall surface 1421, and the end face of the second insulating part 132 near the first insulating part 131 can fit against the first wall surface 1411. Thus, the fixing member 140 can restrict the movement of the insulating part 130 toward the first direction F1.

[0050] For example, the sleeve component 150 includes a first sleeve body 150A and a second sleeve body 150B. The first sleeve body 150A sleeves the connection position 102 of the first electrical connection component 110 and the second electrical connection component 120, and the second sleeve body 150B sleeves the connection body 121 of the second electrical connection component 120. The first sleeve body 150A also sleeves a portion of the second sleeve body 150B. Specifically, the first sleeve body 150A defines a first sleeve space 151, and the second sleeve portion 150B defines a second sleeve space 152. The connection position 102 of the first electrical connection component 110 and the second electrical connection component 120 is located within the first sleeve space 151 and is enclosed by the first sleeve body 150A. A portion of the electrical connection body 121 of the second electrical connection component 120 is located within the second sleeve space 152 and is enclosed by the second sleeve body 150B, thereby exposing the electrical connection terminal 122 of the second electrical connection component 120 for easy electrical connection with other components.

[0051] For example, the second housing 150B has a first clearance space 153 at the end away from the electrical connection terminal 122. The first clearance space 153 is used to avoid a portion of a locking component such as a screw 160. For example, the first clearance space 153 has an arc-shaped structure and is connected to the second housing space 152.

[0052] For example, a second clearance space 154 is provided at the end of the second housing 150B away from the electrical connection terminal 122. The second clearance space 154 is used to avoid a portion of the third insulating portion 133. In an optional embodiment of this application, a portion of the third insulating portion 133 is placed within the second clearance space 154. For example, the second clearance space 154 has an arc-shaped structure.

[0053] During actual installation, the end of the electrical connection body 121 of the second electrical connection component 120 away from the electrical connection terminal 122 is inserted into the second sleeve 150B from the end away from the first sleeve 150A until it reaches the position of the electrical connection terminal 122. Then, the second screw hole 123 and the first screw hole 113 are aligned, and a locking component such as a screw 160 is inserted into the second screw hole 123 and the first screw hole 113 and locked. Afterward, the first sleeve 150A is fitted onto the connection position 102 between the first electrical connection component 110 and the second electrical connection component 120, and also fitted onto the second sleeve 150B.

[0054] like Figures 10 to 17As shown, the RF power supply 10 may include a connector 100 and a shielding housing 200. The shielding housing 200 may include multiple shielding plates that can be connected together. For example, the shielding housing 200 may include a first shielding plate 210, a second shielding plate 220, a third shielding plate 230, a fourth shielding plate 240, a fifth shielding plate 250, and a sixth shielding plate 260. The first shielding plate 210 and the second shielding plate 220 are disposed opposite to each other. The third shielding plate 230, the fourth shielding plate 240, the fifth shielding plate 250, and the sixth shielding plate 260 are connected between the first shielding plate 210 and the second shielding plate 220. The third shielding plate 230 and the fourth shielding plate 240 are disposed opposite to each other, and the third shielding plate 230 and the fourth shielding plate 240 are respectively located below and above the first shielding plate 210 and the second shielding plate 220. The fifth shielding plate 250 and the sixth shielding plate 260 are arranged opposite to each other, and the fifth shielding plate 250 and the sixth shielding plate 260 are respectively located on both sides of the first shielding plate 210 and the second shielding plate 220. It should be noted that the number and connection relationship of the shielding plates of the shielding shell 200 in this embodiment can be set according to requirements, and this embodiment does not impose any limitations.

[0055] It is understood that the shielding housing 200 in this application embodiment uses shielding material, such as aluminum, which can shield external signals.

[0056] The connector 100 can be disposed on any one of the shielding plates of the shielding housing 200. In this embodiment, the connector 100 is disposed on the first shielding plate 210 as an example for illustrative purposes.

[0057] In one alternative embodiment, such as Figure 13 , Figure 14 and Figure 15 As shown, and in combination Figure 10 , Figure 11 and Figure 12 The first shielding plate 210 includes an outer side 212 and an inner side 211 that are opposite to each other. The first shielding plate 210 includes a through hole 213 that penetrates the outer side 212 and the inner side 211 of the first shielding plate 210 and a groove 214 disposed on the outer side 212 of the first shielding plate 210. The groove 214 and the through hole 213 of the first shielding plate 210 are connected.

[0058] At least a portion of the first insulating portion 131 extends beyond the outer side 212 of the first shielding plate 210, the second insulating portion 132 is disposed in the groove 214 of the first shielding plate 210, a portion of the third insulating portion 133 is disposed in the through hole 213 of the first shielding plate 210, and another portion of the third insulating portion 133 extends into the inner side 211 of the first shielding plate 210.

[0059] The fixing component 140 is fixed to the first shielding plate 210. Both the fixing component 140 and the first shielding plate 210 are provided with screw holes, and the fixing component 140 and the first shielding plate 210 are connected by screws, thereby fixing the fixing component 140 to the first shielding plate 210. Thus, in this embodiment of the application, the fixing component 140 and the shielding shell 200 are electrically connected. It is understood that the shielding shell 200 is grounded, thereby ensuring that the fixing component 140 is grounded.

[0060] The second electrical connection component 120 is disposed within the inner side 211 of the first shielding plate 210.

[0061] The sleeve component 150 is disposed within the inner side 211 of the first shielding plate 210. That is, both the first sleeve 150A and the second sleeve 150B are disposed within the inner side 211 of the first shielding plate 210.

[0062] The sleeve component 150, the fixing component 140 and the insulating component 130 together define a mounting groove 101, and the mounting groove 101 is located between the sleeve component 150 and the fixing component 140. A part of the first shielding plate 210 is disposed in the mounting groove 101.

[0063] For example, the second fixing part 142 is disposed within the groove 214 of the first shielding plate 210, and the second fixing part 142 and the first shielding plate 210 are connected. The second fixing part 142 and the first shielding plate 210 are detachably connected, that is, the second fixing part 142 and the first shielding plate 210 can be connected together or separated. For example, the second fixing part 142 is provided with multiple screw holes, and the first shielding plate 210 is provided with multiple screw holes. Multiple screws can be disposed in the screw holes of the second fixing part 142 and the screw holes of the first shielding plate 210 to fix the second fixing part 142 to the first shielding plate 210. For example, the outer surface of the second fixing part 142 is flush with the outer surface 212 of the first shielding plate 210.

[0064] For example, the RF power supply 10 further includes a first carrier plate 410, which is disposed on the inner side 211 of the first shielding plate 210. The first carrier plate 410 and the first shielding plate 210 are connected. A first notch 411 is provided at the end of the first carrier plate 410 connected to the first shielding plate 210. A part of the connecting body 121 of the second electrical connection component 120 and a part of the sleeve component 150 are disposed in the first notch 411 of the first carrier plate 410, and the sleeve component 150 is connected to the first carrier plate 410. Specifically, the first sleeve 150A is connected to the first carrier plate 410. In an optional embodiment, screw holes can be provided on the first sleeve 150A and the first carrier plate 410. Screws can be disposed in the screw holes of the first sleeve 150A and the first carrier plate 410 and locked, thereby fixing the first sleeve 150A to the first carrier plate 410. A portion of the second body 150B is disposed within the first notch 411. The connection position 102 of the first electrical connection component 110 and the second electrical connection component 120 is located above the first support plate 410, and the electrical connection terminal 122 of the second electrical connection component 120 is located below the first support plate 410.

[0065] The first support plate 410 can also support other components of the RF power supply 10. The first support plate 410 can also cool the components of the RF power supply 10, and can also be called a cooling plate.

[0066] In another alternative embodiment, such as Figure 10 , Figure 11 , Figure 12 , Figure 16 and Figure 17 The RF power supply 10 also includes a detection device 300, which includes a detection component 310 and a detection carrier 320. The detection carrier 320 includes a through hole 321, and the detection component 310 is disposed within the through hole 321 of the detection carrier 320. The detection component 310 is sleeved on the third insulating part 133, and the connection positions 102 between the detection component 310 and the first electrical connection part 110 and the second electrical connection part 120 are spaced apart. A portion of the third insulating part 133 is located within the through hole 321 of the detection carrier 320. The detection component 310 and the detection carrier 320 are located between the sleeve part 150 and the fixing part 140. The detection component 310 is disposed within the mounting groove 101, and a portion of the detection carrier 320 is disposed within the mounting groove 101. The detection device 300 is disposed within the inner side surface 211 of the first shielding plate 210. The detection carrier 320 of the detection device 300 can also be connected to the first shielding plate 210.

[0067] For example, the detection carrier 320 and the inner surface 211 of the first shielding plate 210 are attached.

[0068] For example, one end of the first support plate 410 connected to the first shielding plate 210 is further provided with a second notch 412, which communicates with the first notch 411. A portion of the detection carrier 320 is disposed within the second notch 412 of the first support plate 410, and the second notch 412 is larger than the first notch 411. For example, to increase the stability of the detection carrier 320, the first support plate 410 further includes a support structure 413 disposed at the position of the second notch 412, and the bottom of the detection carrier 320 can be placed on the support structure 413.

[0069] For example, the RF power supply 10 further includes a second carrier plate 420, which is disposed on the inner side 211 of the first shielding plate 210. The second carrier plate 420 and the first shielding plate 210 are connected. A third notch 421 is provided at the end of the second carrier plate 420 connected to the first shielding plate 210. A portion of the detection carrier 320 is disposed within the third notch 421 of the second carrier plate 420. The second carrier plate 420 and the first carrier plate 410 are spaced apart within the shielding housing 200, for example, the second carrier plate 420 is positioned above the first carrier plate 410. Thus, the upper and lower ends of the detection carrier 320 are respectively defined between the second carrier plate 420 and the first carrier plate 410.

[0070] For example, the detection component 310 can be used to detect the voltage and / or current of the connector 100. The detection component 310 is spaced apart from and does not contact the metal parts of the connector 100, and the detection component 310 can detect the voltage and / or current of the connector 100 by electromagnetic induction.

[0071] The connectors and RF power supplies provided in the embodiments of this application have been described in detail above. Specific examples have been used to illustrate the principles and implementation methods of this utility model. The descriptions of the embodiments above are only for the purpose of helping to understand the method and core ideas of this utility model. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of this application. Therefore, the content of this specification should not be construed as a limitation of this application.

Claims

1. A connector, characterized in that, include: Insulating components, fixing components, sleeve components, first electrical connection components, and second electrical connection components; The insulating component includes a first insulating portion, a second insulating portion, and a third insulating portion connected in sequence. The second insulating component is formed on the outer surface of the first insulating portion and the third insulating portion. The insulating component also includes a through hole penetrating the first insulating portion, the second insulating portion, and the third insulating portion. The fixing component is made of shielding material and is hollow. The fixing component is sleeved on the first insulating part, or the fixing component is sleeved on the first insulating part and the second insulating part. The fixing component can be fixed on the preset component to restrict the movement of the insulating component toward the first direction. At least a portion of the first electrical connection component is disposed in the through hole of the insulating component, the first electrical connection component and the second electrical connection component are physically and electrically connected, and the connection position of the first electrical connection component and the second electrical connection component is located at the end of the third insulating portion away from the first insulating portion. The sleeve component is made of insulating material. The sleeve component covers the connection position of the first electrical connection component and the second electrical connection component, and the sleeve component covers the electrical connection body of the second electrical connection component, exposing the electrical connection terminal of the second electrical connection component.

2. The connector according to claim 1, characterized in that, The first electrical connection component, the insulating component, and the fixing component are arranged coaxially.

3. The connector according to claim 1, characterized in that, The first electrical connection component includes a first electrical connection portion and a second electrical connection portion, wherein the size of the first electrical connection portion is smaller than the size of the second electrical connection portion, and a first step surface is defined between the first electrical connection portion and the second electrical connection portion. The through-hole of the insulating component includes a first insulating space and a second insulating space, the first insulating space being smaller than the second insulating space, and the insulating component further includes a second stepped surface located between the first insulating space and the second insulating space; The first electrical connection portion is disposed within the first insulating space, and the second electrical connection portion is disposed within the second insulating space. The first step surface and the second step surface can fit together. The second step surface is used to restrict the movement of the second electrical connection portion toward a second direction, which is opposite to the first direction.

4. The connector according to claim 1, characterized in that, The first electrical connection component has a connection groove at one end away from the second electrical connection component, and a first screw hole at the other end; A second screw hole is provided at the end of the electrical connection body away from the electrical connection terminal; A screw is disposed in the first screw hole and the second screw hole to fix the first electrical connection component and the second electrical connection component, and to electrically connect the first electrical connection component and the second electrical connection component.

5. The connector according to claim 1, characterized in that, The sleeve component includes a first sleeve and a second sleeve. The first sleeve covers the connection position of the first electrical connection component and the second electrical connection component, and the second sleeve covers the connection body of the second electrical connection component. The first sleeve also covers a portion of the second sleeve.

6. A radio frequency power supply, characterized in that, include: A shielding housing and a connector, wherein the shielding housing includes a first shielding plate; The connector is the connector as described in any one of claims 1-5; The first shielding plate includes an outer side and an inner side that are opposite to each other. The first shielding plate includes a through hole that penetrates the outer side and the inner side of the first shielding plate and a groove disposed on the outer side of the first shielding plate. The groove and the through hole of the first shielding plate are connected. At least a portion of the first insulating portion extends beyond the outer side of the first shielding plate, the second insulating portion is disposed in the groove of the first shielding plate, a portion of the third insulating portion is disposed in the through hole of the first shielding plate, and another portion of the third insulating portion extends into the inner side of the first shielding plate. The fixing component is fixed to the first shielding plate; the second electrical connection component is disposed inside the inner side of the first shielding plate; the sleeve component is disposed inside the inner side of the first shielding plate. The sleeve component, the fixing component, and the insulating component together define a mounting groove, and the mounting groove is located between the sleeve component and the fixing component. A portion of the first shielding plate is disposed within the mounting groove.

7. The radio frequency power supply according to claim 6, characterized in that, The fixing component includes a first fixing part and a second fixing part connected together. The first fixing part is sleeved on the first insulating part, and the second fixing part is sleeved on the second insulating part. The second fixing part is disposed in the groove of the first shielding plate body, and the second fixing part and the first shielding plate body are connected.

8. The radio frequency power supply according to claim 6, characterized in that, The radio frequency power supply also includes a first carrier plate, which is disposed on the inner side of the first shielding plate. The first carrier plate and the first shielding plate are connected. A first notch is provided at the end of the first carrier plate that is connected to the first shielding plate. A part of the connecting body of the second electrical connection component and a part of the sleeve component are disposed in the first notch of the first carrier plate, and the sleeve component is connected to the first carrier plate.

9. The radio frequency power supply according to claim 6, characterized in that, The radio frequency power supply also includes a detection device, which includes a detection component and a detection carrier. The detection carrier includes a through hole, and the detection component is disposed in the through hole of the detection carrier. The detection component is sleeved on the third insulating part, and the connection positions of the detection component and the first electrical connection component and the second electrical connection component are spaced apart. A part of the third insulating part is located in the through hole of the detection carrier. The detection component and the detection carrier are located between the sleeved part and the fixing part. The detection component is disposed in the mounting groove, and a part of the detection carrier is disposed in the mounting groove.

10. The radio frequency power supply according to claim 9, characterized in that, The radio frequency power supply also includes a first carrier plate and a second carrier plate; The first carrier plate is disposed on the inner side of the first shielding plate, and the first carrier plate and the first shielding plate are connected. One end of the first carrier plate connected to the first shielding plate is provided with a first notch and a second notch. A part of the connecting body of the second electrical connection component and a part of the sleeve component are disposed in the first notch of the first carrier plate, and the sleeve component is connected to the first carrier plate. A part of the detection carrier is disposed in the second notch of the first carrier plate, and the second notch is larger than the first notch. The second carrier plate is disposed on the inner side of the first shielding plate. The second carrier plate and the first shielding plate are connected. A third notch is provided at the end of the second carrier plate that is connected to the first shielding plate. A portion of the detection carrier is disposed in the third notch of the second carrier plate.

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