Excimer laser lens exchange cavity protection structure

Abstract

The utility model relates to cavity protection structure technical field, and disclose excimer laser lens changing cavity protection structure, realize protection cavity through setting up cavity side sealing plate, mirror seat subassembly, exhaust component, light outlet sealing assembly etc. Structure, the output shaft of electric push rod promotes the baffle to be located in the sliding groove and moves, the baffle stretches sealing ring A synchronously when moving, then between sealing ring B and slide, carry out the complete isolation of light outlet, connect exhaust component and outside exhaust pipeline, through vacuum pump suction exhaust component inside gas, make the gas between mirror seat subassembly's inside and baffle completely empty, make it produce vacuum negative pressure state, then open mirror seat subassembly and change lens, start electric push rod again, and electric push rod pulls the baffle through the output shaft, make the baffle between sealing ring B be drawn out, and make light outlet completely expose, complete the replacement work to lens, have played the effect of insulating air, protection cavity.

Description

Technical Field

[0001] This utility model relates to the field of cavity protection structure technology, and in particular to the cavity protection structure for excimer laser lens replacement. Background Technology

[0002] An excimer laser is a gas laser that uses rare gases (such as fluorine and krypton) or their halides (such as fluorides and chlorides) as the working medium. Its working principle is as follows: In the laser, rare gases, halogen gases, and buffer gases are carefully proportioned and filled into a sealed laser cavity to maintain a pressure range of 2–4 atmospheres. A short-pulse high-voltage discharge is applied between the cathode and anode within the cavity, with a discharge voltage of approximately 20–40 kV and a pulse width of approximately 50–100 ns, effectively exciting the gas between the electrodes. This process excites the gas to a high-energy state, forming what is known as an "excimer." During this process, the rare gases (such as fluorine and krypton) or their halides (such as fluorides and chlorides) undergo a passivation reaction with the inner wall of the cavity, forming a dense fluoride film that prevents further reaction between the rare gases (such as fluorine and krypton) or their halides (such as fluorides and chlorides) and the inner wall, thus slowing down the gas reaction rate. However, rare gases (such as fluorine and krypton) or their halides (such as fluorides and chlorides) will damage the fluoride film formed on the inner wall of the cavity once they come into contact with moisture in the air, accelerating the reaction of rare gases (such as fluorine and krypton) or their halides (such as fluorides and chlorides) and reducing their service life.

[0003] The laser has two output ports, one at the front and one at the back, for mounting a mirror assembly. Coated lenses are mounted on the mirror assembly. During lens replacement, air may enter the cavity through the output port and react with the fluoride film on the inner wall of the cavity, damaging the fluoride film formed there. Current methods for protecting the laser during lens replacement include continuously filling the cavity with high-purity helium to create a pressure difference, and adding a protective cap to the output port end face. However, these methods cannot guarantee that air will not enter the cavity. Utility Model Content

[0004] To address the shortcomings of existing technologies, this invention provides a protective structure for the lens replacement cavity of an excimer laser, which has the advantages of protecting the cavity and increasing its lifespan, thus solving the problems mentioned in the background art.

[0005] This utility model provides the following technical solution: a protective structure for a lens replacement cavity of an excimer laser, including a laser cavity. Side sealing plates are fixedly installed on both sides of the laser cavity. A lens mount assembly is installed inside one side of the side sealing plate, away from the laser cavity. An exhaust assembly is fixedly installed on the top of the side sealing plate, and the exhaust assembly communicates with the lens mount assembly and the interior of the laser cavity. A light outlet sealing assembly is fixedly installed on the other side of the side sealing plate, corresponding to the position of the lens mount assembly. A lubrication assembly is fixedly installed on one side of the side sealing plate, located on the side of the lens mount assembly. The lubrication assembly contains lubricating grease. A transmission oil hole is opened inside the side sealing plate between the lubrication assembly and the light outlet sealing assembly.

[0006] Through the above structural design, the design and coordination of the cavity side sealing plate, lubrication components, and transmission oil holes, the laser cavity can be isolated from the outside when the lens is replaced, protecting the inner wall of the laser cavity from damage. Furthermore, it eliminates the need to evacuate the gas inside the laser cavity, saving time and reducing the waste of rare gases.

[0007] Preferably, the light outlet sealing assembly includes a bottom plate, a top plate A, and a top plate B. The bottom plate is fixedly installed on one side of the cavity side sealing plate. A fixing groove and a sliding groove are formed on the surface of the bottom plate. The top plate A and the top plate B are fixedly installed on the surface of the bottom plate at the fixing groove and the sliding groove.

[0008] With the above structural design, the light outlet sealing assembly achieves a reasonable distribution design by setting the bottom plate, top plate A, and top plate B, and each of them is equipped with a sealing ring at the connection point, so that it can maintain a sealed state in the working environment.

[0009] Preferably, an electric push rod is fixedly installed inside the fixed groove, a baffle is slidably installed inside the sliding groove, the output shaft end of the electric push rod is fixedly connected to the baffle, and a protective corrugated pipe is fixedly connected to one side of the baffle between the outer ring of the baffle and the inner wall of the sliding groove.

[0010] The above-mentioned structure can achieve the effect of real-time sealing and covering of the light outlet. When the output shaft is moved by the electric push rod, the baffle moves inside the sliding groove. Due to its large size, the baffle can completely cover the light outlet.

[0011] Preferably, a light outlet is provided between the bottom plate and the top plate B, and the shape and size of the light outlet are smaller than those of the baffle. A sealing ring A is provided on the outer ring of the fixing groove between the top plate A and the bottom plate. A sealing ring B is provided on the inner side of the light outlet of both the bottom plate and the top plate B. A sealing ring C is provided on the outer ring of the sliding groove between the bottom plates.

[0012] With the above structural design, and by setting sealing rings A, B, and C, the entire cavity side sealing plate can achieve sealing in both working and standby states.

[0013] Preferably, the lubrication assembly includes a grease can and a rotating rod. The grease can is fixedly installed on one side of the cavity side sealing plate, located on one side of the mirror mount assembly. The inner ring of the grease can has a threaded groove. The rotating rod is slidably installed inside the grease can. The end of the rotating rod is provided with a piston head located inside the grease can. The middle part of the rotating rod is provided with a screw ring. The outer ring of the screw ring is threaded. The screw ring and the inner ring of the grease can are threaded to match.

[0014] With the above structural design, the angle of the rotating rod can be finely adjusted, so that the lubricating grease is evenly coated on the surfaces of sealing rings A, B, and C, extending their service life, reducing replacement frequency, and lowering costs.

[0015] Preferably, the oil transmission hole includes a compression hole, which is opened between the end face of the grease tank and the inside of the base plate. The oil transmission hole is located inside the base plate and has a lubrication groove A on the side of the sealing ring A and sealing ring C. The oil transmission hole is located inside the base plate and has a lubrication groove B on the side of the sealing ring B. The compression hole is connected to the lubrication groove A and the lubrication groove B.

[0016] With the above structural design, lubricating grease is conveyed through the extrusion hole, lubrication groove A, and lubrication groove B, so that the lubricating grease is evenly coated on the surfaces of sealing rings A, B, and C. The amount applied each time is small, but it is enough to lubricate for a long time.

[0017] This utility model has the following advantages: 1. The excimer laser lens replacement cavity protection structure protects the cavity by setting up a cavity side sealing plate, a lens mount assembly, an exhaust assembly, and an output port sealing assembly. First, the electric push rod is energized, and the output shaft of the electric push rod pushes the baffle to move inside the sliding groove. When the baffle moves, it first squeezes the sealing ring B and simultaneously stretches the sealing ring A. Then it slides between the sealing rings B, completely blocking the output port. The exhaust assembly is connected to the external exhaust pipe, and the gas inside the exhaust assembly is sucked out by the vacuum pump, so that the gas inside the lens mount assembly and between the baffle is completely emptied, creating a vacuum negative pressure state. Then the lens mount assembly is opened to replace or remove the lens. The electric push rod is activated again, and the electric push rod pulls the baffle through the output shaft, so that the baffle is pulled out between the sealing rings B, and the output port is fully exposed, completing the lens replacement work and achieving the effect of isolating air and protecting the cavity.

[0018] 2. The excimer laser lens replacement cavity protection structure achieves lubrication of the sealing rings through the inclusion of lubrication components, a grease tank, a rotary rod, and transmission oil holes. By rotating the rotary rod, the screw ring rotates and moves forward inside the grease tank, causing the piston head to squeeze the lubricating grease inside the grease tank into the extrusion hole. Subsequently, the rotary rod is gradually rotated to fill lubrication grooves A and B with grease. After fine-tuning the rotary rod again, the grease is positioned inside lubrication grooves A and B to lubricate sealing rings A, B, and C, resulting in a thin layer of grease on their surfaces. This extends the service life of sealing rings A, B, and C, effectively prolonging their lifespan. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the internal structure of the laser cavity of this utility model; Figure 3 This is a schematic diagram of the structure of the laser cavity internal light outlet sealing assembly of this utility model; Figure 4 This is a first-view schematic diagram of the internal structure of the light outlet sealing assembly of this utility model; Figure 5 This is a schematic diagram of the internal structure of the lubrication component of this utility model; Figure 6 This is a second-view schematic diagram of the internal structure of the light outlet sealing assembly of this utility model; Figure 7 for Figure 5 Enlarged view of point A in the middle.

[0020] In the diagram: 1. Laser cavity; 2. Cavity side sealing plate; 3. Mirror mount assembly; 4. Exhaust assembly; 5. Light outlet sealing assembly; 51. Base plate; 52. Top plate A; 53. Top plate B; 54. Electric push rod; 55. Baffle; 56. Protective bellows; 57. Sealing ring A; 58. Sealing ring B; 59. Sealing ring C; 6. Lubrication assembly; 61. Grease tank; 62. Rotary rod; 63. Piston head; 64. Screw ring; 7. Oil transfer hole; 71. Extrusion hole; 72. Lubrication groove A; 73. Lubrication groove B. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Please see Figures 1-5 The excimer laser lens replacement cavity protection structure includes a laser cavity 1. Cavity side sealing plates 2 are fixedly installed on both sides of the laser cavity 1. A lens mount assembly 3 is installed inside one side of the cavity side sealing plate 2, away from the laser cavity 1. An exhaust assembly 4 is fixedly installed on the top of the cavity side sealing plate 2, and the exhaust assembly 4 is connected to the lens mount assembly 3 and the interior of the laser cavity 1. An output port sealing assembly 5 is fixedly installed on the other side of the cavity side sealing plate 2, corresponding to the position of the lens mount assembly 3. A lubrication assembly 6 is fixedly installed on one side of the cavity side sealing plate 2, located on the side of the lens mount assembly 3. The lubrication assembly 6 contains lubricating grease. A transmission oil hole 7 is opened inside the cavity side sealing plate 2 between the lubrication assembly 6 and the output port sealing assembly 5.

[0023] In practical use, this device, through the design and coordination of the cavity side sealing plate 2, the lubrication assembly 6, and the transmission oil hole 7, isolates the laser cavity 1 from the outside during lens replacement, protecting the inner wall of the laser cavity 1 from damage. Furthermore, it eliminates the need to evacuate the gas inside the laser cavity 1, saving time and reducing the waste of rare gases. The lubrication assembly 6 and the transmission oil hole 7 enable routine maintenance of sealing rings A57, B58, and C59. Lubricating grease from the lubrication assembly 6 is evenly injected into the transmission oil hole 7, ensuring uniform coating on its surface, extending service life and reducing costs.

[0024] Please see Figures 1-4 The light outlet sealing assembly 5 includes a base plate 51, a top plate A52, and a top plate B53. The base plate 51 is fixedly installed on one side of the cavity side sealing plate 2. A fixing groove and a sliding groove are provided on the surface of the base plate 51. The top plate A52 and the top plate B53 are fixedly installed on the surface of the base plate 51 at the surface of the fixing groove and the sliding groove.

[0025] The light outlet sealing assembly 5 achieves a reasonable distribution design by setting the base plate 51, top plate A52, and top plate B53, and each of them is equipped with a sealing ring at the connection point, so that it can maintain a sealed state in the working environment and prevent internal air leakage or external air entry.

[0026] Please see Figures 1-4 An electric push rod 54 is fixedly installed inside the fixed groove, and a baffle 55 is slidably installed inside the sliding groove. The output shaft end of the electric push rod 54 is fixedly connected to the baffle 55. A protective corrugated pipe 56 is fixedly connected to one side of the baffle 55 between the outer ring of the baffle 55 and the inner wall of the sliding groove.

[0027] With the above-mentioned structural design, the light outlet can be sealed and covered in real time. When the output shaft is moved by the electric push rod 54, the baffle 55 moves inside the sliding groove. Because of its large size, the baffle 55 can completely cover the light outlet, and a seal can be achieved between the baffle 55 and the sealing ring B58.

[0028] Please see Figures 1-4 A light outlet is provided between the bottom plate 51 and the top plate B53. The shape and size of the light outlet are smaller than those of the baffle 55. A sealing ring A57 is provided on the outer ring of the fixing groove between the top plate A52 and the bottom plate 51. A sealing ring B58 is provided on the inner side of the light outlet of both the bottom plate 51 and the top plate B53. A sealing ring C59 is provided on the outer ring of the sliding groove between the bottom plates 51 and the bottom plate 52.

[0029] By setting sealing rings A57, B58, and C59, the cavity side sealing plate 2 can achieve sealing in both working and standby states. When the baffle 55 covers the light outlet, the elastic deformation of sealing ring B58 presses against the surface of baffle 55, achieving a sealing effect between the sliding groove and baffle 55, thus preventing internal air leakage or external air entry.

[0030] Please see Figures 1-7 The lubrication assembly 6 includes a grease can 61 and a rotating rod 62. The grease can 61 is fixedly installed on one side of the cavity side sealing plate 2, located on one side of the mirror mount assembly 3. The inner ring of the grease can 61 has a threaded groove. The rotating rod 62 is slidably installed inside the grease can 61. The end of the rotating rod 62 is located inside the grease can 61 and has a piston head 63. The middle part of the rotating rod 62 has a screw ring 64. The outer ring of the screw ring 64 has threads, and the threads between the screw ring 64 and the inner ring of the grease can 61 are compatible.

[0031] When maintenance is required, the screw rod 62 is turned so that the screw ring 64 is located inside the grease tank 61 and rotates. This causes the screw rod 62 to move into the grease tank 61, while the piston head 63 squeezes the lubricating grease inside the grease tank 61, slowly filling the extrusion hole 71, lubrication groove A72, and lubrication groove B73. Then, the angle of the screw rod 62 is finely adjusted so that the lubricating grease is evenly coated on the surfaces of the sealing rings A57, B58, and C59, extending their service life, reducing replacement frequency, and lowering costs.

[0032] Please see Figures 1-7 The oil transmission hole 7 includes a squeezing hole 71, which is located between the end face of the grease tank 61 and the interior of the base plate 51. The oil transmission hole 7 is located inside the base plate 51 and has a lubrication groove A72 on one side of the sealing rings A57 and C59. The oil transmission hole 7 is located inside the base plate 51 and has a lubrication groove B73 on one side of the sealing ring B58. The squeezing hole 71 is connected to the lubrication grooves A72 and B73.

[0033] Under long-term negative pressure and prolonged use, sealing rings A57, B58, and C59 will gradually dry out and age, resulting in a loss of elasticity. At the same time, the halogen gas inside the laser cavity 1 will slightly corrode the surface of sealing rings B58 and C59, shortening their lifespan. At this time, lubricating grease needs to be delivered through the extrusion hole 71, lubrication groove A72, and lubrication groove B73 to evenly coat the surface of sealing rings A57, B58, and C59. The amount applied each time is small, but it is enough to lubricate for a long time.

[0034] Working principle: When in use, the electric push rod 54 is energized first, so that the output shaft of the electric push rod 54 starts to work. The output shaft of the electric push rod 54 pushes the baffle 55 to move inside the sliding groove. When the baffle 55 moves, it first squeezes the sealing ring B58 and simultaneously stretches the sealing ring A57. Then it slides between the sealing rings B58 to completely block the light outlet. The sealing rings B58 and the baffle 55 are adhered to achieve complete sealing. Connect the exhaust assembly 4 to the external exhaust pipe, and use a vacuum pump to draw the gas inside the exhaust assembly 4, so that the gas between the inside of the lens mount assembly 3 and the baffle 55 is completely emptied, creating a vacuum negative pressure state. Then open the lens mount assembly 3 to replace or remove the lens. After the lens replacement is completed, the gas between the lens mount assembly 3 and the cavity side sealing plate 2 is evacuated again by the vacuum pump to create a vacuum negative pressure state. Then, the electric push rod 54 is activated again. The electric push rod 54 pulls the baffle 55 through the output shaft, so that the baffle 55 is pulled out between the sealing rings B58 and the light outlet is fully exposed, completing the lens replacement. This device plays a sealing role, which can effectively isolate the laser cavity 1 from the outside air, protect the inner wall of the laser cavity 1 from oxide damage, and when replacing the lens, it is not necessary to evacuate all the gas inside the laser cavity 1, which saves time and reduces gas waste. Under prolonged negative pressure and use, sealing rings A57, B58, and C59 will gradually dry out and age, losing their elasticity. Simultaneously, the halogen gas inside the laser cavity 1 will slightly corrode the surfaces of sealing rings B58 and C59, shortening their lifespan. During routine maintenance, rotating the screw rod 62 causes the screw ring 64 to rotate and move forward inside the grease tank 61, allowing the piston head 63 to squeeze the lubricating grease from the grease tank 61 into the extrusion hole 71. Then, gradually rotating the screw rod 62 fills the lubrication grooves A72 and B73 with grease. Fine-tuning the screw rod 62 again ensures the grease remains inside the lubrication grooves A72 and B73, lubricating sealing rings A57, B58, and C59, creating a thin layer of grease on their surfaces. This extends the service life of sealing rings A57, B58, and C59.

Claims

1. A protective structure for the lens changing cavity of an excimer laser, comprising a laser cavity (1), characterized in that: Both sides of the laser cavity (1) are fixedly installed with cavity side sealing plates (2). A mirror mount assembly (3) is installed inside one side of the cavity side sealing plate (2) away from the laser cavity (1). An exhaust assembly (4) is fixedly installed on the top of the cavity side sealing plate (2). The exhaust assembly (4) is connected to the mirror mount assembly (3) and the interior of the laser cavity (1). An output port sealing assembly (5) is fixedly installed on the other side of the cavity side sealing plate (2) and corresponds to the position of the mirror mount assembly (3). A lubrication assembly (6) is fixedly installed on one side of the cavity side sealing plate (2) on the side of the mirror mount assembly (3). The lubrication assembly (6) is provided with grease. A transmission oil hole (7) is opened between the lubrication assembly (6) and the output port sealing assembly (5) inside the cavity side sealing plate (2).

2. The excimer laser lens replacement cavity protection structure according to claim 1, characterized in that: The light outlet sealing assembly (5) includes a bottom plate (51), a top plate A (52), and a top plate B (53). The bottom plate (51) is fixedly installed on one side of the cavity side sealing plate (2). A fixing groove and a sliding groove are provided on the surface of the bottom plate (51). The top plate A (52) and the top plate B (53) are fixedly installed on the surface of the bottom plate (51) on the surface of the fixing groove and the sliding groove.

3. The excimer laser lens replacement cavity protection structure according to claim 2, characterized in that: An electric push rod (54) is fixedly installed inside the fixed groove, and a baffle (55) is slidably installed inside the sliding groove. The output shaft end of the electric push rod (54) is fixedly connected to the baffle (55), and a protective corrugated pipe (56) is fixedly connected on one side of the baffle (55) between the outer ring of the baffle (55) and the inner wall of the sliding groove.

4. The excimer laser lens replacement cavity protection structure according to claim 3, characterized in that: A light outlet is provided between the bottom plate (51) and the top plate B (53). The shape and size of the light outlet are smaller than those of the baffle (55). A sealing ring A (57) is provided on the outer ring of the fixing groove between the top plate A (52) and the bottom plate (51). A sealing ring B (58) is provided on the inner side of the light outlet of the bottom plate (51) and the top plate B (53). A sealing ring C (59) is provided on the outer ring of the sliding groove between the bottom plates (51) and the bottom plate (52).

5. The excimer laser lens replacement cavity protection structure according to claim 4, characterized in that: The lubrication assembly (6) includes a grease can (61) and a rotating rod (62). The grease can (61) is fixedly installed on one side of the cavity side sealing plate (2) located on one side of the mirror mount assembly (3). The inner ring of the grease can (61) has a threaded groove. The rotating rod (62) is slidably installed inside the grease can (61). The end of the rotating rod (62) is provided with a piston head (63) inside the grease can (61). The middle part of the rotating rod (62) is provided with a screw ring (64). The outer ring of the screw ring (64) is provided with threads. The screw ring (64) and the inner ring of the grease can (61) are threaded to match.

6. The excimer laser lens replacement cavity protection structure according to claim 5, characterized in that: The transmission oil hole (7) includes a squeezing hole (71). The squeezing hole (71) is located between the end face of the grease tank (61) and the inside of the base plate (51). The transmission oil hole (7) is located inside the base plate (51) and has a lubrication groove A (72) on one side of the sealing ring A (57) and the sealing ring C (59). The transmission oil hole (7) is located inside the base plate (51) and has a lubrication groove B (73) on one side of the sealing ring B (58). The squeezing hole (71) is connected to the lubrication groove A (72) and the lubrication groove B (73).

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