A hybrid permanent magnet and electromagnetic control device

Abstract

The utility model discloses a kind of permanent magnet and electromagnetic hybrid control device.The device includes: magnetic conducting spring piece, the magnetic conducting spring piece proximal end is fixed;Optical element, the optical element is fixed on the magnetic conducting spring piece;Magnetic conducting bar, the magnetic conducting bar is used to attract the magnetic conducting spring piece distal end and make magnetic conducting spring piece bend;Permanent magnet and coil, the permanent magnet and coil are all installed on the magnetic conducting bar, and the coil is connected power supply.Cavity inner portion is only a simple magnetic workpiece (magnetic conducting spring piece) and fixed structure, without any active pollution source, thereby from principle, guarantee the "absolute clean" environment necessary for laser cavity, especially ultraviolet, extreme ultraviolet laser cavity.

Description

Technical Field

[0001] This utility model relates to a hybrid control of permanent magnet and electromagnetic, and in particular to a hybrid control device of permanent magnet and electromagnetic. Background Technology

[0002] Solid-state lasers, especially those operating in the solid-state ultraviolet, deep ultraviolet, and even extreme ultraviolet wavelength ranges, require extremely demanding optical environments within their cavities. Key optical components, such as nonlinear crystals (BBO, CLBO, KBBF, etc.), laser crystals, and cavity mirrors, are highly sensitive to contaminants (including particles, organic molecules, and moisture) within the cavity. These contaminants can deposit on the surfaces of optical components, leading to increased laser absorption, decreased damage threshold, reduced conversion efficiency, and even permanent damage to the optical components, severely limiting the laser's output performance, stability, and lifespan.

[0003] Therefore, maintaining high sealing and high cleanliness of the laser cavity is one of the core technical challenges in realizing high-performance, long-life solid-state lasers, especially ultraviolet lasers.

[0004] However, during the commissioning, operation, or maintenance of lasers, dynamic operation or state switching of the intracavity optical path is unavoidable. Common operations include: Laser shutdown: Move the light-blocking element into the optical path to interrupt the laser.

[0005] Optical path conversion: Moving or removing optical elements into / out of the optical path to change the beam path.

[0006] Power monitoring: Temporarily insert a power meter or diagnostic module into the optical path for measurement.

[0007] Currently, the technical solutions for addressing these needs have significant drawbacks: Manual operation of the laser cavity: This is the most primitive method. When operation is required, the laser cavity must be opened in a high-level cleanroom environment and manually operated. This method is not only cumbersome and inefficient, but also greatly compromises the cavity's sealing and cleanliness. Each opening introduces new risks of contamination, moisture, and air, requiring the laser to undergo lengthy re-purification and stabilization processes, which cannot meet the requirements of modern industry for continuous and stable laser operation.

[0008] Built-in electric motion mechanism: To address the cavity opening issue, some solutions integrate electric motion mechanisms (such as piezoelectric ceramic drivers, micro stepper motors, servo motor-driven slides, etc.) directly inside the laser cavity. While this automates intracavity operation, it introduces new problems: Pollution sources: Processes such as motor brush wear, lubricant evaporation, and friction from mechanical movements continuously generate micron / nano-sized particles and release gaseous organic matter. These pollutants accumulate continuously within the sealed laser cavity, directly contaminating sensitive optical surfaces and forming inherent, irremovable pollution sources.

[0009] Size and layout limitations: Such mechanisms and their necessary support structures are usually large in size, occupying valuable cavity space, resulting in bulky laser cavity designs and hindering the compactness and optimization of optical layouts.

[0010] External power and dynamic seal transmission: As a compromise, some engineering practices place the power source (such as a motor) outside the cavity, transmitting motion to the working parts inside the cavity (such as light-blocking plates, optical element holders, etc.) through mechanical transmission components such as shafts and guide rods passing through the cavity wall. Although this approach moves the main source of contamination outside the cavity, it introduces the fatal problem of "dynamic sealing": The challenge of dynamic seal reliability: The dynamic sealing structure where the drive shaft passes through the cavity wall is the weakest link in achieving cavity sealing. During long-term operation, the seals inevitably experience wear and aging, leading to a decline in sealing performance and allowing pollutants and moisture from the external atmosphere to slowly seep into the high-purity laser cavity.

[0011] Complex structure and volume issues: This solution requires a complete motion mechanism, including slides, turntables, and bearings, to be installed inside the cavity. Its structure is complex, it occupies a large amount of internal space, and it increases the system's potential failure points.

[0012] In summary, existing technologies suffer from a long-standing and unresolved core contradiction: how to achieve rapid, reliable, and contamination-free control of intracavitary optical components while ensuring the laser cavity remains "absolutely" sealed and clean. Whether through open-cavity operation, built-in motors, or dynamic sealing transmission, all methods come at the cost of sacrificing cavity cleanliness or increasing complexity and size. Summary of the Invention

[0013] To address the aforementioned problems, this application provides a hybrid control device combining permanent magnet and electromagnetic components.

[0014] This utility model provides the following technical solution: a permanent magnet and electromagnetic hybrid control device, comprising: A magnetically conductive spring sheet, wherein the near end of the magnetically conductive spring sheet is fixed; Optical element, the optical element being fixed on the magnetically conductive sheet; A magnetic rod, which is used to attract the distal end of the magnetically conductive elastic piece and cause the magnetically conductive elastic piece to bend. A permanent magnet and a coil are mounted on the magnetic rod, and the coil is connected to a power source.

[0015] Furthermore, the near end of the magnetically conductive spring sheet is fixed by bolts.

[0016] Furthermore, the optical elements include a reflector, a dichroic mirror, a beam splitter, a power probe, and a waveplate.

[0017] Furthermore, the device includes a housing, in which the magnetic conductive spring is disposed, and the housing has a first protrusion that fixes the proximal end of the magnetic conductive spring and a second protrusion that limits the distal end of the magnetic conductive spring when the coil is energized. The permanent magnet and the coil are disposed outside the housing. One end of the magnetic rod extends out of the housing and the other end extends into the housing.

[0018] Furthermore, the housing has a first protrusion that fixes the near end of the magnetic conductive spring sheet and limits the far end of the magnetic conductive spring sheet when the coil is energized; the permanent magnet and the coil are disposed outside the housing; one end of the magnetic rod extends out of the housing and the other end extends into the housing.

[0019] Furthermore, the first protrusion also has a waste light absorption cavity.

[0020] The beneficial effects of this utility model are as follows: This invention fundamentally eliminates the source of contamination: It eliminates all moving parts within the cavity that experience friction, wear, or require lubrication (such as motors, slides, and bearings), and also eliminates the need for moving parts to pass through the cavity wall (dynamic seal). The cavity interior consists only of a simple magnetic workpiece (such as a spring) and a fixed structure, with no active source of contaminant emission. This, in principle, ensures the "absolutely clean" environment necessary for laser cavities, especially ultraviolet and extreme ultraviolet laser cavities.

[0021] A perfect cavity seal is achieved: since there are no moving parts inside the cavity, the power system is entirely located outside the cavity, and the connection between the cavity and the outside world only requires providing a simple static seal interface for the magnetic guide rod. Static sealing technology is far superior to dynamic sealing in terms of reliability, durability, and sealing effect, ensuring that the laser cavity maintains an ultra-high vacuum or high-purity protective gas environment throughout its entire life cycle, fundamentally solving the leakage risk inherent in dynamic sealing.

[0022] The extremely compact structure greatly frees up internal space: internal functional components (such as light-blocking plates and optical elements) are integrated on a thin magnetic spring, eliminating the need for complex support and transmission mechanisms. This makes the entire internal actuator extremely small, allowing it to be flexibly deployed in any confined space within the laser cavity, providing unprecedented flexibility for optical layout and facilitating the miniaturization and integration of lasers.

[0023] Precise and reliable control with extremely low power consumption: Employing a "permanent magnet holding, electromagnetic release" operating mode. In the default adsorption holding state, the system operates with zero power consumption, saving energy and generating no heat. Actions are controlled by brief electromagnetic pulses, resulting in fast response and precise control. Simultaneously, the permanent magnet adsorption has a power-off self-holding characteristic, ensuring the internal components remain in a safe position in the event of an unexpected power outage, thus improving system reliability.

[0024] Low manufacturing and maintenance costs: The solution has a simple structure with almost no consumable parts inside the cavity, and the external power components are also conventional. This makes the manufacturing cost of the entire system significantly lower than that of precision internal electric mechanisms or complex dynamic sealing transmission systems. At the same time, due to its extremely high reliability, its maintenance requirements are very low, effectively reducing the total life-cycle cost. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the coil energized state in Embodiment 1 of the present invention; Figure 2 This is a schematic diagram of the coil de-energized state in Embodiment 1 of the present invention; Figure 3 This is a schematic diagram of the coil energized state in Embodiment 2 of the present invention; Figure 4 This is a schematic diagram of the coil de-energized state in Embodiment 2 of the present invention. Detailed Implementation

[0026] To further illustrate the technical means and effects adopted by this utility model in order to achieve the intended utility model purpose, the following detailed description of the specific implementation methods, structure, features and effects of this utility model is provided in conjunction with the accompanying drawings and preferred embodiments.

[0027] This application can fundamentally eliminate contamination of the laser cavity by moving parts, while also featuring a compact structure, precise control, and high reliability, in order to meet the stringent requirements of high-end solid-state lasers, especially ultraviolet lasers.

[0028] The embodiments of this utility model will be further described below with reference to several examples.

[0029] Example 1 like Figures 1-2 A hybrid control device combining permanent magnet and electromagnetic components, comprising: Magnetic guide spring 3, the near end of magnetic guide spring 3 is fixed; Optical element 5 is fixed on magnetically conductive spring sheet 3; Magnetic rod 2 is used to attract the distal end of magnetic elastic piece 3 and cause magnetic elastic piece 3 to bend. Permanent magnet 1 and coil 4 are both mounted on magnetic rod 2, and coil 4 is connected to a power source.

[0030] In this embodiment, the optical element 5 is a reflector, but in some embodiments it may also be a dichroic mirror, a beam splitter, a power probe, or a waveplate.

[0031] The near end of the magnetically conductive spring sheet 3 is fixed by bolt 6.

[0032] It also includes a housing 9, a magnetic spring sheet 3 is disposed inside the housing 9, the housing 9 has a first protrusion 7 for fixing the near end of the magnetic spring sheet 3, and a second protrusion 8 for limiting the far end of the magnetic spring sheet 3 when the coil 4 is energized, the permanent magnet 1 and the coil 4 are disposed outside the housing 9; one end of the magnetic rod 2 extends out of the housing 9 and the other end extends into the housing 9.

[0033] The magnetic rod is machined from DT4 electrical pure iron, ensuring a diameter tolerance of ±0.02mm. The end face is ground flat to ensure perpendicularity <0.01mm. The dimensions are Ø10mm×43mm, the surface roughness Ra<0.8μm, and the nickel plating thickness is 5-8μm. The adsorption end is machined with a 30° cone angle to form the pole shoe, with a smooth transition.

[0034] The cylindrical permanent magnet is made of neodymium iron boron (N42) and measures Ø20mm × 8mm. It is machined before magnetization and has a zinc or nickel-plated protective coating. The axial magnetization strength is ≥1.2T and it is coaxial with the magnetic rod.

[0035] The electromagnetic coil 4 uses 0.35mm diameter H-class insulated enameled wire. The coil has an inner diameter of 15mm, an outer diameter of approximately 30mm, a height of 13mm, approximately 625 turns, and a DC resistance of approximately 8.5Ω. PEI / PEEK plastic is used as the skeleton material. The operating voltage is 24VDC, and the electromagnetic field generated by the 2.9A discharge current cancels the magnetic field of the magnetic rod 2, causing the magnetic spring piece 3 attracted to the end face to detach. A pulse current of 0.5~1A is maintained, weakening the magnetic field of the magnetic rod 2, preventing the magnetic spring piece 3 from re-attracting, and simultaneously maintaining a low coil heating power.

[0036] In this embodiment, the magnetic rod 2 passes through the center of the electromagnetic coil 4, and its upper end is in close and flat contact with the lower end face of the permanent magnet 1. A safe distance of 4mm is maintained between the upper surface of the electromagnetic coil 4 and the lower end face of the permanent magnet 1 to ensure that the demagnetizing pulse does not cause irreversible demagnetization of the permanent magnet. An O-ring or metal washer is used to achieve a static seal at the interface between the magnetic rod 2 and the housing 9. The reflector 5 is installed via a magnetic spring sheet 3 to ensure smooth reset upon release. The suction force at a 6mm gap outside the pole shoe is approximately 3.0-5.0N, requiring a safety factor of 7.5-12.5 relative to 0.4N.

[0037] Absolutely no contamination: There are no moving parts inside the cavity that could generate particles or gas, which in principle ensures the ultra-high cleanliness of the laser cavity.

[0038] Perfect cavity seal: It adopts mature static sealing technology, which completely solves the leakage problem inherent in "dynamic sealing", and has extremely high reliability.

[0039] Extremely compact structure: The internal volume of the cavity is tiny, which can be flexibly arranged in any narrow position in the optical path, greatly freeing up design space.

[0040] High reliability and long lifespan: The "permanent magnet holding" mode has zero power consumption and zero heat generation; the "pulse release" mode has almost zero mechanical wear and an extremely long system lifespan.

[0041] Safe and reliable: When the power is off, the workpiece automatically remains in an adsorbed state to prevent accidental drop and damage.

[0042] Low cost and intelligent operation: Compared with complex in-cavity motors or dynamic sealing systems, this solution significantly reduces costs and is easy to integrate for automated control.

[0043] Example 2 like Figures 3-4 A hybrid control device combining permanent magnet and electromagnetic components, comprising: Magnetic guide spring 3, the near end of magnetic guide spring 3 is fixed; Optical element 5 is fixed on magnetically conductive spring sheet 3; Magnetic rod 2 is used to attract the distal end of magnetic elastic piece 3 and cause magnetic elastic piece 3 to bend. Permanent magnet 1 and coil 4 are both mounted on magnetic rod 2, and coil 4 is connected to a power source.

[0044] In this embodiment, the optical element 5 is a reflector, but in some embodiments it may also be a dichroic mirror, a beam splitter, a power probe, or a waveplate.

[0045] The near end of the magnetically conductive spring sheet 3 is fixed by bolt 6.

[0046] It also includes a housing 9, a magnetic spring sheet 3 is disposed inside the housing 9, and a first protrusion 7 is provided inside the housing 9 to fix the near end of the magnetic spring sheet 3 and limit the far end of the magnetic spring sheet 3 when the coil 4 is energized. The permanent magnet 1 and the coil 4 are disposed outside the housing 9. One end of the magnetic rod 2 extends out of the housing 9 and the other end extends into the housing 9.

[0047] The first protrusion 6 also has a waste light absorption cavity 10.

[0048] This invention not only successfully solves the long-standing problem of "pollution-free operation" in high-cleanliness laser cavities, but also provides an ideal basic execution unit for realizing intelligent functions such as online diagnosis, optical path switching, and power adjustment for solid-state lasers (especially ultraviolet lasers) with its advantages of compact structure, reliable sealing, precise control, and low cost, thus powerfully promoting the intelligent and reliable development of high-end solid-state lasers.

[0049] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present utility model without departing from the scope of the present utility model shall still fall within the scope of the present utility model.

Claims

1. A hybrid control device combining permanent magnet and electromagnetic components, characterized in that, include: A magnetically conductive spring sheet, wherein the near end of the magnetically conductive spring sheet is fixed; Optical element, the optical element being fixed on the magnetically conductive sheet; A magnetic rod, which is used to attract the distal end of the magnetically conductive elastic piece and cause the magnetically conductive elastic piece to bend. A permanent magnet and a coil are mounted on the magnetic rod, and the coil is connected to a power source.

2. The apparatus according to claim 1, characterized in that, The near end of the magnetically conductive spring sheet is fixed by bolts.

3. The apparatus according to claim 1, characterized in that, The optical components include a reflector, a dichroic mirror, a beam splitter, a power probe, and a waveplate.

4. The apparatus according to claim 1, characterized in that, It also includes a housing, in which the magnetic conductive spring is disposed, and the housing has a first protrusion that fixes the proximal end of the magnetic conductive spring and a second protrusion that limits the distal end of the magnetic conductive spring when the coil is energized. The permanent magnet and the coil are disposed outside the housing. One end of the magnetic rod extends out of the housing and the other end extends into the housing.

5. The apparatus according to claim 1, characterized in that, It also includes a housing, the magnetic conductive spring is disposed inside the housing, the housing has a first protrusion that fixes the near end of the magnetic conductive spring and limits the far end of the magnetic conductive spring when the coil is energized, the permanent magnet and the coil are disposed outside the housing; one end of the magnetic rod extends out of the housing and the other end extends into the housing.

6. The apparatus according to claim 5, characterized in that, The first protrusion also has a waste light absorption cavity.

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