Driving assembly and piezoelectric micropump

CN224843569UActive Publication Date: 2026-10-09GOERTEK MICROELECTRONICS CO LTD
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Patent Information

Application Number
CN202522124432.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-09-30
Publication Date
2026-10-09
Estimated Expiration
2035-09-30

AI Technical Summary

Technical Problem

目前的振子振动的耗能较高

Benefits of technology

[0017]本申请的一个技术效果在于,振动板设有低应力区域,起振区域区域环绕低应力区域设置,从而使得振动板更加容易的变形,以使压电片带动振动板振动时,有利于降低能耗。

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Abstract

The utility model discloses a kind of driving assembly and piezoelectric micropump.The driving assembly includes vibrating plate and piezoelectric sheet, the piezoelectric sheet is bonded in the fixed area of the vibrating plate, the fixed area includes low stress area and the starting area around the low stress area;The outer periphery of the piezoelectric sheet is fixedly connected with the starting area, to be radially limited by the starting area.Vibrating plate is equipped with low stress area, starting area area is arranged around low stress area, to make vibrating plate more easily deformed, to make piezoelectric sheet drive vibrating plate vibrate, it is favorable to reduce energy consumption.
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Description

Technical Field

[0001] This utility model relates to the field of electronic equipment technology, and more specifically, to a drive component and a piezoelectric micropump. Background Technology

[0002] In related technologies, piezoelectric pneumatic pumps generally use an oscillator as the driving component. The oscillator mainly utilizes the inverse piezoelectric effect of piezoelectric materials, converting electrical signals into mechanical deformation to rapidly change the gas volume within the cavity, generating airflow at the outlet. Currently, the energy consumption of oscillation is relatively high.

[0003] Therefore, a new technical solution is needed to solve the above-mentioned technical problems. Utility Model Content

[0004] One objective of this invention is to provide a new technical solution for a drive component.

[0005] According to a first aspect of the present invention, a driving component is provided. The driving component includes: A vibrating plate and a piezoelectric sheet, wherein the piezoelectric sheet is bonded to a fixed area of ​​the vibrating plate, the fixed area including a low-stress area and a vibration-initiating area surrounding the low-stress area; The outer periphery of the piezoelectric sheet is fixedly connected to the vibration-inducing region so as to be radially limited by the vibration-inducing region.

[0006] Optionally, the low-stress region includes a first hollowed-out portion and / or a thinned portion.

[0007] Optionally, the first perforated portion includes a circular hole or a mesh.

[0008] Optionally, the vibrating plate is circular or square, and / or the piezoelectric sheet is circular or square.

[0009] Optionally, the low-stress region includes a first hollow portion and a thinned portion, the thinned portion being disposed around the outer periphery of the first hollow portion.

[0010] Optionally, the vibrating plate, the low-stress region, and the piezoelectric sheet are arranged coaxially.

[0011] Optionally, the piezoelectric sheet and the vibrating plate have multiple connection points, which are spaced apart.

[0012] Optionally, the inner diameter of the first hollow portion is 1mm to 5.5mm.

[0013] Optionally, the drive assembly further includes a fixing member, the fixing member having a second hollow portion through it along the thickness direction, the vibrating plate being located inside the second hollow portion, the vibrating plate being connected to the fixing member via an elastic arm, and a gap being present between the vibrating plate and the fixing member.

[0014] Optionally, the fixing member, the vibrating plate, and the elastic arm are integrally formed.

[0015] Optionally, a plurality of elastic arms are provided at intervals between the vibrating plate and the fixing member along the circumferential direction of the vibrating plate.

[0016] According to a second aspect of the present invention, a piezoelectric micropump is provided. This piezoelectric micropump includes the driving components described in the above embodiments.

[0017] One technical advantage of this application is that the vibrating plate is provided with a low-stress area, and the vibration start area is arranged around the low-stress area, which makes the vibrating plate easier to deform, so that when the piezoelectric sheet drives the vibrating plate to vibrate, it helps to reduce energy consumption.

[0018] Other features and advantages of the present invention will become clear from the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings. Attached Figure Description

[0019] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments of the present invention and, together with their description, serve to explain the principles of the present invention.

[0020] Figure 1 This is a schematic diagram of the structure of a driver component according to an embodiment of this application.

[0021] Figure 2 This is a schematic diagram of the structure of a driving component according to another embodiment of this application.

[0022] Figure 3 This is a schematic diagram of the structure of a driving component according to another embodiment of this application.

[0023] Figure 4 This is a schematic diagram of the structure of a piezoelectric micropump according to an embodiment of this application.

[0024] Figure label: 1. Vibrating plate; 11. First hollow section; 2. Piezoelectric sheet; 3. Fixing component; 4. Elastic arm; 5. Housing; 51. Outlet; 52. Inner cavity. Detailed Implementation

[0025] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the present invention.

[0026] The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the invention or its application or use.

[0027] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and equipment should be considered part of the specification.

[0028] In all the examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values.

[0029] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0030] According to one embodiment of this application, a driving component is provided. For example... Figures 1 to 3 As shown, the driving assembly includes a vibrating plate 1 and a piezoelectric sheet 2. The piezoelectric sheet 2 is bonded to a fixed area of ​​the vibrating plate 1. The fixed area includes a low-stress area and a vibration-inducing area surrounding the low-stress area. The outer periphery of the piezoelectric sheet 2 is fixedly connected to the vibration-inducing area so as to be radially limited by the vibration-inducing area.

[0031] In this example, the driving component includes a vibrating plate 1 and a piezoelectric sheet 2. The vibrating plate 1 has a low-stress region, and the vibration start region is arranged around the low-stress region, which makes the vibrating plate 1 easier to deform, so that when the piezoelectric sheet 2 drives the vibrating plate to vibrate, it helps to reduce energy consumption.

[0032] It should be noted that the piezoelectric element 2 exhibits the inverse piezoelectric effect. When an external electric field is applied to the piezoelectric element 2, its internal crystal structure deforms, causing the material as a whole to undergo mechanical deformation, i.e., elongation or contraction. When an alternating voltage is applied to the piezoelectric element 2, it will periodically elongate and contract. The outer periphery of the piezoelectric element 2 is fixedly connected to the vibration region, and is radially limited by the vibration region, thereby driving the vibrating plate 1 to undergo bending vibration. That is, the entire driving component can undergo bending vibration, thus playing a driving role. By setting a low-stress region on the vibrating plate 1, the vibrating plate 1 can be more easily deformed. Under the same voltage, the amplitude of the driving component can be increased. When the driving component is used in a piezoelectric micropump, it helps to reduce the energy consumption of the piezoelectric micropump.

[0033] The piezoelectric element 2 can be firmly bonded to one side of the vibrating plate 1 along the thickness direction using adhesives such as epoxy resin.

[0034] In this example, the vibrating plate 1 is also surrounded by a connecting area on the outer periphery of the fixed area. The connecting area is suitable for fixed connection with external devices, such as the housing of a piezoelectric micropump.

[0035] In one example, the low-stress region includes a first perforation 11. That is, the vibrating plate 1 has a first perforation 11 extending along its thickness direction; a piezoelectric sheet 2 is bonded to one end of the vibrating plate 1 along its thickness direction, and the piezoelectric sheet 2 covers the first perforation 11. The first perforation 11 on the vibrating plate 1 reduces stress, makes the vibrating plate 1 more easily deformable, and also reduces the weight of the vibrating plate 1, thus reducing energy consumption when the piezoelectric sheet 2 drives the vibrating plate 1 to vibrate.

[0036] In this example, the piezoelectric sheet 2 covers the first hollow portion 11, that is, the projection of the piezoelectric sheet 2 on the vibrating plate 1 can completely cover the first hollow portion 11, thereby avoiding problems such as air leakage in the first hollow portion 11.

[0037] The inner diameter of the first hollow portion 11 can be 1mm to 5.5mm. This requires ensuring the strength of the vibrating plate 1 while minimizing its weight. For example, the inner diameter of the first hollow portion 11 can be 1mm, 2mm, 3mm, 4mm, 5mm, or 5.5mm. Of course, the specific value of the inner diameter of the first hollow portion 11 can be determined by those skilled in the art based on actual conditions, and is not specifically limited here.

[0038] In this example, the first hollow portion 11 is a through hole that extends through the vibrating plate 1 along its thickness direction. The shape of the through hole can be circular, square, or irregular, etc., which can be determined by those skilled in the art according to the actual situation, and is not specifically limited here.

[0039] It should be noted that the first hollow part 11 can be formed on the vibrating plate 1 by cutting with a cutter, laser cutting or drilling, etc. Those skilled in the art can decide according to the actual situation, and no specific limitation is made here.

[0040] In this example, the piezoelectric sheet 2 can be made of piezoelectric materials such as piezoelectric ceramics or piezoelectric films. The vibrating plate 1 can be a thin metal sheet with good elasticity, such as copper or stainless steel. Of course, the specific materials of the piezoelectric sheet 2 and the vibrating plate 1 can be determined by those skilled in the art based on the actual situation, and are not specifically limited here.

[0041] In this example, the thickness of the vibrating plate 1 can be set to 0.05mm to 0.1mm, which is beneficial for increasing the deformation and reducing the driving voltage. For example, the thickness of the vibrating plate 1 can be set to 0.05mm, 0.06mm, 0.07mm, 0.08mm, 0.09mm or 0.1mm, etc., which can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0042] In this example, the thickness of the piezoelectric sheet 2 can be set to be the same as the thickness of the vibrating plate 1, or the thickness of the piezoelectric sheet 2 can be greater than the thickness of the vibrating plate 1. The specific thickness of the piezoelectric sheet 2 can be determined by those skilled in the art based on actual conditions, and is not specifically limited here.

[0043] like Figure 4 As shown, in this example, the housing 5 of the piezoelectric micropump has an inner cavity 52, and the housing 5 also has an outlet 51 communicating with the inner cavity 52. ​​A vibrating plate 1 can be mounted on the housing 5, and the vibrating plate 1 can serve as a sidewall of the inner cavity 52. ​​A piezoelectric sheet 2 is bonded to the side of the vibrating plate 1 facing away from the inner cavity 52.

[0044] In one example, the first perforated portion 11 includes a circular hole or a mesh.

[0045] In this example, the vibrating plate 1 can have circular holes extending through it along its thickness direction. Multiple circular holes can be provided, spaced apart from each other. For example, the multiple circular holes can be arranged circumferentially along the low-stress region, or a circular hole can be located at the center of the vibrating plate 1, with multiple circular holes spaced apart along the outer periphery of the central hole. Of course, the specific arrangement of the multiple circular holes can be determined by those skilled in the art based on actual conditions, and is not specifically limited here.

[0046] In this example, the multiple circular holes can be symmetrically arranged, thereby making the intensity more uniform throughout the vibrating plate 1, which is beneficial to the stable vibration of the drive assembly. For example, the multiple circular holes can be arranged axially or centrally symmetrically. Those skilled in the art can decide according to the actual situation, and no specific limitation is made here.

[0047] In this example, the first perforated portion 11 can also be a mesh structure. Each mesh opening is of equal size, and the distance between two adjacent mesh openings is equal. Furthermore, the shape of each mesh opening can be circular or square, etc., as can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0048] like Figure 1 and Figure 2 As shown, in one example, the vibrating plate 1 is circular or square, and / or the piezoelectric sheet 2 is circular or square. By setting the vibrating plate 1 and the piezoelectric sheet 2 into different shapes, it is possible to adapt to different installation scenarios.

[0049] like Figure 1 As shown, in this example, the vibrating plate 1 can be square in shape, and the piezoelectric sheet 2 can be circular in shape. The first perforated portion 11 on the vibrating plate 1 is a circular hole, or the first perforated portion 11 on the vibrating plate 1 can also be a square hole.

[0050] Or, such as Figure 2 As shown, the vibrating plate 1 has a circular structure, and the piezoelectric sheet 2 also has a circular structure. The first hollow part 11 on the vibrating plate 1 is a circular hole, or the first hollow part 11 on the vibrating plate 1 can also be a square hole.

[0051] Alternatively, the vibrating plate 1 can be a square structure, and the piezoelectric sheet 2 can also be a square structure. The first hollow part 11 on the vibrating plate 1 is a circular hole, or the first hollow part 11 on the vibrating plate 1 can also be a square hole.

[0052] Alternatively, the vibrating plate 1 can be a circular structure, and the piezoelectric sheet 2 can be a square structure. The first hollow part 11 on the vibrating plate 1 is a circular hole, or the first hollow part 11 on the vibrating plate 1 can also be a square hole.

[0053] Of course, the specific structure of the vibrating plate 1 and the piezoelectric sheet 2 can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0054] In one example, the low-stress region includes a thinned portion. That is, the thickness of the low-stress region of the vibrating plate 1 is small, thereby enabling the formation of a thinned portion. By providing a thinned portion in the vibrating plate 1, stress can be reduced, the vibrating plate 1 can be more easily deformed, and the weight of the vibrating plate 1 can also be reduced, which helps to reduce energy consumption when the piezoelectric sheet 2 drives the vibrating plate 1 to vibrate.

[0055] In this example, the low-stress region may include a thinned portion and a first hollowed-out portion 11, the thinned portion being disposed around the outer periphery of the first hollowed-out portion 11. By providing the thinned portion and the first hollowed-out portion 11 on the vibrating plate 1, it is beneficial to further reduce the weight of the vibrating plate 1, making the deformation of the vibrating plate 1 more favorable, thereby reducing the energy consumption of the drive assembly vibration.

[0056] In this example, the thinning portion can be a groove provided on the surface of the vibrating plate 1, the groove can extend to the first hollow portion 11, or the groove and the hollow portion can be spaced apart.

[0057] It should be noted that the groove can be an annular groove, which is arranged around the outer periphery of the first hollow portion 11. Multiple annular grooves can also be provided, and these grooves are arranged at radial intervals along the vibrating plate 1. For example, multiple annular grooves are evenly spaced at radial intervals along the vibrating plate 1.

[0058] Alternatively, multiple grooves may be provided, with the multiple grooves spaced apart circumferentially along the first hollow portion 11. For example, two, three, or four grooves may be provided, with the multiple grooves evenly spaced apart circumferentially along the first hollow portion 11.

[0059] In this example, when the piezoelectric sheet 2 is bonded to the vibrating plate 1, the piezoelectric sheet 2 can cover the thinned portion. Alternatively, the thinned portion is an annular groove, and when the piezoelectric sheet 2 is bonded to the vibrating plate 1, the piezoelectric sheet 2 is located inside the annular groove. That is, the bottom wall of the annular groove is provided with a first hollow portion 11, the piezoelectric sheet 2 is bonded to the bottom wall of the annular groove, and covers the first hollow portion 11.

[0060] In this example, the thinning portion can be located on the side of the vibrating plate 1 facing the piezoelectric sheet 2. Alternatively, the thinning portion can be located on the side of the vibrating plate 1 away from the vibrating plate 1. Or, thinning portions can be provided on both opposite sides of the vibrating plate 1. Those skilled in the art can determine the appropriate method based on the actual situation, and no specific limitation is made here.

[0061] In this example, the low-stress area can also be one of the first hollowed-out portion and the thinned portion. Those skilled in the art can decide based on the actual situation, and no specific limitation is made here.

[0062] In one example, the vibrating plate 1, the low-stress region, and the piezoelectric sheet 2 are arranged coaxially to improve the stability of the vibration of the drive assembly.

[0063] like Figure 2 As shown, in this example, both the vibrating plate 1 and the piezoelectric sheet 2 are circular structures. The vibrating plate 1 has a circular first hollow portion 11 in the middle as a low-stress area. The vibrating plate 1, the first hollow portion 11, and the piezoelectric sheet 2 are arranged coaxially, that is, the centers of the vibrating plate 1, the first hollow portion 11, and the piezoelectric sheet 2 are on the same straight line.

[0064] Or, such as Figure 1 As shown, the vibrating plate 1 can be square in shape, and the piezoelectric sheet 2 can be circular in shape. The first hollow part 11 on the vibrating plate 1 is a circular hole. That is, the center of the first hollow part 11 and the center of the piezoelectric sheet 2 are both on the center line of the vibrating plate 1.

[0065] In one example, there are multiple connection points between the piezoelectric sheet 2 and the vibrating plate 1, and the multiple connection points are spaced apart.

[0066] In this example, the piezoelectric element 2 and the vibrating plate 1 can be bonded together using an adhesive such as epoxy resin. The adhesive can be applied to multiple locations on the surface of the vibrating plate 1 or the piezoelectric element 2, with each location serving as a connection point. This multi-point connection method avoids applying adhesive to the entire surface of the piezoelectric element 2, thus saving materials and reducing costs. It also facilitates further reduction of the overall weight of the drive assembly, thereby lowering vibration energy consumption.

[0067] In this example, multiple protrusions can be spaced apart on the surface of the vibrating plate 1 facing the piezoelectric sheet 2. Each protrusion serves as a connection point, and adhesive is applied to each protrusion, allowing the piezoelectric sheet 2 to be bonded to it. By providing multiple protrusions on the surface of the vibrating plate 1, the connection strength between the vibrating plate 1 and the piezoelectric sheet 2 can be improved, thereby facilitating thinning or hollowing out of other areas of the vibrating plate 1. The protrusions can be integrally formed with the vibrating plate 1, or they can be connected to the surface of the vibrating plate 1 by bonding or welding.

[0068] Of course, the specific connection structure between the vibrating plate 1 and the piezoelectric sheet 2 can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0069] like Figure 3 As shown, in one example, the drive assembly further includes a fixing member 3, which has a second hollow portion through it along the thickness direction. The vibrating plate 1 is located in the second hollow portion, and the vibrating plate 1 is connected to the fixing member 3 by an elastic arm 4, with a gap between the vibrating plate 1 and the fixing member 3.

[0070] In this example, the fixing member 3 can be fixed to the housing 5 of the piezoelectric micropump, the piezoelectric sheet 2 drives the vibrating plate 1 to vibrate, and the vibrating plate 1 and the fixing member 3 are elastically connected by the elastic arm 4, which can further increase the overall vibration amplitude of the vibrating plate 1 and the piezoelectric sheet 2 to reduce energy consumption.

[0071] In this example, the vibrating plate 1, the elastic arm 4, and the fixing member 3 can be integrally formed. That is, the vibrating plate 1 is cut out from the fixing member 3 by cutting, and the vibrating plate 1 is not completely separated from the fixing member 3. The part connecting the vibrating plate 1 and the fixing member 3 serves as the elastic arm 4. The fixing member 3 can be cut by means of a cutting knife, laser cutting, etc., which can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0072] Alternatively, a second hollow section can be cut out in the fixing member 3 first, and then the vibrating plate 1 can be connected to the fixing member 3 through the elastic arm 4, with the vibrating plate 1 located inside the second hollow section. There is a gap between the vibrating plate 1 and the second hollow section to allow the vibrating plate 1 to vibrate smoothly.

[0073] In this example, a sealing membrane can be placed on the fixture to seal the gap. The gap is sealed by the sealing membrane, thereby preventing fluid leakage from the inner cavity 52 of the piezoelectric micropump.

[0074] In one example, along the circumference of the vibrating plate 1, a plurality of elastic arms 4 are provided at intervals between the vibrating plate 1 and the fixing member 3.

[0075] In this example, multiple elastic arms 4 can be spaced apart between the vibrating plate 1 and the fixing member 3. The multiple elastic arms 4 can be evenly spaced along the circumference of the vibrating plate 1. For example, two, three or four elastic arms 4 can be spaced apart between the vibrating plate 1 and the fixing member 3, which can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0076] According to another embodiment of this application, a piezoelectric micropump is provided. The piezoelectric micropump includes the driving assembly described in the above embodiment. The driving assembly includes a vibrating plate 1 and a piezoelectric sheet 2. The piezoelectric sheet 2 is bonded to a fixed region of the vibrating plate 1. The fixed region includes a low-stress region and a vibration-inducing region surrounding the low-stress region. The outer periphery of the piezoelectric sheet 2 is fixedly connected to the vibration-inducing region and is radially limited by the vibration-inducing region. The vibrating plate 1 has a low-stress region, and the vibration-inducing region is arranged around the low-stress region, thereby making the vibrating plate 1 easier to deform, which helps to reduce energy consumption when the piezoelectric sheet 2 drives the vibrating plate to vibrate.

[0077] like Figure 4 As shown, in this example, the piezoelectric micropump includes a housing 5, which has an inner cavity 52. ​​An inlet and an outlet 51 are respectively provided on opposite sides of the inner cavity 52. ​​A drive assembly is installed on the housing 5 and can change the volume of the inner cavity 52 by the vibration of the drive assembly, thereby driving fluid to flow into the inner cavity 52 from the inlet and out of the inner cavity 52 from the outlet 51.

[0078] The piezoelectric micropump of this application can be used in the heat dissipation mechanism of electronic products such as mobile phones and laptops. Those skilled in the art can use it according to the actual situation, and no specific limitations are made here.

[0079] Of course, the piezoelectric micropump of this application also includes at least all the beneficial effects of the above embodiments, which will not be elaborated here.

[0080] The above embodiments mainly describe the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. For the sake of brevity, they will not be elaborated here.

[0081] Although specific embodiments of the present invention have been described in detail by way of examples, those skilled in the art should understand that the above examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Those skilled in the art should understand that modifications can be made to the above embodiments without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A driving component, characterized in that, include: A vibrating plate and a piezoelectric sheet, wherein the piezoelectric sheet is bonded to a fixed area of ​​the vibrating plate, the fixed area including a low-stress area and a vibration-initiating area surrounding the low-stress area; The outer periphery of the piezoelectric sheet is fixedly connected to the vibration-inducing region so as to be radially limited by the vibration-inducing region.

2. The driving component according to claim 1, characterized in that, The low-stress region includes the first hollowed-out portion and / or the thinned portion.

3. The driving component according to claim 2, characterized in that, The first hollowed-out portion includes a circular hole or a mesh.

4. The driving component according to claim 1, characterized in that, The vibrating plate is circular or square, and / or the piezoelectric sheet is circular or square.

5. The driving component according to claim 1, characterized in that, The low-stress region includes a first hollow portion and a thinning portion, wherein the thinning portion is disposed around the outer periphery of the first hollow portion.

6. The driving component according to claim 1, characterized in that, The vibrating plate, low-stress area, and piezoelectric sheet are arranged coaxially.

7. The driving component according to claim 1, characterized in that, The piezoelectric sheet and the vibrating plate have multiple connection points, which are spaced apart.

8. The driving component according to claim 2, characterized in that, The inner diameter of the first hollowed-out part is 1mm to 5.5mm.

9. The driving component according to claim 1, characterized in that, It also includes a fixing member, which has a second hollow portion through it along the thickness direction. The vibrating plate is located in the second hollow portion. The vibrating plate and the fixing member are connected by an elastic arm, and there is a gap between the vibrating plate and the fixing member.

10. A piezoelectric micropump, characterized in that, Includes the drive component as described in any one of claims 1 to 9.