A bionic crab tong driving device

Abstract

The utility model discloses a bionic crab forceps drive arrangement relates to precision drive technical field, including base, guide rail, drive platform and a pair of imitative crab forceps piezoelectric drive module. The guide rail is established with drive platform in base, and two drive modules are symmetrical in the guide rail and drive platform, can independently drive cooperation, and is integrated structure, and the flexible pre -tightening structure with piezoelectric ceramic is established between the middle part of front side edge and support arm, the end of front side edge and the front end of palm node, the device realizes two -way linear drive by the phase difference control of symmetrical drive module, and the arc -shaped driving foot is abutted guide rail and is inhibited to return when braking, solves the low problem of traditional piezoelectric drive efficiency, integrated structure has no mechanical gap, and cooperation flexible pre -tightening structure promotes overall rigidity, and the ability of resisting external disturbance is strong, and the drive platform can micron -level adjustment initial gap, and adapts to different guide rail and installation error, and adapts to the demand of photolithography machine and other precision equipment.

Description

Technical Field

[0001] This utility model relates to the field of precision drive technology, specifically to a biomimetic crab claw drive device. Background Technology

[0002] With the rapid development of robotics, micro-nano manufacturing, aerospace, and biomedicine, precision drive technology has become a key bottleneck restricting industry upgrades. Traditional electromagnetic drive technology is limited by structural volume, electromagnetic interference, and positioning accuracy, making it difficult to meet the requirements of nanoscale positioning, multi-degree-of-freedom coordination, and resistance to complex environmental disturbances. In contrast, piezoelectric drive technology, with its advantages of high resolution, fast response speed, compact structure, and resistance to electromagnetic interference, has become the core technology direction in the field of precision drive.

[0003] Especially in high-end manufacturing equipment such as lithography machines, the accuracy of the positioning stage directly determines the chip manufacturing process level. However, traditional piezoelectric drive devices have obvious defects: on the one hand, stick-slip piezoelectric drivers have low stepping efficiency and are prone to "backtracking" during the driving process, which leads to increased positioning errors and cannot meet the stable displacement output requirements of the lithography machine stage; on the other hand, existing piezoelectric drive devices are mostly single drive units, lacking a collaborative working mechanism, making it difficult to achieve bidirectional linear drive, and have weak anti-disturbance capabilities, and their positioning accuracy is easily affected under complex working conditions (such as temperature fluctuations and external vibrations).

[0004] Furthermore, traditional piezoelectric drive devices are complex to assemble, and the gaps between components can easily lead to insufficient drive stiffness, further reducing positioning stability. Therefore, developing a new type of piezoelectric drive device that combines bidirectional drive, backlash suppression, high stiffness, and disturbance resistance has become an urgent need to overcome the bottlenecks in precision manufacturing technology. Utility Model Content

[0005] The purpose of this invention is to overcome the above-mentioned problems and provide a biomimetic crab claw driving device. To achieve the above objective, this invention adopts the following technical solution:

[0006] A biomimetic crab claw driving device includes a base, a guide rail, a driving platform, and a pair of crab claw piezoelectric driving modules. The guide rail and the driving platform are mounted on the base, and the pair of crab claw piezoelectric driving modules are symmetrically arranged between the guide rail and the driving platform. One end of each crab claw piezoelectric driving module is mounted on the driving platform, and the other end of each module abuts against the guide rail. The two crab claw piezoelectric driving modules drive independently and cooperate with each other. The crab claw piezoelectric driving modules are an integrated structure.

[0007] The imitation crab claw piezoelectric drive module includes a support arm, a front edge, a palm joint, and an arc-shaped drive foot. The support arm, front edge, palm joint, and arc-shaped drive foot are connected in sequence by flexible hinges. A flexible pre-tightening structure is provided between the middle of the support arm and the front edge, and between the end of the front edge and the front end of the palm joint. Piezoelectric ceramics are installed on the flexible pre-tightening structure.

[0008] As an improvement, the flexible pre-tightening structure includes a first flexible structure and a second flexible structure. The first flexible structure is disposed between the middle of the support arm and the front edge, and the second flexible structure is disposed between the end of the front edge and the front end of the palm joint.

[0009] As an improvement, the support arm has an L-shaped structure, and the support arm and the front side edge form a U-shaped structure. One end of the first flexible structure is located at the rear end of the support arm, and the other end of the first flexible structure is connected to the middle of the front side edge through a flexible hinge.

[0010] As an improvement, the front side edge and the palm joint are in an L-shaped structure, one end of the second flexible structure is located at the front end of the palm joint, and the other end of the second flexible structure is connected to the end of the front side edge through a flexible hinge.

[0011] As an improvement, the drive platform includes a displacement fine-tuning platform and a drive foot adapter plate. The displacement fine-tuning platform is mounted on the base, and the drive foot adapter plate is mounted on the fine-tuning platform. The rear end of the support arm is mounted on the drive foot adapter plate. The initial gap between the arc-shaped drive foot and the guide rail is adjusted by rotating the knob of the displacement fine-tuning platform.

[0012] As an improvement, a support frame is provided at the bottom of the guide rail, and the support frame is mounted on the base.

[0013] The advantages of this utility model are:

[0014] 1. This utility model features bidirectional drive and backlash suppression, resulting in high efficiency: a pair of crab claw-like piezoelectric drive modules are symmetrically arranged, and the drive or braking roles are dynamically switched through phase difference control to achieve bidirectional linear drive; during braking, the arc-shaped drive foot tightly abuts against the guide rail, effectively suppressing backlash and solving the problem of low efficiency in traditional piezoelectric drive stepping.

[0015] 2. The integrated structure and high rigidity of this utility model provide strong resistance to disturbances: The crab claw-like piezoelectric drive module is an integrated design with a flexible hinge without mechanical backlash. Combined with the pre-tightening force of the flexible pre-tightening structure, it enhances the overall rigidity of the device. Under complex working conditions such as external vibration and temperature fluctuations, it can still maintain stable drive and its resistance to disturbances is significantly better than that of traditional devices.

[0016] 3. The initial gap of this utility model is adjustable and has wide adaptability: The displacement fine-tuning platform of the drive platform can achieve micron-level precision adjustment of the initial gap, ensuring that the arc-shaped drive foot is in close contact with the guide rail, adapting to different guide rail types and installation errors, and reducing assembly difficulty. Attached Figure Description

[0017] Figure 1 This is a structural diagram of a biomimetic crab claw driving device in Example 1.

[0018] Figure 2 This is a structural diagram of the crab claw-inspired piezoelectric drive module in Example 1.

[0019] Figure 3 This is a schematic diagram of the driving process and signal timing in Example 1.

[0020] The diagram is labeled as follows:

[0021] 1. Base; 2. Guide rail; 3. Drive platform; 31. Displacement fine-tuning platform; 32. Drive foot adapter plate; 4. Imitation crab claw piezoelectric drive module; 41. Support arm; 42. Front side edge; 43. Palm joint; 44. Arc-shaped drive foot; 45. Flexible hinge; 46. Flexible pre-tightening structure; 461. First flexible structure; 462. Second flexible structure; 5. Piezoelectric ceramic; 6. Support frame. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0023] In the description of the embodiments of this utility model, it should be noted that if terms such as "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," or "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, terms such as "first," "second," and "third" are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0024] Furthermore, the use of terms such as "horizontal," "vertical," and "sag" does not imply that the component must be absolutely horizontal or suspended, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0025] In the description of the embodiments of this utility model, "a plurality of" means at least two.

[0026] In the description of the embodiments of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0027] The present invention will be described in detail below through specific embodiments to enable a better understanding of the present invention. However, the following embodiments do not limit the scope of protection of the present invention.

[0028] Example 1

[0029] This embodiment discloses a biomimetic crab claw driving device.

[0030] like Figures 1 to 3 As shown, this embodiment includes a base 1, a guide rail 2, a drive platform 3, and a pair of crab claw-inspired piezoelectric drive modules 4. Through the collaboration of the dual drive modules and the crab claw-inspired structural design, precise drive and retraction suppression are achieved. The specific structure is as follows:

[0031] (I) Basic support and guiding structure: base 1, guide rail 2 and support frame 6

[0032] Base 1: This is the basic load-bearing component of the device, ensuring the stability of the overall structure and preventing deformation of base 1 from affecting the driving accuracy. The surface of base 1 is a honeycomb panel, providing a flat and high-precision mounting reference for guide rail 2 and drive platform 3.

[0033] Guide rail 2 and support frame 6: The guide rail 2 adopts a high-precision linear guide rail 2, whose guiding accuracy can reach the micron level, providing precise guidance for the linear movement of the drive platform 3; the bottom of the guide rail 2 is equipped with a support frame 6, which is fixed to the base 1 by high-strength bolts. The levelness and parallelism of the guide rail 2 can be adjusted by the support frame 6 to ensure that the movement direction of the guide rail 2 and the drive platform 3 are completely consistent, reducing guiding errors.

[0034] (II) Drive Platform 3: Displacement Adjustment and Drive Module Installation Foundation

[0035] The drive platform 3 includes a displacement fine-tuning platform 31 and a drive foot adapter plate 32, which work together to achieve initial clearance adjustment and stable installation of the drive module.

[0036] Displacement fine-tuning platform 31: Set on the base 1, it adopts a spiral fine-tuning or piezoelectric fine-tuning structure. By rotating the knob on the side of the platform, the position can be adjusted with micron-level precision. Its function is to fine-tune the relative position of the drive platform 3 and the guide rail 2 during device assembly, so as to ensure that the arc-shaped drive foot 44 of the imitation crab claw piezoelectric drive module 4 is in close contact with the guide rail 2, change the initial gap, and improve the drive stiffness.

[0037] Drive foot adapter plate 32: Fixed on displacement fine-tuning platform 31, providing an installation interface for imitation crab claw piezoelectric drive module 4. The adapter plate surface is provided with high-precision positioning holes. The rear end of the support arm 41 of imitation crab claw piezoelectric drive module 4 is fixed to the adapter plate by bolts to ensure rigid connection between drive module and drive platform 3, and avoid relative displacement during drive process, which would affect drive accuracy.

[0038] (III) Core Drive Structure: A pair of crab claw-inspired piezoelectric drive modules 4

[0039] A pair of crab claw-inspired piezoelectric drive modules 4 are symmetrically arranged between the guide rail 2 and the drive platform 3, in a mirror distribution. They can be driven independently and cooperate with each other (dynamically switching between "drive / brake" roles). Bidirectional linear motion is achieved through phase difference control of the piezoelectric ceramic 5. Each drive module is an integrated structure, reducing assembly gaps and improving overall rigidity. The specific structure is as follows:

[0040] like Figure 3 As shown, the crab claw-inspired piezoelectric actuator utilizes a bidirectional linear drive cooperative bipedal structure. It employs a symmetrical design with two independent driving legs cooperating with each other, dynamically allocating roles (driving / braking) between the driving legs. High-precision bidirectional linear motion is achieved through phase difference control of the piezoelectric ceramic 5. During the driving process, bidirectional drive can be realized, effectively suppressing backlash and improving driving capability.

[0041] Each individual crab claw-inspired piezoelectric drive module 4 serves a dual function of driving and suppressing retraction, rapidly switching operating modes through electrical signal timing control. An innovative control algorithm ensures the synchronization of the two legs' movements, precisely analyzing and controlling the driving electrical signals applied to both ends of each piezoelectric ceramic 5 to achieve excellent coordination between the two driven legs.

[0042] The host computer sends control signals to the piezoelectric control board, which then transmits control commands to the piezoelectric actuator, which in turn sends drive commands to the piezoelectric drive device.

[0043] Main module structure: Support arm 41, front side edge 42, palm joint 43, and arc-shaped drive foot 44. The support arm 41, front side edge 42, palm joint 43, and arc-shaped drive foot 44 are connected sequentially by flexible hinges 45, forming a multi-joint motion structure resembling a crab claw. The flexible hinges 45 are made using an integrated cutting process, with no mechanical backlash, allowing for flexible rotation at minute angles while possessing sufficient rigidity to prevent excessive deformation during operation.

[0044] Support arm 41: It has an L-shaped structure. The rear end is fixed on the drive foot adapter plate 32, and the front end is connected to the front side edge 42 through a flexible hinge 45, which serves to connect the drive platform 3 with other components of the module. The support arm 41 and the front side edge 42 form a U-shaped structure, which provides installation space for the flexible pre-tightening structure 46 and the piezoelectric ceramic 5.

[0045] Front edge 42: One end is connected to the support arm 41 via a flexible hinge 45, and the other end is connected to the palm joint 43 via a flexible hinge 45. The middle and the end are respectively connected to the flexible pre-tightening structure 46, which is the key component for transmitting the driving force of the piezoelectric ceramic 5. The front edge 42 and the palm joint 43 form an L-shaped structure, which can convert the expansion and contraction deformation of the piezoelectric ceramic 5 into the linear thrust of the arc-shaped driving foot 44.

[0046] Palm joint 43: One end is connected to the front side edge 42 via a flexible hinge 45, and the other end is integrally formed with the arc-shaped drive foot 44, which plays the role of transmitting motion and force, ensuring that the motion of the front side edge 42 can be accurately transmitted to the arc-shaped drive foot 44.

[0047] Arc-shaped drive foot 44: It has an arc-shaped structure, and its end abuts against the guide rail 2. Its arc-shaped surface is precision polished to increase the contact area with the guide rail 2 and reduce local pressure. When driving, the arc-shaped drive foot 44 drives the drive platform 3 to move through the static friction between it and the guide rail 2. When braking, it achieves self-locking through pre-tightening force to suppress backlash.

[0048] Flexible pre-tensioning structure 46 and piezoelectric ceramic 5: The core of driving force generation and retraction suppression, the flexible pre-tensioning structure 46, includes a first flexible structure 461 and a second flexible structure 462, both of which adopt flexible beam structures with adjustable elastic coefficients. Piezoelectric ceramic 5 (which adopts a stacked structure, allowing for large expansion and contraction) is installed on these structures. The switching between driving and braking is achieved through the expansion and contraction deformation of the piezoelectric ceramic 5 and the elastic reset of the flexible pre-tensioning structure 46.

[0049] The first flexible structure 461 is located between the middle of the support arm 41 and the front edge 42. One end is fixed to the rear end of the support arm 41, and the other end is connected to the middle of the front edge 42 through a flexible hinge 45. A piezoelectric ceramic 5 is sandwiched in the middle. When the piezoelectric ceramic 5 is energized and extends, it pushes the front edge 42 to rotate around the flexible hinge 45 at the front end of the support arm 41, causing the palm joint 43 and the arc-shaped drive foot 44 to press against the guide rail 2, thereby achieving braking. When the power is cut off and the structure retracts, the flexible pre-tightening structure 46 pulls the front edge 42 back to its original position, reducing the pressure between the arc-shaped drive foot 44 and the guide rail 2, thus preparing for the drive.

[0050] The second flexible structure 462 is located between the end of the front edge 42 and the front end of the palm joint 43. One end is fixed to the front end of the palm joint 43, and the other end is connected to the end of the front edge 42 through a flexible hinge 45. A piezoelectric ceramic 5 is sandwiched in the middle. When the piezoelectric ceramic 5 is energized and extends, it pushes the palm joint 43 to rotate around the flexible hinge 45 at the end of the front edge 42, which drives the arc-shaped drive foot 44 to generate thrust along the guide rail 2, thus driving the platform 3 to move. When the power is cut off and the structure retracts, the flexible pre-tightening structure 46 pulls the palm joint 43 back to its original position, and the arc-shaped drive foot 44 returns to its initial position, ready for the next drive.

[0051] By controlling the energizing timing (phase difference control) of the piezoelectric ceramics 5 in the two crab claw-like piezoelectric drive modules 4, bidirectional linear drive can be achieved: for example, when the left module drives and the right module brakes, the drive platform 3 moves to the left; when the right module drives and the left module brakes, the drive platform 3 moves to the right; when the two modules work together, the backlash phenomenon during the drive process can be effectively suppressed, and the stepping efficiency and positioning accuracy can be improved.

[0052] The specific embodiments of this utility model have been described in detail above, but they are merely examples, and this utility model is not equivalent to the specific embodiments described above. For those skilled in the art, any equivalent modifications and substitutions to this utility model are also within the scope of this utility model. Therefore, all equivalent changes and modifications made without departing from the spirit and scope of this utility model should be covered within the scope of this utility model.

Claims

1. A biomimetic crab claw driving device, characterized in that, The device includes a base (1), a guide rail (2), a drive platform (3), and a pair of crab claw piezoelectric drive modules (4). The guide rail (2) and the drive platform (3) are mounted on the base (1). The pair of crab claw piezoelectric drive modules (4) are symmetrically arranged between the guide rail (2) and the drive platform (3). One end of each crab claw piezoelectric drive module (4) is mounted on the drive platform (3), and the other end of each crab claw piezoelectric drive module (4) abuts against the guide rail (2). The two crab claw piezoelectric drive modules (4) are driven independently and cooperate with each other. The crab claw piezoelectric drive modules (4) are an integrated structure. The imitation crab claw piezoelectric drive module (4) includes a support arm (41), a front edge (42), a palm joint (43), and an arc-shaped drive foot (44). The support arm (41), the front edge (42), the palm joint (43), and the arc-shaped drive foot (44) are connected in sequence by a flexible hinge (45). A flexible pre-tightening structure (46) is provided between the middle of the support arm (41) and the front edge (42), and between the end of the front edge (42) and the front end of the palm joint (43). Piezoelectric ceramics (5) are installed on the flexible pre-tightening structure (46).

2. The biomimetic crab claw driving device according to claim 1, characterized in that, The flexible pre-tightening structure (46) includes a first flexible structure (461) and a second flexible structure (462). The first flexible structure (461) is disposed between the middle of the support arm (41) and the front edge (42), and the second flexible structure (462) is disposed between the end of the front edge (42) and the front end of the palm joint (43).

3. The biomimetic crab claw driving device according to claim 2, characterized in that, The support arm (41) has an L-shaped structure, and the support arm (41) and the front side edge (42) form a U-shaped structure. One end of the first flexible structure (461) is located at the rear end of the support arm (41), and the other end of the first flexible structure (461) is connected to the middle of the front side edge (42) through a flexible hinge (45).

4. The biomimetic crab claw driving device according to claim 2, characterized in that, The front side edge (42) and the palm joint (43) form an L-shaped structure. One end of the second flexible structure (462) is located at the front end of the palm joint (43), and the other end of the second flexible structure (462) is connected to the end of the front side edge (42) through a flexible hinge (45).

5. The biomimetic crab claw driving device according to claim 3, characterized in that, The drive platform (3) includes a displacement fine-tuning platform (31) and a drive foot adapter plate (32). The displacement fine-tuning platform (31) is set on the base (1), and the drive foot adapter plate (32) is set on the fine-tuning platform. The rear end of the support arm (41) is installed on the drive foot adapter plate (32). The initial gap between the arc-shaped drive foot (44) and the guide rail (2) is adjusted by rotating the knob of the displacement fine-tuning platform (31).

6. The biomimetic crab claw driving device according to claim 1, characterized in that, The bottom of the guide rail (2) is provided with a support frame (6), which is mounted on the base (1).

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