Piezoelectric drive device and apparatus

Abstract

The utility model belongs to the field of semiconductor processing equipment, concretely relates to a piezoelectric drive device and equipment, include: casing assembly, rotor, along first direction relative to casing assembly mobile setting, piezoelectric drive subassembly, two groups piezoelectric drive subassembly along second direction and divide in rotor both sides, second direction with first direction vertical, every group piezoelectric drive subassembly includes at least two piezoelectric stacks, piezoelectric stacks are configured as the deformation along first direction and second direction can be produced when electrified. Can through the electrification time sequence of control both sides piezoelectric stacks, so that when a piezoelectric stack separates from the rotor, the other piezoelectric stack always keeps contact with the rotor, this design ensures the continuity of power transmission, avoids the motion precision decline problem caused by alternating contact separation in the prior art, thereby significantly improves the control precision and stability of the rotor in nanometer motion.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor processing equipment, specifically relating to a piezoelectric drive device and equipment. Background Technology

[0002] Semiconductor devices require high-precision fixation and displacement during manufacturing, making multi-degree-of-freedom ultra-precision nanoscale drive positioning systems crucial equipment. Current technologies generally employ piezoelectric actuators to achieve this function. The working principle of a piezoelectric actuator utilizes the electro-mechanical energy conversion characteristics of piezoelectric materials, transferring the minute deformation of the piezoelectric material after energization to a displacement platform, thereby achieving nanoscale movement of the platform. However, in existing piezoelectric actuators, there is alternating contact and separation between the piezoelectric drive element and the power output element. This results in poor controllability of the motion precision of the power output element and makes it impossible to achieve a balance between rapid and high-precision movement. Utility Model Content

[0003] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide a piezoelectric drive device and equipment that can improve driving efficiency and motion accuracy.

[0004] To achieve the above and other related objectives, this utility model provides a piezoelectric drive device, comprising: Housing assembly; The mover is movably disposed relative to the housing assembly along a first direction; A piezoelectric drive assembly, wherein two sets of the piezoelectric drive assemblies are respectively placed on both sides of the mover along a second direction, the second direction being perpendicular to the first direction; Each of the piezoelectric drive components includes at least two piezoelectric stacks configured to deform along the first and second directions when energized. The end of the piezoelectric stack away from the mover is fixed relative to the housing assembly, and the end of the piezoelectric stack near the mover is configured to abut or separate from the mover as the piezoelectric stack deforms.

[0005] In an optional embodiment of the present invention, the piezoelectric drive assembly is configured to move in a first mode and a second mode in response to control commands from the controller; in response to the first mode, at least two piezoelectric stacks in the same group of piezoelectric drive assemblies move in opposite timing sequences; in response to the second mode, all piezoelectric stacks in the same group of piezoelectric drive assemblies move in the same timing sequence.

[0006] In an optional embodiment of this utility model, each group of piezoelectric drive components includes at least four piezoelectric stacks, which are arranged in a rectangular array along a target plane, the target plane being a plane perpendicular to the second direction; two piezoelectric stacks located on one diagonal of the rectangular array are the first piezoelectric stacks, and two piezoelectric stacks located on the other diagonal of the rectangular array are the second piezoelectric stacks; in response to the first mode, the first piezoelectric stacks and the second piezoelectric stacks move in opposite timing sequences.

[0007] In an optional embodiment of the present invention, the piezoelectric stack includes a first piezoelectric stack and a second piezoelectric stack stacked along the second direction. The first piezoelectric stack is configured to generate a telescoping motion along the second direction when energized, and the second piezoelectric stack is configured to generate a swaying motion along the first direction when energized.

[0008] In an optional embodiment of the present invention, the second piezoelectric stack is disposed at one end of the piezoelectric stack near the mover.

[0009] In an optional embodiment of the present invention, the mover has a cylindrical power output part at one end in the first direction, the power output part extends through to the outside of the housing assembly, and a linear bearing is provided between the power output part and the housing assembly.

[0010] In an optional embodiment of this utility model, a wear-resistant layer made of wear-resistant material is provided on one end of the piezoelectric stack opposite to the mover, and / or on one side of the mover opposite to the piezoelectric stack.

[0011] In an optional embodiment of this utility model, a stroke detection device is further included. The stroke detection device includes an encoder and a reading head arranged opposite to each other. The encoder has a long strip structure and the length direction of the encoder is parallel to the first direction. One of the encoder and the reading head is fixedly arranged relative to the moving part, and the other is fixedly arranged relative to the housing assembly.

[0012] In an optional embodiment of the present invention, a guiding mechanism is provided between the mover and the housing assembly. The guiding mechanism is configured to at least prevent the mover from deflecting in a third direction, which is perpendicular to the first direction and the second direction.

[0013] To achieve the above and other related objectives, this utility model also provides a device, comprising: The piezoelectric drive device; and A front-end component for clamping or supporting external devices, the front-end component being detachably connected to the moving part; The drive controller is electrically connected to the piezoelectric drive assembly.

[0014] The technical advantages of this invention are as follows: By setting at least two piezoelectric stacks in each piezoelectric drive component and placing them on both sides of the mover in the second direction, and utilizing the characteristic that the piezoelectric stacks can deform in the first and second directions after being energized, and by controlling the energizing sequence of the piezoelectric stacks on both sides, this design ensures the continuity of power transmission when one piezoelectric stack separates from the mover, avoids the problem of decreased motion accuracy caused by alternating contact and separation in the prior art, and thus significantly improves the control accuracy and stability of the mover in nanometer-level motion. Attached Figure Description

[0015] Figure 1 This is a perspective view of the piezoelectric drive device provided in an embodiment of this utility model; Figure 2 This is an end view of the piezoelectric drive device provided in an embodiment of this utility model; Figure 3 yes Figure 2 AA section view; Figure 4 This is a schematic diagram of the piezoelectric drive device provided in the embodiment of this utility model during the first mode of movement; Figure 5 This is a schematic diagram of the piezoelectric drive device provided in the embodiment of this utility model during the second mode of movement; Figure 6 This is a perspective view of the piezoelectric drive assembly provided in an embodiment of this utility model; Figure 7 yes Figure 3 BB cross-sectional view.

[0016] Explanation of reference numerals in the attached drawings: 10, housing assembly; 20, mover; 21, power output end; 30, piezoelectric drive assembly; 31, piezoelectric stack; 3101, first piezoelectric stack; 3102, second piezoelectric stack; 311, first piezoelectric stack; 312, second piezoelectric stack; 40, linear bearing; 50, stroke detection device; 51, encoder; 52, reading head. Detailed Implementation

[0017] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model. It should be noted that, unless otherwise specified, the following embodiments and features described therein can be combined with each other.

[0018] It should be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of the present invention. Therefore, the illustrations only show the components related to the present invention and are not drawn according to the number, shape and size of the components in actual implementation. In actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0019] Please see Figures 1 to 7 As shown, the piezoelectric drive device provided in the embodiment of this utility model includes a housing assembly 10, a mover 20, and a piezoelectric drive assembly 30; the mover 20 is movably disposed relative to the housing assembly 10 along a first direction; two sets of the piezoelectric drive assemblies 30 are disposed on both sides of the mover 20 along a second direction, the second direction being perpendicular to the first direction; each set of the piezoelectric drive assemblies 30 includes at least two piezoelectric stacks 31, the piezoelectric stacks 31 being configured to generate deformation along the first direction and the second direction when energized, the end of the piezoelectric stacks 31 away from the mover 20 being fixedly disposed relative to the housing assembly 10, and the end of the piezoelectric stacks 31 near the mover 20 being configured to abut or separate from the mover 20 as the piezoelectric stacks 31 deforms.

[0020] This invention provides at least two piezoelectric stacks 31 in each piezoelectric drive assembly 30, positioned on both sides of the mover 20 in the second direction. Utilizing the characteristic that the piezoelectric stacks 31 deform in both the first and second directions after being energized, and by controlling the energizing sequence of the two piezoelectric stacks 31, when one piezoelectric stack 31 separates from the mover 20, the other piezoelectric stack 31 always remains in contact with the mover 20. This design ensures the continuity of power transmission and avoids the problem of decreased motion accuracy caused by alternating contact and separation in the prior art, thereby significantly improving the control accuracy and stability of the mover 20 in nanometer-level motion.

[0021] Please see Figure 4 , Figure 5As shown, in an optional embodiment of this invention, the piezoelectric drive assembly 30 is configured to move in a first mode and a second mode in response to control commands from the controller. In response to the first mode, at least two piezoelectric stacks 31 in the same group of piezoelectric drive assemblies 30 move in opposite sequences. In response to the second mode, all piezoelectric stacks 31 in the same group of piezoelectric drive assemblies 30 move in the same sequence. This invention configures the piezoelectric drive assembly 30 to operate in two modes in response to controller commands: in the first mode, the same group of piezoelectric stacks 31 move in opposite sequences, forming a continuous driving effect through alternating push-pull actions, achieving rapid, large-stroke movement of the mover 20; in the second mode, all piezoelectric stacks 31 move in the same sequence, generating precise micro-displacement through synergistic action, ensuring high-precision, short-stroke positioning of the mover 20. This design allows the device to flexibly switch motion modes according to actual needs, effectively solving the contradiction between rapid and high-precision movement that existing technologies cannot simultaneously achieve, thus meeting both efficiency and precision requirements in scenarios such as semiconductor device processing.

[0022] Please see Figure 6 As shown, in an optional embodiment of the present invention, each group of piezoelectric drive components 30 includes at least four piezoelectric stacks 31, which are arranged in a rectangular array along a target plane, the target plane being a plane perpendicular to the second direction; two piezoelectric stacks 31 located on one diagonal of the rectangular array are the first piezoelectric stacks 3101, and two piezoelectric stacks 31 located on the other diagonal of the rectangular array are the second piezoelectric stacks 3102; in response to the first mode, the first piezoelectric stacks 3101 and the second piezoelectric stacks 3102 move in opposite timing sequences. This invention arranges at least four piezoelectric stacks 31 in a rectangular array, and the first piezoelectric stack 3101 and the second piezoelectric stack 3102 on the diagonal move in opposite sequences, so that the driving units on the two diagonal sets form a complementary push-pull action. This design significantly improves the overall driving force through the coordinated work of multiple piezoelectric stacks 31. On the other hand, the symmetrical array layout and alternating driving method make the driving force on the mover 20 more uniform and balanced in spatial distribution, avoiding local stress concentration. Thus, while improving the output force, it ensures the smoothness of the mover 20's movement and the control accuracy.

[0023] Please see Figure 4 , Figure 5As shown, in an optional embodiment of this invention, the piezoelectric stack 31 includes a first piezoelectric stack 311 and a second piezoelectric stack 312 stacked along the second direction. The first piezoelectric stack 311 is configured to generate a telescopic motion along the second direction when energized, and the second piezoelectric stack 312 is configured to generate a swaying motion along the first direction when energized. This invention designs each piezoelectric stack 31 as a first piezoelectric stack 311 and a second piezoelectric stack 312 stacked along the second direction, and controls them to generate a telescopic motion in the second direction and a swaying motion in the first direction, respectively. This design allows a single piezoelectric stack 31 to simultaneously provide a clamping force perpendicular to the movement direction of the mover 20 and a driving force along the movement direction. Through the combination of these two motions, more reliable and precise frictional coupling and power transmission with the mover 20 are achieved, significantly enhancing the stability of the driving contact and the controllability of the power output, laying the foundation for achieving nanometer-level high-precision motion.

[0024] Please see Figure 4 , Figure 5 As shown, in an optional embodiment of this invention, the second piezoelectric stack 312 is disposed at the end of the piezoelectric stack 31 near the mover 20. By disposing the second piezoelectric stack 312, which generates the first-direction sweeping motion, at the end of the piezoelectric stack 31 near the mover 20, this invention enables the sweeping motion to be transmitted to the mover 20 more directly and efficiently, reducing energy loss and motion errors in intermediate transmission links. This arrangement optimizes the transmission path of the driving force, enhances the directness and effectiveness of the driving force received by the mover 20, thereby further improving the motion accuracy and response speed of the displacement platform and ensuring the reliability of nanometer-level positioning.

[0025] Please see Figures 1 to 3 As shown, in an optional embodiment of this utility model, the mover 20 has a cylindrical power output part 21 at one end in the first direction. The power output part 21 extends through to the outside of the housing assembly 10, and a linear bearing 40 is provided between the power output part 21 and the housing assembly 10. By setting a cylindrical power output part 21 at one end of the mover 20 and allowing it to pass through the housing via the linear bearing 40, this design allows the precise linear motion of the mover 20 to be directly transmitted to the external load through the high-precision linear bearing 40. The linear bearing 40 effectively eliminates radial clearance and lateral interference, ensuring extremely high straightness and stability of the power output part 21 during movement. This allows the nanoscale displacement generated by piezoelectric drive to be transmitted to the external working platform without loss or deviation, ultimately achieving the high-precision positioning requirements for semiconductor device processing.

[0026] In an optional embodiment of this invention, a wear-resistant layer made of wear-resistant material is provided at one end of the piezoelectric stack 31 opposite to the mover 20, and / or on one side of the mover 20 opposite to the piezoelectric stack 31. By providing a wear-resistant material layer at the contact interface between the piezoelectric stack 31 and the mover 20, this invention significantly reduces frictional wear generated during high-frequency reciprocating motion, effectively preventing changes in the contact surface morphology and a decrease in driving force transmission efficiency due to material wear. This design not only extends the service life of the piezoelectric drive device, but more importantly, maintains the long-term stability of the frictional characteristics of the drive interface, thereby ensuring that the mover 20 can obtain consistent and precise driving force transmission in different motion modes, ultimately maintaining the high precision and repeatability of nanometer-level motion control.

[0027] Please see Figure 7 As shown, in an optional embodiment of this utility model, a stroke detection device 50 is further included. The stroke detection device 50 includes an encoder 51 and a reading head 52 arranged opposite to each other. The encoder 51 has a long strip structure, and the length direction of the encoder 51 is parallel to the first direction. One of the encoder 51 and the reading head 52 is fixedly arranged relative to the mover 20, and the other is fixedly arranged relative to the housing assembly 10. By setting the stroke detection device 50 composed of the long strip encoder 51 and the reading head 52, and forming a relatively fixed relationship with the mover 20 and the housing assembly 10, this utility model can detect the absolute displacement and motion speed of the mover 20 along the first direction in real time and accurately. This design realizes closed-loop feedback control of nanometer-level motion. By comparing and compensating the detected actual position with the target position, motion errors caused by nonlinear factors such as slippage and creep are effectively eliminated, thereby significantly improving the positioning accuracy, repeatability, and long-term motion stability of the displacement platform.

[0028] In an optional embodiment of this invention, a guide mechanism is provided between the mover 20 and the housing assembly 10. The guide mechanism is configured to at least prevent the mover 20 from deflecting in a third direction, which is perpendicular to the first direction and the second direction. By providing a guide mechanism between the mover 20 and the housing assembly 10, this invention effectively limits the unintended deflection and displacement of the mover 20 in a third direction. This design ensures that the mover 20 moves strictly in a straight line along a preset first direction, eliminating motion errors and accuracy losses caused by lateral movement or torsion. This guarantees the transmission efficiency and directional consistency of the piezoelectric driving force, ultimately enabling the displacement platform to achieve higher precision nanometer-level positioning and more stable motion performance.

[0029] In specific embodiments, the guiding mechanism may be, for example, a slider and a slide rail that cooperate with each other, or a guide pin and a pin hole that cooperate with each other.

[0030] This invention also provides a device, particularly a semiconductor processing device, comprising the aforementioned piezoelectric drive device, a front-end component, and a drive controller. The front-end component is used to clamp or support external devices, such as optical elements for holding or supporting wafers or semiconductor optical processing equipment. The front-end component is detachably connected to the mover 20. The drive controller is electrically connected to the piezoelectric drive assembly 30. By applying the piezoelectric drive device to a semiconductor processing equipment and enabling its mover 20 to drive the front-end component, such as a wafer holder or optical element support, through a detachable connection, combined with the precise electrical control of the drive controller, this invention allows the equipment to fully utilize the dual-mode motion, high-precision closed-loop control, and stable output characteristics of the piezoelectric drive device. This design enables the semiconductor processing equipment to achieve both rapid, large-stroke wafer transport or component adjustment, and nanometer-level precision alignment or focusing operations when performing processes such as wafer positioning, photolithography, or precision inspection, significantly improving the equipment's production efficiency and processing accuracy.

[0031] In summary, this invention, by arranging at least two piezoelectric stacks 31 in each piezoelectric drive assembly 30 and placing them on both sides of the mover 20 in the second direction, utilizes the characteristic that the piezoelectric stacks 31 deform in both the first and second directions after being energized. By controlling the energizing sequence of the two piezoelectric stacks 31, when one piezoelectric stack 31 separates from the mover 20, the other piezoelectric stack 31 always remains in contact with the mover 20. This design ensures the continuity of power transmission and avoids the problem of decreased motion accuracy caused by alternating contact and separation in the prior art, thereby significantly improving the control accuracy and stability of the mover 20 in nanometer-level motion. This invention, by configuring the piezoelectric drive assembly 30, can respond to... The device operates in two modes according to controller commands: In the first mode, the same group of piezoelectric stacks 31 move in opposite sequences, forming a continuous driving effect through alternating push-pull actions, achieving rapid, large-stroke movement of the mover 20; in the second mode, all piezoelectric stacks 31 move in the same sequence, generating precise micro-displacement through synergistic action, ensuring high-precision, short-stroke positioning of the mover 20. This design allows the device to flexibly switch motion modes according to actual needs, effectively solving the contradiction between rapid and high-precision movement that existing technologies cannot simultaneously achieve, thus meeting the dual requirements of efficiency and precision in semiconductor device processing and other scenarios. This invention arranges at least four piezoelectric stacks 31 in a rectangular array... The piezoelectric stacks 31 and 3102 on the diagonal are arranged in opposite sequences, creating a complementary push-pull effect between the two sets of diagonal drive units. This design significantly improves the overall driving force through the coordinated work of multiple piezoelectric stacks 31. Furthermore, the symmetrical array layout and alternating drive method ensure a more uniform and balanced spatial distribution of the driving force on the mover 20, avoiding localized stress concentration. This enhances the output force while maintaining the smoothness and control precision of the mover 20's movement. The invention further designs each piezoelectric stack 31 as a first piezoelectric stack 311 and a second piezoelectric stack 312 stacked along a second direction, and controls their respective generation... The design incorporates a second-direction telescopic motion and a first-direction sweeping motion. This allows a single piezoelectric stack 31 to simultaneously provide a clamping force perpendicular to the movement direction of the mover 20 and a driving force along the movement direction. The combination of these two motions achieves more reliable and precise frictional coupling and power transmission with the mover 20, thereby significantly enhancing the stability of the driving contact and the controllability of the power output, laying the foundation for achieving nanometer-level high-precision motion. By placing the second piezoelectric stack 312 for generating the first-direction sweeping motion at the end of the piezoelectric stack 31 close to the mover 20, the sweeping motion can be transmitted to the mover 20 more directly and efficiently, reducing energy loss and motion error in the intermediate transmission links.This layout optimizes the transmission path of the driving force, enhances the directness and effectiveness of the driving force on the mover 20, thereby further improving the motion accuracy and response speed of the displacement platform and ensuring the reliability of nanometer-level positioning. This invention, by setting a cylindrical power output section 21 at one end of the mover 20 and having it pass through the housing via a linear bearing 40, directly transmits the precise linear motion of the mover 20 to the external load through the high-precision linear bearing 40. The linear bearing 40 effectively eliminates radial clearance and lateral interference, ensuring extremely high straightness and stability of the power output section 21 during movement. This allows the nanometer-level displacement generated by piezoelectric drive to be transmitted to the external working platform without loss or deviation, ultimately realizing semiconductor device processing. The high-precision positioning requirements are met. This invention significantly reduces friction and wear during high-frequency reciprocating motion by setting a wear-resistant material layer at the contact interface between the piezoelectric stack 31 and the mover 20, effectively preventing changes in the contact surface morphology and a decrease in driving force transmission efficiency due to material wear. This design not only extends the service life of the piezoelectric drive device but, more importantly, maintains the long-term stability of the frictional characteristics of the drive interface, ensuring that the mover 20 can obtain consistent and accurate driving force transmission in different motion modes, ultimately maintaining the high precision and repeatability of nanometer-level motion control. This invention also incorporates a stroke detection device 50 composed of a strip encoder 51 and a reading head 52, which is relatively fixed to the mover 20 and the housing assembly 10. The system can detect the absolute displacement and velocity of the mover 20 along the first direction in real time and with high precision. This design achieves closed-loop feedback control of nanoscale motion. By comparing and compensating for the detected actual position with the target position, it effectively eliminates motion errors caused by nonlinear factors such as slippage and creep, thereby significantly improving the positioning accuracy, repeatability, and long-term motion stability of the displacement platform. Furthermore, by setting a guiding mechanism between the mover 20 and the housing assembly 10, this invention effectively limits the unexpected skewness and displacement of the mover 20 in the third direction. This design ensures that the mover 20 moves strictly in a straight line along the preset first direction, eliminating motion errors and accuracy losses caused by lateral movement or torsion, thus guaranteeing the transmission of piezoelectric driving force. The improved delivery efficiency and directional consistency ultimately enable the displacement platform to achieve higher precision nanometer-level positioning and more stable motion performance. This invention applies the piezoelectric drive device to semiconductor processing equipment, allowing its mover 20 to drive front-end components, such as wafer holders or optical component supports, via a detachable connection. Combined with the precise electrical control of the drive controller, the equipment can fully utilize the dual-mode motion, high-precision closed-loop control, and stable output characteristics of the piezoelectric drive device. This design enables semiconductor processing equipment to perform both rapid, large-stroke wafer transport or component adjustment, and nanometer-level precision alignment or focusing operations during wafer positioning, photolithography, or precision inspection processes, significantly improving equipment production efficiency and processing accuracy.

[0032] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

[0033] Throughout this description, numerous specific details, such as examples of components and / or methods, are provided to provide a complete understanding of embodiments of the present invention. However, those skilled in the art will recognize that embodiments of the present invention may be practiced without one or more of these specific details or by other devices, systems, components, methods, parts, materials, components, etc. In other instances, well-known structures, materials, or operations have not been specifically shown or described in detail to avoid obscuring aspects of embodiments of the present invention.

Claims

1. A piezoelectric drive device, characterized in that, include: Housing assembly (10); The mover (20) is movably disposed relative to the housing assembly (10) along a first direction; Two sets of piezoelectric drive assemblies (30) are placed on both sides of the mover (20) along a second direction, the second direction being perpendicular to the first direction; Each of the piezoelectric drive components (30) includes at least two piezoelectric stacks (31), which are configured to deform along the first and second directions when energized. The end of the piezoelectric stack (31) away from the mover (20) is fixed relative to the housing assembly (10), and the end of the piezoelectric stack (31) near the mover (20) is configured to abut or separate from the mover (20) as the piezoelectric stack (31) deforms.

2. The piezoelectric drive device according to claim 1, characterized in that, The piezoelectric drive assembly (30) is configured to move in a first mode and a second mode in response to control commands from the controller; in response to the first mode, at least two of the piezoelectric stacks (31) in the same group of piezoelectric drive assemblies (30) move in opposite timing sequences; in response to the second mode, all of the piezoelectric stacks (31) in the same group of piezoelectric drive assemblies (30) move in the same timing sequence.

3. The piezoelectric drive device according to claim 2, characterized in that, Each of the piezoelectric drive components (30) includes at least four piezoelectric stacks (31), which are arranged in a rectangular array along a target plane that is perpendicular to the second direction. Two of the piezoelectric stacks (31) located on one diagonal of the rectangular array are the first piezoelectric stacks (3101), and two of the piezoelectric stacks (31) located on the other diagonal of the rectangular array are the second piezoelectric stacks (3102). In response to the first mode, the first piezoelectric stacks (3101) and the second piezoelectric stacks (3102) move in opposite timing sequences.

4. The piezoelectric drive device according to claim 1, characterized in that, The piezoelectric stack (31) includes a first piezoelectric stack (311) and a second piezoelectric stack (312) stacked along the second direction. The first piezoelectric stack (311) is configured to generate a telescoping motion along the second direction when energized, and the second piezoelectric stack (312) is configured to generate a swaying motion along the first direction when energized.

5. The piezoelectric drive device according to claim 4, characterized in that, The second piezoelectric stack (312) is disposed at one end of the piezoelectric stack (31) near the mover (20).

6. The piezoelectric drive device according to claim 1, characterized in that, The mover (20) has a cylindrical power output part (21) at one end in the first direction. The power output part (21) extends through to the outside of the housing assembly (10). A linear bearing (40) is provided between the power output part (21) and the housing assembly (10).

7. The piezoelectric drive device according to claim 1, characterized in that, The piezoelectric stack (31) is provided with a wear-resistant layer made of wear-resistant material at one end opposite to the mover (20), and / or the mover (20) is provided with a side opposite to the piezoelectric stack (31).

8. The piezoelectric drive device according to claim 1, characterized in that, It also includes a stroke detection device (50), which includes an encoder (51) and a reading head (52) arranged opposite to each other. The encoder (51) has a long strip structure and the length direction of the encoder (51) is parallel to the first direction. One of the encoder (51) and the reading head (52) is fixed relative to the mover (20) and the other is fixed relative to the housing assembly (10).

9. The piezoelectric drive device according to claim 1, characterized in that, A guide mechanism is provided between the mover (20) and the housing assembly (10), the guide mechanism being configured to at least prevent the mover (20) from deflecting in a third direction, the third direction being perpendicular to the first direction and the second direction.

10. A device, characterized in that, include: The piezoelectric drive device according to any one of claims 1 to 9; as well as A front end component for clamping or supporting external devices, the front end component being detachably connected to the mover (20); The drive controller is electrically connected to the piezoelectric drive assembly (30).

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