Three-dimensional small volume piezoelectric nanomanipulator

Abstract

The utility model relates to the technical field of precision positioning platform, disclose a three -dimensional small volume piezoelectric nanometer positioning platform, it includes shell and mesa. Shell and mesa between being equipped with YZ axle piezoelectric drive mechanism, X axle piezoelectric drive mechanism and with YZ axle piezoelectric drive mechanism, X axle piezoelectric drive mechanism connection's adapter plate. YZ axle piezoelectric drive mechanism includes the Y axle piezoelectric drive mechanism and Z axle piezoelectric drive mechanism of vertical connection. Z axle piezoelectric drive mechanism is connected with mesa. Y axle piezoelectric drive mechanism is connected with adapter plate. X axle piezoelectric drive mechanism is connected with shell on the side away from adapter plate. The utility model's series structure has realized X, Y, Z three -dimensional super -precision movement. The utility model whole structure layout is reasonable, compact, small, has the characteristics such as small motion coupling, high repeat positioning accuracy, fast response speed, running stable.

Description

Technical Field

[0001] This utility model belongs to the field of precision positioning stage technology, specifically, it relates to a three-dimensional small-volume piezoelectric nanopositioning stage. Background Technology

[0002] As scientific exploration delves deeper into the microscopic world, an increasing number of scientific fields have extreme demands for precise positioning. These include ensuring nanometer-level stable focusing of laser beams in laser processing, achieving precise wafer alignment in semiconductor inspection, and performing super-resolution microscopic imaging in biomedicine. These applications all share the same core requirement—a multi-degree-of-freedom, high-precision, and fast-response precision positioning stage. In recent years, thanks to advancements in piezoelectric ceramic manufacturing processes and technologies, commercially available piezoelectric ceramic sheets offer significant advantages such as miniaturization, high reliability, and stability, making them ideal for various precision adjustments and precision instrument applications. However, multi-degree-of-freedom precision positioning stages are often complex in structure and large in size. This makes integration with other positioning systems difficult, and also results in high motion coupling, low repeatability, low load capacity, and insufficient resolution and response speed.

[0003] Based on the above, the current problem to be solved is to provide a three-dimensional small-volume piezoelectric nanopositioning stage with high repeatability, high resolution, fast response speed, and large load capacity. Utility Model Content

[0004] The purpose of this invention is to provide a three-dimensional small-volume piezoelectric nanopositioning stage, which aims to solve the problems of complex structure, large volume, low repeatability, slow response speed and small load of existing multi-degree-of-freedom positioning stages.

[0005] This invention is implemented as follows: a three-dimensional small-volume piezoelectric nanopositioning stage includes: a shell and a platform; a YZ-axis piezoelectric drive mechanism and an X-axis piezoelectric drive mechanism are provided between the shell and the platform, and a transition plate is connected to the YZ-axis piezoelectric drive mechanism and the X-axis piezoelectric drive mechanism;

[0006] The YZ-axis piezoelectric drive mechanism includes a Y-axis piezoelectric drive mechanism and a Z-axis piezoelectric drive mechanism connected vertically. The Z-axis piezoelectric drive mechanism is connected to the platform, and the Y-axis piezoelectric drive mechanism is connected to the adapter plate. The side of the X-axis piezoelectric drive mechanism away from the adapter plate is connected to the outer shell.

[0007] Furthermore, the adapter plate is L-shaped, and the X-axis piezoelectric drive mechanism is vertically positioned above the Y-axis piezoelectric drive mechanism.

[0008] Furthermore, the X-axis piezoelectric drive mechanism includes a first amplification body and a first piezoelectric ceramic disposed within the first amplification body. The first amplification body includes two fixed ends and two first flexible arms disposed on each side of the fixed ends.

[0009] Furthermore, the major axis of the first piezoelectric ceramic is set at an angle α with the Y-axis, where 0 < α < 90°.

[0010] Furthermore, the Y-axis piezoelectric drive mechanism includes a second amplification body and a second piezoelectric ceramic disposed within the second amplification body. The second amplification body includes two fixed ends and two first flexible arms disposed on each side of the fixed ends.

[0011] Furthermore, the major axis of the second piezoelectric ceramic is set at an angle β with the X-axis, where 0 < β < 90°.

[0012] Furthermore, the Z-axis piezoelectric drive mechanism includes a third piezoelectric ceramic arranged parallel to the Z-axis and a flexible hinge connected to the top of the third piezoelectric ceramic. The side of the flexible hinge facing away from the third piezoelectric ceramic is connected to the platform.

[0013] Furthermore, the flexible hinge includes a connecting portion in the middle and second flexible arms symmetrically arranged on both sides of the connecting portion, wherein the second flexible arms are configured as straight beam type flexible arms.

[0014] Furthermore, the X-axis piezoelectric drive mechanism, Y-axis piezoelectric drive mechanism, and Z-axis piezoelectric drive mechanism are equipped with strain sensors.

[0015] The beneficial effects of the three-dimensional small-volume piezoelectric nanopositioning stage provided by this utility model are as follows:

[0016] The Y-axis and Z-axis piezoelectric drive mechanisms are integrated, resulting in a compact structure and low motion coupling. The X-axis piezoelectric drive mechanism is connected in series with the Y-axis piezoelectric drive mechanism via an adapter plate, achieving ultra-high precision three-dimensional positioning in X, Y, and Z directions. Furthermore, the series structure makes efficient use of space, resulting in a small size, low motion coupling, and high repeatability.

[0017] The Y-axis and X-axis piezoelectric drive mechanisms employ the principle of parallel kinematics amplification design, ensuring nanometer-level resolution while providing a large stroke for linear motion along the Y and X axes. The Z-axis piezoelectric drive mechanism utilizes a third piezoelectric ceramic direct drive method, resulting in a larger load capacity, higher resonant frequency, and faster response speed on the Z-axis.

[0018] This invention employs a frictionless, high-precision flexible guiding system. The first flexible arm, the second flexible arm, and the flexible hinge ensure stable operation and high accuracy of the entire system. The closed-loop version of the first flexible arm, the second flexible arm, and the flexible hinge, equipped with strain sensors, avoids temperature drift, provides real-time position detection and feedback, eliminates the hysteresis and creep characteristics of piezoelectric ceramics, and achieves nanometer-level precision positioning. Attached Figure Description

[0019] Figure 1 A schematic diagram of the three-dimensional small-volume piezoelectric nanopositioning stage provided by this utility model;

[0020] Figure 2 Exploded view of the three-dimensional small-volume piezoelectric nanopositioning stage provided by this utility model;

[0021] Figure 3 A three-dimensional structural diagram of the combination of the YZ-axis piezoelectric drive mechanism and the X-axis piezoelectric drive mechanism provided by this utility model;

[0022] Figure 4 A three-dimensional structural diagram of the YZ-axis piezoelectric drive mechanism provided by this utility model;

[0023] Figure 5 Left view of the YZ axis piezoelectric drive mechanism provided by this utility model;

[0024] Figure 6 A bottom view of the YZ-axis piezoelectric drive mechanism provided by this utility model;

[0025] Figure 7 A three-dimensional structural diagram of the X-axis piezoelectric drive mechanism provided by this utility model;

[0026] Figure 8 Top view of the X-axis piezoelectric drive mechanism provided by this utility model;

[0027] In the figure: 1-shell; 2-tabletop; 3-YZ axis piezoelectric drive mechanism; 31-Y axis piezoelectric drive mechanism; 311-second magnified body; 312-second piezoelectric ceramic; 32-Z axis piezoelectric drive mechanism; 321-flexible hinge; 3211-connecting part; 3212-second flexible arm; 322-third piezoelectric ceramic; 4-X axis piezoelectric drive mechanism; 41-first magnified body; 42-first piezoelectric ceramic; 5-adapter plate; 6-strain sensor; a-fixed end; b-first flexible arm. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely for explaining the present utility model and are not intended to limit the present utility model.

[0029] The implementation of this utility model will be described in detail below with reference to specific embodiments.

[0030] In the accompanying drawings of this embodiment, the same or similar reference numerals correspond to the same or similar components. In the description of this utility model, it should be understood that if terms such as "upper," "lower," "left," and "right" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting this utility model. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0031] Reference Figures 1-8 The image shown is a preferred embodiment of the present invention.

[0032] The three-dimensional small-volume piezoelectric nanopositioning stage includes a shell 1 and a stage 2, as shown in the reference. Figure 1 The platform 2 is mounted on the outer casing 1, and the platform 2 and the outer casing 1 form a cavity. Between the outer casing 1 and the platform 2 are a YZ-axis piezoelectric drive mechanism 3, an X-axis piezoelectric drive mechanism 4, and an adapter plate 5, as shown in the reference. Figure 2 The adapter plate 5 is connected to the YZ-axis piezoelectric drive mechanism 3 and the X-axis piezoelectric drive mechanism 4, forming a series structure between the YZ-axis piezoelectric drive mechanism 3 and the X-axis piezoelectric drive mechanism 4, as shown in the reference. Figure 3 The YZ-axis piezoelectric drive mechanism 3 is connected to the platform 2. When voltage is applied, the YZ-axis piezoelectric drive mechanism 3 pushes the platform 2 to move linearly along the Y-axis and Z-axis, respectively. When voltage is applied, the output end of the X-axis piezoelectric drive mechanism 4 moves linearly along the X-axis, driving the YZ-axis piezoelectric drive mechanism and the platform 2 connected in series to move linearly along the X-axis together. The series structure of the YZ-axis piezoelectric drive mechanism 3 and the X-axis piezoelectric drive mechanism 4 achieves ultra-precise positioning along the X, Y, and Z axes.

[0033] The YZ axis piezoelectric drive mechanism 3 includes a vertically connected Y-axis piezoelectric drive mechanism 31 and a Z-axis piezoelectric drive mechanism 32, as shown in the reference. Figure 4 One end of the Y-axis piezoelectric drive mechanism 31 is connected to the adapter plate 5, and the other end is connected to the Z-axis piezoelectric drive mechanism 32. The Y-axis piezoelectric drive mechanism 31 and the Z-axis piezoelectric drive mechanism 32 are integrated into one unit, resulting in a compact structure, low motion coupling, and high positioning accuracy. The side of the Z-axis piezoelectric drive mechanism 32 away from the Y-axis piezoelectric drive mechanism 31 is connected to the table surface 2.

[0034] The adapter plate 5 is preferably L-shaped. One side of the adapter plate 5 is connected to the top surface of one end of the Y-axis piezoelectric drive mechanism 31, and the other side of the adapter plate 5 is connected to the bottom surface of one end of the X-axis piezoelectric drive mechanism 4. The X-axis piezoelectric drive mechanism 4 is vertically disposed above the Y-axis piezoelectric drive mechanism 31. The adapter plate 5 allows the X-axis piezoelectric drive mechanism 4 to be stacked above the Y-axis piezoelectric drive mechanism 31 and on one side of the Z-axis piezoelectric drive mechanism 32. The side of the X-axis piezoelectric drive mechanism 4 away from the adapter plate 5 is connected to the bottom surface of the outer casing 1. The entire structure of this utility model is extremely compact, very small in size, and easy to integrate.

[0035] The X-axis piezoelectric drive mechanism 4 includes a first amplifier 41 and a first piezoelectric ceramic 42 disposed within the first amplifier 41. (Refer to...) Figure 7 The first magnifying body 41 includes two fixed ends a and two first flexible arms b on each side of the fixed ends a. The two ends of the long axis of the first piezoelectric ceramic 42 are connected to the fixed ends a. The four first flexible arms b are evenly distributed on the first magnifying body 41 on both sides of the first piezoelectric ceramic 42. Preferably, the long axis of the first piezoelectric ceramic 42 is set at an angle α with the Y-axis, 0 < α < 90°, refer to... Figure 8 When a voltage is applied to the first piezoelectric ceramic 42, displacement occurs, the first flexible arm b deforms, and the output end of the first amplifying body 41 moves linearly along the X-axis.

[0036] The Y-axis piezoelectric drive mechanism 31 includes a second amplification body 311 and a second piezoelectric ceramic 312 disposed within the second amplification body 311. The second amplification body 311 includes two fixed ends a and two first flexible arms b on each side of the fixed ends a. The two ends of the long axis of the second piezoelectric ceramic 312 are respectively connected to the fixed ends a. Four first flexible arms b are evenly disposed on the second amplification body 311 on both sides of the second piezoelectric ceramic 312. Preferably, the long axis of the second piezoelectric ceramic 312 is set at an angle β with the X-axis, 0 < β < 90°, referencing... Figure 6 When a voltage is applied to the second piezoelectric ceramic 312, displacement occurs, the first flexible arm b deforms, and the output end of the second amplifier 311 moves linearly along the Y-axis.

[0037] The X-axis piezoelectric drive mechanism 4 and the Y-axis piezoelectric drive mechanism 31 adopt the parallel kinematic mechanism amplification design principle to amplify and output the small displacements of the first piezoelectric ceramic 42 and the second piezoelectric ceramic 312, so that they produce large linear displacements in the X-axis and Y-axis.

[0038] The Z-axis piezoelectric drive mechanism 32 includes a third piezoelectric ceramic 322 arranged parallel to the Z-axis and a flexible hinge 321 connected to the top of the third piezoelectric ceramic 322. (Refer to...) Figure 5The flexible hinge 321 is connected to the platform 2 on the side opposite to the third piezoelectric ceramic 322. When voltage is applied, the Z-axis piezoelectric drive mechanism 32 generates linear displacement along the Z-axis, causing the flexible hinge 321 to deform, thereby pushing the platform 2 to move linearly along the Z-axis. Preferably, the flexible hinge 321 includes a connecting portion 3211 in the middle and second flexible arms 3212 symmetrically arranged on both sides of the connecting portion 3211. The second flexible arms 3212 are configured as straight beam type flexible arms. The bottom of the connecting portion 321 is connected to the third piezoelectric ceramic 322, and the top of the connecting portion 321 is connected to the platform 2. The Z-axis piezoelectric drive mechanism 32 uses the direct drive of the third piezoelectric ceramic 322 to push the platform 2 to move linearly along the Z-axis, which has the characteristics of large load, high resonant frequency, and fast response speed.

[0039] To eliminate the influence of load installation on the sensing, strain sensors 6 are provided in the X-axis piezoelectric drive mechanism 4, Y-axis piezoelectric drive mechanism 31, and Z-axis piezoelectric drive mechanism 32. Specifically, strain sensors 6 are attached to the side walls of the second flexible arm 3212 and the first flexible arm b. The installation of strain sensors 6 allows for real-time detection and feedback, resulting in more precise control and nanometer-level precision positioning, which is very suitable for ultra-high precision positioning applications.

[0040] This invention is not intended to limit the scope of this invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention shall be included within the scope of protection of this invention.

Claims

1. A three-dimensional small-volume piezoelectric nanopositioning stage, characterized in that, include: The outer shell (1) and the tabletop (2) are provided between the outer shell (1) and the tabletop (2), including a YZ-axis piezoelectric drive mechanism (3), an X-axis piezoelectric drive mechanism (4), and a transition plate (5) connected to the YZ-axis piezoelectric drive mechanism (3) and the X-axis piezoelectric drive mechanism (4). The YZ axis piezoelectric drive mechanism (3) includes a Y-axis piezoelectric drive mechanism (31) and a Z-axis piezoelectric drive mechanism (32) connected vertically. The Z-axis piezoelectric drive mechanism (32) is connected to the table (2), and the Y-axis piezoelectric drive mechanism (31) is connected to the adapter plate (5). The X-axis piezoelectric drive mechanism (4) is connected to the outer shell (1) on the side away from the adapter plate (5).

2. The three-dimensional small-volume piezoelectric nanopositioning stage according to claim 1, characterized in that, The adapter plate (5) is L-shaped, and the X-axis piezoelectric drive mechanism (4) is vertically positioned above the Y-axis piezoelectric drive mechanism (31).

3. The three-dimensional small-volume piezoelectric nanopositioning stage according to claim 1, characterized in that, The X-axis piezoelectric drive mechanism (4) includes a first amplification body (41) and a first piezoelectric ceramic (42) disposed in the first amplification body (41). The first amplification body (41) includes two fixed ends (a) and two first flexible arms (b) disposed on both sides of the fixed ends (a).

4. The three-dimensional small-volume piezoelectric nanopositioning stage according to claim 3, characterized in that, The major axis of the first piezoelectric ceramic (42) is set at an angle α with the Y axis, where 0 < α < 90°.

5. The three-dimensional small-volume piezoelectric nanopositioning stage according to claim 1, characterized in that, The Y-axis piezoelectric drive mechanism (31) includes a second amplification body (311) and a second piezoelectric ceramic (312) disposed in the second amplification body (311). The second amplification body (311) includes two fixed ends (a) and two first flexible arms (b) disposed on both sides of the fixed ends (a).

6. The three-dimensional small-volume piezoelectric nanopositioning stage according to claim 5, characterized in that, The major axis of the second piezoelectric ceramic (312) is set at an angle β with the X-axis, where 0 < β < 90°.

7. The three-dimensional small-volume piezoelectric nanopositioning stage according to claim 1, characterized in that, The Z-axis piezoelectric drive mechanism (32) includes a third piezoelectric ceramic (322) arranged parallel to the Z-axis and a flexible hinge (321) connected to the top of the third piezoelectric ceramic (322). The flexible hinge (321) is connected to the table surface (2) on the side away from the third piezoelectric ceramic (322).

8. The three-dimensional small-volume piezoelectric nanopositioning stage according to claim 7, characterized in that, The flexible hinge (321) includes a connecting part (3211) in the middle and a second flexible arm (3212) symmetrically arranged on both sides of the connecting part (3211). The second flexible arm (3212) is configured as a straight beam type flexible arm.

9. The three-dimensional small-volume piezoelectric nanopositioning stage according to claim 1, characterized in that, The X-axis piezoelectric drive mechanism (4), Y-axis piezoelectric drive mechanism (31) and Z-axis piezoelectric drive mechanism (32) are equipped with strain sensors (6).

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