A plasma surface treatment system

Abstract

The application belongs to the technical field of material surface modification, and specifically relates to a plasma surface treatment system, which comprises a shell provided with a control panel on the front side, a closure assembly provided on the front side of the shell, an inner container provided on the middle part of the rear side of the closure assembly, a plasma generating assembly fixedly connected to the control panel and arranged on the upper part of the inner container, a support fixedly connected to the inner wall of the inner container, a support assembly arranged on the inner wall of the support, and a vacuum assembly arranged on the rear side of the shell; the application adopts an adjusting piece to realize height adjustment through a screw rod; when a workpiece with an inclined surface is treated, an operator can rotate the adjusting piece to a target height; a damping ring arranged on the lower part of the adjusting piece extrudes the surface of the screw rod to form a stable friction force locking structure, so that loosening of the adjusting piece caused by vibration during plasma treatment is avoided, the workpiece is kept at a horizontal angle through the height difference of different support assemblies, and uniform plasma coverage is ensured.

Description

Technical Field

[0001] This application belongs to the field of material surface modification technology, specifically a plasma surface treatment system. Background Technology

[0002] Plasma surface treatment technology has become a core means for cleaning and activating material surfaces in industries such as electronic components, medical devices, and automotive parts due to its advantages of not requiring chemical reagents and having high processing precision.

[0003] Plasma cleaning machines, as a type of plasma surface treatment equipment, use an external vacuum pump and gas source to remove contaminants such as oil and oxide layers from the material surface through the action of active particles (such as O⁻ and OH⁻) in low-temperature plasma in a vacuum environment via the action of active particles in the low-temperature plasma. They also introduce polar groups to enhance the adhesion of subsequent processes and are a key technology path to replace traditional chemical cleaning and physical polishing.

[0004] Existing plasma cleaning machines mostly have a planar workpiece support structure. When processing workpieces with an inclined surface on top, it is impossible to ensure that the inclined surface of the workpiece is parallel to the support structure. This results in the plasma acting on a localized area of ​​the workpiece, leading to over-processing in certain areas. Therefore, it is necessary to design a plasma surface treatment system to solve the above problems. Utility Model Content

[0005] The purpose of this application is to address the shortcomings of existing technologies by designing a plasma surface treatment system that uses multiple sets of adjustable support components to adjust the workpiece angle. This solves the problem that the inclined surface of the workpiece cannot be guaranteed to be parallel to the support structure, resulting in localized over-treatment of the workpiece due to the plasma acting on a localized area.

[0006] To achieve the above objectives, the following technical solution is adopted: A plasma surface treatment system includes a housing with a control panel on the front side, a sealing component on the front side of the housing, an inner liner in the middle of the housing near the rear side of the sealing component, a plasma generating component that is signal-connected to the upper part of the inner liner, a support member horizontally fixedly connected to the inner wall of the inner liner, a support component in the inner wall of the support member, and a vacuum component on the rear side of the housing.

[0007] Preferably, the sealing assembly includes a sealing door, a sealing ring, an observation window, and a base. The base is vertically fixed to the front left side of the shell near the inner liner. The sealing door is hinged to the inner wall of the base. An observation window is provided through the middle of the sealing door. A sealing ring is fixedly connected to the rear side of the sealing door. The rear side of the sealing ring contacts the outer side of the inner liner.

[0008] Preferably, the vacuum assembly includes a connecting pipe and a vacuum pump. One end of the connecting pipe is fixedly connected to the rear side of the housing and communicates with the inside of the inner liner. The other end of the connecting pipe is fixedly installed on the outside of the air inlet port of the vacuum pump by a fastener. The vacuum pump is used to extract air from the inner liner.

[0009] Preferably, the support includes a support platform and a through hole. The support platform is fixedly connected to the inner wall of the inner liner by a connecting frame. The through hole is vertically opened on the upper surface of the support platform. Multiple sets of through holes are opened and the multiple sets of through holes are evenly distributed on the upper surface of the support platform.

[0010] Preferably, the support assembly includes a mounting base, which is inserted into the inner wall of the through hole. A screw is fixedly connected to the center of the upper part of the mounting base. An adjusting member is threadedly connected to the outer side of the screw. A damping ring is fixedly connected to the lower part of the adjusting member near the outer side of the screw. The surface of the damping ring is pressed against the surface of the screw.

[0011] Preferably, both the upper and lower parts of the adjusting member are cylindrical, the diameter of the upper cylindrical part of the adjusting member is smaller than the diameter of the lower cylindrical part, and anti-slip texture is provided on the outer side of the lower cylindrical part of the adjusting member.

[0012] Preferably, the connecting frame is configured in an L-shape.

[0013] Preferably, the inner liner is cylindrical and made of 316 stainless steel.

[0014] Compared with the prior art, the beneficial effects of this application are: 1. This application uses an adjusting component to achieve height adjustment via a screw. When processing workpieces with inclined surfaces, the operator can rotate the adjusting component to the target height. The damping ring at the bottom of the adjusting component presses against the screw surface to form a stable friction locking structure, preventing the adjusting component from loosening due to vibration during plasma treatment. By using the height difference of different support components, the workpiece is kept at a horizontal angle, ensuring uniform plasma coverage.

[0015] 2. This application adopts multiple sets of evenly distributed through holes. The mounting base of the support component can be flexibly inserted into different through holes according to the size and shape of the workpiece, so as to realize the layout as needed. Compared with the traditional fixed support platform, the adaptability is improved. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of this application; Figure 2 This is a schematic diagram showing the unfolded state of the enclosed component in this application; Figure 3 This is a schematic diagram of the structure of the support component in this application; Figure 4 This is a schematic diagram showing the breakdown of the supporting components in this application.

[0017] The components include: 1. Shell; 2. Enclosure assembly; 21. Sealing door; 22. Sealing ring; 23. Observation window; 24. Base; 3. Control panel; 4. Inner liner; 5. Support component; 51. Support platform; 52. Connecting bracket; 53. Through hole; 6. Support assembly; 61. Mounting base; 62. Screw; 63. Adjusting component; 64. Damping ring; 7. Vacuum assembly; 71. Connecting pipe; 72. Fastener; 73. Vacuum pump; 8. Plasma generation assembly. Detailed Implementation

[0018] Reference Figure 1 - Figure 4 A plasma surface treatment system includes a housing 1 with a control panel 3 on the front, which is the main body of the plasma cleaner. The housing 1 is made of metal and has a box-like structure. An emergency stop button is located on the upper front for emergency shutdown. The housing 1 has sufficient strength to support an inner tank 4. Wiring channels and component mounting slots are pre-reserved inside, allowing for concealed wiring of the inner tank 4, control panel 3, and vacuum assembly 7. It can also receive gases such as oxygen and nitrogen, which can be injected into the inner tank 4. The control panel 3 is equipped with a touch or button interface, allowing preset plasma processing parameters such as power, processing time, and vacuum threshold. It also controls the start and stop of the plasma generating assembly 8 in real time and displays the system's operating status. A sealing assembly 2 is located on the front of the housing 1 to ensure the sealing of the inner tank 4 and facilitate safe loading and unloading of workpieces. The inner tank 4 is located in the middle of the housing 1 near the rear of the sealing assembly 2. The upper part of the inner tank 4 is fixedly connected to the plasma generating assembly 8, which is signal-connected to the control panel 3. Under the control of the control panel 3, it generates low-temperature plasma, such as through radio frequency discharge or dielectric barrier discharge. Active particles in the plasma, such as O⁻, OH⁻, and N⁺, bombard the workpiece surface, removing contaminants such as oil and oxide layers. Simultaneously, they alter the surface chemical properties, increasing the surface contact angle and enhancing the adhesion of subsequent coatings or welds. The power and discharge frequency of the plasma generating component 8 can be adjusted via the control panel 3 to suit different workpiece materials, such as metals, plastics, and ceramics. A support member 5 is horizontally fixed to the inner wall of the inner liner 4, and a support component 6 is installed on the inner wall of the support member 5. A vacuum component 7 is located at the rear of the shell 1 to extract air from the inner liner 4, creating a low-pressure plasma treatment environment.

[0019] In this embodiment, during use, the support layout is adjusted according to the size and shape of the workpiece to be processed: a suitable through hole 53 is selected from the support platform 51 of the support member 5, and the mounting base 61 of the support component 6 is inserted into the through hole 53 to achieve initial fixation of the support component 6; the height is adjusted by rotating the adjustment member 63 through its threaded engagement with the screw 62, so that when processing a flat workpiece, it can be placed directly on the support platform 51; when processing the workpiece, the height difference of different support components 6 is used to keep the workpiece at a preset tilt angle to ensure uniform plasma coverage in the subsequent process; After adjustment, the damping ring 64 is locked by friction formed on the surface of the screw 62, preventing the adjusting component 63 from loosening due to vibration during processing and ensuring the stability of the workpiece position. Place the positioned workpiece on the upper part of the adjusting component 63, close the sealing door 21, and confirm the workpiece position is correct through the observation window 23, then prepare to enter the vacuum extraction stage.

[0020] The operator sends a vacuum extraction command through the control panel 3, and the vacuum pump 73 starts. It continuously extracts air from the inner liner 4 through the connecting pipe 71. When the vacuum level reaches the preset threshold, it maintains a low-pressure environment in the inner liner 4. This environment can reduce air impurities, such as oxygen and nitrogen molecules, from reacting uselessly with the subsequently generated plasma, while making the plasma easier to diffuse, laying the foundation for uniform action on the workpiece surface.

[0021] After the vacuum level stabilizes, the plasma generating component 8 is activated via the control panel 3. The plasma generating component 8 generates a high-frequency electric field through its built-in electrodes. The electric field energy acts on the small amount of working gas remaining in the inner liner 4, causing the outer electrons of the gas molecules to gain energy and break free from the atomic nucleus, forming a low-temperature plasma composed of active particles such as electrons, positive ions, and free radicals such as O⁻, OH⁻, and N⁺. The active particles in the plasma modify the surface of the workpiece through physical bombardment and chemical reaction.

[0022] The operator observes the color of the plasma morphology inside the inner tank 4 in real time through the observation window 23. After the preset processing time is reached, the vacuum pump 73 is turned off, and clean air is slowly introduced into the inner tank 4 to gradually restore the air pressure inside the inner tank 4 to normal pressure. After the air pressure inside the inner tank 4 is restored, the operator opens the sealing door 21 and takes out the processed workpiece from the adjusting component 63.

[0023] As a preferred embodiment, the sealing assembly 2 includes a sealing door 21, a sealing ring 22, an observation window 23, and a base 24. The base 24 is vertically fixed to the front left side of the housing 1 near the inner liner 4, providing hinged support for the sealing door 21 to ensure stable opening and closing and sufficient strength to bear the weight of the sealing door 21. The sealing door 21 is hinged to the inner wall of the base 24. When closed, the sealing door 21 covers the front opening of the inner liner 4, forming a closed space; when open, it provides ample operating space for loading and unloading workpieces. Magnetic or snap-fit ​​structures can be provided on the edge of the door to assist in positioning and fixing when closed. An observation window 23, made of high-temperature resistant quartz glass, is provided through the middle of the sealed door 21. Operators can directly observe the processing status of the workpiece and the plasma morphology such as color and distribution inside the inner tank 4 through the observation window 23, and determine whether the plasma generating component 8 is working properly. A sealing ring 22 is fixedly connected to the rear side of the sealed door 21. The rear side of the sealing ring 22 contacts the outer side of the inner tank 4 and is made of high-temperature resistant and elastic silicone. The sealing ring 22 undergoes slight deformation when squeezed, completely blocking the flow path between the inner tank 4 and the outside air, and preventing leakage when the vacuum component 7 is extracted.

[0024] As a preferred embodiment, the vacuum assembly 7 includes a connecting pipe 71 and a vacuum pump 73. One end of the connecting pipe 71 is fixedly connected to the rear side of the housing 1 and communicates with the interior of the inner liner 4. The connecting pipe 71 is a negative pressure resistant pipe, with one end welded or flanged to the rear side of the housing 1 and communicating with the interior of the inner liner 4. The inner diameter of the pipe is designed according to the pumping speed of the vacuum pump 73, and the inner diameter of the pipe is ≥15mm to avoid increased pumping resistance due to an excessively small pipe diameter, which would affect the efficiency of vacuum improvement. The other end of the connecting pipe 71 is fixedly installed on the outside of the air inlet port of the vacuum pump 73 by a fastener 72. The fastener 72 adopts a clamp-type structure and is sleeved on the connection between the connecting pipe 71 and the air inlet port of the vacuum pump 73. At the joint, a tight fixation is achieved by tightening bolts. Vacuum pump 73 is used to extract air from the inner liner 4, serving as the system's vacuum power source. It extracts air from the inner liner 4 to create a low-pressure environment. The appropriate pumping speed of vacuum pump 73 is selected according to the processing requirements. During operation, air is continuously extracted from the inner liner 4 through connecting pipe 71, which can reduce the interference of air impurities on the plasma, reduce the useless reaction between active particles such as O⁻ and N⁺ and air molecules, and improve the efficiency of plasma action on the workpiece surface. In conjunction with control panel 3, automatic vacuum control is achieved. When the vacuum level of the inner liner 4 reaches a preset threshold, such as 10⁻³Pa, vacuum pump 73 automatically reduces power or stops to avoid energy waste.

[0025] As a preferred embodiment, the support member 5 includes a support platform 51 and a through hole 53. The support platform 51 is made of a high-temperature resistant and highly flat metal plate, used to support the workpiece being processed. The support platform 51 is fixedly connected to the inner wall of the inner liner 4 via a connecting bracket 52. The connecting bracket 52 is an L-shaped metal bracket, with one end fixed to the inner wall of the inner liner 4 and the other end connected to the support platform 51, maintaining a gap between the support platform 51 and the inner wall of the inner liner 4 to prevent obstruction of airflow during vacuum extraction and to prevent airflow dead zones within the inner liner 4 that could lead to uneven vacuum levels. The through hole 53 is vertical. Multiple sets of through holes 53 are evenly distributed on the upper surface of the support platform 51. The diameter of the circular holes evenly distributed on the upper surface of the support platform 51 is adapted to the mounting base 61. For example, the hole diameter is 10mm and the diameter of the mounting base 61 is 9.8mm, so as to achieve an interference fit. The operator can insert the support component 6 into different through holes 53 according to the size and shape of the workpiece. At the same time, when the support component 6 is not used, the plasma can adhere to the workpiece through the through holes 53, avoiding obstruction of the workpiece surface.

[0026] As a preferred embodiment, the support assembly 6 includes a mounting base 61, which is inserted into the inner wall of the through hole 53. The lower cylindrical structure is inserted into the inner wall of the through hole 53 and fixed with an interference fit to prevent loosening. The upper part is fixedly connected to the screw 62, providing stable support for the screw 62. The screw 62 is fixedly connected to the center of the upper part of the mounting base 61, providing a threaded track for height adjustment of the adjusting component 63. Precision threads, such as M8 threads with a pitch of 1mm, are formed on the outer side. When the operator rotates the adjusting component 63, the adjusting component 63 can move up and down along the screw 62. The height of the workpiece can be adjusted within the range of 0-50mm to accommodate the angle requirements of workpieces with different inclined surfaces. The outer thread of the screw 62 is connected to the adjusting component 63, which directly supports the workpiece and realizes height adjustment and convenient operation. The lower part of the adjusting component 63 is fixedly connected to the outer side of the screw 62. The surface of the damping ring 64 is pressed against the surface of the screw 62. When the adjusting component 63 is adjusted to the target height, the friction between the damping ring 64 and the screw 62 can prevent the adjusting component 63 from rotating on its own, ensuring that the workpiece remains highly stable in the vibration environment of plasma treatment.

[0027] As a preferred embodiment, both the upper and lower parts of the adjusting member 63 are cylindrical. The diameter of the upper cylindrical part of the adjusting member 63 is smaller than that of the lower cylindrical part. The outer side of the lower cylindrical part of the adjusting member 63 is provided with anti-slip texture. The upper part is used to support the workpiece, and the small contact surface reduces the obstruction of the workpiece surface. The lower part provides a rotation force application area for the operator.

[0028] As a preferred embodiment, the connector 52 is configured in an L-shape.

[0029] As a preferred approach, the inner liner 4 is cylindrical and made of 316 stainless steel, which has excellent corrosion resistance and can withstand the oxidation corrosion of plasma; it also has high temperature resistance, capable of withstanding temperatures above 300℃. The cylindrical structure makes it easier for plasma to be evenly distributed, reducing plasma accumulation in the corners of the cavity and ensuring consistent processing results in all areas of the workpiece.

Claims

1. A plasma surface treatment system, comprising a housing (1) with a control panel (3) disposed on the front side, characterized in that; A sealing component (2) is provided on the front side of the housing (1). An inner liner (4) is provided in the middle of the housing (1) near the rear side of the sealing component (2). A plasma generating component (8) that is signal-connected to the control panel (3) is fixedly connected to the upper part of the inner liner (4). A support member (5) is horizontally fixedly connected to the inner wall of the inner liner (4). A support component (6) is provided on the inner wall of the support member (5). A vacuum component (7) is provided on the rear side of the housing (1).

2. The plasma surface treatment system according to claim 1, characterized in that: The sealing assembly (2) includes a sealing door (21), a sealing ring (22), an observation window (23), and a base (24). The base (24) is vertically fixed to the front left side of the shell (1) near the inner liner (4). The sealing door (21) is hinged to the inner wall of the base (24). The observation window (23) is provided through the middle of the sealing door (21). The sealing ring (22) is fixedly connected to the rear side of the sealing door (21). The rear side of the sealing ring (22) contacts the outer side of the inner liner (4).

3. The plasma surface treatment system according to claim 1, characterized in that: The vacuum assembly (7) includes a connecting pipe (71) and a vacuum pump (73). One end of the connecting pipe (71) is fixedly connected to the rear side of the housing (1) and communicates with the inside of the inner liner (4). The other end of the connecting pipe (71) is fixedly installed on the outside of the air inlet port of the vacuum pump (73) by a fastener (72). The vacuum pump (73) is used to extract air from the inner liner (4).

4. The plasma surface treatment system according to claim 1, characterized in that: The support member (5) includes a support platform (51) and a through hole (53). The support platform (51) is fixedly connected to the inner wall of the inner liner (4) by a connecting frame (52). The through hole (53) is vertically opened on the upper surface of the support platform (51). There are multiple sets of through holes (53), and the multiple sets of through holes (53) are evenly distributed on the upper surface of the support platform (51).

5. The plasma surface treatment system according to claim 1, characterized in that: The support assembly (6) includes a mounting base (61) which is inserted into the inner wall of the through hole (53). A screw (62) is fixedly connected to the center of the upper part of the mounting base (61). An adjusting member (63) is threadedly connected to the outer side of the screw (62). A damping ring (64) is fixedly connected to the lower part of the adjusting member (63) near the outer side of the screw (62). The surface of the damping ring (64) is pressed against the surface of the screw (62).

6. The plasma surface treatment system according to claim 5, characterized in that: The upper and lower parts of the adjusting member (63) are both cylindrical. The diameter of the upper cylindrical part of the adjusting member (63) is smaller than that of the lower cylindrical part. Anti-slip texture is provided on the outer side of the lower cylindrical part of the adjusting member (63).

7. The plasma surface treatment system according to claim 4, characterized in that: The connecting frame (52) is configured in an L shape.

8. The plasma surface treatment system according to claim 1, characterized in that: The inner liner (4) is cylindrical and made of 316 stainless steel.

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