An annular chamber remote plasma source generator assembly

Abstract

The utility model belongs to the technical field of remote plasma source generator, concretely relates to a ring cavity remote plasma source generator assembly, the utility model discloses: quartz cavity is equipped with air inlet and air outlet, two groups of radiating water tray are respectively mirror image and set in the both sides of quartz cavity, and the one side of radiating water tray towards quartz cavity is provided with containing groove, containing groove is adapted with quartz cavity, and the one side of radiating water tray away from quartz cavity is provided with water tank, cover plate is established at the top surface of water tank, and cover plate is provided with at least one water inlet and one water outlet, insulation assembly is established between two groups of radiating water tray, a plurality of magnetic cores are distributed on radiating water tray, the utility model discloses is used to solve the technical problem of the service life and production efficiency of generator of reducing in the prior art remote plasma source generator using external cooling module, but the radiating efficiency is not high, and the cavity and magnetic core assembly are prone to overheating, reduce the service life and production efficiency of generator.

Description

Technical Field

[0001] This utility model belongs to the technical field of remote plasma source generators, specifically relating to a ring cavity remote plasma source generator assembly. Background Technology

[0002] A remote plasma source is a device used to generate plasma, commonly found in photovoltaics, chemicals, and semiconductors. In current semiconductor manufacturing, remote plasma sources synthesize plasma outside the reaction zone using a plasma source. Under the influence of airflow, electric fields, and magnetic fields, the plasma is introduced into the reaction zone. It is frequently used for surface modification, chamber cleaning, thin film etching, and plasma-assisted deposition. Specifically, it consists of a chamber, inlet, outlet, magnetic core, and ignition port, forming a remote plasma source dissociation chamber. The function of a remote plasma source is to perform atomic-level cleaning of process chambers in semiconductor equipment. Fluorine-containing compounds are used as raw material gases to enter the chamber. Under the influence of alternating electric and magnetic fields, the raw material gases are dissociated, releasing fluorine free radicals. The active ions F- enter the process chamber and react with contaminants such as silicon oxide and silicon nitride. The resulting vaporized material is then extracted from the process chamber by a vacuum pump, thus ensuring the cleanliness of the process chamber.

[0003] Existing remote plasma generators continuously generate high temperatures during gas ionization, requiring real-time heat dissipation. However, current cooling devices are mostly external cooling modules, which are inefficient, making the cavity and core components prone to overheating. This severely reduces the lifespan of the cavity and seals, and also lowers production efficiency. Therefore, there is an urgent need for highly efficient cooling devices. Utility Model Content

[0004] This invention provides a ring-shaped cavity remote plasma source generator assembly to solve the technical problem that existing remote plasma source generators use external cooling modules, but the heat dissipation efficiency is not high, and the cavity and magnetic core assembly are prone to overheating, reducing the service life and production efficiency of the generator. This utility model includes: a quartz cavity, which is provided with an air inlet and an air outlet; Two sets of cooling water trays are respectively mirror-arranged on both sides of the quartz cavity, and the side of the cooling water tray facing the quartz cavity has a receiving groove, which is adapted to the quartz cavity. The side of the cooling water tray facing away from the quartz cavity has a water groove. A cover plate is provided on the top surface of the water tank, and the cover plate has at least one water inlet and one water outlet; An insulating component is provided between the two sets of cooling water trays; Several magnetic cores are evenly distributed on the cooling water tray.

[0005] In this invention, the cooling water tray serves as a component that connects both the quartz cavity and the magnetic core. It has a water trough on it, which can utilize the water flowing into the water trough as a cooling medium. This greatly increases the heat dissipation efficiency of the cavity and the magnetic core, preventing overheating and thus avoiding impacts on the generator's service life and production efficiency.

[0006] Furthermore, the water tank is provided with a flow channel, which has the following advantages: the flow channel extends the flow path of the water, increases the heat exchange area, and improves the heat exchange efficiency.

[0007] Furthermore: each set of cooling water trays includes two pairs of mirrored water trays A and B, wherein water trays A and B are arranged in a staggered ring; The water trays A and B are each provided with water grooves on the side facing away from the quartz cavity; An insulating buffer pad is provided between water tray A and water tray B; The number of magnetic cores is four, corresponding to the intersection of water tray A and water tray B respectively. The beneficial effects of this step are: the mirrored water tray A corresponds to the upper and lower ends of the quartz cavity, and the mirrored water tray B corresponds to the left and right ends of the quartz cavity. The insulating buffer pads in water trays A and B can improve the structural stability of water trays A and B and the quartz cavity, and can also increase the dimensional tolerance of water trays A / B and the quartz cavity, avoiding the quartz cavity from breaking during assembly. In addition, the four magnetic cores made of ferrite are evenly distributed in the groove of the heat dissipation water tray as transformers, which can make the magnetic field distribution more uniform.

[0008] Furthermore: the insulating component includes a ceramic plate and an insulating thermally conductive pad disposed on at least one side of the ceramic plate; The ceramic plate includes a first ceramic plate and a second ceramic plate, and the insulating thermal pad includes a first insulating thermal pad and a second insulating thermal pad. The first ceramic plate and the first insulating thermal pad correspond to the outer ring of the heat sink, and the second ceramic plate and the second insulating thermal pad correspond to the inner ring of the heat sink. The beneficial effects of this step are: the ceramic plate acts as a dielectric material to isolate the heat sink on both sides of the quartz cavity, and one or both sides of the ceramic plate are covered with insulating thermal pads for better heat dissipation.

[0009] Furthermore, each of the mating surfaces of water tray A and water tray B has two connecting holes, which communicate with their respective water tanks. A first connector is provided inside the connection hole; The insulating buffer pad is also provided with through holes corresponding to the connecting holes. The beneficial effect of this step is that the isolated water trays A and B are connected in series through the connecting holes, and the flow channels of each water tank are combined with the connecting holes to form a complete water circulation loop.

[0010] Furthermore: the water tray A or the water tray B has at least two through holes perpendicular to the quartz cavity, and a second connector is provided in the through hole. The beneficial effect of this step is that the cooling water circulation loop of the heat dissipation water trays on both sides of the quartz cavity is connected, and only one inlet and one outlet need to be retained, simplifying the number of external water pipes.

[0011] Furthermore, the cross-section of the quartz cavity is circular, square, or oval. The beneficial effect of this step is that by setting different discharge paths, the uniformity of plasma electrolysis and the ease of dissociation can be compared.

[0012] Furthermore: a positioning ring is provided on the side of the water tank facing the cover plate, and a positioning groove adapted to the positioning ring is provided on the side of the cover plate facing the water tank. A sealing ring is also filled between the positioning ring and the positioning groove. The beneficial effects of this step are: the positioning ring and the positioning groove improve the connection accuracy between the cover plate and the water tank, and the sealing ring improves the connection sealing performance between the cover plate and the water tank.

[0013] Furthermore, the surfaces of the water tank, the cover plate, the connecting hole, and the through hole are all provided with a waterproof membrane. The beneficial effects of this step are: in order to prevent the water flow from conducting electricity, pure water is used; and in order to prevent the pure water from corroding the cover plate, water tank, connecting hole, and / or through hole, and generating metal ions that enter the pure water and increase its conductivity, a waterproof membrane is provided to avoid the generation of metal ions and maintain the insulation of the pure water.

[0014] The beneficial effects of this utility model are: 1. This application takes into account that the cooling water tray can contact the quartz cavity and the magnetic core at the same time. A cooling flow channel is opened in the cooling water tray to cool the quartz cavity and the magnetic core in a timely manner, so as to avoid the quartz cavity and the magnetic core from overheating and affecting the service life and performance of the generator. 2. The cooling water tray can also be evenly and symmetrically divided into multiple pieces, and separated by insulating buffer pads. This can increase the tolerance of the size of the cooling water tray and the quartz cavity when multiple cooling water trays (water tray A and water tray B) are installed with the quartz cavity, avoid the quartz cavity from breaking during assembly, and improve the structural stability between the components of the generator. 3. Set water tanks, connecting holes and through holes on multiple cooling water pans (water pan A and water pan B) to connect the water tanks of different cooling water pans into a whole, combine the main flow channel and the auxiliary flow channel, and transfer heat from different heat dissipation positions. This can not only improve heat dissipation efficiency, but also make the temperature of different heat dissipation positions as even as possible, and avoid local overheating, which may cause generator failure. Attached Figure Description

[0015] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0016] Figure 1 A perspective view of a ring cavity remote plasma source generator assembly provided by this utility model; Figure 2 An exploded view of a ring-shaped cavity remote plasma source generator assembly provided by this utility model; Figure 3 A front structural schematic diagram of a ring cavity remote plasma source generator assembly provided by this utility model; Figure 4 A schematic diagram of the back structure of a ring cavity remote plasma source generator assembly provided by this utility model; Figure 5 A partial three-dimensional schematic diagram of the heat dissipation water tray in a ring cavity remote plasma source generator assembly provided by this utility model; Figure 6 A schematic diagram of the flow channel structure of the cooling water tray in a ring cavity remote plasma source generator assembly provided by this utility model; Figure 7 A schematic diagram of the connection flow channel structure of the cooling water tray in a ring cavity remote plasma source generator assembly provided by this utility model; Figure 8 A schematic diagram of the sealing structure of the heat dissipation water tray in a ring cavity remote plasma source generator assembly provided by this utility model; Figure 9 A perspective view of a quartz cavity in a ring-shaped remote plasma source generator assembly provided by this utility model; Figure 10 A cross-sectional view of an embodiment of a ring-shaped cavity remote plasma source generator assembly using a quartz cavity provided by this utility model; Figure 11 A perspective view of a second embodiment of a quartz cavity in a ring-shaped remote plasma source generator assembly provided by this utility model; Figure 12 A cross-sectional view of a quartz cavity used in a ring-shaped remote plasma source generator assembly provided by this utility model, according to embodiment two. Figure 13 A perspective view of the quartz cavity in a ring-shaped remote plasma source generator assembly provided by this utility model, in embodiment three; Figure 14 A cross-sectional view of a quartz cavity used in an annular cavity remote plasma source generator assembly provided by this utility model.

[0017] Figure label: 1-Quartz cavity; 2-Water tray A; 21-Water tank A; 22-Cover plate A; 23-Positioning ring; 24-Positioning groove; 3-Water tray B; 31-Water tank B; 32-Cover plate B; 33-Inlet; 34-Outlet; 41-First ceramic plate; 42-Second ceramic plate; 51-First insulating thermal pad; 52-Second insulating thermal pad; 6-First connector; 7-Second connector; 8-Insulating bolt; 9-Insulating buffer pad. Detailed Implementation

[0018] The embodiments of the present invention will now be described in detail with reference to the accompanying drawings. These embodiments are merely illustrative of the present invention and should not be construed as limiting the scope of protection of the present invention. It should be noted that, unless otherwise stated, the technical or scientific terms used in this application shall have the ordinary meaning as understood by one of ordinary skill in the art to which this utility model pertains.

[0019] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0020] Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly defined.

[0021] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0022] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0023] Implementation of this application, for example Figures 1-14 As shown, this application provides a ring cavity remote plasma source generator assembly.

[0024] This application includes: a quartz cavity 1, which has an air inlet at one end and an air outlet at the other end. The air inlet and the air outlet are connected by an oval ring. This structure is conducive to the movement of plasma in an alternating magnetic field. It solves the shortcomings and defects of the cavity of the long-range plasma source in the prior art due to the small curvature of the rectangular corner, and reduces the impact damage of the moving spiral plasma source on the cavity caused by uneven magnetic field distribution. Two sets of cooling water trays are respectively mirror-image arranged on both sides of the quartz cavity 1, and the side of the cooling water tray facing the quartz cavity 1 has a receiving groove, which is adapted to the quartz cavity 1. The side of the cooling water tray facing away from the quartz cavity has a water groove. The two sets of cooling water trays are connected by insulating bolts 8 through the tube, so that the cooling water trays on both sides of the quartz cavity 1 are not electrically connected. A cover plate is provided on the top surface of the water tank, and the cover plate has at least one water inlet and one water outlet; An insulating component is provided between the two sets of cooling water trays; Several magnetic cores are evenly distributed on the cooling water tray.

[0025] In the above structure, since the cooling water tray is a part that connects the quartz cavity 1 and the magnetic core at the same time, and a water tank is opened on it, the water flowing into the water tank can be used as a cooling medium, which can greatly increase the heat dissipation efficiency of the cavity and the magnetic core, avoid overheating, and affect the service life and production efficiency of the generator.

[0026] Based on the above technical solution, the water tank is provided with a flow channel, which can extend the flow path of water, increase the heat exchange area, and improve the heat exchange efficiency.

[0027] Based on the above technical solution, each set of cooling water trays includes two pairs of mirrored water trays A2 and B3. The water trays A2 and B3 are arranged in a staggered ring. The mirrored water trays A2 correspond to the upper and lower ends of the quartz cavity 1, and the mirrored water trays B3 correspond to the left and right ends of the quartz cavity 1. Both the water tray A2 and the water tray B3 have water troughs on the side facing away from the quartz cavity 1. The water troughs are water trough A21, located on the outer end face of the water tray A2, with a corresponding cover plate A22; and water trough B31, located on the outer end face of the water tray B3, with a corresponding cover plate B32. An insulating buffer pad 9 is provided between the water tray A2 and the water tray B3. The insulating buffer pad 9 in the water tray A2 and the water tray B3 can improve the structural stability of the water tray A2, the water tray B3 and the quartz cavity 1, and can also increase the dimensional tolerance of the water tray A2 / water tray B3 and the quartz cavity 1, and prevent the quartz cavity 1 from breaking during the assembly process. The number of magnetic cores (the magnetic cores are not modified and belong to conventional technology, so they are not shown in the figure) is four, respectively corresponding to the intersection of the water pan A2 and the water pan B3, that is, in the groove formed by the cover plate A22 and the cover plate B32; in addition, the four magnetic cores made of ferrite are evenly distributed in the groove of the heat dissipation water pan as transformers, which can make the magnetic field distribution more uniform.

[0028] Based on the above technical solution, the insulating component includes a ceramic plate and an insulating thermally conductive pad disposed on at least one side of the ceramic plate; The ceramic plate includes a first ceramic plate 41 and a second ceramic plate 42, and the insulating thermal pad includes a first insulating thermal pad 51 and a second insulating thermal pad 52. The first ceramic plate 41 and the first insulating thermal pad 51 correspond to the outer ring of the heat sink, and the second ceramic plate 42 and the second insulating thermal pad 52 correspond to the inner ring of the heat sink. The ceramic plate acts as a dielectric material to isolate the heat sink on both sides of the quartz cavity 1, and one or both sides of the ceramic plate are covered with insulating thermal pads for better heat dissipation.

[0029] Based on the above technical solutions, such as Figure 5 and Figure 6 As shown, both water tray A2 and water tray B3 have two connecting holes on their mating surfaces, and these connecting holes communicate with their respective water tanks. The connection hole is provided with a first connector 6, and the two ends of the first connector 6 are respectively inserted into the connection hole of water tray A2 and the connection hole of water tray B3; The insulating buffer pad 9 also has through holes corresponding to the connecting holes. The isolated water trays A2 and B3 are connected in series through the connecting holes, and the flow channels of each water tank are combined with the connecting holes to form a complete water flow circulation loop, that is, the independent water trays A and B of the entire single-sided heat dissipation water tray are connected into a whole.

[0030] Based on the above technical solutions, such as Figure 7 As shown, the water tray A2 or the water tray B3 has at least two through holes perpendicular to the quartz cavity 1. A second connector 7 is provided in the through hole. The second connector 7 is installed in the same way as the first connector 6, connecting the cooling water circulation loop of the heat dissipation water trays on both sides of the quartz cavity 1. In this way, only one inlet 33 and one outlet 34 need to be retained, simplifying the number of external water pipes.

[0031] Based on the above technical solutions, such as Figures 9-14 As shown, the cross-section of the quartz cavity 1 is circular, square, or oval, and different discharge paths can be set to compare the uniformity of plasma electrolysis and the ease of dissociation of different discharge paths.

[0032] Specifically, it can be divided into two embodiments, namely, quartz cavity 1 and embodiment 1. Figure 9 and Figure 10 As shown, the circular quartz cavity 1 has a cross-sectional diameter of 34mm. The discharge path starts from the high-voltage ignition of the upper water pan B3, and then breaks down the plasma inside the quartz cavity 1 to the grounded lower water pan B3. The insulating component plays an insulating role. The discharge surface of the quartz cavity 1 is circular. Designing different discharge paths (short at the edges and long in the middle) is beneficial to plasma breakdown, and the ignition success rate of the remote plasma source is also improved to a certain extent.

[0033] Example 2 of quartz cavity 1, such as Figure 11 and Figure 12 As shown, the cross-sectional width of the square quartz cavity 1 is 34 mm, which is the same as the diameter of the cross-section of the circular quartz cavity 1, and the length is 52 mm. The discharge surface of the quartz cavity 1 is rectangular. Compared with Example 1, it can be seen that the discharge area of ​​the square quartz cavity 1 is significantly increased, and the discharge path distance is more uniform, which is beneficial to the uniformity of plasma electrolysis.

[0034] Example 3 of quartz cavity 1, such as Figure 13 and Figure 14As shown, the quartz cavity 1 and the cooling water tray groove are designed as rounded rectangles (equivalent to oval shapes). The square part has a cross-sectional width of 34mm and a length of 52mm, while the rounded rectangle has a length of 76mm. The discharge surface of the quartz cavity 1 with this shape is elliptical. The rounded rectangle combines the advantages of circular and square cavities, increasing the discharge area and promoting the uniformity of plasma electrolysis. At the same time, the plasma breaks down first along the minimum discharge path, making it easier for the plasma to dissociate.

[0035] Based on the above technical solutions, such as Figure 8 As shown, the side of the water tank facing the cover plate is provided with a positioning ring 23, and the side of the cover plate facing the water tank is provided with a positioning groove 24 that is adapted to the positioning ring 23. A sealing ring is also filled between the positioning ring 23 and the positioning groove 24. The positioning ring 23 and the positioning groove 24 improve the connection accuracy between the cover plate and the water tank, and the sealing ring improves the connection sealing performance between the cover plate and the water tank.

[0036] Based on the above technical solution, the surfaces of the water tank, the cover plate, the connecting hole, and the through hole are all provided with a waterproof membrane. Normally, the cooling water trays (water tray A2, water tray B3, cover plate A22, and cover plate B32 are made of copper-aluminum alloy for conductivity) are for high-voltage ignition, but the cooling water trays on both sides need to be mutually insulated, so insulating components are provided. Now, since water flow is needed for cooling, pure water is used to prevent the water flow from conducting electricity. Furthermore, to prevent corrosion of the pure water with the cover plate, water tank, connecting hole, and / or through hole, which could generate metal ions that increase conductivity, a waterproof membrane is provided to prevent the generation of metal ions and maintain the insulation of the pure water.

[0037] In the above description, the single-sided cooling water trays (water tray A2 and water tray B3) are connected in series with high-voltage wires to ensure uniform discharge during plasma ignition. The magnetic core is installed outside the ionization cavity (quartz cavity 1 and cooling water tray). The magnetic core is a high-temperature component, and the cooling water tray is directly mounted close to the magnetic core for convenient heat dissipation. The high-voltage ignition coil is wound around the cooling copper water tray and fixed with an insulating plate, providing an AC signal to the cooling water tray. This application features a simple structure, long lifespan, good heat dissipation effect, and synchronous internal and external heat exchange, improving heat dissipation efficiency, extending service life, and increasing production efficiency.

[0038] Numerous specific details are set forth in this specification. However, it will be understood that embodiments of this invention may be practiced without these specific details. In some instances, well-known methods, structures, and techniques have not been shown in detail so as not to obscure the understanding of this specification. In the description of this specification, references to the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this invention. In this specification, illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Furthermore, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of the different embodiments or examples.

[0039] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model, and they should all be covered within the scope of the claims and specification of this utility model.

Claims

1. A ring-shaped cavity remote plasma source generator assembly, characterized in that, include: The quartz cavity is equipped with an air inlet and an air outlet; Two sets of cooling water trays are respectively mirror-arranged on both sides of the quartz cavity, and the side of the cooling water tray facing the quartz cavity has a receiving groove, which is adapted to the quartz cavity. The side of the cooling water tray facing away from the quartz cavity has a water groove. A cover plate is provided on the top surface of the water tank, and the cover plate has at least one water inlet and one water outlet; An insulating component is provided between the two sets of cooling water trays; Several magnetic cores are evenly distributed on the cooling water tray.

2. The annular cavity remote plasma source generator assembly according to claim 1, characterized in that, The water tank is equipped with a flow channel.

3. The annular cavity remote plasma source generator assembly according to claim 2, characterized in that, Each set of cooling water trays includes two pairs of mirrored water trays A and B, which are arranged in a staggered ring. The water trays A and B are each provided with water grooves on the side facing away from the quartz cavity; An insulating buffer pad is provided between water tray A and water tray B; The number of magnetic cores is four, which are respectively located at the intersection of the water pan A and the water pan B.

4. The annular cavity remote plasma source generator assembly according to claim 1, characterized in that, The insulating assembly includes a ceramic plate and an insulating thermally conductive pad disposed on at least one side of the ceramic plate; The ceramic plate includes a first ceramic plate and a second ceramic plate, and the insulating thermal pad includes a first insulating thermal pad and a second insulating thermal pad. The first ceramic plate and the first insulating thermal pad correspond to the outer ring of the heat sink, and the second ceramic plate and the second insulating thermal pad correspond to the inner ring of the heat sink.

5. The annular cavity remote plasma source generator assembly according to claim 3, characterized in that, The mating surfaces of water tray A and water tray B each have two connecting holes, which communicate with their respective water tanks. A first connector is provided inside the connection hole; The insulating buffer pad also has through holes corresponding to the connecting holes.

6. The annular cavity remote plasma source generator assembly according to claim 5, characterized in that, The water tray A or the water tray B has at least two through holes perpendicular to the quartz cavity, and a second connector is provided in the through hole.

7. The annular cavity remote plasma source generator assembly according to claim 1, characterized in that, The cross-section of the quartz cavity is circular, square, or oval.

8. The annular cavity remote plasma source generator assembly according to claim 1, characterized in that, The water tank has a positioning ring on the side facing the cover plate, and the cover plate has a positioning groove on the side facing the water tank that matches the positioning ring. A sealing ring is also filled between the positioning ring and the positioning groove.

9. The annular cavity remote plasma source generator assembly according to claim 6, characterized in that, The surfaces of the water tank, the cover plate, the connecting hole, and the through hole are all provided with a waterproof membrane.

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